{"id":"https://openalex.org/W2565567775","doi":"https://doi.org/10.1149/06906.0015ecst","title":"Miniaturization and Biocompatible Encapsulation for Implantable Biomedical Silicon Devices","display_name":"Miniaturization and Biocompatible Encapsulation for Implantable Biomedical Silicon Devices","publication_year":2015,"publication_date":"2015-09-10","ids":{"openalex":"https://openalex.org/W2565567775","doi":"https://doi.org/10.1149/06906.0015ecst","mag":"2565567775"},"language":"en","primary_location":{"id":"doi:10.1149/06906.0015ecst","doi":"https://doi.org/10.1149/06906.0015ecst","is_oa":true,"landing_page_url":"https://doi.org/10.1149/06906.0015ecst","pdf_url":"https://iopscience.iop.org/article/10.1149/06906.0015ecst/pdf","source":{"id":"https://openalex.org/S4210205149","display_name":"ECS Transactions","issn_l":"1938-5862","issn":["1938-5862","1938-6737","2151-2051"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["norway-1","poland-20"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ECS Transactions","raw_type":"journal-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://iopscience.iop.org/article/10.1149/06906.0015ecst/pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5066876755","display_name":"Jean-Charles Souriau","orcid":"https://orcid.org/0000-0002-3203-6978","observed_orcids":["https://orcid.org/0000-0002-3203-6978"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Jean-Charles Souriau","raw_affiliation_strings":["CEA, LETI, MINATEC Campus","Univ. Grenoble Alpes"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"Univ. Grenoble Alpes","institution_ids":["https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079825495","display_name":"Jorge Mario Herrera Morales","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Jorge Mario Herrera Morales","raw_affiliation_strings":["CEA, LETI, MINATEC Campus","Univ. Grenoble Alpes"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"Univ. Grenoble Alpes","institution_ids":["https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044817205","display_name":"Laetitia Castagn\u00e9","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Laetitia Castagn\u00e9","raw_affiliation_strings":["CEA, LETI, MINATEC Campus","Univ. Grenoble Alpes"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"Univ. Grenoble Alpes","institution_ids":["https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5106708082","display_name":"Gilles Simon","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Gilles Simon","raw_affiliation_strings":["CEA, LETI, MINATEC Campus","Univ. Grenoble Alpes"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"Univ. Grenoble Alpes","institution_ids":["https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024964477","display_name":"Karima Amara","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114346","display_name":"LivaNova (Italy)","ror":"https://ror.org/01ys7qn31","country_code":"IT","type":"company","lineage":["https://openalex.org/I4210114346","https://openalex.org/I4210126453"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Karima Amara","raw_affiliation_strings":["Sorin CRM SAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sorin CRM SAS","institution_ids":["https://openalex.org/I4210114346"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5079329070","display_name":"Bertrand Boutaud","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114346","display_name":"LivaNova (Italy)","ror":"https://ror.org/01ys7qn31","country_code":"IT","type":"company","lineage":["https://openalex.org/I4210114346","https://openalex.org/I4210126453"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Bertrand Boutaud","raw_affiliation_strings":["Sorin CRM SAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sorin CRM SAS","institution_ids":["https://openalex.org/I4210114346"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4129,"has_fulltext":true,"cited_by_count":4,"citation_normalized_percentile":{"value":0.60801112,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"69","issue":"6","first_page":"15","last_page":"24"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.44999998807907104,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.44999998807907104,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10460","display_name":"Electronic Packaging and Soldering Technologies","score":0.3571999967098236,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11932","display_name":"Wireless Body Area Networks","score":0.05909999832510948,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/biomedical-implants","display_name":"biomedical implants","score":0.6959999799728394},{"id":"https://openalex.org/keywords/hermetic-packaging","display_name":"hermetic packaging","score":0.734000027179718},{"id":"https://openalex.org/keywords/biocompatible-encapsulation","display_name":"biocompatible encapsulation","score":0.8730000257492065},{"id":"https://openalex.org/keywords/cardiac-leads","display_name":"cardiac leads","score":0.6499999761581421},{"id":"https://openalex.org/keywords/silicon-interposer","display_name":"silicon