{"id":"https://openalex.org/W2233438474","doi":"https://doi.org/10.1021/acsami.5b09454","title":"Femtosecond Nanostructuring of Glass with Optically Trapped Microspheres and Chemical Etching","display_name":"Femtosecond Nanostructuring of Glass with Optically Trapped Microspheres and Chemical Etching","publication_year":2015,"publication_date":"2015-11-24","ids":{"openalex":"https://openalex.org/W2233438474","doi":"https://doi.org/10.1021/acsami.5b09454","mag":"2233438474","pmid":"https://pubmed.ncbi.nlm.nih.gov/26600213"},"language":"en","primary_location":{"id":"doi:10.1021/acsami.5b09454","doi":"https://doi.org/10.1021/acsami.5b09454","is_oa":false,"landing_page_url":"https://doi.org/10.1021/acsami.5b09454","pdf_url":null,"source":{"id":"https://openalex.org/S164001016","display_name":"ACS Applied Materials & Interfaces","issn_l":"1944-8244","issn":["1944-8244","1944-8252"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-2","ki-jl-1","medline","norway-1","poland-200","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320006","host_organization_name":"American Chemical Society","host_organization_lineage":["https://openalex.org/P4310320006"],"host_organization_lineage_names":["American Chemical Society"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ACS Applied Materials & Interfaces","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","pubmed"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5057737761","display_name":"Aleksander M. Shakhov","orcid":"https://orcid.org/0000-0002-0958-2903","observed_orcids":["https://orcid.org/0000-0002-0958-2903"]},"institutions":[{"id":"https://openalex.org/I153845743","display_name":"Moscow Institute of Physics and Technology","ror":"https://ror.org/00v0z9322","country_code":"RU","type":"education","lineage":["https://openalex.org/I153845743"]},{"id":"https://openalex.org/I2801076587","display_name":"Semenov Institute of Chemical Physics","ror":"https://ror.org/01jemb993","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I2801076587","https://openalex.org/I4210145551"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"A. Shakhov","raw_affiliation_strings":["Moscow Institute of Physics and Technology, Institutskiy lane 9, Dolgoprudny, Moscow Region 141700, Russian Federation","Semenov Institute of Chemical Physics RAS, Kosygina st. 4, Moscow 119991, Russian Federation"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Moscow Institute of Physics and Technology, Institutskiy lane 9, Dolgoprudny, Moscow Region 141700, Russian Federation","institution_ids":["https://openalex.org/I153845743"]},{"raw_affiliation_string":"Semenov Institute of Chemical Physics RAS, Kosygina st. 4, Moscow 119991, Russian Federation","institution_ids":["https://openalex.org/I2801076587"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008161895","display_name":"Artyom A. Astafiev","orcid":"https://orcid.org/0000-0001-9269-414X","observed_orcids":["https://orcid.org/0000-0001-9269-414X"]},"institutions":[{"id":"https://openalex.org/I2801076587","display_name":"Semenov Institute of Chemical Physics","ror":"https://ror.org/01jemb993","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I2801076587","https://openalex.org/I4210145551"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"A. Astafiev","raw_affiliation_strings":["Semenov Institute of Chemical Physics RAS, Kosygina st. 4, Moscow 119991, Russian Federation"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Semenov Institute of Chemical Physics RAS, Kosygina st. 4, Moscow 119991, Russian Federation","institution_ids":["https://openalex.org/I2801076587"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030698677","display_name":"Alexander A. Gulin","orcid":"https://orcid.org/0000-0001-7117-4276","observed_orcids":["https://orcid.org/0000-0001-7117-4276"]},"institutions":[{"id":"https://openalex.org/I19880235","display_name":"Lomonosov Moscow State University","ror":"https://ror.org/010pmpe69","country_code":"RU","type":"education","lineage":["https://openalex.org/I19880235"]},{"id":"https://openalex.org/I2801076587","display_name":"Semenov Institute of Chemical