{"id":"https://openalex.org/W2161663444","doi":"https://doi.org/10.1557/proc-285-513","title":"Preferentially Oriented Cubic Boron Nitride Films Grown on Si (001) Substrates by Ion Assisted Pulsed Laser Deposition","display_name":"Preferentially Oriented Cubic Boron Nitride Films Grown on Si (001) Substrates by Ion Assisted Pulsed Laser Deposition","publication_year":1992,"publication_date":"1992-01-01","ids":{"openalex":"https://openalex.org/W2161663444","doi":"https://doi.org/10.1557/proc-285-513","mag":"2161663444"},"language":"en","primary_location":{"id":"doi:10.1557/proc-285-513","doi":"https://doi.org/10.1557/proc-285-513","is_oa":false,"landing_page_url":"https://doi.org/10.1557/proc-285-513","pdf_url":null,"source":{"id":"https://openalex.org/S2530005873","display_name":"MRS Proceedings","issn_l":"0272-9172","issn":["0272-9172","1946-4274"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310311721","host_organization_name":"Cambridge University Press","host_organization_lineage":["https://openalex.org/P4310311721","https://openalex.org/P4310311702"],"host_organization_lineage_names":["Cambridge University Press","University of Cambridge"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"MRS Proceedings","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5049352140","display_name":"A. K. Ballal","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I66946132","display_name":"University of Maryland, College Park","ror":"https://ror.org/047s2c258","country_code":"US","type":"education","lineage":["https://openalex.org/I66946132"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A. K. Ballal","raw_affiliation_strings":["Materials and Nuclear Engineering Department, University of Maryland, College Park","Materials and Nuclear Engineering Department, University of Maryland, College Park, MD, 20742-2115"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Materials and Nuclear Engineering Department, University of Maryland, College Park","institution_ids":["https://openalex.org/I66946132"]},{"raw_affiliation_string":"Materials and Nuclear Engineering Department, University of Maryland, College Park, MD, 20742-2115","institution_ids":["https://openalex.org/I66946132"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057449525","display_name":"L. Salamanca\u2010Riba","orcid":"https://orcid.org/0000-0001-8155-6403","observed_orcids":["https://orcid.org/0000-0001-8155-6403"]},"institutions":[{"id":"https://openalex.org/I66946132","display_name":"University of Maryland, College Park","ror":"https://ror.org/047s2c258","country_code":"US","type":"education","lineage":["https://openalex.org/I66946132"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L. Salamanca-riba","raw_affiliation_strings":["Materials and Nuclear Engineering Department, University of Maryland, College Park","Materials and Nuclear Engineering Department, University of Maryland, College Park, MD, 20742-2115"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Materials and Nuclear Engineering Department, University of Maryland, College Park","institution_ids":["https://openalex.org/I66946132"]},{"raw_affiliation_string":"Materials and Nuclear Engineering Department, University of Maryland, College Park, MD, 20742-2115","institution_ids":["https://openalex.org/I66946132"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063315951","display_name":"Gary L. Doll","orcid":"https://orcid.org/0000-0002-5608-9935","observed_orcids":["https://orcid.org/0000-0002-5608-9935"]},"institutions":[{"id":"https://openalex.org/I118136607","display_name":"General Motors (United States)","ror":"https://ror.org/05addee68","country_code":"US","type":"company","lineage":["https://openalex.org/I118136607"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"G. L. Doll","raw_affiliation_strings":["Physics Department, General Motors Research Laboratories, Warren","Physics Department, General Motors Research Laboratories, Warren, MI, 48090-9055"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physics Department, General Motors Research Laboratories, Warren","institution_ids":["https://openalex.org/I118136607"]},{"raw_affiliation_string":"Physics Department, General Motors Research Laboratories, Warren, MI, 48090-9055","institution_ids":["https://openalex.org/I118136607"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056111714","display_name":"Charles A. Taylor","orcid":"https://orcid.org/0009-0006-5879-3105","observed_orcids":["https://orcid.org/0009-0006-5879-3105"]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. A. Taylor","raw_affiliation_strings":["Physics Department, University of Michigan, Ann Arbor","Physics Department, University of Michigan, Ann Arbor, MI, 48109-1120"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physics Department, University of Michigan, Ann Arbor","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Physics Department, University of Michigan, Ann Arbor, MI, 48109-1120","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5038733600","display_name":"Roy Clarke","orcid":"https://orcid.org/0000-0002-2426-062X","observed_orcids":["https://orcid.org/0000-0002-2426-062X"]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R. Clarke","raw_affiliation_strings":["Physics