{"id":"https://openalex.org/W2170626701","doi":"https://doi.org/10.1116/1.588618","title":"Fabrication of metal\u2013oxide\u2013semiconductor devices with extreme ultraviolet lithography","display_name":"Fabrication of metal\u2013oxide\u2013semiconductor devices with extreme ultraviolet lithography","publication_year":1996,"publication_date":"1996-11-01","ids":{"openalex":"https://openalex.org/W2170626701","doi":"https://doi.org/10.1116/1.588618","mag":"2170626701"},"language":"en","primary_location":{"id":"doi:10.1116/1.588618","doi":"https://doi.org/10.1116/1.588618","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.588618","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100858519","display_name":"K. B. Nguyen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I192454743","display_name":"Sandia National Laboratories California","ror":"https://ror.org/058m7ey48","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I192454743","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. B. Nguyen","raw_affiliation_strings":["Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551","institution_ids":["https://openalex.org/I192454743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110028882","display_name":"G. F. Cardinale","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I192454743","display_name":"Sandia National Laboratories California","ror":"https://ror.org/058m7ey48","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I192454743","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"G. F. Cardinale","raw_affiliation_strings":["Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551","institution_ids":["https://openalex.org/I192454743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004679976","display_name":"Daniel A. Tichenor","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I192454743","display_name":"Sandia National Laboratories California","ror":"https://ror.org/058m7ey48","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I192454743","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. A. Tichenor","raw_affiliation_strings":["Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551","institution_ids":["https://openalex.org/I192454743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063818929","display_name":"Glenn D. Kubiak","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I192454743","display_name":"Sandia National Laboratories California","ror":"https://ror.org/058m7ey48","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I192454743","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"G. D. Kubiak","raw_affiliation_strings":["Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551","institution_ids":["https://openalex.org/I192454743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017507094","display_name":"Kurt W. Berger","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I192454743","display_name":"Sandia National Laboratories California","ror":"https://ror.org/058m7ey48","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I192454743","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. Berger","raw_affiliation_strings":["Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551","institution_ids":["https://openalex.org/I192454743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063373946","display_name":"Avijit K. Ray-Chaudhuri","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I192454743","display_name":"Sandia National Laboratories California","ror":"https://ror.org/058m7ey48","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I192454743","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. K. Ray-Chaudhuri","raw_affiliation_strings":["Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551","institution_ids":["https://openalex.org/I192454743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033956519","display_name":"Yon E. Perras","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I192454743","display_name":"Sandia National Laboratories California","ror":"https://ror.org/058m7ey48","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I192454743","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Y. Perras","raw_affiliation_strings":["Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551","institution_ids":["https://openalex.org/I192454743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004211474","display_name":"Steven J. Haney","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I192454743","display_name":"Sandia National Laboratories California","ror":"https://ror.org/058m7ey48","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I192454743","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. J. Haney","raw_affiliation_strings":["Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551","institution_ids":["https://openalex.org/I192454743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015787257","display_name":"Rodney P. Nissen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I192454743","display_name":"Sandia National Laboratories California","ror":"https://ror.org/058m7ey48","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I192454743","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Nissen","raw_affiliation_strings":["Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551","institution_ids":["https://openalex.org/I192454743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033961673","display_name":"Kevin D. Krenz","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I192454743","display_name":"Sandia National Laboratories California","ror":"https://ror.org/058m7ey48","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I192454743","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. Krenz","raw_affiliation_strings":["Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551","institution_ids":["https://openalex.org/I192454743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088767053","display_name":"Richard H. Stulen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I192454743","display_name":"Sandia National Laboratories California","ror":"https://ror.org/058m7ey48","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I192454743","https://openalex.org/I198811213","https://openalex.org/I4210104735"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. H. Stulen","raw_affiliation_strings":["Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Sandia