{"id":"https://openalex.org/W2498039147","doi":"https://doi.org/10.1007/978-1-4684-8407-6_5","title":"Ion Cleaning and Milling of Solid Surfaces","display_name":"Ion Cleaning and Milling of Solid Surfaces","publication_year":1989,"publication_date":"1989-01-01","ids":{"openalex":"https://openalex.org/W2498039147","doi":"https://doi.org/10.1007/978-1-4684-8407-6_5","mag":"2498039147"},"language":"en","primary_location":{"id":"doi:10.1007/978-1-4684-8407-6_5","doi":"https://doi.org/10.1007/978-1-4684-8407-6_5","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-1-4684-8407-6_5","pdf_url":null,"source":{"id":"https://openalex.org/S4306463937","display_name":"Springer eBooks","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"ebook platform"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Ion and Atomic Beams for Controlled Fusion and Technology","raw_type":"book-chapter"},"volume":{"id":"https://openalex.org/W611088672","display_name":"Ion and Atomic Beams for Controlled Fusion and Technology"},"type":"book-chapter","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5000753820","display_name":"M. D. Gabovich","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. D. Gabovich","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051935548","display_name":"N. V. Pleshivtsev","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"N. V. Pleshivtsev","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5031373613","display_name":"N. N. Semashko","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"N. N. Semashko","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.40925267,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"103","last_page":"131"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.98580002784729,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.98580002784729,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.00559999980032444,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.0027000000700354576,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ion-cleaning","display_name":"ion cleaning","score":0.9150000214576721},{"id":"https://openalex.org/keywords/ion-milling","display_name":"ion beam etching","score":0.9580000042915344},{"id":"https://openalex.org/keywords/solid-surfaces","display_name":"solid surfaces","score":0.8259999752044678},{"id":"https://openalex.org/keywords/surface-cleaning","display_name":"surface cleaning","score":0.6859999895095825},{"id":"https://openalex.org/keywords/surface-modification","display_name":"surface modification","score":0.5220000147819519},{"id":"https://openalex.org/keywords/ion-bombardment","display_name":"ion bombardment","score":0.6290000081062317}],"concepts":[{"id":"https://openalex.org/C48736558","wikidata":"https://www.wikidata.org/wiki/Q16910983","display_name":"Ion milling machine","level":3,"score":0.5820667743682861},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5611121654510498},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.47144806385040283},{"id":"https://openalex.org/C2994054872","wikidata":"https://www.wikidata.org/wiki/Q3489404","display_name":"Solid surface","level":2,"score":0.41205090284347534},{"id":"https://openalex.org/C21880701","wikidata":"https://www.wikidata.org/wiki/Q2144042","display_name":"Process engineering","level":1,"score":0.39587703347206116},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.38706183433532715},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.3453963100910187},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.24159547686576843},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2246474325656891},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.12281212210655212},{"id":"https://openalex.org/C159467904","wikidata":"https://www.wikidata.org/wiki/Q2001702","display_name":"Chemical physics","level":1,"score":0.05732464790344238},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0364302396774292},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/978-1-4684-8407-6_5","doi":"https://doi.org/10.1007/978-1-4684-8407-6_5","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-1-4684-8407-6_5","pdf_url":null,"source":{"id":"https://openalex.org/S4306463937","display_name":"Springer eBooks","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"ebook platform"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Ion and Atomic Beams for Controlled Fusion and Technology","raw_type":"book-chapter"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2126989967","https://openalex.org/W2481031882","https://openalex.org/W4211224319","https://openalex.org/W2488530037","https://openalex.org/W2502814155","https://openalex.org/W566679041","https://openalex.org/W2558382908","https://openalex.org/W7020000178","https://openalex.org/W2074109116","https://openalex.org/W4246480838"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-10-10T09:11:00.788812","created_date":"2016-08-23T00:00:00"}