{"id":"https://openalex.org/W2216398786","doi":"https://doi.org/10.4229/28theupvsec2013-1av.1.12","title":"The Effect of Temperature on the Growth of High Quality Al-Doped Zinc Oxide Thin Films by RF Magnetron Sputtering","display_name":"The Effect of Temperature on the Growth of High Quality Al-Doped Zinc Oxide Thin Films by RF Magnetron Sputtering","publication_year":2013,"publication_date":"2013-01-01","ids":{"openalex":"https://openalex.org/W2216398786","doi":"https://doi.org/10.4229/28theupvsec2013-1av.1.12","mag":"2216398786"},"language":"en","primary_location":{"id":"doi:10.4229/28theupvsec2013-1av.1.12","doi":"https://doi.org/10.4229/28theupvsec2013-1av.1.12","is_oa":true,"landing_page_url":"https://doi.org/10.4229/28theupvsec2013-1av.1.12","pdf_url":null,"source":{"id":"https://openalex.org/S7407053010","display_name":"EU PVSEC","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article-journal"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://doi.org/10.4229/28theupvsec2013-1av.1.12","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5112949437","display_name":"M. Mannir Aliyu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I885383172","display_name":"National University of Malaysia","ror":"https://ror.org/00bw8d226","country_code":"MY","type":"education","lineage":["https://openalex.org/I885383172"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Aliyu, M.M.","raw_affiliation_strings":["National University of Malaysia, Bangi, Malaysia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National University of Malaysia, Bangi, Malaysia","institution_ids":["https://openalex.org/I885383172"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032713423","display_name":"Kazi Sajedur Rahman","orcid":"https://orcid.org/0000-0002-2347-1521","observed_orcids":["https://orcid.org/0000-0002-2347-1521"]},"institutions":[{"id":"https://openalex.org/I885383172","display_name":"National University of Malaysia","ror":"https://ror.org/00bw8d226","country_code":"MY","type":"education","lineage":["https://openalex.org/I885383172"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Rahman, K.S.","raw_affiliation_strings":["National University of Malaysia, Bangi, Malaysia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National University of Malaysia, Bangi, Malaysia","institution_ids":["https://openalex.org/I885383172"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079442652","display_name":"Towhid Hossain Chowdhury","orcid":"https://orcid.org/0000-0001-8490-1276","observed_orcids":["https://orcid.org/0000-0001-8490-1276"]},"institutions":[{"id":"https://openalex.org/I931681460","display_name":"Universiti Tunku Abdul Rahman","ror":"https://ror.org/050pq4m56","country_code":"MY","type":"education","lineage":["https://openalex.org/I931681460"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Chowdhury, T.H.","raw_affiliation_strings":["Universiti Tunku Abdul Rahman, Kampar, Malaysia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universiti Tunku Abdul Rahman, Kampar, Malaysia","institution_ids":["https://openalex.org/I931681460"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007392073","display_name":"Fei Lu Siaw","orcid":"https://orcid.org/0000-0003-4885-7743","observed_orcids":["https://orcid.org/0000-0003-4885-7743"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Siaw, F.L.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062460830","display_name":"Kok\u2010Keong Chong","orcid":"https://orcid.org/0000-0002-7350-597X","observed_orcids":["https://orcid.org/0000-0002-7350-597X"]},"institutions":[{"id":"https://openalex.org/I74969885","display_name":"Southern University Bangladesh","ror":"https://ror.org/05bg0c903","country_code":"BD","type":"education","lineage":["https://openalex.org/I74969885"]}],"countries":["BD"],"is_corresponding":false,"raw_author_name":"Chong, K.-K.","raw_affiliation_strings":["Southern University, Chittagong, Bangladesh"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Southern University, Chittagong, Bangladesh","institution_ids":["https://openalex.org/I74969885"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048409881","display_name":"Kamaruzzaman Sopian","orcid":"https://orcid.org/0000-0002-4675-3927","observed_orcids":["https://orcid.org/0000-0002-4675-3927"]},"institutions":[{"id":"https://openalex.org/I885383172","display_name":"National University of Malaysia","ror":"https://ror.org/00bw8d226","country_code":"MY","type":"education","lineage":["https://openalex.org/I885383172"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Sopian, K.","raw_affiliation_strings":["National University of Malaysia, Bangi, Malaysia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National University of Malaysia, Bangi, Malaysia","institution_ids":["https://openalex.org/I885383172"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5050350023","display_name":"Nowshad Amin","orcid":"https://orcid.org/0000-0002-3250-1307","observed_orcids":["https://orcid.org/0000-0002-3250-1307"]},"institutions":[{"id":"https://openalex.org/I885383172","display_name":"National University of Malaysia","ror":"https://ror.org/00bw8d226","country_code":"MY","type":"education","lineage":["https://openalex.org/I885383172"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Amin, N.","raw_affiliation_strings":["National University of Malaysia, Bangi, Malaysia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National University of Malaysia, Bangi, Malaysia","institution_ids":["https://openalex.org/I885383172"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"200","last_page":"202"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.002199999988079071,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10590","display_name":"Chalcogenide Semiconductor Thin Films","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/aluminum-doped-zinc-oxide","display_name":"Al-doped ZnO","score":0.8870000243186951},{"id":"https://openalex.org/keywords/azo-thin-films","display_name":"AZO thin films","score":0.9150000214576721},{"id":"https://openalex.org/keywords/deposition-temperature","display_name":"deposition