{"id":"https://openalex.org/W2595486271","doi":"https://doi.org/10.1117/12.2258339","title":"Scanner-to-scanner CD analysis and control in an HVM environment","display_name":"Scanner-to-scanner CD analysis and control in an HVM environment","publication_year":2017,"publication_date":"2017-03-18","ids":{"openalex":"https://openalex.org/W2595486271","doi":"https://doi.org/10.1117/12.2258339","mag":"2595486271"},"language":"en","primary_location":{"id":"doi:10.1117/12.2258339","doi":"https://doi.org/10.1117/12.2258339","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.2258339","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5110040611","display_name":"Du Hyun Beak","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Du Hyun Beak","raw_affiliation_strings":["SAMSUNG Electronics Co., Ltd. (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics Co., Ltd. (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112260486","display_name":"Ju Hee Shin","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Ju Hee Shin","raw_affiliation_strings":["ASML Brion (Korea, Republic of)","SAMSUNG Electronics Co., Ltd. (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Brion (Korea, Republic of)","institution_ids":[]},{"raw_affiliation_string":"SAMSUNG Electronics Co., Ltd. (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037219236","display_name":"Tony Nokap Park","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Tony Park","raw_affiliation_strings":["SAMSUNG Electronics Co., Ltd. (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics Co., Ltd. (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073171443","display_name":"Dong Kyeng Han","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Dong Kyeng Han","raw_affiliation_strings":["SAMSUNG Electronics Co., Ltd. (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics Co., Ltd. (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113657494","display_name":"Jin Phil Choi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jin Phil Choi","raw_affiliation_strings":["SAMSUNG Electronics Co., Ltd. (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics Co., Ltd. (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086744521","display_name":"Jeong Heung Kong","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jeong Heung Kong","raw_affiliation_strings":["SAMSUNG Electronics Co., Ltd. (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics Co., Ltd. (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110192222","display_name":"Young Seog Kang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Young Seog Kang","raw_affiliation_strings":["SAMSUNG Electronics Co., Ltd. (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics Co., Ltd. (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024269528","display_name":"Se Yeon Jang","orcid":"https://orcid.org/0000-0003-2935-936X","observed_orcids":["https://orcid.org/0000-0003-2935-936X"]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Se Yeon Jang","raw_affiliation_strings":["SAMSUNG Electronics Co., Ltd. (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SAMSUNG Electronics Co., Ltd. (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012519581","display_name":"Peter Nikolsky","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I927257375","display_name":"ASML (Netherlands)","ror":"https://ror.org/01vxknj13","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I927257375"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Peter Nikolsky","raw_affiliation_strings":["ASML Netherlands B.V. (Netherlands)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Netherlands B.V. (Netherlands)","institution_ids":["https://openalex.org/I927257375"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081577334","display_name":"Chris Strolenberg","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I927257375","display_name":"ASML (Netherlands)","ror":"https://ror.org/01vxknj13","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I927257375"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Chris Strolenberg","raw_affiliation_strings":["ASML Netherlands B.V. (Netherlands)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Netherlands B.V. (Netherlands)","institution_ids":["https://openalex.org/I927257375"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018328041","display_name":"Noh-Kyoung Park","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I927257375","display_name":"ASML (Netherlands)","ror":"https://ror.org/01vxknj13","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I927257375"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Noh-Kyoung Park","raw_affiliation_strings":["ASML Netherlands B.V. (Netherlands)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Netherlands B.V. (Netherlands)","institution_ids":["https://openalex.org/I927257375"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005277783","display_name":"Khalid Elbattay","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I927257375","display_name":"ASML (Netherlands)","ror":"https://ror.org/01vxknj13","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I927257375"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Khalid Elbattay","raw_affiliation_strings":["ASML Netherlands B.V. (Netherlands)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Netherlands B.V. (Netherlands)","institution_ids":["https://openalex.org/I927257375"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Vito Tomasello","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Vito Tomasello","raw_affiliation_strings":["ASML Brion (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Brion (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090330767","display_name":"Austin Peng","orcid":"https://orcid.org/0000-0001-5142-2789","observed_orcids":["https://orcid.org/0000-0001-5142-2789"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Austin Peng","raw_affiliation_strings":["ASML Brion (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Brion (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010056461","display_name":"Anand Guntuka","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Anand Guntuka","raw_affiliation_strings":["ASML Brion (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Brion (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083723091","display_name":"Zhao-Ze