{"id":"https://openalex.org/W2322201660","doi":"https://doi.org/10.1117/12.2219312","title":"A route for industry compatible directed self-assembly of high-chi PS-PDMS block copolymers","display_name":"A route for industry compatible directed self-assembly of high-chi PS-PDMS block copolymers","publication_year":2016,"publication_date":"2016-04-01","ids":{"openalex":"https://openalex.org/W2322201660","doi":"https://doi.org/10.1117/12.2219312","mag":"2322201660"},"language":"en","primary_location":{"id":"doi:10.1117/12.2219312","doi":"https://doi.org/10.1117/12.2219312","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.2219312","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103403147","display_name":"Sophie B\u00f6hme","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"S. B\u00f6hme","raw_affiliation_strings":["CEA-LETI, MINATEC (France)","LTM, CNRS (France)","Univ. Grenoble Alpes (France)","Laboratoire des technologies de la micro\u00e9lectronique"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-LETI, MINATEC (France)","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"LTM, CNRS (France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210128684"]},{"raw_affiliation_string":"Univ. Grenoble Alpes (France)","institution_ids":["https://openalex.org/I899635006"]},{"raw_affiliation_string":"Laboratoire des technologies de la micro\u00e9lectronique","institution_ids":["https://openalex.org/I4210128684"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082495026","display_name":"C. Girardot","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Girardot","raw_affiliation_strings":["CEA-LETI, MINATEC (France)","LTM, CNRS (France)","Univ. Grenoble Alpes (France)","Laboratoire des technologies de la micro\u00e9lectronique"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-LETI, MINATEC (France)","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"LTM, CNRS (France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210128684"]},{"raw_affiliation_string":"Univ. Grenoble Alpes (France)","institution_ids":["https://openalex.org/I899635006"]},{"raw_affiliation_string":"Laboratoire des technologies de la micro\u00e9lectronique","institution_ids":["https://openalex.org/I4210128684"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101561493","display_name":"J. Garnier","orcid":"https://orcid.org/0000-0002-7313-1066","observed_orcids":["https://orcid.org/0000-0002-7313-1066"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. Garnier","raw_affiliation_strings":["CEA-LETI, MINATEC (France)","LTM, CNRS (France)","Univ. Grenoble Alpes (France)","Laboratoire des technologies de la micro\u00e9lectronique"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-LETI, MINATEC (France)","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"LTM, CNRS (France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210128684"]},{"raw_affiliation_string":"Univ. Grenoble Alpes (France)","institution_ids":["https://openalex.org/I899635006"]},{"raw_affiliation_string":"Laboratoire des technologies de la micro\u00e9lectronique","institution_ids":["https://openalex.org/I4210128684"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042152886","display_name":"Javier Arias\u2010Zapata","orcid":"https://orcid.org/0000-0002-0566-0222","observed_orcids":["https://orcid.org/0000-0002-0566-0222"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. Arias-Zapata","raw_affiliation_strings":["CEA-LETI, MINATEC (France)","LTM, CNRS (France)","Univ. Grenoble Alpes (France)","Laboratoire des technologies de la micro\u00e9lectronique"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-LETI, MINATEC (France)","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"LTM, CNRS (France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210128684"]},{"raw_affiliation_string":"Univ. Grenoble Alpes (France)","institution_ids":["https://openalex.org/I899635006"]},{"raw_affiliation_string":"Laboratoire des technologies de la micro\u00e9lectronique","institution_ids":["https://openalex.org/I4210128684"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010813881","display_name":"Sandrine Arnaud","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"S. Arnaud","raw_affiliation_strings":["CEA-LETI, MINATEC (France)","LTM, CNRS (France)","Univ. Grenoble Alpes (France)","Laboratoire des technologies de la micro\u00e9lectronique"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-LETI, MINATEC (France)","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"LTM, CNRS (France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210128684"]},{"raw_affiliation_string":"Univ. Grenoble