{"id":"https://openalex.org/W2187359754","doi":null,"title":"A 45nmLogicTechnology withHigh-k+Metal GateTransistors, Strained Silicon, 9CuInterconnect Layers, 193nmDryPatterning, and100%Pb-free Packaging","display_name":"A 45nmLogicTechnology withHigh-k+Metal GateTransistors, Strained Silicon, 9CuInterconnect Layers, 193nmDryPatterning, and100%Pb-free Packaging","publication_year":2007,"publication_date":"2007-01-01","ids":{"openalex":"https://openalex.org/W2187359754","mag":"2187359754"},"language":"en","primary_location":{"id":"mag:2187359754","doi":null,"is_oa":false,"landing_page_url":"https://ieeexplore.ieee.org/abstract/document/4418914","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null},"volume":null,"type":"article","indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5043092503","display_name":"K. Mistry","orcid":"https://orcid.org/0000-0001-6472-599X","observed_orcids":["https://orcid.org/0000-0001-6472-599X"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"K. Mistry","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"C. C. Allen","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"C. C. Allen","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057943957","display_name":"Chris Auth","orcid":"https://orcid.org/0009-0002-9196-2098","observed_orcids":["https://orcid.org/0009-0002-9196-2098"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"C. Auth","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0009-0002-9196-2098","affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"Brian Beattie","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Brian Beattie","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039475064","display_name":"D. Bergstrom","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"D. Bergstrom","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038804907","display_name":"M. C. Bost","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Bost","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000039813","display_name":"Mark Brazier","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Brazier","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"Markus J. Buehler","orcid":"https://orcid.org/0000-0002-4173-9659","observed_orcids":["https://orcid.org/0000-0002-4173-9659"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Markus J. Buehler","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-4173-9659","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067002561","display_name":"A. Cappellani","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"A. Cappellani","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109867336","display_name":"Robert S. Chau","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"R. Chau","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102774114","display_name":"Changhwan Choi","orcid":"https://orcid.org/0000-0002-8386-3885","observed_orcids":["https://orcid.org/0000-0002-8386-3885"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Changhwan Choi","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-8386-3885","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103177853","display_name":"G. Ding","orcid":"https://orcid.org/0009-0008-0697-9332","observed_orcids":["https://orcid.org/0009-0008-0697-9332"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"G. Ding","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0009-0008-0697-9332","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112914605","display_name":"K. Fischer","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"K. Fischer","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075781072","display_name":"Tahir Ghani","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"T. Ghani","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113735992","display_name":"R. Grover","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"R. Grover","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101675586","display_name":"Weihua Han","orcid":"https://orcid.org/0000-0003-4590-3820","observed_orcids":["https://orcid.org/0000-0003-4590-3820"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Weihua Han","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0003-4590-3820","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087680432","display_name":"Dennis G. Hanken","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Dennis G. Hanken","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060170978","display_name":"M. Hattendorf","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Hattendorf","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062266688","display_name":"J. Hicks","orcid":"https://orcid.org/0000-0002-7480-0719","observed_orcids":["https://orcid.org/0000-0002-7480-0719"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Hicks","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-7480-0719","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078315140","display_name":"R. Huessner","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"R. Huessner","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039387792","display_name":"Doug B. Ingerly","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"D. Ingerly","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023812483","display_name":"Pulkit Jain","orcid":"https://orcid.org/0000-0001-5708-9761","observed_orcids":["https://orcid.org/0000-0001-5708-9761"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Pulkit Jain","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-5708-9761","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082818620","display_name":"R. James","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"R. James","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067948521","display_name":"Lain\u2010Jong Li","orcid":"https://orcid.org/0000-0002-4059-7783","observed_orcids":["https://orcid.org/0000-0002-4059-7783"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Lain\u2010Jong Li","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-4059-7783","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030801075","display_name":"Shalik Ram Joshi","orcid":"https://orcid.org/0000-0002-3819-7836","observed_orcids":["https://orcid.org/0000-0002-3819-7836"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Shalik Ram Joshi","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056790935","display_name":"C. Kenyon","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"C. Kenyon","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042828809","display_name":"Kelin J. Kuhn","orcid":"https://orcid.org/0009-0001-8908-0347","observed_orcids":["https://orcid.org/0009-0001-8908-0347"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kelin J. Kuhn","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049520187","display_name":"Kyung Wook Lee","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kyung Wook Lee","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054455079","display_name":"H. Liu","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H. Liu","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040973208","display_name":"Jose A. Maiz","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Maiz","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010236237","display_name":"Brian L. McIntyre","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"B. McIntyre","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"Peter C. Moon","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Peter C. Moon","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043484371","display_name":"Jan M. Neirynck","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Neirynck","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010124316","display_name":"Sangwoo Pae","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Sangwoo