Department, University of Michigan, Ann Arbor","Physics Department, University of Michigan, Ann Arbor, MI, 48109-1120"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physics Department, University of Michigan, Ann Arbor","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Physics Department, University of Michigan, Ann Arbor, MI, 48109-1120","institution_ids":["https://openalex.org/I27837315"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.4198,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.82143738,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"285","issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11341","display_name":"Boron and Carbon Nanomaterials Research","score":0.7929999828338623,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11341","display_name":"Boron and Carbon Nanomaterials Research","score":0.7929999828338623,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.12039999663829803,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.0551999993622303,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cubic-boron-nitride","display_name":"cubic boron nitride","score":0.9520000219345093},{"id":"https://openalex.org/keywords/thin-films","display_name":"thin films","score":0.9079999923706055},{"id":"https://openalex.org/keywords/crystallographic-texture","display_name":"crystallographic texture","score":0.6840000152587891},{"id":"https://openalex.org/keywords/si-100-substrate","display_name":"Si(100) substrate","score":0.8330000042915344},{"id":"https://openalex.org/keywords/thin-film-adhesion","display_name":"film adhesion","score":0.7429999709129333},{"id":"https://openalex.org/keywords/antireflection-coatings","display_name":"antireflection coatings","score":0.843999981880188},{"id":"https://openalex.org/keywords/sp3-bonding","display_name":"sp3 bonding","score":0.8100000023841858},{"id":"https://openalex.org/keywords/zinc-blende-structure","display_name":"zinc-blende structure","score":0.800000011920929},{"id":"https://openalex.org/keywords/lattice-parameters","display_name":"lattice parameters","score":0.7269999980926514},{"id":"https://openalex.org/keywords/infrared-absorption","display_name":"infrared absorption","score":0.531000018119812}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.914499044418335},{"id":"https://openalex.org/C2780243435","wikidata":"https://www.wikidata.org/wiki/Q410193","display_name":"Boron nitride","level":2,"score":0.8722096681594849},{"id":"https://openalex.org/C137637335","wikidata":"https://www.wikidata.org/wiki/Q899604","display_name":"Crystallite","level":2,"score":0.6417313814163208},{"id":"https://openalex.org/C37982897","wikidata":"https://www.wikidata.org/wiki/Q901321","display_name":"Pulsed laser deposition","level":3,"score":0.6118982434272766},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.48180097341537476},{"id":"https://openalex.org/C24444364","wikidata":"https://www.wikidata.org/wiki/Q473227","display_name":"Cubic crystal system","level":2,"score":0.4679604470729828},{"id":"https://openalex.org/C150493377","wikidata":"https://www.wikidata.org/wiki/Q1427863","display_name":"Transmittance","level":2,"score":0.4472881853580475},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3689766526222229},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.33932822942733765},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.28962671756744385},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.23198172450065613},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2119448482990265},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.10692229866981506},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1557/proc-285-513","doi":"https://doi.org/10.1557/proc-285-513","is_oa":false,"landing_page_url":"https://doi.org/10.1557/proc-285-513","pdf_url":null,"source":{"id":"https://openalex.org/S2530005873","display_name":"MRS Proceedings","issn_l":"0272-9172","issn":["0272-9172","1946-4274"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310311721","host_organization_name":"Cambridge University Press","host_organization_lineage":["https://openalex.org/P4310311721","https://openalex.org/P4310311702"],"host_organization_lineage_names":["Cambridge University Press","University of Cambridge"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"MRS Proceedings","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W590881860","https://openalex.org/W1571150756","https://openalex.org/W1985871678","https://openalex.org/W1988839799","https://openalex.org/W2080117566","https://openalex.org/W2085101561"],"related_works":["https://openalex.org/W2355862987","https://openalex.org/W2049757704","https://openalex.org/W2402697569","https://openalex.org/W1993098890","https://openalex.org/W2070141875","https://openalex.org/W2326185588","https://openalex.org/W1970838757","https://openalex.org/W2003387566","https://openalex.org/W1976191581","https://openalex.org/W2394197356"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-10-01T08:54:57.152042","created_date":"2025-10-10T00:00:00"}