{"id":"https://openalex.org/W2312374557","doi":"https://doi.org/10.1166/jnn.2011.3723","title":"Novel Microcantilever Design for Versatile Mass Sensor Application","display_name":"Novel Microcantilever Design for Versatile Mass Sensor Application","publication_year":2011,"publication_date":"2011-03-14","ids":{"openalex":"https://openalex.org/W2312374557","doi":"https://doi.org/10.1166/jnn.2011.3723","mag":"2312374557","pmid":"https://pubmed.ncbi.nlm.nih.gov/21776680"},"language":"en","primary_location":{"id":"doi:10.1166/jnn.2011.3723","doi":"https://doi.org/10.1166/jnn.2011.3723","is_oa":false,"landing_page_url":"https://doi.org/10.1166/jnn.2011.3723","pdf_url":null,"source":{"id":"https://openalex.org/S133947007","display_name":"Journal of Nanoscience and Nanotechnology","issn_l":"1533-4880","issn":["1533-4880","1533-4899"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","poland-40"],"host_organization":"https://openalex.org/P4310321646","host_organization_name":"American Scientific Publishers","host_organization_lineage":["https://openalex.org/P4310321646"],"host_organization_lineage_names":["American Scientific Publishers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Nanoscience and Nanotechnology","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref","pubmed"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056125306","display_name":"J M Kim","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I51226738","display_name":"Dong-A University","ror":"https://ror.org/03qvtpc38","country_code":"KR","type":"education","lineage":["https://openalex.org/I51226738"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"J. M. Kim","raw_affiliation_strings":["Department of Chemical Engineering, Dong-A University, 840 Hadan-dong, Saha, Busan 604-714, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Chemical Engineering, Dong-A University, 840 Hadan-dong, Saha, Busan 604-714, Korea","institution_ids":["https://openalex.org/I51226738"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103487306","display_name":"Sue-min Chang","orcid":"https://orcid.org/0000-0003-3548-145X","observed_orcids":["https://orcid.org/0000-0003-3548-145X"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"S. M. Chang","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"H. Muramatsu","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H. Muramatsu","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"T. Ohashi","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"T. Ohashi","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072522191","display_name":"O. Matsuzawa","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"O. Matsuzawa","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076578534","display_name":"Yoshiharu Shirakawabe","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Y. Shirakawabe","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"I. H. Kim","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"I. H. Kim","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":null,"display_name":"W. S. Kim","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"W. S. Kim","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.224,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.66059672,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":93},"biblio":{"volume":"11","issue":"4","first_page":"3134","last_page":"3140"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9887999892234802,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9887999892234802,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.006899999920278788,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.00139999995008111,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microcantilever","display_name":"microcantilever","score":0.8600000143051147},{"id":"https://openalex.org/keywords/mass-sensors","display_name":"mass sensors","score":0.9750000238418579},{"id":"https://openalex.org/keywords/resonant-frequency-shift","display_name":"resonant frequency shift","score":0.8820000290870667},{"id":"https://openalex.org/keywords/cantilever-structures","display_name":"cantilever structures","score":0.5220000147819519}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.9881673455238342},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8239673972129822},{"id":"https://openalex.org/C192328126","wikidata":"https://www.wikidata.org/wiki/Q4514647","display_name":"Schematic","level":2,"score":0.5999317765235901},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5251554846763611},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.49280670285224915},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4684726297855377},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.19184479117393494},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.1478060781955719},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008365","descriptor_name":"Manometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D008365","descriptor_name":"Manometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D008365","descriptor_name":"Manometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008970","descriptor_name":"Molecular Weight","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D008970","descriptor_name":"Molecular Weight","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D008970","descriptor_name":"Molecular Weight","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D036103","descriptor_name":"Nanotechnology","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D036103","descriptor_name":"Nanotechnology","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D036103","descriptor_name":"Nanotechnology","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false}],"locations_count":2,"locations":[{"id":"doi:10.1166/jnn.2011.3723","doi":"https://doi.org/10.1166/jnn.2011.3723","is_oa":false,"landing_page_url":"https://doi.org/10.1166/jnn.2011.3723","pdf_url":null,"source":{"id":"https://openalex.org/S133947007","display_name":"Journal of Nanoscience and Nanotechnology","issn_l":"1533-4880","issn":["1533-4880","1533-4899"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","poland-40"],"host_organization":"https://openalex.org/P4310321646","host_organization_name":"American Scientific Publishers","host_organization_lineage":["https://openalex.org/P4310321646"],"host_organization_lineage_names":["American Scientific Publishers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Nanoscience and Nanotechnology","raw_type":"journal-article"},{"id":"pmid:21776680","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/21776680","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of nanoscience and nanotechnology","raw_type":"Journal Article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"id":"https://metadata.un.org/sdg/11","score":0.49000000953674316,"display_name":"Sustainable cities and communities"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4405139729","https://openalex.org/W2084800511","https://openalex.org/W2133532837","https://openalex.org/W2013368815","https://openalex.org/W246629076","https://openalex.org/W2056438536","https://openalex.org/W1979764111","https://openalex.org/W2167713931","https://openalex.org/W4412524192","https://openalex.org/W2000467084"],"abstract_inverted_index":{"This":[0],"study":[1],"presents":[2],"a":[3,17,34,42,53,67,81,113,117,121],"new":[4],"microcantilever":[5,19,118],"design":[6,58],"for":[7,21,66,86,94,119],"versatile":[8],"mass":[9,124],"sensor":[10,23,78,125],"application.":[11],"The":[12,64],"novel":[13],"comb-type":[14,39,88],"cantilever":[15,40,89,110],"provides":[16],"sensitive":[18,109,123],"structure":[20,115],"normal":[22,77],"application,":[24],"and":[25],"its":[26],"sensing":[27],"responses":[28],"are":[29],"compared":[30,91],"with":[31,92],"those":[32],"of":[33,59,76,101,116],"commercial":[35,49,96],"cantilever.":[36],"While":[37],"the":[38,48,57,60,74,87,95,99,102,107],"has":[41],"similar":[43],"total":[44],"surface":[45,62,104],"area":[46,105],"to":[47,72],"cantilever,":[50,97],"there":[51],"is":[52,126],"distinct":[54],"difference":[55],"in":[56,106],"regional":[61],"area.":[63],"results":[65],"static":[68],"charge":[69],"interaction,":[70],"used":[71],"compare":[73],"sensitivity":[75],"applications,":[79],"show":[80],"significant":[82],"resonant":[83],"frequency":[84],"change":[85],"when":[90],"that":[93],"indicating":[98],"importance":[100],"large":[103],"highly":[108,122],"region.":[111],"Thus,":[112],"schematic":[114],"fabricating":[120],"proposed.":[127]},"counts_by_year":[{"year":2020,"cited_by_count":1}],"updated_date":"2026-10-08T09:06:37.294493","created_date":"2016-06-24T00:00:00"}