{"id":"https://openalex.org/W2532005153","doi":"https://doi.org/10.1109/fendt.2015.7398336","title":"Analysis of dynamic characteristic for ultra-thin coating layer with Ultrasonic Atomic Force Microscopy","display_name":"Analysis of dynamic characteristic for ultra-thin coating layer with Ultrasonic Atomic Force Microscopy","publication_year":2015,"publication_date":"2015-05-01","ids":{"openalex":"https://openalex.org/W2532005153","doi":"https://doi.org/10.1109/fendt.2015.7398336","mag":"2532005153"},"language":"en","primary_location":{"id":"doi:10.1109/fendt.2015.7398336","doi":"https://doi.org/10.1109/fendt.2015.7398336","is_oa":false,"landing_page_url":"https://doi.org/10.1109/fendt.2015.7398336","pdf_url":null,"source":{"id":"https://openalex.org/S7407088140","display_name":"IEEE Far East NDT New Technology & Application Forum (FENDT)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE Far East NDT New Technology & Application Forum (FENDT)","raw_type":"proceedings-article"},"parent_works":[],"lineage":["https://openalex.org/W2532005153"],"child_works_count":0,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5057650322","display_name":"Dong-Ryul Kwak","orcid":"https://orcid.org/0000-0001-7166-9914","observed_orcids":["https://orcid.org/0000-0001-7166-9914"]},"institutions":[{"id":"https://openalex.org/I118373667","display_name":"Seoul National University of Science and Technology","ror":"https://ror.org/00chfja07","country_code":"KR","type":"education","lineage":["https://openalex.org/I118373667"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Dong Ryul Kwak","raw_affiliation_strings":["Department of Mechanical & Automotive Engineering, Seoul National University of Science and Technology, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical & Automotive Engineering, Seoul National University of Science and Technology, Seoul, Korea","institution_ids":["https://openalex.org/I118373667"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072366522","display_name":"Seung Bum Cho","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I118373667","display_name":"Seoul National University of Science and Technology","ror":"https://ror.org/00chfja07","country_code":"KR","type":"education","lineage":["https://openalex.org/I118373667"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Seung Bum Cho","raw_affiliation_strings":["Department of Mechanical & Automotive Engineering, Seoul National University of Science and Technology, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical & Automotive Engineering, Seoul National University of Science and Technology, Seoul, Korea","institution_ids":["https://openalex.org/I118373667"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5012406719","display_name":"Ik Keun Park","orcid":"https://orcid.org/0000-0001-6369-3316","observed_orcids":["https://orcid.org/0000-0001-6369-3316"]},"institutions":[{"id":"https://openalex.org/I118373667","display_name":"Seoul National University of Science and Technology","ror":"https://ror.org/00chfja07","country_code":"KR","type":"education","lineage":["https://openalex.org/I118373667"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Ik Keun Park","raw_affiliation_strings":["Department of Mechanical & Automotive Engineering, Seoul National University of Science and Technology, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical & Automotive Engineering, Seoul National University of Science and Technology, Seoul, Korea","institution_ids":["https://openalex.org/I118373667"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I118373667"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"182","last_page":"185"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9937000274658203,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9937000274658203,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.0052999998442828655,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ultrasonic-atomic-force-microscopy","display_name":"ultrasonic atomic force microscopy","score":0.996999979019165},{"id":"https://openalex.org/keywords/ultrathin-coatings","display_name":"ultrathin coatings","score":0.8399999737739563},{"id":"https://openalex.org/keywords/dynamic-characteristics","display_name":"dynamic characteristics","score":0.5490000247955322},{"id":"https://openalex.org/keywords/contact-stiffness","display_name":"contact stiffness","score":0.7580000162124634},{"id":"https://openalex.org/keywords/cantilever-resonance-frequency","display_name":"cantilever resonance frequency","score":0.796999990940094},{"id":"https://openalex.org/keywords/aluminum-thin-films","display_name":"aluminum thin films","score":0.9670000076293945},{"id":"https://openalex.org/keywords/titanium-thin-films","display_name":"titanium thin films","score":1.0},{"id":"https://openalex.org/keywords/magnetron-sputtering","display_name":"magnetron