{"id":"https://openalex.org/W2159659616","doi":"https://doi.org/10.1109/plans.2000.838318","title":"High aspect-ratio dry-release poly-silicon MEMS technology for inertial-grade microgyroscopes","display_name":"High aspect-ratio dry-release poly-silicon MEMS technology for inertial-grade microgyroscopes","publication_year":2002,"publication_date":"2002-11-07","ids":{"openalex":"https://openalex.org/W2159659616","doi":"https://doi.org/10.1109/plans.2000.838318","mag":"2159659616"},"language":"en","primary_location":{"id":"doi:10.1109/plans.2000.838318","doi":"https://doi.org/10.1109/plans.2000.838318","is_oa":false,"landing_page_url":"https://doi.org/10.1109/plans.2000.838318","pdf_url":null,"source":{"id":"https://openalex.org/S4393918190","display_name":"IEEE/ION Position Location and Navigation Symposium","issn_l":"2153-358X","issn":["2153-358X"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["norway-1"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE 2000. Position Location and Navigation Symposium (Cat. No.00CH37062)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081523432","display_name":"Farrokh Ayazi","orcid":"https://orcid.org/0000-0002-4539-7393","observed_orcids":["https://orcid.org/0000-0002-4539-7393"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"F. Ayazi","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5112286154","display_name":"K. Najafi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. Najafi","raw_affiliation_strings":["Center for Integrated Microsystems, University of Michigan, Ann Arbor, MI, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Center for Integrated Microsystems, University of Michigan, Ann Arbor, MI, USA","institution_ids":["https://openalex.org/I27837315"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.4224,"has_fulltext":false,"cited_by_count":15,"citation_normalized_percentile":{"value":0.82045607,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"304","last_page":"308"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11325","display_name":"Inertial Sensor and Navigation","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/polysilicon-mems","display_name":"polysilicon MEMS","score":0.8529999852180481},{"id":"https://openalex.org/keywords/deep-reactive-ion-etching","display_name":"deep reactive ion etching","score":0.7179999947547913},{"id":"https://openalex.org/keywords/residual-stress","display_name":"residual stress","score":0.5960000157356262},{"id":"https://openalex.org/keywords/clamped-clamped-beam-resonator","display_name":"clamped-clamped beam resonator","score":0.7770000100135803},{"id":"https://openalex.org/keywords/quality-factor","display_name":"quality factor","score":0.859000027179718},{"id":"https://openalex.org/keywords/coriolis-acceleration","display_name":"Coriolis acceleration","score":0.5950000286102295}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7955843210220337},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.7009629607200623},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4986879825592041},{"id":"https://openalex.org/C173386949","wikidata":"https://www.wikidata.org/wiki/Q192735","display_name":"Inertial frame of reference","level":2,"score":0.48746466636657715},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.34275734424591064},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.31118375062942505},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.10097306966781616},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/plans.2000.838318","doi":"https://doi.org/10.1109/plans.2000.838318","is_oa":false,"landing_page_url":"https://doi.org/10.1109/plans.2000.838318","pdf_url":null,"source":{"id":"https://openalex.org/S4393918190","display_name":"IEEE/ION Position Location and Navigation Symposium","issn_l":"2153-358X","issn":["2153-358X"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["norway-1"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE 2000. Position Location and Navigation Symposium (Cat. No.00CH37062)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W2073089007","https://openalex.org/W2115472321","https://openalex.org/W2149128480","https://openalex.org/W2152873042","https://openalex.org/W2157375988"],"related_works":["https://openalex.org/W2157375988","https://openalex.org/W7097382286","https://openalex.org/W2101214719","https://openalex.org/W186739127","https://openalex.org/W2763309801","https://openalex.org/W7099858815","https://openalex.org/W2035066109","https://openalex.org/W2115472321","https://openalex.org/W2066632268","https://openalex.org/W2123269363"],"abstract_inverted_index":{"This":[0,24,116],"paper":[1],"presents":[2],"an":[3],"all-silicon,":[4],"single":[5],"wafer":[6],"high":[7,109,122],"aspect-ratio":[8],"dry-release":[9],"MEMS":[10],"technology":[11,90,117,131],"capable":[12,34],"of":[13,16,35,48,59,129,139,153],"producing":[14,36],"10-100's":[15],"microns":[17,60],"thick,":[18,78],"electrically":[19],"isolated":[20],"3-D":[21],"silicon":[22,41],"microstructures.":[23],"process":[25],"utilizes":[26],"polysilicon":[27,39,85],"as":[28,108,110],"the":[29,130,149],"structural":[30],"material":[31],"and":[32,40,135],"is":[33],"very":[37],"thick":[38],"electrodes":[42,143],"using":[43],"deep":[44],"reactive":[45],"ion":[46],"etching":[47],"silicon.":[49],"Various":[50],"size":[51],"capacitive":[52],"air-gaps":[53,156],"ranging":[54],"from":[55],"sub-micron":[56,145],"to":[57,94],"tens":[58],"can":[61,157],"be":[62,95],"realized":[63],"in":[64,74,112],"this":[65,89],"technology.":[66],"Using":[67],"a":[68],"bent-beam":[69],"strain":[70],"gauge,":[71],"residual":[72],"stress":[73],"80":[75],"/spl":[76,80,98],"mu/m":[77,81,99],"4":[79],"wide":[82],"trench-refilled":[83],"vertical":[84,142],"beams":[86],"fabricated":[87],"through":[88],"have":[91,104],"been":[92],"measured":[93],"zero.":[96],"300":[97],"long":[100],"clamped-clamped":[101],"beam":[102],"resonators":[103],"shown":[105],"quality":[106],"factors":[107],"85,000":[111],"1m":[113],"Torr":[114],"vacuum.":[115],"provides":[118],"features":[119],"required":[120],"for":[121,162],"performance":[123],"vibratory":[124],"gyroscopes.":[125],"The":[126],"all-silicon":[127],"feature":[128],"improves":[132],"long-term":[133],"stability":[134],"temperature":[136],"sensitivity;":[137],"fabrication":[138],"large":[140,159],"area,":[141],"with":[144],"gap":[146],"will":[147],"increase":[148],"sensitivity":[150],"by":[151],"orders":[152],"magnitude.":[154],"Larger":[155],"accommodate":[158],"drive":[160],"amplitudes":[161],"increased":[163],"Coriolis":[164],"acceleration.":[165]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-10-06T10:28:23.643775","created_date":"2016-06-24T00:00:00"}