Alpes (France)","institution_ids":["https://openalex.org/I899635006"]},{"raw_affiliation_string":"Laboratoire des technologies de la micro\u00e9lectronique","institution_ids":["https://openalex.org/I4210128684"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017402687","display_name":"Raluca Tiron","orcid":"https://orcid.org/0000-0002-4772-3295","observed_orcids":["https://orcid.org/0000-0002-4772-3295"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"R. Tiron","raw_affiliation_strings":["CEA-LETI, MINATEC (France)","Univ. Grenoble Alpes (France)","Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-LETI, MINATEC (France)","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"Univ. Grenoble Alpes (France)","institution_ids":["https://openalex.org/I899635006"]},{"raw_affiliation_string":"Commissariat \u00e0 l'\u00e9nergie atomique et aux \u00e9nergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5107338866","display_name":"Olivier Marconot","orcid":"https://orcid.org/0000-0003-1441-8806","observed_orcids":["https://orcid.org/0000-0003-1441-8806","https://orcid.org/0000-0002-7714-2037"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"O. Marconot","raw_affiliation_strings":["CEA INAC (France)","Univ. Grenoble Alpes (France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA INAC (France)","institution_ids":["https://openalex.org/I2738703131"]},{"raw_affiliation_string":"Univ. Grenoble Alpes (France)","institution_ids":["https://openalex.org/I899635006"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005567332","display_name":"D. Buttard","orcid":"https://orcid.org/0000-0002-3117-3559","observed_orcids":["https://orcid.org/0000-0002-3117-3559"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"D. Buttard","raw_affiliation_strings":["CEA INAC (France)","Univ. Grenoble Alpes (France)","Silicon Nanoelectronics Photonics and Structures"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA INAC (France)","institution_ids":["https://openalex.org/I2738703131"]},{"raw_affiliation_string":"Univ. Grenoble Alpes (France)","institution_ids":["https://openalex.org/I899635006"]},{"raw_affiliation_string":"Silicon Nanoelectronics Photonics and Structures","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5071547819","display_name":"M. Zelsmann","orcid":"https://orcid.org/0000-0002-7619-4871","observed_orcids":["https://orcid.org/0000-0002-7619-4871"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Zelsmann","raw_affiliation_strings":["CEA-LETI, MINATEC (France)","LTM, CNRS (France)","Univ. Grenoble Alpes (France)","Laboratoire des technologies de la micro\u00e9lectronique"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA-LETI, MINATEC (France)","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"LTM, CNRS (France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210128684"]},{"raw_affiliation_string":"Univ. Grenoble Alpes (France)","institution_ids":["https://openalex.org/I899635006"]},{"raw_affiliation_string":"Laboratoire des technologies de la micro\u00e9lectronique","institution_ids":["https://openalex.org/I4210128684"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.4827,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.76262879,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":"9777","issue":null,"first_page":"97771W","last_page":"97771W"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11471","display_name":"Block Copolymer Self-Assembly","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11471","display_name":"Block Copolymer Self-Assembly","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.0006000000284984708,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/directed-self-assembly","display_name":"directed self-assembly","score":0.9879999756813049},{"id":"https://openalex.org/keywords/block-copolymers","display_name":"block copolymers","score":0.8659999966621399},{"id":"https://openalex.org/keywords/hard-mask","display_name":"hard mask","score":0.47999998927116394},{"id":"https://openalex.org/keywords/trench-patterning","display_name":"trench patterning","score":0.625},{"id":"https://openalex.org/keywords/pattern-transfer","display_name":"pattern transfer","score":0.6940000057220459},{"id":"https://openalex.org/keywords/annealing","display_name":"annealing","score":0.800000011920929},{"id":"https://openalex.org/keywords/plasticizers","display_name":"plasticizers","score":0.7450000047683716},{"id":"https://openalex.org/keywords/photolithography","display_name":"photolithography","score":0.5339999794960022},{"id":"https://openalex.org/keywords/line-width-roughness","display_name":"line