National Laboratories, P.O. Box 969, MS 9409, Livermore, California 94551","institution_ids":["https://openalex.org/I192454743"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006008970","display_name":"Hiroshi Fujioka","orcid":"https://orcid.org/0000-0001-7242-4249","observed_orcids":["https://orcid.org/0000-0001-7242-4249"]},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"H. Fujioka","raw_affiliation_strings":["University of California, Berkeley, Cory Hall, Berkeley, California 94720"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of California, Berkeley, Cory Hall, Berkeley, California 94720","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058605789","display_name":"Chenming Calvin Hu","orcid":"https://orcid.org/0000-0003-0836-6296","observed_orcids":["https://orcid.org/0000-0003-0836-6296","https://orcid.org/0009-0000-9599-3401"]},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. Hu","raw_affiliation_strings":["University of California, Berkeley, Cory Hall, Berkeley, California 94720"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of California, Berkeley, Cory Hall, Berkeley, California 94720","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018019857","display_name":"Jeffrey Bokor A","orcid":"https://orcid.org/0000-0002-4541-0156","observed_orcids":["https://orcid.org/0000-0002-4541-0156"]},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Bokor","raw_affiliation_strings":["University of California, Berkeley, Cory Hall, Berkeley, California 94720"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of California, Berkeley, Cory Hall, Berkeley, California 94720","institution_ids":["https://openalex.org/I95457486"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064846445","display_name":"D. M. Tennant","orcid":"https://orcid.org/0000-0002-9575-3368","observed_orcids":["https://orcid.org/0000-0002-9575-3368"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"D. M. Tennant","raw_affiliation_strings":["Bell Laboratories/Lucent Technologies, Holmdel, New Jersey 07733","Murray Hill, New Jersey 07974"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Bell Laboratories/Lucent Technologies, Holmdel, New Jersey 07733","institution_ids":[]},{"raw_affiliation_string":"Murray Hill, New Jersey 07974","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108537676","display_name":"Linus A. Fetter","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"L. A. Fetter","raw_affiliation_strings":["Bell Laboratories/Lucent Technologies, Holmdel, New Jersey 07733","Murray Hill, New Jersey 07974"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Bell Laboratories/Lucent Technologies, Holmdel, New Jersey 07733","institution_ids":[]},{"raw_affiliation_string":"Murray Hill, New Jersey 07974","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.9325,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.70946781,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":"14","issue":"6","first_page":"4188","last_page":"4192"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/metal-oxide-semiconductor-devices","display_name":"MOS devices","score":0.8640000224113464},{"id":"https://openalex.org/keywords/euv-lithography","display_name":"EUV lithography","score":0.9089999794960022},{"id":"https://openalex.org/keywords/gate-length","display_name":"gate length","score":0.6480000019073486},{"id":"https://openalex.org/keywords/device-fabrication","display_name":"device fabrication","score":0.6269999742507935},{"id":"https://openalex.org/keywords/alignment-strategies","display_name":"alignment strategies","score":0.6259999871253967},{"id":"https://openalex.org/keywords/photomask-fabrication","display_name":"photomask fabrication","score":0.9760000109672546},{"id":"https://openalex.org/keywords/device-characteristics","display_name":"device characteristics","score":0.925000011920929}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.8865659236907959},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.7793357968330383},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7497183680534363},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6179670691490173},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.5150406360626221},{"id":"https://openalex.org/C2776798109","wikidata":"https://www.wikidata.org/wiki/Q11391","display_name":"Ultraviolet","level":2,"score":0.512257993221283},{"id":"https://openalex.org/C162996421","wikidata":"https://www.wikidata.org/wiki/Q371965","display_name":"Extreme ultraviolet lithography","level":2,"score":0.4699894189834595},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.46510419249534607},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.4638092517852783},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.447887122631073},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.438295841217041},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.10255342721939087},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07262644171714783},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.588618","doi":"https://doi.org/10.1116/1.588618","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.588618","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W602425880"],"related_works":["https://openalex.org/W4320930010","https://openalex.org/W1992449797","https://openalex.org/W2111541651","https://openalex.org/W2001033776","https://openalex.org/W2028336334","https://openalex.org/W2007394233","https://openalex.org/W1989435016","https://openalex.org/W1965812563","https://openalex.org/W2136254199","https://openalex.org/W2005982281"],"abstract_inverted_index":{"This":[0],"article":[1],"reports":[2],"results":[3],"from":[4],"the":[5],"successful":[6],"fabrication":[7],"of":[8,22],"metal\u2013oxide\u2013semiconductor":[9],"(MOS)":[10],"devices":[11],"with":[12,19],"extreme":[13],"ultraviolet":[14],"lithography.":[15],"n-type":[16],"MOS":[17],"transistors":[18],"gate":[20],"lengths":[21],"0.1":[23],"\u03bcm":[24],"were":[25],"fabricated":[26],"and":[27,39],"demonstrated":[28],"good":[29],"device":[30,40],"characteristics.":[31],"The":[32],"alignment":[33],"strategy,":[34],"mask":[35,37],"layout,":[36],"fabrication,":[38],"characteristics":[41],"will":[42],"be":[43],"reported.":[44]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1}],"updated_date":"2026-10-17T09:40:24.721904","created_date":"2016-06-24T00:00:00"}