{"id":"https://openalex.org/W2189490954","doi":null,"title":"Characterization of an AlGaN/GaN Electrostatically Actuated Cantilever using Finite Element Method","display_name":"Characterization of an AlGaN/GaN Electrostatically Actuated Cantilever using Finite Element Method","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W2189490954","mag":"2189490954"},"language":"en","primary_location":{"id":"mag:2189490954","doi":null,"is_oa":false,"landing_page_url":"http://br.comsol.com/paper/download/62937/deroller_presentation.pdf","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null},"volume":null,"type":"article","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5062076868","display_name":"Nicholas DeRoller","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I155781252","display_name":"University of South Carolina","ror":"https://ror.org/02b6qw903","country_code":"US","type":"education","lineage":["https://openalex.org/I155781252"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Nicholas DeRoller","raw_affiliation_strings":["UNIVERSITY OF SOUTH CAROLINA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"UNIVERSITY OF SOUTH CAROLINA","institution_ids":["https://openalex.org/I155781252"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083726084","display_name":"Muhammad Qazi","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Muhammad Qazi","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055280461","display_name":"Jie Liu","orcid":"https://orcid.org/0000-0002-8140-9144","observed_orcids":["https://orcid.org/0000-0002-8140-9144"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jie Liu","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-8140-9144","affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5035874660","display_name":"Goutam Koley","orcid":"https://orcid.org/0009-0004-0505-0485","observed_orcids":["https://orcid.org/0009-0004-0505-0485"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Goutam Koley","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2448,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.60466486,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/algan-gan-hfet","display_name":"AlGaN/GaN HFET","score":0.8939999938011169},{"id":"https://openalex.org/keywords/mems","display_name":"MEMS","score":0.6629999876022339},{"id":"https://openalex.org/keywords/three-dimensional-finite-element-model","display_name":"three-dimensional finite element model","score":0.781000018119812},{"id":"https://openalex.org/keywords/operating-frequency","display_name":"operating frequency","score":0.5879999995231628},{"id":"https://openalex.org/keywords/electrostatic-response","display_name":"electrostatic response","score":0.9300000071525574},{"id":"https://openalex.org/keywords/cantilever-geometry","display_name":"cantilever geometry","score":0.4399999976158142}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.9626514315605164},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.8728303909301758},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6817269921302795},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.5467658042907715},{"id":"https://openalex.org/C45374587","wikidata":"https://www.wikidata.org/wiki/Q12525525","display_name":"Computation","level":2,"score":0.46813687682151794},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.454344242811203},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.25346434116363525},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2358916699886322},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.21598246693611145},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.17410853505134583},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.11366546154022217},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:2189490954","doi":null,"is_oa":false,"landing_page_url":"http://br.comsol.com/paper/download/62937/deroller_presentation.pdf","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W61027077","https://openalex.org/W1991000354","https://openalex.org/W1994151168","https://openalex.org/W2026007350","https://openalex.org/W2034636057","https://openalex.org/W2061543408","https://openalex.org/W2079217369","https://openalex.org/W2087508572","https://openalex.org/W2096987181","https://openalex.org/W2113488710","https://openalex.org/W2139228516","https://openalex.org/W2149562261"],"related_works":["https://openalex.org/W2999003107","https://openalex.org/W2034039540","https://openalex.org/W2935183956","https://openalex.org/W2027917822","https://openalex.org/W1993711401","https://openalex.org/W2057789046","https://openalex.org/W2114618702","https://openalex.org/W2002161886","https://openalex.org/W2026404350","https://openalex.org/W2578219048"],"abstract_inverted_index":{"A":[0],"3D":[1,104],"model":[2],"of":[3,100],"an":[4,23],"electrostatically":[5],"actuated":[6],"micro":[7],"cantilever":[8,52,76],"has":[9,22],"been":[10],"developed":[11],"for":[12],"characterization":[13],"using":[14],"the":[15,47,75,78],"finite":[16],"element":[17],"method":[18],"(FEM).":[19],"The":[20,95],"microcantilever":[21],"AlGaN/GaN":[24,48],"HFET":[25],"embedded":[26],"on":[27],"its":[28,39],"base.":[29],"Through":[30],"various":[31],"FEM":[32,105],"simulations":[33],"we":[34],"are":[35],"able":[36],"to":[37,88],"determine":[38],"operating":[40],"frequency,":[41],"electrostatic":[42],"response,":[43],"and":[44,77,82,92],"strains":[45],"about":[46],"interface.":[49],"This":[50],"simulated":[51],"system":[53],"is":[54,67,85],"more":[55,107],"complex":[56],"than":[57],"most":[58],"because":[59],"it":[60],"incorporates":[61],"very":[62],"thin":[63,79],"subdomains.":[64],"Since":[65],"there":[66],"such":[68],"a":[69],"large":[70],"difference":[71],"in":[72],"scale":[73],"between":[74],"films,":[80],"mapped":[81],"swept":[83],"meshing":[84],"used":[86],"heavily":[87],"reduce":[89],"memory":[90],"requirements":[91],"computation":[93],"time.":[94],"complex,":[96],"asymmetric":[97],"top":[98],"geometry":[99],"this":[101],"structure":[102],"makes":[103],"simulation":[106],"desirable":[108],"over":[109],"standard":[110],"PDE":[111],"based":[112],"analysis.":[113]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-09-21T07:43:02.447757","created_date":"2016-06-24T00:00:00"}