Li","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Zhao-Ze Li","raw_affiliation_strings":["ASML Brion (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Brion (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053363114","display_name":"Ronald Goossens","orcid":"https://orcid.org/0009-0006-8953-0949","observed_orcids":["https://orcid.org/0009-0006-8953-0949"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ronald Goossens","raw_affiliation_strings":["ASML Brion (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Brion (United States)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027281312","display_name":"Machi Ryu","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Machi Ryu","raw_affiliation_strings":["ASML Brion (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Brion (Korea, Republic of)","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100828218","display_name":"Jangho Shin","orcid":"https://orcid.org/0009-0003-2635-5811","observed_orcids":["https://orcid.org/0009-0003-2635-5811"]},"institutions":[{"id":"https://openalex.org/I4405259277","display_name":"Samsung Electronics (South Korea)","ror":"https://ror.org/020m7t761","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973","https://openalex.org/I4405259277"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jangho Shin","raw_affiliation_strings":["ASML Brion (Korea, Republic of)","SAMSUNG Electronics Co., Ltd. (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Brion (Korea, Republic of)","institution_ids":[]},{"raw_affiliation_string":"SAMSUNG Electronics Co., Ltd. (Korea, Republic of)","institution_ids":["https://openalex.org/I4405259277"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031434312","display_name":"Chung-Yong Kim","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Chung-Yong Kim","raw_affiliation_strings":["ASML Korea Co., Ltd. (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Korea Co., Ltd. (Korea, Republic of)","institution_ids":[]}]},{"author_position":"middle","author":{"id":null,"display_name":"Andrew Moe","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Andrew Moe","raw_affiliation_strings":["ASML Korea Co., Ltd. (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Korea Co., Ltd. (Korea, Republic of)","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5034871944","display_name":"Yun-A Sung","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yun-A Sung","raw_affiliation_strings":["ASML Korea Co., Ltd. (Korea, Republic of)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Korea Co., Ltd. (Korea, Republic of)","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.7762,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.59408538,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":"10147","issue":null,"first_page":"101470A","last_page":"101470A"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11517","display_name":"Advanced optical system design","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/root-cause-identification","display_name":"root cause identification","score":0.7940000295639038},{"id":"https://openalex.org/keywords/asml","display_name":"ASML","score":0.382999986410141}],"concepts":[{"id":"https://openalex.org/C2779751349","wikidata":"https://www.wikidata.org/wiki/Q1474480","display_name":"Scanner","level":2,"score":0.9511063098907471},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5649356842041016},{"id":"https://openalex.org/C116834253","wikidata":"https://www.wikidata.org/wiki/Q2039217","display_name":"Identification (biology)","level":2,"score":0.48651450872421265},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.4015331268310547},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.38486766815185547},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C59822182","wikidata":"https://www.wikidata.org/wiki/Q441","display_name":"Botany","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/12.2258339","doi":"https://doi.org/10.1117/12.2258339","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.2258339","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1970580398","https://openalex.org/W1990704897","https://openalex.org/W2029622967","https://openalex.org/W2051315364","https://openalex.org/W6642989968"],"related_works":["https://openalex.org/W2078583103","https://openalex.org/W1969621326","https://openalex.org/W2111072440","https://openalex.org/W2075435724","https://openalex.org/W2051315364","https://openalex.org/W4367307872","https://openalex.org/W2140631957","https://openalex.org/W2077266788","https://openalex.org/W2130338586","https://openalex.org/W2107982549"],"abstract_inverted_index":{"Shrinking":[0],"pattern":[1],"sizes":[2],"dictate":[3],"that":[4],"scanner-to-scanner":[5],"variations":[6],"for":[7,24,105],"HVM":[8,42,106],"products":[9],"shrink":[10],"proportionally.":[11],"This":[12],"paper":[13],"shows":[14],"the":[15,90],"ability":[16],"to":[17,63,74],"identify":[18],"(a":[19],"subset":[20],"of)":[21],"root":[22,34,60],"causes":[23],"mismatch":[25,97],"between":[26,92],"ArF":[27],"immersion":[28],"scanners":[29],"using":[30,44],"scanner":[31,68],"metrology.":[32],"The":[33,56],"cause":[35],"identification":[36,58],"was":[37,98],"done":[38],"in":[39,110],"a":[40,45],"Samsung":[41,109],"factory":[43],"methodology":[46],"(Proximity":[47],"Matching":[48],"Budget":[49],"Breakdown":[50],"or":[51],"PromaBB)":[52],"developed":[53],"by":[54],"ASML.":[55],"proper":[57],"of":[59,67,78],"causes-1":[61],"helps":[62],"select":[64],"what":[65],"combination":[66,111],"control":[69],"parameters":[70],"should":[71],"be":[72],"used":[73],"reduce":[75],"proximity":[76],"differences":[77],"critical":[79],"patterns":[80],"while":[81],"minimizing":[82],"undesirable":[83],"side":[84],"effects":[85],"from":[86],"cross-compensation.":[87],"Using":[88],"PromaBB,":[89],"difference":[91],"predicted":[93],"and":[94,124],"measured":[95],"CD":[96],"below":[99],"0.2nm.":[100],"PromaBB":[101],"has":[102],"been":[103],"proposed":[104],"implementation":[107],"at":[108],"with":[112],"other":[113],"ASML":[114],"fab":[115],"applications:":[116],"Pattern":[117],"Matcher":[118],"Full":[119],"Chip":[120],"(PMFC),":[121],"Image":[122],"Tuner":[123],"FlexWave.":[125]},"counts_by_year":[{"year":2021,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2017-03-23T00:00:00"}