{"id":"https://openalex.org/W2216680485","doi":null,"title":"\ub514\uc2a4\ud50c\ub808\uc774 \uacf5\uc815\uc6a9 \uc720\ub3c4 \uacb0\ud569\ud615 \ud50c\ub77c\uc2a4\ub9c8 \uc2dc\uc2a4\ud15c\uc5d0\uc11c\uc758 \uc804\uc790\uae30\uc801 \ud2b9\uc131 \uc5f0\uad6c","display_name":"\ub514\uc2a4\ud50c\ub808\uc774 \uacf5\uc815\uc6a9 \uc720\ub3c4 \uacb0\ud569\ud615 \ud50c\ub77c\uc2a4\ub9c8 \uc2dc\uc2a4\ud15c\uc5d0\uc11c\uc758 \uc804\uc790\uae30\uc801 \ud2b9\uc131 \uc5f0\uad6c","publication_year":2014,"publication_date":"2014-02-01","ids":{"openalex":"https://openalex.org/W2216680485","mag":"2216680485"},"language":"ko","primary_location":{"id":"mag:2216680485","doi":null,"is_oa":false,"landing_page_url":"https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE02362354","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null},"volume":null,"type":"article","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5041146954","display_name":"\uc624\uc120\uadfc","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\uc624\uc120\uadfc","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074660970","display_name":"\uc774\uc601\uc900","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\uc774\uc601\uc900","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091200521","display_name":"\uae40\ubcd1\uc900","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\uae40\ubcd1\uc900","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014041817","display_name":"\uc804\uc7ac\ud64d","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\uc804\uc7ac\ud64d","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082766289","display_name":"\uc11c\uc885\ud604","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\uc11c\uc885\ud604","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5014794338","display_name":"\ucd5c\ud76c\ud658","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\ucd5c\ud76c\ud658","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.190967,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"2014","issue":"2","first_page":"257","last_page":"257"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9785000085830688,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9785000085830688,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.006599999964237213,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10642","display_name":"Atmospheric-Pressure Plasma Applications","score":0.0020000000949949026,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/inductively-coupled-plasma","display_name":"inductively coupled plasma","score":0.996999979019165},{"id":"https://openalex.org/keywords/display-manufacturing","display_name":"display manufacturing","score":0.5870000123977661},{"id":"https://openalex.org/keywords/electromagnetic-properties","display_name":"electromagnetic properties","score":0.8640000224113464},{"id":"https://openalex.org/keywords/antenna-arrays","display_name":"antenna arrays","score":0.6629999876022339},{"id":"https://openalex.org/keywords/argon-plasma","display_name":"argon plasma","score":0.7400000095367432},{"id":"https://openalex.org/keywords/electric-field","display_name":"electric field","score":0.5640000104904175},{"id":"https://openalex.org/keywords/magnetic-field","display_name":"magnetic field","score":1.0},{"id":"https://openalex.org/keywords/poynting-vector","display_name":"Poynting vector","score":0.9049999713897705},{"id":"https://openalex.org/keywords/plasma-simulation","display_name":"plasma simulation","score":0.515999972820282},{"id":"https://openalex.org/keywords/process-pressure","display_name":"process pressure","score":0.6039999723434448},{"id":"https://openalex.org/keywords/rf-power","display_name":"RF power","score":0.6759999990463257}],"concepts":[{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3423522710800171}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:2216680485","doi":null,"is_oa":false,"landing_page_url":"https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE02362354","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W3026661772","https://openalex.org/W2345734290","https://openalex.org/W1565976352","https://openalex.org/W2093565161","https://openalex.org/W1487095968","https://openalex.org/W2033489341","https://openalex.org/W1755507059","https://openalex.org/W3027121848","https://openalex.org/W2332041362","https://openalex.org/W3048577562"],"abstract_inverted_index":{"\ub514\uc2a4\ud50c\ub808\uc774":[0],"\uacf5\uc815\uc6a9":[1],"ICP":[2],"(Inductively":[3],"Coupled":[4],"Plasma)":[5],"\uc7a5\ube44\uc758":[6],"\uacf5\uc815\uc601\uc5ed\ubcc4":[7],"\uc804\uc790\uae30\uc801":[8],"\ud2b9\uc131\uc744":[9],"\ud30c\uc545\ud558\uae30\uc704\ud574":[10],"9\uac1c\uc758":[11],"\uc548\ud14c\ub098\uac00":[12],"\uc801\uc6a9\ub41c":[13],"3\ucc28\uc6d0":[14],"\uad6c\uc870\uc5d0\uc11c":[15],"Ar":[16],"\ud50c\ub77c\uc2a4\ub9c8\ub97c":[17],"\uc0ac\uc6a9\ud558\uc5ec":[18],"\uc2dc\ubbac\ub808\uc774\uc158":[19],"\ud558\uc600\ub2e4.":[20],"\uc548\ud14c\ub098\uc5d0":[21],"\uc778\uac00\ub41c":[22],"\uc804\ub958,":[23],"\uacf5\uc815\uc555\ub825,":[24],"power\ub4f1":[25],"\uacf5\uc815":[26],"\uc870\uac74\ubcc4\ub85c":[27],"\uc548\ud14c\ub098\ub85c\ubd80\ud130":[28],"\uc720\ub3c4\ub41c":[29],"\uc804\uae30\uc7a5\uacfc":[30],"\uc790\uae30\uc7a5\uc744":[31],"\uad6c\ud558\uace0,":[32],"\uc774\ub4e4\ub85c\ubd80\ud130":[33],"poynting's":[34],"t...":[35]},"counts_by_year":[],"updated_date":"2025-11-06T04:12:42.849631","created_date":"2016-06-24T00:00:00"}