{"id":"https://openalex.org/W2594892445","doi":null,"title":"Developing Etching Process for Nanostructures on InGaP and AlInP Using OX-35 Etcher","display_name":"Developing Etching Process for Nanostructures on InGaP and AlInP Using OX-35 Etcher","publication_year":2014,"publication_date":"2014-01-01","ids":{"openalex":"https://openalex.org/W2594892445","mag":"2594892445"},"language":"en","primary_location":{"id":"mag:2594892445","doi":null,"is_oa":false,"landing_page_url":"https://snf.stanford.edu/SNF/processes/ee412/srping-14/final-reports/ee412-final-report-etching-ingap-allnp-nanostructures-in-ox-335","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null},"volume":null,"type":"article","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5000681343","display_name":"Jieyang Jia","orcid":"https://orcid.org/0000-0002-4878-6386","observed_orcids":["https://orcid.org/0000-0002-4878-6386"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jieyang Jia","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-4878-6386","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111767998","display_name":"Li Zhao","orcid":"https://orcid.org/0000-0003-0393-6050","observed_orcids":["https://orcid.org/0000-0003-0393-6050"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Zhao Li","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-7702-3348","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103572395","display_name":"Mary X. Tang","orcid":"https://orcid.org/0000-0003-3916-8698","observed_orcids":["https://orcid.org/0000-0003-3916-8698"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Mary Tang","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5108210345","display_name":"J.P. McVittie","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J.P. McVittie","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.29965948,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.1768999993801117,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.1768999993801117,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12309","display_name":"solar cell performance optimization","score":0.14059999585151672,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.08060000091791153,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dry-etching","display_name":"dry etching","score":0.8489999771118164},{"id":"https://openalex.org/keywords/nanostructures","display_name":"nanostructures","score":0.6990000009536743},{"id":"https://openalex.org/keywords/ingap","display_name":"InGaP","score":0.9919999837875366},{"id":"https://openalex.org/keywords/alinp","display_name":"AlInP","score":0.9980000257492065},{"id":"https://openalex.org/keywords/iii-v-semiconductors","display_name":"III-V semiconductors","score":0.9229999780654907},{"id":"https://openalex.org/keywords/surface-recombination","display_name":"surface recombination","score":0.8190000057220459},{"id":"https://openalex.org/keywords/gaas-solar-cells","display_name":"GaAs solar cells","score":0.8019999861717224},{"id":"https://openalex.org/keywords/antireflection-coatings","display_name":"antireflection coatings","score":0.8149999976158142},{"id":"https://openalex.org/keywords/light-trapping","display_name":"light trapping","score":0.9769999980926514},{"id":"https://openalex.org/keywords/surface-damage","display_name":"surface damage","score":0.5049999952316284}],"concepts":[{"id":"https://openalex.org/C186187911","wikidata":"https://www.wikidata.org/wiki/Q1093894","display_name":"Nanostructure","level":2,"score":0.8479721546173096},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7319316267967224},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.710598886013031},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.6489759683609009},{"id":"https://openalex.org/C2779845233","wikidata":"https://www.wikidata.org/wiki/Q3381567","display_name":"Photocurrent","level":2,"score":0.5925890207290649},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.567071259021759},{"id":"https://openalex.org/C1291036","wikidata":"https://www.wikidata.org/wiki/Q1191918","display_name":"Dry etching","level":4,"score":0.5258553624153137},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.48613712191581726},{"id":"https://openalex.org/C2780824857","wikidata":"https://www.wikidata.org/wiki/Q58803","display_name":"Solar cell","level":2,"score":0.4780559837818146},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.461407333612442},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.41239356994628906}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:2594892445","doi":null,"is_oa":false,"landing_page_url":"https://snf.stanford.edu/SNF/processes/ee412/srping-14/final-reports/ee412-final-report-etching-ingap-allnp-nanostructures-in-ox-335","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2950506470","https://openalex.org/W2770875876","https://openalex.org/W2000894745","https://openalex.org/W4404876760","https://openalex.org/W4403001635","https://openalex.org/W2025433952","https://openalex.org/W2203423424","https://openalex.org/W1874709914","https://openalex.org/W4399294254","https://openalex.org/W2902651663"],"abstract_inverted_index":{"Nanostructures":[0],"have":[1,121],"been":[2,47],"widely":[3],"applied":[4],"to":[5,36,153,164,167,179],"solar":[6,42],"cells":[7],"for":[8,155],"antireflection":[9],"coating,":[10],"light":[11,158],"trapping":[12],"enhancement,":[13],"and":[14,62,145],"so":[15],"forth":[16],".":[17,129],"In":[18],"2013,":[19],"D.":[20],"Liang":[21],"et":[22],"al.":[23],"at":[24],"Stanford":[25],"University":[26],"has":[27,46],"demonstrated":[28,48],"the":[29,38,50,57,71,76,82,86,101,131,134,156,162,169,181],"use":[30],"of":[31,40,103,138,175],"nanostructured":[32],"AlGaAs":[33,52,127,146],"window":[34,53],"layer":[35,54],"increase":[37,102],"performance":[39],"GaAs":[41],"cells.":[43],"Although":[44],"it":[45,66,173],"that":[49,70],"nanostructure":[51,83,87],"can":[55],"enhance":[56],"photocurrent,":[58],"open-circuit":[59],"voltage":[60],"(Voc)":[61],"fill":[63],"factor":[64],"(FF),":[65],"was":[67],"also":[68],"noted":[69],"major":[72],"loss":[73,151],"mechanism":[74],"in":[75,100,148],"cell":[77],"is":[78,88,96,174],"surface":[79,94,104,124],"recombination":[80],"on":[81,186],"surface.":[84],"Since":[85],"usually":[89,120],"formed":[90],"by":[91],"dry":[92,182],"etching,":[93],"damage":[95],"inevitable,":[97],"which":[98],"results":[99,147],"recombination.":[105],"To":[106],"cope":[107],"with":[108],"this":[109],"challenge,":[110],"InGaP":[111,144],"materials":[112,141,188],"are":[113],"considered":[114],"as":[115,143,190],"potential":[116],"substitutes":[117],"since":[118],"they":[119],"much":[122],"lower":[123],"recombination(":[125],"than":[126],"materials(":[128],"On":[130],"other":[132],"hand,":[133],"high":[135],"refractive":[136],"index":[137],"III-V":[139,187],"semiconductor":[140],"such":[142,189],"optical":[149,170],"reflection":[150],"up":[152],"36%":[154],"incident":[157],",":[159],"thus":[160],"generates":[161],"need":[163],"form":[165],"nanostructures":[166,185],"reduce":[168],"loss.":[171],"Therefore,":[172],"great":[176],"research":[177],"interests":[178],"investigate":[180],"etch":[183],"process":[184],"InGaP.":[191]},"counts_by_year":[],"updated_date":"2026-10-17T09:40:24.721904","created_date":"2017-03-16T00:00:00"}