{"id":"https://openalex.org/W2164336095","doi":"https://doi.org/10.1109/nebc.1993.404382","title":"Fabrication of microstructures for modeling transport in porous materials","display_name":"Fabrication of microstructures for modeling transport in porous materials","publication_year":2002,"publication_date":"2002-12-30","ids":{"openalex":"https://openalex.org/W2164336095","doi":"https://doi.org/10.1109/nebc.1993.404382","mag":"2164336095"},"language":"en","primary_location":{"id":"doi:10.1109/nebc.1993.404382","doi":"https://doi.org/10.1109/nebc.1993.404382","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nebc.1993.404382","pdf_url":null,"source":{"id":"https://openalex.org/S4393916914","display_name":"IEEE Annual Northeast Bioengineering Conference (NEBEC)","issn_l":"1071-121X","issn":["1071-121X"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"1993 IEEE Annual Northeast Bioengineering Conference","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5108692889","display_name":"David J. Mears","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I145311948","display_name":"Johns Hopkins University","ror":"https://ror.org/00za53h95","country_code":"US","type":"education","lineage":["https://openalex.org/I145311948"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D.J. Mears","raw_affiliation_strings":["Department of Biomedical Engineering, Johns Hopkins University, Baltimore, MD, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering, Johns Hopkins University, Baltimore, MD, USA","institution_ids":["https://openalex.org/I145311948"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012517803","display_name":"Scott W. Straka","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I145311948","display_name":"Johns Hopkins University","ror":"https://ror.org/00za53h95","country_code":"US","type":"education","lineage":["https://openalex.org/I145311948"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S.W. Straka","raw_affiliation_strings":["Department of Biomedical Engineering, Johns Hopkins University, Baltimore, MD, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering, Johns Hopkins University, Baltimore, MD, USA","institution_ids":["https://openalex.org/I145311948"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012106344","display_name":"W. Mark Saltzman","orcid":"https://orcid.org/0000-0002-2163-549X","observed_orcids":["https://orcid.org/0000-0002-2163-549X"]},"institutions":[{"id":"https://openalex.org/I145311948","display_name":"Johns Hopkins University","ror":"https://ror.org/00za53h95","country_code":"US","type":"education","lineage":["https://openalex.org/I145311948"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"W.M. Saltzman","raw_affiliation_strings":["Department of Biomedical Engineering, Johns Hopkins University, Baltimore, MD, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering, Johns Hopkins University, Baltimore, MD, USA","institution_ids":["https://openalex.org/I145311948"]}]},{"author_position":"last","author":{"id":null,"display_name":"N.F. Sheppard","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I145311948","display_name":"Johns Hopkins University","ror":"https://ror.org/00za53h95","country_code":"US","type":"education","lineage":["https://openalex.org/I145311948"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"N.F. Sheppard","raw_affiliation_strings":["Department of Biomedical Engineering, Johns Hopkins University, Baltimore, MD, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering, Johns Hopkins University, Baltimore, MD, USA","institution_ids":["https://openalex.org/I145311948"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I145311948"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.34057821,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"143","last_page":"144"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.5479000210762024,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.5479000210762024,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.17190000414848328,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.13099999725818634,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-micromachining","display_name":"silicon micromachining","score":0.8679999709129333},{"id":"https://openalex.org/keywords/porous-media","display_name":"porous media","score":0.5440000295639038},{"id":"https://openalex.org/keywords/pore-network-model","display_name":"pore network model","score":0.5360000133514404},{"id":"https://openalex.org/keywords/anisotropic-etching","display_name":"anisotropic etching","score":0.8619999885559082},{"id":"https://openalex.org/keywords/controlled-release-systems","display_name":"controlled release systems","score":0.6579999923706055},{"id":"https://openalex.org/keywords/fluorescent-dye-release","display_name":"fluorescent dye release","score":0.8410000205039978},{"id":"https://openalex.org/keywords/microfabrication","display_name":"microfabrication","score":0.6029999852180481}],"concepts":[{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.8687070608139038},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7294096946716309},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.711215078830719},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6669741868972778},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.6621018648147583},{"id":"https://openalex.org/C2776685891","wikidata":"https://www.wikidata.org/wiki/Q428660","display_name":"Porous silicon","level":3,"score":0.6166878938674927},{"id":"https://openalex.org/C41075158","wikidata":"https://www.wikidata.org/wiki/Q4996485","display_name":"Bulk micromachining","level":5,"score":0.6107606887817383},{"id":"https://openalex.org/C87976508","wikidata":"https://www.wikidata.org/wiki/Q1498213","display_name":"Microstructure","level":2,"score":0.534267246723175},{"id":"https://openalex.org/C105569014","wikidata":"https://www.wikidata.org/wiki/Q3271208","display_name":"Porous medium","level":3,"score":0.50140380859375},{"id":"https://openalex.org/C6648577","wikidata":"https://www.wikidata.org/wiki/Q622669","display_name":"Porosity","level":2,"score":0.4971454441547394},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4655137062072754},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.459995836019516},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.43029019236564636},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2765854001045227},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.21014150977134705},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1887558400630951},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/nebc.1993.404382","doi":"https://doi.org/10.1109/nebc.1993.404382","is_oa":false,"landing_page_url":"https://doi.org/10.1109/nebc.1993.404382","pdf_url":null,"source":{"id":"https://openalex.org/S4393916914","display_name":"IEEE Annual Northeast Bioengineering Conference (NEBEC)","issn_l":"1071-121X","issn":["1071-121X"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"1993 IEEE Annual Northeast Bioengineering Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W13972067","https://openalex.org/W1988600272","https://openalex.org/W2080757045","https://openalex.org/W2099435753"],"related_works":["https://openalex.org/W1966226952","https://openalex.org/W2137891877","https://openalex.org/W2050313057","https://openalex.org/W187773635","https://openalex.org/W2470841344","https://openalex.org/W1507450207","https://openalex.org/W2139557402","https://openalex.org/W2051300575","https://openalex.org/W2791216791","https://openalex.org/W2000544792"],"abstract_inverted_index":{"Silicon":[0],"micromachining":[1,34],"was":[2,22,59],"used":[3],"to":[4,26,61],"fabricate":[5],"microstructures":[6],"for":[7],"modeling":[8],"transport":[9],"in":[10,50],"porous":[11],"systems.":[12,54],"A":[13,55],"linear":[14],"network":[15,88],"of":[16,33,38,64,71,76,79,84],"pores":[17],"connected":[18],"by":[19],"narrow":[20],"channels":[21],"etched":[23],"into":[24],"silicon":[25],"create":[27],"constricted":[28],"pore":[29,47,87],"networks.":[30],"The":[31],"use":[32],"enables":[35],"the":[36,41,46,68,72,77,85],"creation":[37],"structures":[39],"having":[40],"same":[42],"characteristic":[43],"dimensions":[44],"as":[45],"networks":[48],"found":[49],"polymeric":[51],"controlled":[52],"release":[53,78],"two":[56],"mask":[57],"process":[58],"developed":[60],"reduce":[62],"undercutting":[63],"convex":[65],"corners":[66],"during":[67],"anisotropic":[69],"etching":[70],"silicon.":[73],"Initial":[74],"studies":[75],"a":[80],"fluorescent":[81],"dye":[82],"out":[83],"micromachined":[86],"are":[89],"presented.>":[90]},"counts_by_year":[],"updated_date":"2026-11-03T10:50:19.383937","created_date":"2016-06-24T00:00:00"}