interposer","score":0.8339999914169312},{"id":"https://openalex.org/keywords/hermeticity","display_name":"hermeticity","score":0.6349999904632568},{"id":"https://openalex.org/keywords/biodegradation","display_name":"biodegradation","score":0.6869999766349792},{"id":"https://openalex.org/keywords/conformal-deposition","display_name":"conformal deposition","score":0.6000000238418579},{"id":"https://openalex.org/keywords/cytotoxicity","display_name":"cytotoxicity","score":0.859000027179718}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7501034140586853},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7179849743843079},{"id":"https://openalex.org/C1318750","wikidata":"https://www.wikidata.org/wiki/Q865663","display_name":"Biocompatible material","level":2,"score":0.7131232619285583},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.681227445602417},{"id":"https://openalex.org/C57528182","wikidata":"https://www.wikidata.org/wiki/Q1271842","display_name":"Miniaturization","level":2,"score":0.5250275731086731},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5183113813400269},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.49163466691970825},{"id":"https://openalex.org/C158802814","wikidata":"https://www.wikidata.org/wiki/Q6056418","display_name":"Interposer","level":4,"score":0.48765599727630615},{"id":"https://openalex.org/C69567186","wikidata":"https://www.wikidata.org/wiki/Q5358403","display_name":"Electronic packaging","level":2,"score":0.4433083236217499},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2772755026817322},{"id":"https://openalex.org/C136229726","wikidata":"https://www.wikidata.org/wiki/Q327092","display_name":"Biomedical engineering","level":1,"score":0.1914604902267456},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1897355020046234},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.09908661246299744},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07928183674812317},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1149/06906.0015ecst","doi":"https://doi.org/10.1149/06906.0015ecst","is_oa":true,"landing_page_url":"https://doi.org/10.1149/06906.0015ecst","pdf_url":"https://iopscience.iop.org/article/10.1149/06906.0015ecst/pdf","source":{"id":"https://openalex.org/S4210205149","display_name":"ECS Transactions","issn_l":"1938-5862","issn":["1938-5862","1938-6737","2151-2051"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["norway-1","poland-20"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ECS Transactions","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1149/06906.0015ecst","doi":"https://doi.org/10.1149/06906.0015ecst","is_oa":true,"landing_page_url":"https://doi.org/10.1149/06906.0015ecst","pdf_url":"https://iopscience.iop.org/article/10.1149/06906.0015ecst/pdf","source":{"id":"https://openalex.org/S4210205149","display_name":"ECS Transactions","issn_l":"1938-5862","issn":["1938-5862","1938-6737","2151-2051"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["norway-1","poland-20"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ECS Transactions","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320322892","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2565567775.pdf","grobid_xml":"https://content.openalex.org/works/W2565567775.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2332494965","https://openalex.org/W2267039233","https://openalex.org/W2076352320","https://openalex.org/W7055120137","https://openalex.org/W2012743911","https://openalex.org/W3090530984","https://openalex.org/W2282253256","https://openalex.org/W2802768342","https://openalex.org/W4309263491","https://openalex.org/W2965812378"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,14,21,30,46,57,71],"new":[4],"strategy":[5],"of":[6,66,83],"packaging":[7,141],"developed":[8],"for":[9],"medical":[10],"applications":[11],"which":[12,50],"includes":[13],"sensor":[15],"and":[16,73,81,93,114,130],"an":[17],"integrated":[18],"circuit":[19],"inside":[20],"hermetic":[22],"silicon":[23,47,58,102],"box":[24],"that":[25,109,122],"could":[26],"be":[27],"embedded":[28],"in":[29,33,97,126,134,145],"cardiac":[31],"lead":[32],"order":[34],"to":[35],"monitor":[36],"the":[37,67,84],"endocardial":[38],"acceleration.":[39],"The":[40,78,100],"electronic":[41],"components":[42],"are":[43],"placed":[44],"on":[45],"interposer":[48],"wafer":[49,59],"was":[51,104],"bonded":[52],"by":[53],"AuSi":[54],"solder":[55],"with":[56,106,132],"lid":[60],"containing":[61],"cavities.":[62],"Different":[63],"metal":[64],"stacks":[65],"sealing":[68],"ring":[69],"including":[70],"barrier":[72],"Au":[74],"have":[75,110],"been":[76,124],"studied.":[77,139],"gas":[79],"content":[80],"hermeticity":[82],"package":[85,103],"were":[86,95,138,143],"analyzed":[87],"using":[88],"Residual":[89],"Gas":[90],"Analysis":[91],"(RGA)":[92],"biodegradation":[94],"tested":[96,144],"saline":[98],"solution.":[99],"final":[101],"encapsulated":[105],"biocompatible":[107,129],"materials":[108,142],"high":[111],"conformality":[112],"deposition":[113],"act":[115],"as":[116,128],"good":[117],"bi-directional":[118],"barrier.":[119],"Materials":[120],"behavior":[121],"had":[123],"reported":[125],"literature":[127],"compatible":[131],"fabrication":[133],"standard":[135],"clean":[136],"rooms":[137],"Finally,":[140],"cytotoxicity.":[146]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2026-09-21T07:43:02.447757","created_date":"2017-01-06T00:00:00"}