temperature","score":0.9190000295639038},{"id":"https://openalex.org/keywords/rf-magnetron-sputtering","display_name":"RF magnetron sputtering","score":0.9259999990463257},{"id":"https://openalex.org/keywords/transparent-conducting-oxides","display_name":"transparent conducting oxides","score":0.9629999995231628},{"id":"https://openalex.org/keywords/buffer-layer","display_name":"buffer layer","score":0.6579999923706055},{"id":"https://openalex.org/keywords/cdte-thin-film-solar-cells","display_name":"CdTe thin-film solar cells","score":0.8339999914169312},{"id":"https://openalex.org/keywords/cigs-solar-cells","display_name":"CIGS solar cells","score":1.0},{"id":"https://openalex.org/keywords/optical-transmittance","display_name":"optical transmittance","score":0.8610000014305115},{"id":"https://openalex.org/keywords/band-gap","display_name":"band gap","score":0.8190000057220459},{"id":"https://openalex.org/keywords/crystallinity","display_name":"crystallinity","score":0.8159999847412109},{"id":"https://openalex.org/keywords/electrical-properties","display_name":"electrical properties","score":0.5910000205039978},{"id":"https://openalex.org/keywords/film-morphology","display_name":"film morphology","score":0.5490000247955322}],"concepts":[{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.7407503724098206},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7238723635673523},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.6818796396255493},{"id":"https://openalex.org/C535196362","wikidata":"https://www.wikidata.org/wiki/Q758","display_name":"Zinc","level":2,"score":0.6802960634231567},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.6392237544059753},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.6260898113250732},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6259301900863647},{"id":"https://openalex.org/C2779530757","wikidata":"https://www.wikidata.org/wiki/Q1207505","display_name":"Quality (philosophy)","level":2,"score":0.5015342235565186},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.4697585105895996},{"id":"https://openalex.org/C2911124769","wikidata":"https://www.wikidata.org/wiki/Q10749005","display_name":"Zinc compounds","level":3,"score":0.43157482147216797},{"id":"https://openalex.org/C123408415","wikidata":"https://www.wikidata.org/wiki/Q194154","display_name":"Cavity magnetron","level":4,"score":0.41779541969299316},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.3261559307575226},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3238203525543213},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.18804073333740234},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07025405764579773},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.06147080659866333},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.4229/28theupvsec2013-1av.1.12","doi":"https://doi.org/10.4229/28theupvsec2013-1av.1.12","is_oa":true,"landing_page_url":"https://doi.org/10.4229/28theupvsec2013-1av.1.12","pdf_url":null,"source":{"id":"https://openalex.org/S7407053010","display_name":"EU PVSEC","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article-journal"},{"id":"mag:2216398786","doi":null,"is_oa":false,"landing_page_url":"https://www.eupvsec-proceedings.com/proceedings?paper=22791","pdf_url":null,"source":{"id":"https://openalex.org/S4306421319","display_name":"World Conference on Photovoltaic Energy Conversion","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"World Conference on Photovoltaic Energy Conversion","raw_type":null}],"best_oa_location":{"id":"doi:10.4229/28theupvsec2013-1av.1.12","doi":"https://doi.org/10.4229/28theupvsec2013-1av.1.12","is_oa":true,"landing_page_url":"https://doi.org/10.4229/28theupvsec2013-1av.1.12","pdf_url":null,"source":{"id":"https://openalex.org/S7407053010","display_name":"EU PVSEC","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article-journal"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.5690000057220459,"display_name":"Affordable and clean energy"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2058979442","https://openalex.org/W1969279744","https://openalex.org/W3016149241","https://openalex.org/W2087147666","https://openalex.org/W2042522071","https://openalex.org/W1976113154","https://openalex.org/W2092130542","https://openalex.org/W2285189056","https://openalex.org/W2384312512","https://openalex.org/W2087988310"],"abstract_inverted_index":{"Al-doped":[0],"zinc":[1],"oxide":[2,8],"is":[3],"a":[4],"popular":[5],"transparent":[6],"conducting":[7],"material":[9,41],"commonly":[10],"used":[11,115,136],"in":[12,97,106,119,142],"thin":[13,123],"film":[14,124,130],"solar":[15,125],"cells":[16],"as":[17,116,137],"front":[18,138],"contact":[19,139],"or":[20],"buffer":[21,117],"layer.":[22],"In":[23],"this":[24],"work,":[25],"we":[26],"attempt":[27],"to":[28,68,113],"investigate":[29],"and":[30,34,52,76,94,121],"assess":[31],"the":[32,40,56,62,73,88,98],"impact":[33],"significance":[35],"of":[36,43,55,87,100],"deposition":[37],"temperature":[38,64,67],"on":[39],"properties":[42],"AZO":[44],"by":[45,60],"RF":[46],"sputtering":[47],"technique.":[48],"The":[49,84],"structural,":[50],"optical":[51,85],"electrical":[53,77],"behaviors":[54],"films":[57,89,109],"were":[58],"studied":[59],"varying":[61],"substrate":[63],"from":[65],"room":[66],"500oC.":[69],"Results":[70],"show":[71],"that":[72],"morphology,":[74],"crystallinity":[75],"indices":[78],"all":[79],"improve":[80],"with":[81],"increasing":[82],"temperature.":[83],"characteristics":[86],"include":[90],"high":[91],"transmittance":[92],"(>90%)":[93],"bandgap":[95],"energy":[96],"range":[99],"3.5":[101],"\u2013":[102],"3.8":[103],"eV.":[104],"All":[105],"all,":[107],"these":[108,143],"are":[110],"found":[111],"suitable":[112],"be":[114,135],"layer":[118,141],"CdTe":[120],"CIGS":[122],"cells,":[126],"while":[127],"at":[128],"higher":[129],"thicknesses,":[131],"they":[132],"can":[133],"equally":[134],"TCO":[140],"cells.":[144]},"counts_by_year":[],"updated_date":"2026-10-08T09:06:37.294493","created_date":"2016-06-24T00:00:00"}