{"id":"https://openalex.org/W2388657264","doi":null,"title":"Research on the Ta_2O_5 Optical Thin Films Deposited by Electron Beam Evaporation with Ion Assisted","display_name":"Research on the Ta_2O_5 Optical Thin Films Deposited by Electron Beam Evaporation with Ion Assisted","publication_year":2008,"publication_date":"2008-01-01","ids":{"openalex":"https://openalex.org/W2388657264","mag":"2388657264"},"language":"en","primary_location":{"id":"mag:2388657264","doi":null,"is_oa":false,"landing_page_url":"http://en.cnki.com.cn/Article_en/CJFDTOTAL-YDSG200801006.htm","pdf_url":null,"source":{"id":"https://openalex.org/S2764529400","display_name":"Piezoelectrics and Acoustooptics","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4324096548","host_organization_name":"Sichuan Institute of Piezoelectric and Acoustooptic Technology","host_organization_lineage":["https://openalex.org/P4324096548"],"host_organization_lineage_names":["Sichuan Institute of Piezoelectric and Acoustooptic Technology"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Piezoelectrics and Acoustooptics","raw_type":null},"volume":null,"type":"article","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100948184","display_name":"Zhongjie Ma","orcid":"https://orcid.org/0000-0002-0527-0291","observed_orcids":["https://orcid.org/0000-0002-0527-0291"]},"institutions":[{"id":"https://openalex.org/I196699116","display_name":"Wuhan University of Technology","ror":"https://ror.org/03fe7t173","country_code":"CN","type":"education","lineage":["https://openalex.org/I196699116"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Zhongjie Ma","raw_affiliation_strings":["School of Materials of Science and Engineering,Wuhan University of Technology,Wuhan 430070,China)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Materials of Science and Engineering,Wuhan University of Technology,Wuhan 430070,China)","institution_ids":["https://openalex.org/I196699116"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5100948184"],"corresponding_institution_ids":["https://openalex.org/I196699116"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.33532056,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.000699999975040555,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11128","display_name":"Transition Metal Oxide Nanomaterials","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ta2o5-thin-films","display_name":"Ta2O5 thin films","score":0.8859999775886536},{"id":"https://openalex.org/keywords/optical-thin-films","display_name":"optical thin films","score":0.9419999718666077},{"id":"https://openalex.org/keywords/electron-beam-evaporation","display_name":"electron beam evaporation","score":0.9639999866485596},{"id":"https://openalex.org/keywords/ion-assisted-deposition","display_name":"ion beam assisted deposition","score":0.9240000247955322},{"id":"https://openalex.org/keywords/k9-glass","display_name":"K9 glass","score":0.7319999933242798},{"id":"https://openalex.org/keywords/optical-transmittance","display_name":"optical transmittance","score":0.8830000162124634},{"id":"https://openalex.org/keywords/substrate-temperature","display_name":"substrate temperature","score":0.9150000214576721},{"id":"https://openalex.org/keywords/oxygen-flux","display_name":"oxygen flux","score":0.9890000224113464},{"id":"https://openalex.org/keywords/deposition-rate","display_name":"deposition rate","score":0.7609999775886536},{"id":"https://openalex.org/keywords/process-parameter-optimization","display_name":"process parameter optimization","score":0.7770000100135803}],"concepts":[{"id":"https://openalex.org/C7770020","wikidata":"https://www.wikidata.org/wiki/Q460616","display_name":"Electron beam physical vapor deposition","level":3,"score":0.8325822949409485},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.8247714042663574},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.810826301574707},{"id":"https://openalex.org/C150493377","wikidata":"https://www.wikidata.org/wiki/Q1427863","display_name":"Transmittance","level":2,"score":0.7828763723373413},{"id":"https://openalex.org/C61441594","wikidata":"https://www.wikidata.org/wiki/Q132814","display_name":"Evaporation","level":2,"score":0.7283846735954285},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.591041088104248},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5639770030975342},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.527130126953125},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5247057676315308},{"id":"https://openalex.org/C50774322","wikidata":"https://www.wikidata.org/wiki/Q644248","display_name":"Ion beam","level":3,"score":0.4757240116596222},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.4454593360424042},{"id":"https://openalex.org/C2781463530","wikidata":"https://www.wikidata.org/wiki/Q904053","display_name":"Ion beam-assisted deposition","level":4,"score":0.4395666718482971},{"id":"https://openalex.org/C2781448156","wikidata":"https://www.wikidata.org/wiki/Q1570182","display_name":"Coating","level":2,"score":0.4198876619338989},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.40785521268844604},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.31613418459892273},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.20204561948776245},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.17875277996063232},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.09430786967277527},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:2388657264","doi":null,"is_oa":false,"landing_page_url":"http://en.cnki.com.cn/Article_en/CJFDTOTAL-YDSG200801006.htm","pdf_url":null,"source":{"id":"https://openalex.org/S2764529400","display_name":"Piezoelectrics and Acoustooptics","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4324096548","host_organization_name":"Sichuan Institute of Piezoelectric and Acoustooptic Technology","host_organization_lineage":["https://openalex.org/P4324096548"],"host_organization_lineage_names":["Sichuan Institute of Piezoelectric and Acoustooptic Technology"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Piezoelectrics and Acoustooptics","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2029491393","https://openalex.org/W1976054569","https://openalex.org/W2161417151","https://openalex.org/W2376887313","https://openalex.org/W2042462857","https://openalex.org/W2111871838","https://openalex.org/W2386523274","https://openalex.org/W4321516915","https://openalex.org/W4241815838","https://openalex.org/W2379729347"],"abstract_inverted_index":{"The":[0],"Ta2O5":[1,12,31,66,92],"optical":[2,62,89],"thin":[3,32,67,93],"films":[4,33,68,94],"were":[5,34,54,95,101],"deposited":[6],"on":[7,87],"K9":[8,47],"glasses":[9],"with":[10,20],"the":[11,29,37,44,55,61,65,70,80,88],"as":[13],"coating":[14],"materials":[15],"by":[16],"electron":[17],"beam":[18,22],"evaporation":[19],"ion":[21],"assisted":[23],"through":[24],"orthogonal":[25],"experiment.The":[26],"transmittances":[27],"of":[28,46,64,72,84,91],"as-deposited":[30],"excellent":[35],"while":[36,69],"maximum":[38],"transmittance":[39,45],"was":[40],"about":[41],"93%,close":[42],"to":[43,79],"glasses.The":[48],"substrate":[49],"temperature":[50],"and":[51,97],"oxygen":[52],"flux":[53],"two":[56],"key":[57],"factors":[58],"which":[59],"influence":[60],"properties":[63,90],"effect":[71],"deposition":[73],"rate":[74],"could":[75],"be":[76],"ignored":[77],"according":[78],"range":[81],"analysis.The":[82],"influences":[83],"preparation":[85],"parameters":[86,100],"analyzed":[96],"optimization":[98],"fabrication":[99],"obtained.":[102]},"counts_by_year":[{"year":2019,"cited_by_count":1}],"updated_date":"2026-09-21T07:43:02.447757","created_date":"2016-06-24T00:00:00"}