{"id":"https://openalex.org/W2492477885","doi":"https://doi.org/10.1154/s0376030800014865","title":"X-ray Characterization of Thin Diamond Films Deposited by Hot-Filament Chemical Vapor Deposition","display_name":"X-ray Characterization of Thin Diamond Films Deposited by Hot-Filament Chemical Vapor Deposition","publication_year":1990,"publication_date":"1990-01-01","ids":{"openalex":"https://openalex.org/W2492477885","doi":"https://doi.org/10.1154/s0376030800014865","mag":"2492477885"},"language":"en","primary_location":{"id":"doi:10.1154/s0376030800014865","doi":"https://doi.org/10.1154/s0376030800014865","is_oa":false,"landing_page_url":"https://doi.org/10.1154/s0376030800014865","pdf_url":null,"source":{"id":"https://openalex.org/S2764582555","display_name":"Advances in X-ray Analysis","issn_l":"0376-0308","issn":["0376-0308","2631-3626"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4327874760","host_organization_name":"International Centre for Diffraction Data","host_organization_lineage":["https://openalex.org/P4327874760"],"host_organization_lineage_names":["International Centre for Diffraction Data"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advances in X-ray Analysis","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Richard F. Hamilton","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210113028","display_name":"Air Products (United States)","ror":"https://ror.org/01ydrx675","country_code":"US","type":"company","lineage":["https://openalex.org/I4210113028"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Richard F. Hamilton","raw_affiliation_strings":["Air Products and Chemieals, Inc. 7201 Hamilton Boulevard Allentown, PA 18195"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Air Products and Chemieals, Inc. 7201 Hamilton Boulevard Allentown, PA 18195","institution_ids":["https://openalex.org/I4210113028"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110944554","display_name":"D. Garg","orcid":"https://orcid.org/0009-0003-6595-2053","observed_orcids":["https://orcid.org/0009-0003-6595-2053"]},"institutions":[{"id":"https://openalex.org/I4210113028","display_name":"Air Products (United States)","ror":"https://ror.org/01ydrx675","country_code":"US","type":"company","lineage":["https://openalex.org/I4210113028"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Diwakar Garg","raw_affiliation_strings":["Air Products and Chemieals, Inc. 7201 Hamilton Boulevard Allentown, PA 18195"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Air Products and Chemieals, Inc. 7201 Hamilton Boulevard Allentown, PA 18195","institution_ids":["https://openalex.org/I4210113028"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079296323","display_name":"Keith A. Wood","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210113028","display_name":"Air Products (United States)","ror":"https://ror.org/01ydrx675","country_code":"US","type":"company","lineage":["https://openalex.org/I4210113028"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Keith A. Wood","raw_affiliation_strings":["Air Products and Chemieals, Inc. 7201 Hamilton Boulevard Allentown, PA 18195"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Air Products and Chemieals, Inc. 7201 Hamilton Boulevard Allentown, PA 18195","institution_ids":["https://openalex.org/I4210113028"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5046976672","display_name":"David S. Hoover","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210113028","display_name":"Air Products (United States)","ror":"https://ror.org/01ydrx675","country_code":"US","type":"company","lineage":["https://openalex.org/I4210113028"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"David S. Hoover","raw_affiliation_strings":["Air Products and Chemieals, Inc. 7201 Hamilton Boulevard Allentown, PA 18195"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Air Products and Chemieals, Inc. 7201 Hamilton Boulevard Allentown, PA 18195","institution_ids":["https://openalex.org/I4210113028"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210113028"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.34778186,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"34","issue":null,"first_page":"543","last_page":"555"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.9717000126838684,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.9717000126838684,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12613","display_name":"X-ray Diffraction in Crystallography","score":0.014000000432133675,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11733","display_name":"X-ray Spectroscopy and Fluorescence Analysis","score":0.003100000089034438,"subfield":{"id":"https://openalex.org/subfields/3108","display_name":"Radiation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thin-diamond-films","display_name":"thin diamond films","score":0.9610000252723694},{"id":"https://openalex.org/keywords/hot-filament-chemical-vapor-deposition","display_name":"hot filament chemical vapor deposition","score":0.9129999876022339},{"id":"https://openalex.org/keywords/x-ray-lithography","display_name":"X-ray lithography","score":0.8100000023841858},{"id":"https://openalex.org/keywords/x-ray-diffraction","display_name":"X-ray diffraction","score":0.6919999718666077},{"id":"https://openalex.org/keywords/grazing-incidence-diffraction","display_name":"grazing incidence diffraction","score":0.9190000295639038},{"id":"https://openalex.org/keywords/crystal-structure","display_name":"crystal structure","score":0.7850000262260437},{"id":"https://openalex.org/keywords/crystal-orientation","display_name":"crystal