sputtering","score":0.9259999990463257},{"id":"https://openalex.org/keywords/nanoscale-thin-films","display_name":"nanoscale thin films","score":0.9049999713897705}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8398160934448242},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7071784138679504},{"id":"https://openalex.org/C2781448156","wikidata":"https://www.wikidata.org/wiki/Q1570182","display_name":"Coating","level":2,"score":0.695991039276123},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.688513994216919},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.6024892330169678},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.5972886085510254},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.5485879778862},{"id":"https://openalex.org/C133267278","wikidata":"https://www.wikidata.org/wiki/Q4120515","display_name":"Nanomechanics","level":3,"score":0.5132710933685303},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.48595893383026123},{"id":"https://openalex.org/C45206210","wikidata":"https://www.wikidata.org/wiki/Q2415817","display_name":"Nanoscopic scale","level":2,"score":0.4790041148662567},{"id":"https://openalex.org/C83898325","wikidata":"https://www.wikidata.org/wiki/Q1324110","display_name":"Kelvin probe force microscope","level":3,"score":0.47595760226249695},{"id":"https://openalex.org/C2779372316","wikidata":"https://www.wikidata.org/wiki/Q569057","display_name":"Stiffness","level":2,"score":0.4755042493343353},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4736168086528778},{"id":"https://openalex.org/C71246147","wikidata":"https://www.wikidata.org/wiki/Q16029538","display_name":"Non-contact atomic force microscopy","level":4,"score":0.4412539601325989},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.3991854786872864},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.332055926322937},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.25031960010528564},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.15069502592086792},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/fendt.2015.7398336","doi":"https://doi.org/10.1109/fendt.2015.7398336","is_oa":false,"landing_page_url":"https://doi.org/10.1109/fendt.2015.7398336","pdf_url":null,"source":{"id":"https://openalex.org/S7407088140","display_name":"IEEE Far East NDT New Technology & Application Forum (FENDT)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE Far East NDT New Technology & Application Forum (FENDT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W179372779","https://openalex.org/W1590558197","https://openalex.org/W1660678152","https://openalex.org/W1981055824","https://openalex.org/W2015444978","https://openalex.org/W2018234105","https://openalex.org/W2026054143","https://openalex.org/W2038536195","https://openalex.org/W2038548257","https://openalex.org/W2042010963","https://openalex.org/W2052314430","https://openalex.org/W2065885105","https://openalex.org/W2070037660","https://openalex.org/W2084186886","https://openalex.org/W2109157932","https://openalex.org/W2123844766","https://openalex.org/W2140617087","https://openalex.org/W2147789640"],"related_works":["https://openalex.org/W2297033036","https://openalex.org/W1980182451","https://openalex.org/W3119949741","https://openalex.org/W1978336640","https://openalex.org/W2053071450","https://openalex.org/W854480730","https://openalex.org/W2033227729","https://openalex.org/W2078441525","https://openalex.org/W2075525662"],"abstract_inverted_index":{"Ultrasonic":[0],"Atomic":[1],"Force":[2],"Microscopy":[3],"(Ultrasonic-AFM)":[4],"was":[5,27],"applied":[6],"to":[7,82,100],"characterize":[8],"the":[9,34,38,54,57,63,73,83,90,95,101,117,121],"mechanical":[10,118],"properties":[11,119],"of":[12,33,37,94,120],"an":[13],"ultra-thin":[14,39,122],"coating":[15,40,123],"layer":[16],"in":[17,80],"a":[18,70,88,111],"nanoscale":[19],"thin":[20,45],"film":[21],"system.":[22],"The":[23],"modified":[24],"Hertzian":[25],"theory":[26],"adopted":[28],"for":[29,114],"accurate":[30],"theoretical":[31],"analysis":[32],"dynamic":[35],"characteristics":[36],"layer.":[41,124],"Aluminum":[42],"and":[43,67,76],"Titanium":[44],"films":[46],"with":[47,69],"200":[48],"nm":[49],"thickness":[50],"were":[51],"coated":[52],"on":[53],"substrate":[55],"using":[56],"DC":[58],"Magnetron":[59],"sputtering":[60],"method.":[61],"When":[62],"cantilever":[64,97],"tip":[65],"approaches":[66],"couples":[68],"sample":[71,84],"surface,":[72],"interaction":[74],"forces":[75],"boundary":[77],"conditions":[78],"change":[79],"response":[81],"contact":[85,91,103],"stiffness.":[86,104],"As":[87],"result,":[89],"resonance":[92],"frequency":[93],"vibrating":[96],"shifts":[98],"according":[99],"local":[102],"This":[105],"research":[106],"demonstrates":[107],"that":[108],"Ultrasonic-AFM":[109],"is":[110],"potential":[112],"technique":[113],"nondestructively":[115],"characterizing":[116]},"counts_by_year":[],"updated_date":"2026-11-14T11:04:58.165337","created_date":"2016-10-28T00:00:00"}