Pae","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110118018","display_name":"C. Parker","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"C. Parker","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025052313","display_name":"D. Parsons","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"D. Parsons","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085027810","display_name":"C. Prasad","orcid":"https://orcid.org/0000-0001-8786-5389","observed_orcids":["https://orcid.org/0000-0001-8786-5389"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"C. Prasad","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-8786-5389","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089458496","display_name":"Leonard C. Pipes","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Leonard C. Pipes","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"M. B. Prince","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. B. Prince","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077642267","display_name":"P. Ranade","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"P. Ranade","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"T.E. Reynolds","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"T.E. Reynolds","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034915709","display_name":"J. Sandford","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Sandford","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043208867","display_name":"L. Shifren","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"L. Shifren","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029034818","display_name":"Javier Sebasti\u00e1n","orcid":"https://orcid.org/0000-0002-9717-866X","observed_orcids":["https://orcid.org/0000-0002-9717-866X"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Sebasti\u00e1n","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019600134","display_name":"J. V. Seiple","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. V. Seiple","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"Dan Simon","orcid":"https://orcid.org/0000-0002-0115-5341","observed_orcids":["https://orcid.org/0000-0002-0115-5341"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Dan Simon","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-0115-5341","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112033468","display_name":"S. Sivakumar","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"S. Sivakumar","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109866740","display_name":"P. Smith","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"P. Smith","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"Christopher W. Thomas","orcid":"https://orcid.org/0000-0001-5371-7257","observed_orcids":["https://orcid.org/0000-0001-5371-7257"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Christopher W. Thomas","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-5371-7257","affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075663643","display_name":"T. Troeger","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"T. Troeger","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084992034","display_name":"Peter Vandervoorn","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"P. Vandervoorn","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"Samuel Williams","orcid":"https://orcid.org/0000-0002-8327-5717","observed_orcids":["https://orcid.org/0000-0002-8327-5717"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Samuel Williams","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-8327-5717","affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5034192487","display_name":"Keith Zawadzki","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"K. Zawadzki","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.23030062,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9307000041007996,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9307000041007996,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.04149999842047691,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.011300000362098217,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/high-k-dielectrics","display_name":"high-k dielectrics","score":0.7609999775886536},{"id":"https://openalex.org/keywords/strained-silicon","display_name":"strained silicon","score":0.8429999947547913},{"id":"https://openalex.org/keywords/copper-interconnects","display_name":"copper interconnects","score":0.8970000147819519},{"id":"https://openalex.org/keywords/sram-arrays","display_name":"SRAM arrays","score":0.7519999742507935},{"id":"https://openalex.org/keywords/drive-current","display_name":"drive current","score":0.6800000071525574},{"id":"https://openalex.org/keywords/process-yield","display_name":"process yield","score":0.7540000081062317},{"id":"https://openalex.org/keywords/reliability","display_name":"reliability","score":0.4580000042915344},{"id":"https://openalex.org/keywords/microprocessors","display_name":"microprocessors","score":0.5550000071525574}],"concepts":[{"id":"https://openalex.org/C123745756","wikidata":"https://www.wikidata.org/wiki/Q1665949","display_name":"Interconnection","level":2,"score":0.6808983087539673},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6616790890693665},{"id":"https://openalex.org/C9395851","wikidata":"https://www.wikidata.org/wiki/Q177929","display_name":"Stack (abstract data type)","level":2,"score":0.6233766078948975},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5905744433403015},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5699407458305359},{"id":"https://openalex.org/C155310634","wikidata":"https://www.wikidata.org/wiki/Q1852785","display_name":"Trench","level":3,"score":0.4853626489639282},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.451321542263031},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3937756419181824},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.20424777269363403},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.20257705450057983},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.18149685859680176},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.16946882009506226},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.09943276643753052},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:2187359754","doi":null,"is_oa":false,"landing_page_url":"https://ieeexplore.ieee.org/abstract/document/4418914","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.651199996471405}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2098958982","https://openalex.org/W7096113300","https://openalex.org/W2097207701","https://openalex.org/W2096142955","https://openalex.org/W2044443802","https://openalex.org/W2133712779","https://openalex.org/W2148720570","https://openalex.org/W1972365898","https://openalex.org/W1499398507","https://openalex.org/W2056737097"],"abstract_inverted_index":{"A":[0],"45nmlogic":[1],"technology":[2],"isdescribed":[3],"that":[4],"forthefirst":[5],"time":[6],"incorporates":[7],"high-k":[8,19],"\u00b1metal":[9],"gate":[10],"transistors":[11],"inahigh":[12],"volume":[13],"manufacturing":[14],"process.":[15],"Thetransistors":[16],"feature":[17],"1.OnmBOT6":[18],"gatedielectric,":[20],"dualbandedgeworkfunction":[21],"metal":[22],"gates":[23],"andthird":[24],"generation":[25],"strained":[26],"silicon,":[27],"resulting":[28],"inthe":[29],"highest":[30],"drive":[31],"currents":[32],"yetreported":[33],"forNMOS":[34],"andPMOS.":[35],"Thetechnology":[36],"alsofeatures":[37],"trench":[38],"contact":[39],"basedlocal":[40],"routing,":[41],"9layers":[42],"ofcopper":[43],"interconnect":[44],"withlow-k":[45],"ILD,low":[46],"cost193nmdrypatterning,":[47],"and1000o":[48],"Pb-free":[49],"packaging.":[50],"Process":[51],"yield,":[52],"performance":[53],"andreliability":[54],"aredemonstrated":[55],"on153MbSRAM":[56],"arrays":[57],"withSRAM":[58],"cell":[59],"size":[60],"of0.346gtm2,":[61],"Fig.":[62],"2TEMofHigh-k":[63],"+Metal":[64],"Gatetransistor":[65],"stack":[66],"andonmultiple":[67],"microprocessors.":[68]},"counts_by_year":[],"updated_date":"2026-10-14T16:39:01.820549","created_date":"2016-06-24T00:00:00"}