width roughness","score":0.7310000061988831},{"id":"https://openalex.org/keywords/line-edge-roughness","display_name":"line edge roughness","score":0.8140000104904175},{"id":"https://openalex.org/keywords/critical-dimension-uniformity","display_name":"critical dimension uniformity","score":0.6660000085830688},{"id":"https://openalex.org/keywords/gate-etching","display_name":"gate etching","score":0.5979999899864197}],"concepts":[{"id":"https://openalex.org/C15920480","wikidata":"https://www.wikidata.org/wiki/Q421281","display_name":"Copolymer","level":3,"score":0.8591784238815308},{"id":"https://openalex.org/C2777210771","wikidata":"https://www.wikidata.org/wiki/Q4927124","display_name":"Block (permutation group theory)","level":2,"score":0.5657556653022766},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5196655988693237},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3819133937358856},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.2248067557811737},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.16414490342140198},{"id":"https://openalex.org/C114614502","wikidata":"https://www.wikidata.org/wiki/Q76592","display_name":"Combinatorics","level":1,"score":0.0703279972076416},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.06154465675354004}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1117/12.2219312","doi":"https://doi.org/10.1117/12.2219312","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.2219312","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-01882740v1","doi":null,"is_oa":false,"landing_page_url":"https://univ-grenoble-alpes.hal.science/hal-01882740","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"SPIE Advanced Lithography conference \u2013 Alternative Lithographic Technologies, Feb 2016, San Jose, United States","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320320883","display_name":"Agence Nationale de la Recherche","ror":"https://ror.org/00rbzpz17"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W1850772087","https://openalex.org/W1970463505","https://openalex.org/W1976055919","https://openalex.org/W1998009021","https://openalex.org/W2021788318","https://openalex.org/W2057917400","https://openalex.org/W2072035380","https://openalex.org/W2073907457","https://openalex.org/W2081594082","https://openalex.org/W2086892109","https://openalex.org/W2101591539","https://openalex.org/W2114708340","https://openalex.org/W2146290512","https://openalex.org/W2162621384","https://openalex.org/W2249309959","https://openalex.org/W2318878680","https://openalex.org/W2330587475","https://openalex.org/W2332846641","https://openalex.org/W2333390581","https://openalex.org/W2333597786","https://openalex.org/W2480729124","https://openalex.org/W4239533284","https://openalex.org/W4239810327","https://openalex.org/W4251264148","https://openalex.org/W4293875001"],"related_works":["https://openalex.org/W2416470717","https://openalex.org/W1980586185","https://openalex.org/W4213403301","https://openalex.org/W2112329995","https://openalex.org/W2332846641","https://openalex.org/W2568763441","https://openalex.org/W2898648494","https://openalex.org/W3174420581","https://openalex.org/W2793425181","https://openalex.org/W2058879111"],"abstract_inverted_index":{"In":[0],"this":[1],"work,":[2],"we":[3,67],"present":[4],"completely":[5],"industry":[6],"adapted":[7],"processes":[8,32],"for":[9,37],"high-chi":[10],"PS-PDMS":[11,49],"block":[12],"copolymers.":[13],"DSA":[14],"was":[15,27],"performed":[16],"on":[17],"trenches":[18],"fabricated":[19],"within":[20],"standard":[21],"photolithography":[22],"stacks":[23],"and":[24,88],"pattern":[25],"transfer":[26],"made":[28],"by":[29,53],"using":[30],"etching":[31,39],"similar":[33],"to":[34],"those":[35],"used":[36],"gate":[38],"in":[40,60],"industry.":[41],"We":[42],"propose":[43],"the":[44,61,79,85,89,92],"alignment":[45],"of":[46,84,91],"two":[47],"different":[48],"(45.5kg/mol,":[50],"16kg/mol)":[51],"solely":[52],"thermal":[54],"annealing.":[55],"By":[56],"adding":[57],"plasticizer":[58],"molecules":[59],"high":[62],"molecular":[63],"weight":[64],"BCP":[65,94],"(45.5k),":[66],"have":[68],"not":[69],"only":[70],"avoided":[71],"solvent":[72],"vapor":[73],"annealing":[74],"but":[75],"also":[76],"reduced":[77],"significantly":[78],"processing":[80],"time.":[81],"The":[82],"properties":[83],"guiding":[86],"lines":[87],"quality":[90],"final":[93],"hard":[95],"mask":[96],"(CD":[97],"uniformity,":[98],"LWR,":[99],"LER)":[100],"were":[101],"investigated.":[102]},"counts_by_year":[{"year":2020,"cited_by_count":2},{"year":2018,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}