{"id":"https://openalex.org/W2152936710","doi":"https://doi.org/10.1117/1.602553","title":"Misalignment modes in high-performance optical systems","display_name":"Misalignment modes in high-performance optical systems","publication_year":2000,"publication_date":"2000-07-01","ids":{"openalex":"https://openalex.org/W2152936710","doi":"https://doi.org/10.1117/1.602553","mag":"2152936710"},"language":"en","primary_location":{"id":"doi:10.1117/1.602553","doi":"https://doi.org/10.1117/1.602553","is_oa":false,"landing_page_url":"https://doi.org/10.1117/1.602553","pdf_url":null,"source":{"id":"https://openalex.org/S175543413","display_name":"Optical Engineering","issn_l":"0091-3286","issn":["0091-3286","1560-2303"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-40","russia-white-list-3"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optical Engineering","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011861267","display_name":"Michael R. Descour","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I138006243","display_name":"University of Arizona","ror":"https://ror.org/03m2x1q45","country_code":"US","type":"education","lineage":["https://openalex.org/I138006243"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Michael R. Descour","raw_affiliation_strings":["Optical Sciences Ctr./Univ. of Arizona","Optical Sciences Ctr./Univ. of Arizona (United States)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Optical Sciences Ctr./Univ. of Arizona","institution_ids":["https://openalex.org/I138006243"]},{"raw_affiliation_string":"Optical Sciences Ctr./Univ. of Arizona (United States)","institution_ids":["https://openalex.org/I138006243"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Mark R. Willer","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I138006243","display_name":"University of Arizona","ror":"https://ror.org/03m2x1q45","country_code":"US","type":"education","lineage":["https://openalex.org/I138006243"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mark R. Willer","raw_affiliation_strings":["Optical Sciences Ctr./Univ. of Arizona"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Optical Sciences Ctr./Univ. of Arizona","institution_ids":["https://openalex.org/I138006243"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Dana S. Clarke","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I138006243","display_name":"University of Arizona","ror":"https://ror.org/03m2x1q45","country_code":"US","type":"education","lineage":["https://openalex.org/I138006243"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Dana S. Clarke","raw_affiliation_strings":["Univ. of Arizona"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Arizona","institution_ids":["https://openalex.org/I138006243"]}]},{"author_position":"last","author":{"id":null,"display_name":"Curtis E. Volin","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I138006243","display_name":"University of Arizona","ror":"https://ror.org/03m2x1q45","country_code":"US","type":"education","lineage":["https://openalex.org/I138006243"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Curtis E. Volin","raw_affiliation_strings":["Univ. of Arizona"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ. of Arizona","institution_ids":["https://openalex.org/I138006243"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5011861267"],"corresponding_institution_ids":["https://openalex.org/I138006243"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.23025321,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"39","issue":"07","first_page":"1737","last_page":"1747"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11484","display_name":"Adaptive optics and wavefront sensing","score":0.3522999882698059,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11484","display_name":"Adaptive optics and wavefront sensing","score":0.3522999882698059,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.22139999270439148,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11517","display_name":"Advanced optical system design","score":0.12929999828338623,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/optical-system-performance","display_name":"optical system performance","score":0.6240000128746033},{"id":"https://openalex.org/keywords/optical-metrology","display_name":"optical metrology","score":0.6620000004768372},{"id":"https://openalex.org/keywords/mean-squared-error","display_name":"mean squared error","score":0.6729999780654907},{"id":"https://openalex.org/keywords/euv-lithography","display_name":"EUV lithography","score":0.9430000185966492},{"id":"https://openalex.org/keywords/actuator-stroke","display_name":"actuator stroke","score":0.7549999952316284},{"id":"https://openalex.org/keywords/mirror-tilt","display_name":"mirror tilt","score":0.9440000057220459}],"concepts":[{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.8118970394134521},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.7473127841949463},{"id":"https://openalex.org/C146599234","wikidata":"https://www.wikidata.org/wiki/Q511093","display_name":"Centroid","level":2,"score":0.6797712445259094},{"id":"https://openalex.org/C126780896","wikidata":"https://www.wikidata.org/wiki/Q899871","display_name":"Distortion (music)","level":4,"score":0.6525160670280457},{"id":"https://openalex.org/C165699331","wikidata":"https://www.wikidata.org/wiki/Q461533","display_name":"Wavefront","level":2,"score":0.603422999382019},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.49979233741760254},{"id":"https://openalex.org/C132771110","wikidata":"https://www.wikidata.org/wiki/Q506922","display_name":"Adaptive optics","level":2,"score":0.49472376704216003},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4328756332397461},{"id":"https://openalex.org/C150627866","wikidata":"https://www.wikidata.org/wiki/Q1076893","display_name":"Field of view","level":2,"score":0.42221730947494507},{"id":"https://openalex.org/C37649242","wikidata":"https://www.wikidata.org/wiki/Q932268","display_name":"System of measurement","level":2,"score":0.41336315870285034},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.16240686178207397},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.0955314040184021},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.0},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1117/1.602553","doi":"https://doi.org/10.1117/1.602553","is_oa":false,"landing_page_url":"https://doi.org/10.1117/1.602553","pdf_url":null,"source":{"id":"https://openalex.org/S175543413","display_name":"Optical Engineering","issn_l":"0091-3286","issn":["0091-3286","1560-2303"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-40","russia-white-list-3"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optical Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306087","display_name":"Semiconductor Research Corporation","ror":"https://ror.org/047z4n946"},{"id":"https://openalex.org/F4320310160","display_name":"University of Arizona","ror":"https://ror.org/03m2x1q45"},{"id":"https://openalex.org/F4320338291","display_name":"Sandia National Laboratories","ror":"https://ror.org/01apwpt12"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W102037933","https://openalex.org/W1659950126","https://openalex.org/W1661046048","https://openalex.org/W1972204915","https://openalex.org/W1972964308","https://openalex.org/W1975792416","https://openalex.org/W2010664990","https://openalex.org/W2022016349","https://openalex.org/W2051211405","https://openalex.org/W2053102108","https://openalex.org/W2080568174","https://openalex.org/W2104675787","https://openalex.org/W2897254212","https://openalex.org/W2986056076"],"related_works":["https://openalex.org/W2069693363","https://openalex.org/W1965431036","https://openalex.org/W2044359144","https://openalex.org/W3012176778","https://openalex.org/W2051557452","https://openalex.org/W2084958052","https://openalex.org/W2044804153","https://openalex.org/W2087161740","https://openalex.org/W7160173416","https://openalex.org/W3080976592"],"abstract_inverted_index":{"Misalignment":[0,49],"modes":[1,20,50,81,90],"are":[2,51,75,154],"combinations":[3],"of":[4,18,36,68,78,85,94,103,121,124,132,167,169],"rigid-body":[5],"perturbations":[6],"to":[7,32,40,148],"the":[8,34,83,92,130,164],"optical":[9,15],"elements":[10],"that":[11,128],"make":[12],"up":[13],"an":[14,119,133],"system.":[16],"Comparison":[17],"misalignment":[19,80,89],"associated":[21],"with":[22],"arbitrary":[23],"metrology":[24,38,72,86],"data":[25],"and":[26,87,115,162],"optical-system":[27,42],"performance":[28,43,97],"can":[29,63,107,143],"be":[30,144],"used":[31],"increase":[33],"sensitivity":[35],"those":[37],"measurements":[39,142,153],"specific":[41],"specifications":[44],"such":[45,170],"as":[46,65],"centroid":[47,149],"distortion.":[48],"compared":[52],"using":[53],"a":[54,66,101,105,110,171],"mean":[55],"squared":[56],"error":[57],"(MSE)":[58],"metric.":[59],"The":[60],"MSE":[61],"value":[62],"serve":[64],"figure":[67],"merit":[69],"by":[70],"which":[71],"measurement":[73],"parameters":[74],"optimized.":[76],"Selection":[77],"measurable":[79],"in":[82,91,129],"case":[84,93,131],"interesting":[88],"optical-":[95],"system":[96],"is":[98],"based":[99],"on":[100],"determination":[102],"whether":[104],"mode":[106],"fit":[108],"into":[109],"projection":[111,138],"camera,":[112,139],"given":[113],"actuator-stroke":[114],"mirror-tilt":[116],"bounds.":[117],"As":[118],"example":[120],"this":[122],"type":[123],"analysis,":[125],"we":[126],"find":[127],"extreme":[134],"ultraviolet":[135],"lithography":[136],"(EUVL)":[137],"exit-pupil":[140],"wavefront":[141],"made":[145],"more":[146],"sensitive":[147],"distortion":[150],"if":[151],"these":[152],"collected":[155],"at":[156],"optimized":[157],"field":[158,166],"positions":[159],"both":[160],"inside":[161],"outside":[163],"ring":[165],"view":[168],"camera.":[172]},"counts_by_year":[{"year":2019,"cited_by_count":1},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":1}],"updated_date":"2026-10-01T08:54:57.152042","created_date":"2016-06-24T00:00:00"}