{"id":"https://openalex.org/W2413614729","doi":"https://doi.org/10.1109/iwjt.2016.7486671","title":"New processes for homojunction silicon solar cells doping: From beam line to plasma immersion ion implantation","display_name":"New processes for homojunction silicon solar cells doping: From beam line to plasma immersion ion implantation","publication_year":2016,"publication_date":"2016-05-01","ids":{"openalex":"https://openalex.org/W2413614729","doi":"https://doi.org/10.1109/iwjt.2016.7486671","mag":"2413614729"},"language":"en","primary_location":{"id":"doi:10.1109/iwjt.2016.7486671","doi":"https://doi.org/10.1109/iwjt.2016.7486671","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iwjt.2016.7486671","pdf_url":null,"source":{"id":"https://openalex.org/S4306420310","display_name":"International Workshop on Junction Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 16th International Workshop on Junction Technology (IWJT)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5049364228","display_name":"Marianne Coig","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Marianne Coig","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024190450","display_name":"Fre\u0301de\u0301ric Milesi","orcid":"https://orcid.org/0009-0002-1582-1744","observed_orcids":["https://orcid.org/0009-0002-1582-1744"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Frederic Milesi","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012066419","display_name":"Jean-Fran\u00e7ois Lerat","orcid":"https://orcid.org/0000-0002-6865-2764","observed_orcids":["https://orcid.org/0000-0002-6865-2764"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210094700","display_name":"Institut National de l'\u00c9nergie Solaire","ror":"https://ror.org/00qk0vr83","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I4210089901","https://openalex.org/I4210094700","https://openalex.org/I4210139971","https://openalex.org/I70900168"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Jean-Francois Lerat","raw_affiliation_strings":["CEA, INES, Le-Bourget-du-Lac, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, INES, Le-Bourget-du-Lac, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210094700"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063609129","display_name":"Thibaut Desrues","orcid":"https://orcid.org/0000-0002-6341-6236","observed_orcids":["https://orcid.org/0000-0002-6341-6236"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210094700","display_name":"Institut National de l'\u00c9nergie Solaire","ror":"https://ror.org/00qk0vr83","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I4210089901","https://openalex.org/I4210094700","https://openalex.org/I4210139971","https://openalex.org/I70900168"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Thibaut Desrues","raw_affiliation_strings":["CEA, INES, Le-Bourget-du-Lac, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, INES, Le-Bourget-du-Lac, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210094700"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021516169","display_name":"J\u00e9r\u00f4me Le Perchec","orcid":"https://orcid.org/0000-0001-6453-9601","observed_orcids":["https://orcid.org/0000-0001-6453-9601"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210094700","display_name":"Institut National de l'\u00c9nergie Solaire","ror":"https://ror.org/00qk0vr83","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I4210089901","https://openalex.org/I4210094700","https://openalex.org/I4210139971","https://openalex.org/I70900168"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Jerome Le Perchec","raw_affiliation_strings":["CEA, INES, Le-Bourget-du-Lac, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, INES, Le-Bourget-du-Lac, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210094700"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006397217","display_name":"Adeline Lanterne","orcid":"https://orcid.org/0000-0001-8080-2545","observed_orcids":["https://orcid.org/0000-0001-8080-2545"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210094700","display_name":"Institut National de l'\u00c9nergie Solaire","ror":"https://ror.org/00qk0vr83","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I4210089901","https://openalex.org/I4210094700","https://openalex.org/I4210139971","https://openalex.org/I70900168"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Adeline Lanterne","raw_affiliation_strings":["CEA, INES, Le-Bourget-du-Lac, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, INES, Le-Bourget-du-Lac, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210094700"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076779854","display_name":"Laurent Lachal","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Laurent Lachal","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5107173761","display_name":"Fr\u00e9d\u00e9ric Mazen","orcid":"https://orcid.org/0000-0001-6821-7191","observed_orcids":["https://orcid.org/0000-0001-6821-7191"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Frederic Mazen","raw_affiliation_strings":["CEA, LETI, MINATEC Campus, Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA, LETI, MINATEC Campus, Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.4072,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.75938211,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"44","last_page":"50"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/n-type-silicon","display_name":"n-type