{"id":"https://openalex.org/W2611491998","doi":null,"title":"Development of a 3-omega thermal conductivity measurement system for thin dielectric films with experimental validation","display_name":"Development of a 3-omega thermal conductivity measurement system for thin dielectric films with experimental validation","publication_year":2017,"publication_date":"2017-01-01","ids":{"openalex":"https://openalex.org/W2611491998","mag":"2611491998"},"language":"en","primary_location":{"id":"pmh:oai:digitalcommons.usu.edu:researchweek-1378","doi":null,"is_oa":true,"landing_page_url":"https://digitalcommons.usu.edu/researchweek/ResearchWeek2017/Session3Poster/22","pdf_url":"https://digitalcommons.usu.edu/cgi/viewcontent.cgi?article=1378&context=researchweek","source":{"id":"https://openalex.org/S4377196327","display_name":"Digital Commons - USU (Utah State University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I121980950","host_organization_name":"Utah State University","host_organization_lineage":["https://openalex.org/I121980950"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Student Research Symposium","raw_type":"text"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://digitalcommons.usu.edu/cgi/viewcontent.cgi?article=1378&context=researchweek","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5034000281","display_name":"Daxi Zhang","orcid":"https://orcid.org/0000-0003-1367-9377","observed_orcids":["https://orcid.org/0000-0003-1367-9377"]},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Daxi Zhang","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0003-1367-9377","affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":["https://openalex.org/A5034000281"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11277","display_name":"Thermal properties of materials","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11277","display_name":"Thermal properties of materials","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11856","display_name":"Thermography and Photoacoustic Techniques","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13116","display_name":"Heat Transfer and Numerical Methods","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thermal-conductivity-measurement","display_name":"thermal conductivity measurement","score":0.9580000042915344},{"id":"https://openalex.org/keywords/thermal-diffusivity","display_name":"thermal diffusivity","score":0.8730000257492065},{"id":"https://openalex.org/keywords/dielectric-thin-films","display_name":"dielectric thin films","score":0.953000009059906},{"id":"https://openalex.org/keywords/silicon-nitride-films","display_name":"silicon nitride thin films","score":0.8889999985694885},{"id":"https://openalex.org/keywords/measurement-system-validation","display_name":"measurement system validation","score":0.7639999985694885},{"id":"https://openalex.org/keywords/heat-spreading","display_name":"heat spreading","score":0.7279999852180481},{"id":"https://openalex.org/keywords/thermal-boundary-conductance","display_name":"thermal boundary conductance","score":0.9900000095367432},{"id":"https://openalex.org/keywords/nanostructured-materials","display_name":"nanostructured materials","score":0.8460000157356262}],"concepts":[{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.6862794756889343},{"id":"https://openalex.org/C2779557605","wikidata":"https://www.wikidata.org/wiki/Q9890","display_name":"Omega","level":2,"score":0.6790565252304077},{"id":"https://openalex.org/C97346530","wikidata":"https://www.wikidata.org/wiki/Q487005","display_name":"Thermal conductivity","level":2,"score":0.6078413724899292},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5708355903625488},{"id":"https://openalex.org/C102232406","wikidata":"https://www.wikidata.org/wiki/Q7783035","display_name":"Thermal conductivity measurement","level":3,"score":0.5230497121810913},{"id":"https://openalex.org/C131540310","wikidata":"https://www.wikidata.org/wiki/Q907564","display_name":"Conductivity","level":2,"score":0.44846731424331665},{"id":"https://openalex.org/C172100665","wikidata":"https://www.wikidata.org/wiki/Q7465774","display_name":"Thermal conduction","level":2,"score":0.4218141734600067},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3562183380126953},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.254940390586853},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2248947024345398},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"pmh:oai:digitalcommons.usu.edu:researchweek-1378","doi":null,"is_oa":true,"landing_page_url":"https://digitalcommons.usu.edu/researchweek/ResearchWeek2017/Session3Poster/22","pdf_url":"https://digitalcommons.usu.edu/cgi/viewcontent.cgi?article=1378&context=researchweek","source":{"id":"https://openalex.org/S4377196327","display_name":"Digital Commons - USU (Utah State University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I121980950","host_organization_name":"Utah State University","host_organization_lineage":["https://openalex.org/I121980950"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Student Research Symposium","raw_type":"text"},{"id":"mag:2611491998","doi":null,"is_oa":false,"landing_page_url":"https://digitalcommons.usu.edu/cgi/viewcontent.cgi?article=1378&context=researchweek","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":{"id":"pmh:oai:digitalcommons.usu.edu:researchweek-1378","doi":null,"is_oa":true,"landing_page_url":"https://digitalcommons.usu.edu/researchweek/ResearchWeek2017/Session3Poster/22","pdf_url":"https://digitalcommons.usu.edu/cgi/viewcontent.cgi?article=1378&context=researchweek","source":{"id":"https://openalex.org/S4377196327","display_name":"Digital Commons - USU (Utah State University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I121980950","host_organization_name":"Utah State University","host_organization_lineage":["https://openalex.org/I121980950"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Student Research Symposium","raw_type":"text"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2611491998.pdf","grobid_xml":"https://content.openalex.org/works/W2611491998.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2248446292","https://openalex.org/W2257765953","https://openalex.org/W1922165941","https://openalex.org/W2076079328","https://openalex.org/W2279494838","https://openalex.org/W2035723253","https://openalex.org/W2020873853","https://openalex.org/W7135273115","https://openalex.org/W6908484958","https://openalex.org/W4286216959"],"abstract_inverted_index":{"The":[0,14,38],"3-omega":[1,85],"technique":[2,15],"was":[3],"developed":[4],"1990s":[5],"for":[6],"the":[7,31,51,59,68,81,84,97,110,117,120,123,126],"measurement":[8,69,111],"of":[9,23,36,50,58,67,70,72,83,93,96,100,125,148],"thermal":[10,39,74,98,138,140,145],"conductivity":[11,40,99],"and":[12,25,144,153],"diffusivity.":[13],"uses":[16],"an":[17],"AC":[18],"power":[19],"supply":[20],"with":[21,34,44,54,87,113],"frequency":[22,35],"omega":[24],"a":[26,55,88,101],"lock-in":[27],"amplifier":[28],"to":[29,63,79,136],"capture":[30],"voltage":[32],"signal":[33,52],"3-omega.":[37],"can":[41],"be":[42,131],"calculated":[43],"high":[45,65],"accuracy":[46,66,82,124],"through":[47],"detailed":[48],"analysis":[49],"combined":[53],"physical":[56],"model":[57],"system.":[60,127],"In":[61],"order":[62],"guarantee":[64],"systems":[71],"unknown":[73],"conductivity,":[75,139],"it":[76],"is":[77],"important":[78],"validate":[80],"system":[86,129],"known":[89],"material.":[90],"Several":[91],"sets":[92],"experimental":[94],"data":[95,114],"300nm":[102],"silicon":[103],"nitride":[104],"film":[105],"were":[106],"collected.":[107],"By":[108],"comparing":[109],"result":[112],"found":[115],"from":[116],"literature":[118],",":[119],"agreement":[121],"verifies":[122],"This":[128],"will":[130],"used":[132],"in":[133],"future":[134],"studies":[135],"measure":[137],"diffusivity,":[141],"heat":[142],"spreading":[143],"boundary":[146],"conductance":[147],"nanoscopic":[149],"films,":[150],"layered":[151],"structures,":[152],"other":[154],"nanostructured":[155],"materials.":[156]},"counts_by_year":[],"updated_date":"2026-09-01T08:31:24.195828","created_date":"2017-05-12T00:00:00"}