{"id":"https://openalex.org/W2154309229","doi":"https://doi.org/10.1016/s0167-9317(97)00092-0","title":"Three dimensional metallization for vertically integrated circuits","display_name":"Three dimensional metallization for vertically integrated circuits","publication_year":1997,"publication_date":"1997-11-01","ids":{"openalex":"https://openalex.org/W2154309229","doi":"https://doi.org/10.1016/s0167-9317(97)00092-0","mag":"2154309229"},"language":"en","primary_location":{"id":"doi:10.1016/s0167-9317(97)00092-0","doi":"https://doi.org/10.1016/s0167-9317(97)00092-0","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0167-9317(97)00092-0","pdf_url":null,"source":{"id":"https://openalex.org/S158028765","display_name":"Microelectronic Engineering","issn_l":"0167-9317","issn":["0167-9317","1873-5568"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronic Engineering","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081727176","display_name":"Peter Ramm","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"P. Ramm","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001489958","display_name":"D. Bollmann","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"D. Bollmann","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060825282","display_name":"Rosi Braun","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Braun","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025481029","display_name":"R. Buchner","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Buchner","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006247984","display_name":"U. Cao-Minh","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"U. Cao-Minh","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051611393","display_name":"Manfred Engelhardt","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1325886976","display_name":"Siemens (Germany)","ror":"https://ror.org/059mq0909","country_code":"DE","type":"company","lineage":["https://openalex.org/I1325886976"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Engelhardt","raw_affiliation_strings":["Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I1325886976"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072675429","display_name":"G. Errmann","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"G. Errmann","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007564234","display_name":"T. Gra\u00dfl","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"T. Gra\u00dfl","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077764652","display_name":"Konrad Hieber","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"K. Hieber","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110257291","display_name":"Henning Hubner","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1325886976","display_name":"Siemens (Germany)","ror":"https://ror.org/059mq0909","country_code":"DE","type":"company","lineage":["https://openalex.org/I1325886976"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. H\u00fcbner","raw_affiliation_strings":["Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I1325886976"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069896844","display_name":"G. Kawala","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"G. Kawala","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086297300","display_name":"M.B. Kleiner","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1325886976","display_name":"Siemens (Germany)","ror":"https://ror.org/059mq0909","country_code":"DE","type":"company","lineage":["https://openalex.org/I1325886976"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Kleiner","raw_affiliation_strings":["Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I1325886976"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041335101","display_name":"Armin Klumpp","orcid":"https://orcid.org/0009-0007-4430-5550","observed_orcids":["https://orcid.org/0009-0007-4430-5550"]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"A. Klumpp","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012450310","display_name":"Stefan K\u00fchn","orcid":"https://orcid.org/0000-0002-5990-4157","observed_orcids":["https://orcid.org/0000-0002-5990-4157"]},"institutions":[{"id":"https://openalex.org/I1325886976","display_name":"Siemens (Germany)","ror":"https://ror.org/059mq0909","country_code":"DE","type":"company","lineage":["https://openalex.org/I1325886976"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. K\u00fchn","raw_affiliation_strings":["Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I1325886976"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068567039","display_name":"Christof Landesberger","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"C. Landesberger","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063471567","display_name":"Henri J. Lezec","orcid":"https://orcid.org/0000-0002-9808-1333","observed_orcids":["https://orcid.org/0000-0002-9808-1333"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H. Lezec","raw_affiliation_strings":["Micrion Europe GmbH Garmischer Str. 4, D-80339 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micrion Europe GmbH Garmischer Str. 4, D-80339 M\u00fcnchen, Germany","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046817065","display_name":"W. Muth","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"W. Muth","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064682297","display_name":"Werner Pamler","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1325886976","display_name":"Siemens (Germany)","ror":"https://ror.org/059mq0909","country_code":"DE","type":"company","lineage":["https://openalex.org/I1325886976"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"W. Pamler","raw_affiliation_strings":["Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I1325886976"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064976074","display_name":"R. Popp","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Popp","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":null,"display_name":"E. Renner","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1325886976","display_name":"Siemens (Germany)","ror":"https://ror.org/059mq0909","country_code":"DE","type":"company","lineage":["https://openalex.org/I1325886976"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"E. Renner","raw_affiliation_strings":["Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I1325886976"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083865667","display_name":"Guenther