silicon","score":0.6470000147819519},{"id":"https://openalex.org/keywords/plasma-immersion-ion-implantation","display_name":"plasma immersion ion implantation","score":1.0},{"id":"https://openalex.org/keywords/solar-cell-efficiency","display_name":"solar cell efficiency","score":0.8289999961853027}],"concepts":[{"id":"https://openalex.org/C2778702798","wikidata":"https://www.wikidata.org/wiki/Q2098457","display_name":"Plasma-immersion ion implantation","level":4,"score":0.9023712873458862},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8012610077857971},{"id":"https://openalex.org/C41823505","wikidata":"https://www.wikidata.org/wiki/Q1436752","display_name":"Ion implantation","level":3,"score":0.7489234805107117},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.7055772542953491},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.6134341955184937},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5700597763061523},{"id":"https://openalex.org/C191952053","wikidata":"https://www.wikidata.org/wiki/Q15119237","display_name":"Dopant","level":3,"score":0.5592783093452454},{"id":"https://openalex.org/C46918542","wikidata":"https://www.wikidata.org/wiki/Q1648344","display_name":"Common emitter","level":2,"score":0.5464878678321838},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.5207653045654297},{"id":"https://openalex.org/C167456791","wikidata":"https://www.wikidata.org/wiki/Q4737729","display_name":"Homojunction","level":3,"score":0.5006399154663086},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.49700596928596497},{"id":"https://openalex.org/C501308230","wikidata":"https://www.wikidata.org/wiki/Q618","display_name":"Boron","level":2,"score":0.4886966049671173},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.4806984066963196},{"id":"https://openalex.org/C2780824857","wikidata":"https://www.wikidata.org/wiki/Q58803","display_name":"Solar cell","level":2,"score":0.462159663438797},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3433176577091217},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.3082956075668335},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.11805233359336853},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0929746925830841},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iwjt.2016.7486671","doi":"https://doi.org/10.1109/iwjt.2016.7486671","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iwjt.2016.7486671","pdf_url":null,"source":{"id":"https://openalex.org/S4306420310","display_name":"International Workshop on Junction Technology","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 16th International Workshop on Junction Technology (IWJT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.8769000172615051}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1972926110","https://openalex.org/W1973339006","https://openalex.org/W1981522843","https://openalex.org/W2003811349","https://openalex.org/W2006062813","https://openalex.org/W2008304445","https://openalex.org/W2013716885","https://openalex.org/W2018178318","https://openalex.org/W2025926285","https://openalex.org/W2028312674","https://openalex.org/W2060552366","https://openalex.org/W2086990220","https://openalex.org/W2105790461","https://openalex.org/W2108640388","https://openalex.org/W2161445809","https://openalex.org/W2169644742","https://openalex.org/W2176416148","https://openalex.org/W2521180351","https://openalex.org/W6676108933"],"related_works":["https://openalex.org/W2028312674","https://openalex.org/W2677747745","https://openalex.org/W2969215544","https://openalex.org/W2587512254","https://openalex.org/W1659903018","https://openalex.org/W2300424159","https://openalex.org/W2314716261","https://openalex.org/W4394065453","https://openalex.org/W7029044273","https://openalex.org/W4298184772"],"abstract_inverted_index":{"The":[0,41],"doping":[1,33,86],"of":[2,24,30,79,99,140,156],"n-type":[3],"silicon":[4],"solar":[5,101],"cells":[6,129,145],"was":[7,73,96,122,142],"investigated":[8,84],"using":[9,44,132],"two":[10,63],"ion":[11,26,90],"implantation":[12,27,91,134],"techniques:":[13],"beam":[14],"line":[15],"and":[16,54,108,136],"plasma":[17,88,149],"immersion.":[18],"Initially,":[19],"we":[20,83],"evaluated":[21],"the":[22,59,85,93,97,116,125],"benefits":[23],"beamline":[25],"in":[28],"replacement":[29],"diffusion":[31],"anneal":[32],"process.":[34],"Two":[35],"different":[36,64],"annealing":[37,47,65],"routines":[38],"were":[39,110,130],"studied.":[40],"first":[42],"one":[43,61],"a":[45,76,100,137,154],"single":[46],"to":[48,66],"activate":[49,68],"both":[50,133],"B":[51],"implanted":[52,56],"emitter":[53,118],"P":[55],"BSF,":[57],"while":[58,120],"second":[60],"used":[62,123],"separately":[67],"each":[69],"dopant.":[70],"Good":[71],"yield":[72,155],"reached":[74],"with":[75,153],"record":[77],"cell":[78,102],"20.33%":[80],"efficiency.":[81],"Secondly,":[82],"by":[87,105,148],"immersion":[89],"where":[92],"final":[94],"objective":[95],"fabrication":[98],"fully":[103,146],"doped":[104,147],"plasma.":[106],"BF3":[107],"B2H6":[109],"compared":[111],"as":[112],"precursor":[113],"gases":[114],"for":[115,124],"boron":[117],"doping,":[119],"PH3":[121],"BSF":[126],"doping.":[127],"Hybrid":[128],"fabricated":[131],"techniques":[135],"maximum":[138],"efficiency":[139],"19.8%":[141],"obtained.":[143],"First":[144],"shown":[150],"promising":[151],"results":[152],"18.8%.":[157]},"counts_by_year":[{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":2}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2016-06-24T00:00:00"}