orientation","score":0.8259999752044678},{"id":"https://openalex.org/keywords/x-ray-transmission","display_name":"X-ray transmission","score":0.7979999780654907},{"id":"https://openalex.org/keywords/mass-absorption-coefficient","display_name":"mass absorption coefficient","score":0.8299999833106995},{"id":"https://openalex.org/keywords/beer-lambert-law","display_name":"Beer-Lambert law","score":0.7860000133514404},{"id":"https://openalex.org/keywords/polycrystalline-diamond","display_name":"polycrystalline diamond","score":0.8619999885559082},{"id":"https://openalex.org/keywords/freestanding-films","display_name":"free-standing films","score":0.6779999732971191},{"id":"https://openalex.org/keywords/film-morphology","display_name":"film morphology","score":0.6589999794960022}],"concepts":[{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.8122490048408508},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.7226004600524902},{"id":"https://openalex.org/C2776921476","wikidata":"https://www.wikidata.org/wiki/Q5283","display_name":"Diamond","level":2,"score":0.7112438678741455},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.692541241645813},{"id":"https://openalex.org/C75937256","wikidata":"https://www.wikidata.org/wiki/Q1440781","display_name":"Carbon film","level":3,"score":0.589170515537262},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5668359398841858},{"id":"https://openalex.org/C183866003","wikidata":"https://www.wikidata.org/wiki/Q515503","display_name":"Combustion chemical vapor deposition","level":4,"score":0.5437127947807312},{"id":"https://openalex.org/C162882748","wikidata":"https://www.wikidata.org/wiki/Q5925925","display_name":"Material properties of diamond","level":3,"score":0.5062345862388611},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4421394169330597},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.40160003304481506},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.35640817880630493},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3320203423500061},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2007569968700409},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1154/s0376030800014865","doi":"https://doi.org/10.1154/s0376030800014865","is_oa":false,"landing_page_url":"https://doi.org/10.1154/s0376030800014865","pdf_url":null,"source":{"id":"https://openalex.org/S2764582555","display_name":"Advances in X-ray Analysis","issn_l":"0376-0308","issn":["0376-0308","2631-3626"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4327874760","host_organization_name":"International Centre for Diffraction Data","host_organization_lineage":["https://openalex.org/P4327874760"],"host_organization_lineage_names":["International Centre for Diffraction Data"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advances in X-ray Analysis","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1492053044","https://openalex.org/W1493810992","https://openalex.org/W1964842250","https://openalex.org/W1970909600","https://openalex.org/W2017817965","https://openalex.org/W2036107834","https://openalex.org/W2043350679","https://openalex.org/W2067075893","https://openalex.org/W2324362536","https://openalex.org/W2494732912","https://openalex.org/W2932676718","https://openalex.org/W2934606788","https://openalex.org/W4237198776"],"related_works":["https://openalex.org/W3144101897","https://openalex.org/W191463321","https://openalex.org/W2063317556","https://openalex.org/W2021178375","https://openalex.org/W2059744147","https://openalex.org/W2036107834","https://openalex.org/W4321259037","https://openalex.org/W1965674412","https://openalex.org/W2020267009","https://openalex.org/W7133293931"],"abstract_inverted_index":{"Abstract":[0],"Synthesizing":[1],"thin":[2,42,79,115],"diamond":[3,23,43,80,116,163],"films":[4,24,65,81,117,133],"by":[5,70,83,90],"chemical":[6],"vapor":[7],"deposition":[8],"(CVD)":[9],"is":[10],"the":[11,19,58,111,120,139,144,152],"most":[12],"recent":[13],"and":[14,37,61,95,103,118,143],"technologically":[15],"important":[16],"development":[17],"in":[18,27,49,93,134],"thin-film":[20],"field.":[21],"Thin":[22],"are":[25],"useful":[26],"many":[28],"applications":[29],"because":[30],"of":[31,63,77,114,131,136,146],"their":[32],"unique":[33],"physical,":[34],"chemical,":[35],"optical,":[36],"electronic":[38],"properties.":[39],"To":[40],"assess":[41],"films\u2019":[44],"suitability":[45],"for":[46,156],"support":[47],"membranes":[48],"X-ray":[50,52,74,91,128,158],"lithography,":[51],"diffraction":[53,106],"was":[54],"used":[55,108],"to":[56,109],"characterize":[57],"crystal":[59,112],"structure":[60,113],"orientation":[62],"these":[64,132],"deposited":[66],"on":[67],"silicon":[68,86],"wafers":[69],"hot-filament":[71],"assisted":[72],"CVD.":[73],"transmission":[75,129],"properties":[76,130],"free-standing":[78],"prepared":[82],"selectively":[84],"etching":[85],"substrates":[87],"were":[88],"characterized":[89],"fluorescence":[92],"short":[94],"long":[96,153],"wavelength":[97,145,154],"regions.":[98],"This":[99],"paper":[100],"discusses":[101],"conventional":[102],"grazing":[104],"incidence":[105],"techniques":[107],"study":[110],"compares":[119],"results":[121],"with":[122],"film":[123],"morphology.":[124],"It":[125],"also":[126],"describes":[127],"terms":[135],"Beer's":[137],"Law,":[138],"mass":[140],"absorption":[141],"coefficient,":[142],"attenuated":[147],"radiation.":[148],"Finally,":[149],"it":[150],"reveals":[151],"regions":[155],"optimum":[157],"lithography":[159],"operations":[160],"using":[161],"polycrystalline":[162],"(PCD)":[164],"film.":[165]},"counts_by_year":[],"updated_date":"2026-10-14T16:39:01.820549","created_date":"2016-08-23T00:00:00"}