Physics","ror":"https://ror.org/01jemb993","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I2801076587","https://openalex.org/I4210145551"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"A. Gulin","raw_affiliation_strings":["Department\rof Chemistry, Moscow State University, GSP-1, Leninskiye Gory 1-3, Moscow 119991, Russian Federation","Semenov Institute of Chemical Physics RAS, Kosygina st. 4, Moscow 119991, Russian Federation"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department\rof Chemistry, Moscow State University, GSP-1, Leninskiye Gory 1-3, Moscow 119991, Russian Federation","institution_ids":["https://openalex.org/I19880235"]},{"raw_affiliation_string":"Semenov Institute of Chemical Physics RAS, Kosygina st. 4, Moscow 119991, Russian Federation","institution_ids":["https://openalex.org/I2801076587"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5052628793","display_name":"Victor A. Nadtochenko","orcid":"https://orcid.org/0000-0002-6645-692X","observed_orcids":["https://orcid.org/0000-0002-6645-692X"]},"institutions":[{"id":"https://openalex.org/I19880235","display_name":"Lomonosov Moscow State University","ror":"https://ror.org/010pmpe69","country_code":"RU","type":"education","lineage":["https://openalex.org/I19880235"]},{"id":"https://openalex.org/I2801076587","display_name":"Semenov Institute of Chemical Physics","ror":"https://ror.org/01jemb993","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I2801076587","https://openalex.org/I4210145551"]},{"id":"https://openalex.org/I4210118280","display_name":"Institute of Problems of Chemical Physics","ror":"https://ror.org/02nknzn40","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210118280","https://openalex.org/I4210145551"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"V. Nadtochenko","raw_affiliation_strings":["Department\rof Chemistry, Moscow State University, GSP-1, Leninskiye Gory 1-3, Moscow 119991, Russian Federation","Institute of Problems of Chemical Physics RAS, Academician Semenov\ravenue 1, Chernogolovka, Moscow Region 142432, Russian Federation","Semenov Institute of Chemical Physics RAS, Kosygina st. 4, Moscow 119991, Russian Federation"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department\rof Chemistry, Moscow State University, GSP-1, Leninskiye Gory 1-3, Moscow 119991, Russian Federation","institution_ids":["https://openalex.org/I19880235"]},{"raw_affiliation_string":"Institute of Problems of Chemical Physics RAS, Academician Semenov\ravenue 1, Chernogolovka, Moscow Region 142432, Russian Federation","institution_ids":["https://openalex.org/I4210118280"]},{"raw_affiliation_string":"Semenov Institute of Chemical Physics RAS, Kosygina st. 4, Moscow 119991, Russian Federation","institution_ids":["https://openalex.org/I2801076587"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5057737761"],"corresponding_institution_ids":["https://openalex.org/I153845743","https://openalex.org/I2801076587"],"apc_list":{"value":4500,"currency":"USD","value_usd":4500},"apc_paid":null,"fwci":1.2995,"has_fulltext":false,"cited_by_count":16,"citation_normalized_percentile":{"value":0.82591689,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"7","issue":"49","first_page":"27467","last_page":"27472"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10566","display_name":"Laser-Matter Interactions and Applications","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/femtosecond-laser-processing","display_name":"femtosecond laser processing","score":0.8560000061988831},{"id":"https://openalex.org/keywords/optical-tweezers","display_name":"optical tweezers","score":0.9120000004768372},{"id":"https://openalex.org/keywords/borosilicate-glass","display_name":"borosilicate glass","score":0.9369999766349792},{"id":"https://openalex.org/keywords/selective-etching","display_name":"selective etching","score":0.6510000228881836},{"id":"https://openalex.org/keywords/koh-etching","display_name":"KOH etching","score":0.9139999747276306},{"id":"https://openalex.org/keywords/silica-microspheres","display_name":"silica microspheres","score":0.8059999942779541},{"id":"https://openalex.org/keywords/laser-affected-zone","display_name":"laser-affected zone","score":0.7049999833106995},{"id":"https://openalex.org/keywords/oxygen-deficiency","display_name":"oxygen