{"id":"https://openalex.org/W2600258665","doi":"https://doi.org/10.1115/imece1994-0490","title":"A New Design for Suspension of Linear Microactuators","display_name":"A New Design for Suspension of Linear Microactuators","publication_year":1994,"publication_date":"1994-11-06","ids":{"openalex":"https://openalex.org/W2600258665","doi":"https://doi.org/10.1115/imece1994-0490","mag":"2600258665"},"language":"en","primary_location":{"id":"doi:10.1115/imece1994-0490","doi":"https://doi.org/10.1115/imece1994-0490","is_oa":false,"landing_page_url":"https://doi.org/10.1115/imece1994-0490","pdf_url":null,"source":{"id":"https://openalex.org/S4363606942","display_name":"ASME International Mechanical Engineering Congress and Exposition (IMECE)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Dynamic Systems and Control: Volume 2 \u2014 Design and Analysis of Fluid Power Control Components/Systems; Automated Modeling; Micro-Mechanical Systems; Microsensors/Microactuators; Fabrication/Systems; Mechatronics for Manufacturing; Automatic Control Textbooks; Sensors for Identification/Control; Dynamic Systems Modeling","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5053171053","display_name":"Laxman Saggere","orcid":"https://orcid.org/0000-0001-6429-6240","observed_orcids":["https://orcid.org/0000-0001-6429-6240"]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]},{"id":"https://openalex.org/I39422238","display_name":"University of Illinois Chicago","ror":"https://ror.org/02mpq6x41","country_code":"US","type":"education","lineage":["https://openalex.org/I39422238"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L. Saggere","raw_affiliation_strings":["University of Michigan","Department of Industrial and Mechanical Engineering, University of Illinois at Chicago"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Michigan","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Department of Industrial and Mechanical Engineering, University of Illinois at Chicago","institution_ids":["https://openalex.org/I39422238"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086947674","display_name":"Sridhar Kota","orcid":"https://orcid.org/0000-0001-5007-345X","observed_orcids":["https://orcid.org/0000-0001-5007-345X"]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Sridhar Kota","raw_affiliation_strings":["University of Michigan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Michigan","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5070154067","display_name":"Selden B. Crary","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. B. Crary","raw_affiliation_strings":["University of Michigan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Michigan","institution_ids":["https://openalex.org/I27837315"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":15,"citation_normalized_percentile":{"value":0.4932598,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"671","last_page":"675"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11608","display_name":"Dielectric materials and actuators","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electrostatic-actuation","display_name":"electrostatic actuation","score":0.8059999942779541},{"id":"https://openalex.org/keywords/mems","display_name":"MEMS","score":0.6710000038146973},{"id":"https://openalex.org/keywords/spring-stiffness","display_name":"spring stiffness","score":0.48500001430511475},{"id":"https://openalex.org/keywords/directional-stiffness","display_name":"directional stiffness","score":0.6859999895095825},{"id":"https://openalex.org/keywords/actuation-displacement","display_name":"actuation displacement","score":0.6729999780654907},{"id":"https://openalex.org/keywords/microsensors","display_name":"microsensors","score":0.9110000133514404}],"concepts":[{"id":"https://openalex.org/C105341887","wikidata":"https://www.wikidata.org/wiki/Q1307987","display_name":"Suspension (topology)","level":3,"score":0.6754188537597656},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.3750951290130615},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3533935546875},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3103850483894348},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.3065834045410156},{"id":"https://openalex.org/C5961521","wikidata":"https://www.wikidata.org/wiki/Q746083","display_name":"Homotopy","level":2,"score":0.0},{"id":"https://openalex.org/C202444582","wikidata":"https://www.wikidata.org/wiki/Q837863","display_name":"Pure mathematics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1115/imece1994-0490","doi":"https://doi.org/10.1115/imece1994-0490","is_oa":false,"landing_page_url":"https://doi.org/10.1115/imece1994-0490","pdf_url":null,"source":{"id":"https://openalex.org/S4363606942","display_name":"ASME International Mechanical Engineering Congress and Exposition (IMECE)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Dynamic Systems and Control: Volume 2 \u2014 Design and Analysis of Fluid Power Control Components/Systems; Automated Modeling; Micro-Mechanical Systems; Microsensors/Microactuators; Fabrication/Systems; Mechatronics for Manufacturing; Automatic Control Textbooks; Sensors for Identification/Control; Dynamic Systems Modeling","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2140342621","https://openalex.org/W7099177784","https://openalex.org/W2533751232","https://openalex.org/W2210275616","https://openalex.org/W7045491428","https://openalex.org/W2742350359","https://openalex.org/W2314672703","https://openalex.org/W2562791031","https://openalex.org/W2961029382","https://openalex.org/W2004136753"],"abstract_inverted_index":{"Abstract":[0],"Linear":[1],"microactuators":[2],"are":[3,10,53,207,217],"important":[4],"transducing":[5],"elements":[6],"in":[7,13,24,32,76,144,159,184,198],"MEMS":[8],"and":[9,29,48,87,105,124,150,201,209],"widely":[11],"used":[12],"a":[14,59,73,84,107,120,126,140,226],"variety":[15],"of":[16,27,58,64,67,83,92,99,148,155,163,180,194,205,213,221],"microsensors.":[17],"A":[18],"linear":[19,60,85,141],"microactuator":[20],"with":[21,139,167],"large":[22],"displacements":[23,138],"the":[25,33,54,65,78,90,100,116,130,132,145,160,168,181,185,191,195,199,202,210,214,222],"direction":[26,147,162],"actuation":[28,122],"high":[30],"stiffness":[31,158],"other":[34],"two":[35,55],"perpendicular":[36],"directions":[37,204],"is":[38,89,174],"essential":[39],"to":[40,178],"improve":[41],"microsensor":[42],"technology.":[43],"An":[44],"electrostatic":[45],"drive":[46],"system":[47,52,71],"an":[49,68],"elastic":[50,69],"suspension":[51,70,103,186,197,224],"main":[56],"components":[57],"microactuator.":[61],"Mechanical":[62],"aspects":[63],"design":[66,109,134,173,216],"have":[72],"major":[74],"role":[75],"controlling":[77],"necessary":[79],"directional":[80],"spring":[81,192],"rates":[82],"actuator":[86],"it":[88],"focus":[91],"this":[93],"paper.":[94],"This":[95],"paper":[96],"examines":[97],"some":[98,179],"recently":[101],"reported":[102],"designs":[104],"introduces":[106],"new":[108,133,196,215],"that":[110,220],"has":[111],"superior":[112],"performance":[113,211],"characteristics":[114,212],"over":[115],"existing":[117,169],"suspensions.":[118],"For":[119],"specified":[121],"force,":[123],"for":[125,129,190],"given":[127],"area":[128],"suspension,":[131],"provides":[135],"much":[136],"larger":[137],"response":[142],"characteristic":[143],"desired":[146,200],"motion,":[149],"maintains":[151],"about":[152],"one":[153],"order":[154],"magnitude":[156],"higher":[157],"undesired":[161,203],"motion":[164],"when":[165],"compared":[166],"designs.":[170],"The":[171],"proposed":[172],"also":[175],"less":[176],"prone":[177],"nonlinear":[182],"effects":[183],"systems.":[187],"Analytical":[188],"expressions":[189],"constants":[193],"motions":[206],"obtained,":[208],"benchmarked":[218],"against":[219],"folded-beam":[223],"through":[225],"finite":[227],"element":[228],"analysis.":[229]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-02T09:45:03.842371","created_date":"2017-04-07T00:00:00"}