G. Ruhl","orcid":"https://orcid.org/0000-0002-5067-4949","observed_orcids":["https://orcid.org/0000-0002-5067-4949"]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"G. Ruhl","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":null,"display_name":"A. S\u00e4nger","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"A. S\u00e4nger","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"U. Scheler","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"U. Scheler","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111730638","display_name":"Andreas Schertel","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"A. Schertel","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113498013","display_name":"C. Schmidt","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"C. Schmidt","raw_affiliation_strings":["Micrion Europe GmbH Garmischer Str. 4, D-80339 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micrion Europe GmbH Garmischer Str. 4, D-80339 M\u00fcnchen, Germany","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017792939","display_name":"Siegfried Schwarzl","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. Schwarzl","raw_affiliation_strings":["Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Solid State Technology, Hansastr. 27d, D-80686 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":null,"display_name":"J. Weber","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"J. Weber","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5101914544","display_name":"Walter Michael Weber","orcid":"https://orcid.org/0000-0001-9504-5671","observed_orcids":["https://orcid.org/0000-0001-9504-5671"]},"institutions":[{"id":"https://openalex.org/I1325886976","display_name":"Siemens (Germany)","ror":"https://ror.org/059mq0909","country_code":"DE","type":"company","lineage":["https://openalex.org/I1325886976"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"W. Weber","raw_affiliation_strings":["Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Siemens AG, Corporate Technology, Microelectronics, Otto-Hahn-Ring 6, D-81739 M\u00fcnchen, Germany","institution_ids":["https://openalex.org/I1325886976"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5081727176"],"corresponding_institution_ids":["https://openalex.org/I4923324"],"apc_list":{"value":2860,"currency":"USD","value_usd":2860},"apc_paid":null,"fwci":2.4039,"has_fulltext":false,"cited_by_count":91,"citation_normalized_percentile":{"value":0.88323117,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":97},"biblio":{"volume":"37-38","issue":null,"first_page":"39","last_page":"47"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10829","display_name":"Interconnection Networks and Systems","score":0.0,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/3d-integration","display_name":"3D integration","score":0.6890000104904175},{"id":"https://openalex.org/keywords/wafer-stacking","display_name":"wafer stacking","score":0.7580000162124634},{"id":"https://openalex.org/keywords/wafer-bonding","display_name":"wafer bonding","score":0.7350000143051147},{"id":"https://openalex.org/keywords/metallization","display_name":"metallization","score":0.7789999842643738},{"id":"https://openalex.org/keywords/vertical-interconnects","display_name":"vertical interconnects","score":0.7730000019073486},{"id":"https://openalex.org/keywords/cmos-compatibility","display_name":"CMOS compatibility","score":0.6140000224113464},{"id":"https://openalex.org/keywords/high-aspect-ratio-vias","display_name":"high aspect ratio vias","score":0.7429999709129333}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7395491600036621},{"id":"https://openalex.org/C187937830","wikidata":"https://www.wikidata.org/wiki/Q175403","display_name":"Microelectronics","level":2,"score":0.7361747026443481},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.6431012153625488},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5975021123886108},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5595279335975647},{"id":"https://openalex.org/C123745756","wikidata":"https://www.wikidata.org/wiki/Q1665949","display_name":"Interconnection","level":2,"score":0.5500168800354004},{"id":"https://openalex.org/C2779133538","wikidata":"https://www.wikidata.org/wiki/Q677010","display_name":"Wafer bonding","level":3,"score":0.46798181533813477},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.4658319354057312},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.43015366792678833},{"id":"https://openalex.org/C59088047","wikidata":"https://www.wikidata.org/wiki/Q229370","display_name":"Three-dimensional integrated circuit","level":3,"score":0.42031723260879517},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3713204860687256},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3709743916988373},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3437437415122986},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2976824641227722},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.164870947599411},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.09071364998817444},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1016/s0167-9317(97)00092-0","doi":"https://doi.org/10.1016/s0167-9317(97)00092-0","is_oa":false,"landing_page_url":"https://doi.org/10.1016/s0167-9317(97)00092-0","pdf_url":null,"source":{"id":"https://openalex.org/S158028765","display_name":"Microelectronic Engineering","issn_l":"0167-9317","issn":["0167-9317","1873-5568"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microelectronic Engineering","raw_type":"journal-article"},{"id":"pmh:oai:publica.fraunhofer.de:publica/191423","doi":null,"is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/191423","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"journal article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1576400338","https://openalex.org/W1963963452","https://openalex.org/W2058242026","https://openalex.org/W2070928426","https://openalex.org/W2078030149"],"related_works":["https://openalex.org/W7048190325","https://openalex.org/W2016077759","https://openalex.org/W2084347051","https://openalex.org/W7097965160","https://openalex.org/W2145903584","https://openalex.org/W2070676114","https://openalex.org/W2742903886","https://openalex.org/W2124193077","https://openalex.org/W1988529718","https://openalex.org/W1981682800"],"abstract_inverted_index":null,"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":3},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":3}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}