{"id":"https://openalex.org/W2167330401","doi":"https://doi.org/10.1111/j.1151-2916.1995.tb08485.x","title":"Effects of Temperature and Reagent Concentration on the Morphology of Chemically Vapor Deposited \u03b2\u2010Ta 2 O 5","display_name":"Effects of Temperature and Reagent Concentration on the Morphology of Chemically Vapor Deposited \u03b2\u2010Ta 2 O 5","publication_year":1995,"publication_date":"1995-05-01","ids":{"openalex":"https://openalex.org/W2167330401","doi":"https://doi.org/10.1111/j.1151-2916.1995.tb08485.x","mag":"2167330401"},"language":"en","primary_location":{"id":"doi:10.1111/j.1151-2916.1995.tb08485.x","doi":"https://doi.org/10.1111/j.1151-2916.1995.tb08485.x","is_oa":false,"landing_page_url":"https://doi.org/10.1111/j.1151-2916.1995.tb08485.x","pdf_url":null,"source":{"id":"https://openalex.org/S53162366","display_name":"Journal of the American Ceramic Society","issn_l":"0002-7820","issn":["0002-7820","1551-2916"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-2","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of the American Ceramic Society","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5109426460","display_name":"Yong Woon Bae","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1289243028","display_name":"Oak Ridge National Laboratory","ror":"https://ror.org/01qz5mb56","country_code":"US","type":"facility","lineage":["https://openalex.org/I1289243028","https://openalex.org/I1330989302","https://openalex.org/I39565521","https://openalex.org/I4210159294"]},{"id":"https://openalex.org/I2800916854","display_name":"American Ceramic Society","ror":"https://ror.org/01e8hcf19","country_code":"US","type":"nonprofit","lineage":["https://openalex.org/I2800916854"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yong W. Bae","raw_affiliation_strings":["Member, American Ceramic Society","Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6063"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Member, American Ceramic Society","institution_ids":["https://openalex.org/I2800916854"]},{"raw_affiliation_string":"Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6063","institution_ids":["https://openalex.org/I1289243028"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058621365","display_name":"Woo Y. Lee","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1289243028","display_name":"Oak Ridge National Laboratory","ror":"https://ror.org/01qz5mb56","country_code":"US","type":"facility","lineage":["https://openalex.org/I1289243028","https://openalex.org/I1330989302","https://openalex.org/I39565521","https://openalex.org/I4210159294"]},{"id":"https://openalex.org/I2800916854","display_name":"American Ceramic Society","ror":"https://ror.org/01e8hcf19","country_code":"US","type":"nonprofit","lineage":["https://openalex.org/I2800916854"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Woo Y. Lee","raw_affiliation_strings":["Member, American Ceramic Society","Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6063"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Member, American Ceramic Society","institution_ids":["https://openalex.org/I2800916854"]},{"raw_affiliation_string":"Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6063","institution_ids":["https://openalex.org/I1289243028"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109040978","display_name":"David P. Stinton","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1289243028","display_name":"Oak Ridge National Laboratory","ror":"https://ror.org/01qz5mb56","country_code":"US","type":"facility","lineage":["https://openalex.org/I1289243028","https://openalex.org/I1330989302","https://openalex.org/I39565521","https://openalex.org/I4210159294"]},{"id":"https://openalex.org/I2800916854","display_name":"American Ceramic Society","ror":"https://ror.org/01e8hcf19","country_code":"US","type":"nonprofit","lineage":["https://openalex.org/I2800916854"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"David P. Stinton","raw_affiliation_strings":["Member, American Ceramic Society","Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6063"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Member, American Ceramic Society","institution_ids":["https://openalex.org/I2800916854"]},{"raw_affiliation_string":"Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6063","institution_ids":["https://openalex.org/I1289243028"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":4070,"currency":"USD","value_usd":4070},"apc_paid":null,"fwci":0.561,"has_fulltext":false,"cited_by_count":17,"citation_normalized_percentile":{"value":0.6705342,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":96},"biblio":{"volume":"78","issue":"5","first_page":"1297","last_page":"1300"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10132","display_name":"Advanced ceramic materials synthesis","score":0.6104000210762024,"subfield":{"id":"https://openalex.org/subfields/2503","display_name":"Ceramics and Composites"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10132","display_name":"Advanced ceramic materials synthesis","score":0.6104000210762024,"subfield":{"id":"https://openalex.org/subfields/2503","display_name":"Ceramics and Composites"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10626","display_name":"High-Temperature Coating Behaviors","score":0.2199999988079071,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.05490000173449516,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/chemical-vapor-deposition","display_name":"chemical vapor deposition","score":0.9309999942779541},{"id":"https://openalex.org/keywords/deposition-temperature","display_name":"deposition