deficiency","score":0.4869999885559082},{"id":"https://openalex.org/keywords/chemical-composition-changes","display_name":"chemical composition changes","score":0.43700000643730164},{"id":"https://openalex.org/keywords/nanopatterning","display_name":"nanopatterning","score":0.49300000071525574},{"id":"https://openalex.org/keywords/2d-materials","display_name":"two-dimensional materials","score":0.5960000157356262}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8909157514572144},{"id":"https://openalex.org/C167735695","wikidata":"https://www.wikidata.org/wiki/Q1777507","display_name":"Femtosecond","level":3,"score":0.8583290576934814},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.7198538780212402},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.7038600444793701},{"id":"https://openalex.org/C20198109","wikidata":"https://www.wikidata.org/wiki/Q1066633","display_name":"Optical tweezers","level":2,"score":0.7015388011932373},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.6875015497207642},{"id":"https://openalex.org/C206802598","wikidata":"https://www.wikidata.org/wiki/Q1422588","display_name":"Borosilicate glass","level":2,"score":0.623609721660614},{"id":"https://openalex.org/C206394296","wikidata":"https://www.wikidata.org/wiki/Q5567119","display_name":"Glass microsphere","level":3,"score":0.5143002867698669},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5012166500091553},{"id":"https://openalex.org/C138268822","wikidata":"https://www.wikidata.org/wiki/Q1051925","display_name":"Resolution (logic)","level":2,"score":0.4846680462360382},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4383120536804199},{"id":"https://openalex.org/C189942447","wikidata":"https://www.wikidata.org/wiki/Q61186","display_name":"Microsphere","level":2,"score":0.41945451498031616},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3784312605857849},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.11856517195701599},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.11034494638442993},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1021/acsami.5b09454","doi":"https://doi.org/10.1021/acsami.5b09454","is_oa":false,"landing_page_url":"https://doi.org/10.1021/acsami.5b09454","pdf_url":null,"source":{"id":"https://openalex.org/S164001016","display_name":"ACS Applied Materials & Interfaces","issn_l":"1944-8244","issn":["1944-8244","1944-8252"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-2","ki-jl-1","medline","norway-1","poland-200","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320006","host_organization_name":"American Chemical Society","host_organization_lineage":["https://openalex.org/P4310320006"],"host_organization_lineage_names":["American Chemical Society"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ACS Applied Materials & Interfaces","raw_type":"journal-article"},{"id":"pmid:26600213","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/26600213","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ACS applied materials & interfaces","raw_type":"Journal Article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G169475240","display_name":null,"funder_award_id":"13-02-12433 (ofi_m2)","funder_id":"https://openalex.org/F4320321079","funder_display_name":"Russian Foundation for Basic Research"},{"id":"https://openalex.org/G2471498506","display_name":null,"funder_award_id":"14-33-00017","funder_id":"https://openalex.org/F4320324099","funder_display_name":"Russian Science Foundation"},{"id":"https://openalex.org/G4061599590","display_name":null,"funder_award_id":"13-02-12433","funder_id":"https://openalex.org/F4320321079","funder_display_name":"Russian Foundation for Basic Research"},{"id":"https://openalex.org/G6664131873","display_name":null,"funder_award_id":"MK-5486.2014.2","funder_id":"https://openalex.org/F4320321912","funder_display_name":"Ministry of Education and Science of the Russian Federation"},{"id":"https://openalex.org/G7057650080","display_name":null,"funder_award_id":"program 1 2015","funder_id":"https://openalex.org/F4320334801","funder_display_name":"Russian Academy of Sciences"},{"id":"https://openalex.org/G7228791147","display_name":null,"funder_award_id":"14-03-00546 