{"id":"https://openalex.org/W2157443782","doi":"https://doi.org/10.1116/1.572304","title":"Hard diamondlike carbon films deposited by ionized deposition of methane gas","display_name":"Hard diamondlike carbon films deposited by ionized deposition of methane gas","publication_year":1983,"publication_date":"1983-01-01","ids":{"openalex":"https://openalex.org/W2157443782","doi":"https://doi.org/10.1116/1.572304","mag":"2157443782"},"language":"en","primary_location":{"id":"doi:10.1116/1.572304","doi":"https://doi.org/10.1116/1.572304","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.572304","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101467232","display_name":"Toshio M\u014dri","orcid":"https://orcid.org/0009-0004-0149-1224","observed_orcids":["https://orcid.org/0009-0004-0149-1224"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Toshio M\u014dri","raw_affiliation_strings":["Department of Electrical Engineering, Faculty of Technology, Tokyo Noko University, Koganei, Tokyo 184, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Faculty of Technology, Tokyo Noko University, Koganei, Tokyo 184, Japan","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5087220022","display_name":"Yoshikatsu Namba","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yoshikatsu Namba","raw_affiliation_strings":["Department of Electrical Engineering, Faculty of Technology, Tokyo Noko University, Koganei, Tokyo 184, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Faculty of Technology, Tokyo Noko University, Koganei, Tokyo 184, Japan","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":6.7092,"has_fulltext":false,"cited_by_count":108,"citation_normalized_percentile":{"value":0.98061931,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":98},"biblio":{"volume":"1","issue":"1","first_page":"23","last_page":"27"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.9639000296592712,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.9639000296592712,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.03530000150203705,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11341","display_name":"Boron and Carbon Nanomaterials Research","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/diamond-like-carbon-films","display_name":"diamond-like carbon films","score":0.8569999933242798},{"id":"https://openalex.org/keywords/methane","display_name":"methane","score":0.7929999828338623},{"id":"https://openalex.org/keywords/film-growth-mechanism","display_name":"film growth mechanism","score":0.7940000295639038},{"id":"https://openalex.org/keywords/hydrogen-content","display_name":"hydrogen content","score":0.699999988079071},{"id":"https://openalex.org/keywords/micro-vickers-hardness","display_name":"micro-Vickers hardness","score":0.8999999761581421},{"id":"https://openalex.org/keywords/electron-diffraction","display_name":"electron diffraction","score":0.6830000281333923},{"id":"https://openalex.org/keywords/deposition-parameters","display_name":"deposition parameters","score":0.5130000114440918}],"concepts":[{"id":"https://openalex.org/C75937256","wikidata":"https://www.wikidata.org/wiki/Q1440781","display_name":"Carbon film","level":3,"score":0.7161057591438293},{"id":"https://openalex.org/C2780064504","wikidata":"https://www.wikidata.org/wiki/Q127583","display_name":"Sapphire","level":3,"score":0.66835618019104},{"id":"https://openalex.org/C516920438","wikidata":"https://www.wikidata.org/wiki/Q37129","display_name":"Methane","level":2,"score":0.6636059284210205},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.634914755821228},{"id":"https://openalex.org/C140205800","wikidata":"https://www.wikidata.org/wiki/Q5860","display_name":"Carbon fibers","level":3,"score":0.6083341240882874},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.6040666103363037},{"id":"https://openalex.org/C512968161","wikidata":"https://www.wikidata.org/wiki/Q556","display_name":"Hydrogen","level":2,"score":0.5198953151702881},{"id":"https://openalex.org/C2776921476","wikidata":"https://www.wikidata.org/wiki/Q5283","display_name":"Diamond","level":2,"score":0.4528936743736267},{"id":"https://openalex.org/C123380192","wikidata":"https://www.wikidata.org/wiki/Q4389419","display_name":"Diamond-like carbon","level":3,"score":0.427503377199173},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.4247414469718933},{"id":"https://openalex.org/C2781285689","wikidata":"https://www.wikidata.org/wiki/Q21921428","display_name":"Crystal (programming language)","level":2,"score":0.42044320702552795},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.4201875925064087},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.41871872544288635},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4152153730392456},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.29563766717910767},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.22897979617118835},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.194281667470932},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.14222931861877441},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.13052743673324585},{"id":"https://openalex.org/C107872376","wikidata":"https://www.wikidata.org/wiki/Q321355","display_name":"Environmental chemistry","level":1,"score":0.08749869465827942},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.07307565212249756},{"id":"https://openalex.org/C104779481","wikidata":"https://www.wikidata.org/wiki/Q50707","display_name":"Composite number","level":2,"score":0.0713670551776886},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.049787163734436035},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.572304","doi":"https://doi.org/10.1116/1.572304","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.572304","pdf_url":null,"source":{"id":"https://openalex.org/S4210190837","display_name":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","issn_l":"0734-2101","issn":["0734-2101","1520-8559"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320309532","display_name":"Syracuse University","ror":"https://ror.org/025r5qe02"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2507853983","https://openalex.org/W2072600729","https://openalex.org/W2328463949","https://openalex.org/W2069201952","https://openalex.org/W2009724386","https://openalex.org/W2128868787","https://openalex.org/W1968373042","https://openalex.org/W1985112246","https://openalex.org/W2056115341","https://openalex.org/W2014905073"],"abstract_inverted_index":{"Very":[0],"hard":[1],"diamondlike":[2],"carbon":[3,34],"films":[4,20,35,47],"have":[5],"been":[6],"prepared":[7],"with":[8],"the":[9,23,46,57,63,83,88],"aid":[10],"of":[11,19,25,32,41,62,70,100],"an":[12],"ionized":[13],"deposition":[14,58],"technique.":[15],"The":[16,30,39,72],"growth":[17],"mechanism":[18],"deposited":[21],"in":[22,45,82],"presence":[24],"methane":[26],"gas":[27],"is":[28,48,95],"discussed.":[29],"properties":[31],"these":[33,93],"are":[36],"as":[37],"follows:":[38],"concentration":[40],"hydrogen":[42],"atoms":[43],"contained":[44],"almost":[49],"negligible.":[50],"Micro-Vickers":[51],"hardness":[52],"changes":[53],"depended":[54],"largely":[55],"on":[56],"conditions,":[59],"but":[60],"some":[61],"values":[64],"obtained":[65,91],"were":[66],"larger":[67],"than":[68],"that":[69,99],"sapphire.":[71],"111,":[73],"220,":[74],"and":[75],"311":[76],"reflections":[77],"can":[78],"be":[79],"observed":[80],"clearly":[81],"electron":[84],"diffraction":[85],"patterns.":[86],"Moreover":[87],"crystal":[89],"structure":[90],"from":[92],"rings":[94],"very":[96],"close":[97],"to":[98],"diamond.":[101]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":5},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}