temperature","score":0.7519999742507935},{"id":"https://openalex.org/keywords/reagent-concentration","display_name":"reagent concentration","score":0.8759999871253967},{"id":"https://openalex.org/keywords/tacl5","display_name":"TaCl5","score":0.7870000004768372},{"id":"https://openalex.org/keywords/si3n4-substrate","display_name":"Si3N4 substrate","score":0.828000009059906},{"id":"https://openalex.org/keywords/coating-morphology","display_name":"coating morphology","score":0.8529999852180481},{"id":"https://openalex.org/keywords/microcracks","display_name":"microcracks","score":0.7900000214576721},{"id":"https://openalex.org/keywords/grain-coalescence","display_name":"grain coalescence","score":0.8330000042915344},{"id":"https://openalex.org/keywords/surface-texture","display_name":"surface texture","score":0.6669999957084656},{"id":"https://openalex.org/keywords/growth-rate-crystal-and-thin-film-growth","display_name":"growth rate (crystal and thin-film growth)","score":0.703000009059906},{"id":"https://openalex.org/keywords/hot-pressed-silicon-nitride","display_name":"hot-pressed silicon nitride","score":0.6549999713897705}],"concepts":[{"id":"https://openalex.org/C499950583","wikidata":"https://www.wikidata.org/wiki/Q183252","display_name":"Morphology (biology)","level":2,"score":0.7802860140800476},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6397897005081177},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.573469877243042},{"id":"https://openalex.org/C2781195486","wikidata":"https://www.wikidata.org/wiki/Q289436","display_name":"Texture (cosmology)","level":3,"score":0.5526248216629028},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5291417241096497},{"id":"https://openalex.org/C2781448156","wikidata":"https://www.wikidata.org/wiki/Q1570182","display_name":"Coating","level":2,"score":0.519242525100708},{"id":"https://openalex.org/C199289684","wikidata":"https://www.wikidata.org/wiki/Q83353","display_name":"Mineralogy","level":1,"score":0.5138087868690491},{"id":"https://openalex.org/C40875361","wikidata":"https://www.wikidata.org/wiki/Q2356542","display_name":"Reagent","level":2,"score":0.49582967162132263},{"id":"https://openalex.org/C39353612","wikidata":"https://www.wikidata.org/wiki/Q5283759","display_name":"Atmospheric temperature range","level":2,"score":0.48631057143211365},{"id":"https://openalex.org/C6648577","wikidata":"https://www.wikidata.org/wiki/Q622669","display_name":"Porosity","level":2,"score":0.4830106496810913},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.4584720730781555},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.32305634021759033},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.26792433857917786},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2509104609489441},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1854410171508789},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.08107292652130127},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.06379660964012146},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C54355233","wikidata":"https://www.wikidata.org/wiki/Q7162","display_name":"Genetics","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1111/j.1151-2916.1995.tb08485.x","doi":"https://doi.org/10.1111/j.1151-2916.1995.tb08485.x","is_oa":false,"landing_page_url":"https://doi.org/10.1111/j.1151-2916.1995.tb08485.x","pdf_url":null,"source":{"id":"https://openalex.org/S53162366","display_name":"Journal of the American Ceramic Society","issn_l":"0002-7820","issn":["0002-7820","1551-2916"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-2","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of the American Ceramic Society","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1506823599","https://openalex.org/W2028573132","https://openalex.org/W2047740438","https://openalex.org/W2093268854","https://openalex.org/W2095215768","https://openalex.org/W2110185176","https://openalex.org/W2158033144","https://openalex.org/W4210307632","https://openalex.org/W4214777302"],"related_works":["https://openalex.org/W2047740438","https://openalex.org/W2072824077","https://openalex.org/W2514128528","https://openalex.org/W2095215768","https://openalex.org/W4411302165","https://openalex.org/W30324003","https://openalex.org/W2000718304","https://openalex.org/W2379404285","https://openalex.org/W2011908233","https://openalex.org/W2053936543"],"abstract_inverted_index":{"Crystalline":[0],"\u03b2\u2010Ta":[1],"2":[2,20,23,39],"O":[3,40],"5":[4,17,41],"coatings":[5,42,80],"were":[6,81],"deposited":[7],"on":[8,64],"hot\u2010isostatically\u2010pressed":[9],"Si":[10],"3":[11],"N":[12],"4":[13],"by":[14],"reacting":[15],"TaCl":[16],"with":[18],"H":[19],"and":[21,30,75],"CO":[22],"in":[24,51],"the":[25,52,60,65,79],"temperature":[26],"range":[27],"of":[28,34,45,54,62,78,86],"1000\u00b0\u20131300\u00b0C":[29],"at":[31],"a":[32,55,84],"pressure":[33],"660":[35],"Pa.":[36],"The":[37,71],"Ta":[38],"generally":[43],"consisted":[44],"wellcoalesced":[46],"2\u20133":[47],"\u03bcm":[48],"grains,":[49],"resulting":[50],"formation":[53],"nonporous":[56],"coating":[57],"morphology.":[58],"However,":[59],"presence":[61],"microcracks":[63],"as\u2010deposited":[66],"surface":[67,72],"was":[68],"consistently":[69],"observed.":[70],"morphology,":[73],"texture,":[74],"growth":[76],"rate":[77],"examined":[82],"as":[83],"function":[85],"deposition":[87],"parameters.":[88]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":1}],"updated_date":"2026-10-03T13:16:28.481748","created_date":"2016-06-24T00:00:00"}