a","funder_id":"https://openalex.org/F4320321079","funder_display_name":"Russian Foundation for Basic Research"}],"funders":[{"id":"https://openalex.org/F4320321079","display_name":"Russian Foundation for Basic Research","ror":"https://ror.org/02mh1ke95"},{"id":"https://openalex.org/F4320321912","display_name":"Ministry of Education and Science of the Russian Federation","ror":"https://ror.org/00ghqgy32"},{"id":"https://openalex.org/F4320324099","display_name":"Russian Science Foundation","ror":"https://ror.org/03y2gwe85"},{"id":"https://openalex.org/F4320334801","display_name":"Russian Academy of Sciences","ror":"https://ror.org/05qrfxd25"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":30,"referenced_works":["https://openalex.org/W359356957","https://openalex.org/W1973370070","https://openalex.org/W1986781889","https://openalex.org/W1987580956","https://openalex.org/W1990628489","https://openalex.org/W1999312098","https://openalex.org/W2000208753","https://openalex.org/W2010830049","https://openalex.org/W2017780015","https://openalex.org/W2019023995","https://openalex.org/W2020295760","https://openalex.org/W2036078488","https://openalex.org/W2040434678","https://openalex.org/W2048659379","https://openalex.org/W2050009887","https://openalex.org/W2057355784","https://openalex.org/W2072368111","https://openalex.org/W2074920874","https://openalex.org/W2076430664","https://openalex.org/W2079325996","https://openalex.org/W2089123115","https://openalex.org/W2090572943","https://openalex.org/W2092995711","https://openalex.org/W2095340428","https://openalex.org/W2103110643","https://openalex.org/W2116191112","https://openalex.org/W2126890783","https://openalex.org/W2146655763","https://openalex.org/W2410704692","https://openalex.org/W2516987155"],"related_works":["https://openalex.org/W2945584781","https://openalex.org/W1972906075","https://openalex.org/W1831126253","https://openalex.org/W2364281481","https://openalex.org/W2095153085","https://openalex.org/W7098075026","https://openalex.org/W1872463636","https://openalex.org/W2022137949","https://openalex.org/W2998151091","https://openalex.org/W2783684250"],"abstract_inverted_index":{"Laser":[0],"processing":[1],"with":[2,34,45,85,96,107,121,138],"optically":[3,41],"trapped":[4,42],"microspheres":[5,43,63,122],"is":[6],"a":[7,16],"promising":[8],"tool":[9],"for":[10],"nanopatterning":[11],"at":[12,57],"subdiffraction-limited":[13,29],"resolution":[14,87,111],"in":[15,37,70,75,155],"wide":[17],"range":[18],"of":[19,31,40,93,130,149],"technological":[20],"and":[21,64,88,159],"biomedical":[22],"applications.":[23],"In":[24],"this":[25],"paper,":[26],"we":[27],"investigate":[28],"structuring":[30],"borosilicate":[32],"glass":[33,49,116,151],"femtosecond":[35],"pulses":[36,56],"the":[38,76,115,128,145],"near-field":[39],"combined":[44],"chemical":[46,157],"postprocessing.":[47],"The":[48],"surface":[50,117],"was":[51,136],"processed":[52],"by":[53,61,119,124],"single":[54],"laser":[55,131],"780":[58],"nm":[59,102,109],"focused":[60],"silica":[62],"then":[65],"subjected":[66],"to":[67],"selective":[68,134],"etching":[69,135,147],"KOH,":[71],"which":[72],"produced":[73],"pits":[74,95],"laser-affected":[77],"zones":[78],"(LAZs).":[79],"Chemical":[80],"postprocessing":[81],"allowed":[82],"obtaining":[83],"structures":[84,106],"better":[86],"reproducibility.":[89],"We":[90,142],"demonstrate":[91],"production":[92],"reproducible":[94],"diameters":[97],"as":[98,100],"small":[99],"70":[101],"(\u03bb/11).":[103],"Complex":[104],"two-dimensional":[105],"100":[108],"(\u03bb/8)":[110],"were":[112],"written":[113],"on":[114],"point":[118,120],"manipulated":[123],"optical":[125],"tweezers.":[126],"Furthermore,":[127],"mechanism":[129],"modification":[132],"underlying":[133],"investigated":[137],"mass":[139],"spectrum":[140],"analysis.":[141],"propose":[143],"that":[144],"increased":[146],"rate":[148],"laser-treated":[150],"results":[152],"from":[153],"changes":[154],"its":[156],"composition":[158],"oxygen":[160],"deficiency.":[161]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":3}],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2016-06-24T00:00:00"}