{"id":"https://openalex.org/W2588044236","doi":null,"title":"Transient enhanced diffusion of As and redistribution of B in As-implanted Silicon","display_name":"Transient enhanced diffusion of As and redistribution of B in As-implanted Silicon","publication_year":1999,"publication_date":"1999-06-10","ids":{"openalex":"https://openalex.org/W2588044236","mag":"2588044236"},"language":"en","primary_location":{"id":"mag:2588044236","doi":null,"is_oa":false,"landing_page_url":"http://ci.nii.ac.jp/naid/10016723085","pdf_url":null,"source":{"id":"https://openalex.org/S4306544932","display_name":"\u534a\u5c0e\u4f53\u30fb\u96c6\u7a4d\u56de\u8def\u6280\u8853\u30b7\u30f3\u30dd\u30b8\u30a6\u30e0\u8b1b\u6f14\u8ad6\u6587\u96c6","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"\u534a\u5c0e\u4f53\u30fb\u96c6\u7a4d\u56de\u8def\u6280\u8853\u30b7\u30f3\u30dd\u30b8\u30a6\u30e0\u8b1b\u6f14\u8ad6\u6587\u96c6","raw_type":null},"volume":null,"type":"article","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5041031577","display_name":"Ryangsu Kim","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ryangsu Kim","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033625632","display_name":"Xin Xia Jian","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Xin Xia Jian","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064845805","display_name":"Tomoya Saito","orcid":"https://orcid.org/0000-0002-8349-4872","observed_orcids":["https://orcid.org/0000-0002-8349-4872"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Tomoya Saito","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-8349-4872","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103735202","display_name":"Takenori Aoki","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Takenori Aoki","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101946816","display_name":"Hiroyuki Kobayashi","orcid":"https://orcid.org/0009-0005-9482-2412","observed_orcids":["https://orcid.org/0009-0005-9482-2412"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hiroyuki Kobayashi","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0009-0005-9482-2412","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110023650","display_name":"Yoshikazu Furuta","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yoshikazu Furuta","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111430338","display_name":"Yoshinari Kamakura","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yoshinari Kamakura","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5082049451","display_name":"Kenji Taniguchi","orcid":"https://orcid.org/0000-0001-5980-1943","observed_orcids":["https://orcid.org/0000-0001-5980-1943"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kenji Taniguchi","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-5980-1943","affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"56","issue":null,"first_page":"65","last_page":"70"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.5795999765396118,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.5795999765396118,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.35179999470710754,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.03830000013113022,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/transient-enhanced-diffusion","display_name":"transient enhanced diffusion","score":0.9649999737739563},{"id":"https://openalex.org/keywords/arsenic-implantation","display_name":"arsenic implantation","score":0.9419999718666077},{"id":"https://openalex.org/keywords/boron-redistribution","display_name":"boron redistribution","score":0.9509999752044678},{"id":"https://openalex.org/keywords/silicon","display_name":"silicon","score":0.5740000009536743},{"id":"https://openalex.org/keywords/ion-implantation","display_name":"ion implantation","score":0.7129999995231628},{"id":"https://openalex.org/keywords/dopant-diffusion","display_name":"dopant diffusion","score":0.7599999904632568}],"concepts":[{"id":"https://openalex.org/C74080474","wikidata":"https://www.wikidata.org/wiki/Q7305975","display_name":"Redistribution (election)","level":3,"score":0.7154637575149536},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5541660785675049},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.546241819858551},{"id":"https://openalex.org/C2780799671","wikidata":"https://www.wikidata.org/wiki/Q17087362","display_name":"Transient (computer programming)","level":2,"score":0.5412023663520813},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.43613719940185547},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.22026070952415466},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2055770754814148},{"id":"https://openalex.org/C17744445","wikidata":"https://www.wikidata.org/wiki/Q36442","display_name":"Political science","level":0,"score":0.17841216921806335},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.16964730620384216},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15443912148475647},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C94625758","wikidata":"https://www.wikidata.org/wiki/Q7163","display_name":"Politics","level":2,"score":0.0},{"id":"https://openalex.org/C199539241","wikidata":"https://www.wikidata.org/wiki/Q7748","display_name":"Law","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:2588044236","doi":null,"is_oa":false,"landing_page_url":"http://ci.nii.ac.jp/naid/10016723085","pdf_url":null,"source":{"id":"https://openalex.org/S4306544932","display_name":"\u534a\u5c0e\u4f53\u30fb\u96c6\u7a4d\u56de\u8def\u6280\u8853\u30b7\u30f3\u30dd\u30b8\u30a6\u30e0\u8b1b\u6f14\u8ad6\u6587\u96c6","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"\u534a\u5c0e\u4f53\u30fb\u96c6\u7a4d\u56de\u8def\u6280\u8853\u30b7\u30f3\u30dd\u30b8\u30a6\u30e0\u8b1b\u6f14\u8ad6\u6587\u96c6","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2991532995","https://openalex.org/W3165129883","https://openalex.org/W592454746","https://openalex.org/W2484301003","https://openalex.org/W2116544524","https://openalex.org/W1973756679","https://openalex.org/W3188807926","https://openalex.org/W2118506321","https://openalex.org/W1983121707","https://openalex.org/W3144805074"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2025-10-10T17:16:08.811792","created_date":"2017-02-24T00:00:00"}