{"id":"https://openalex.org/W2149604108","doi":null,"title":"Dimension-Dependent Mechanical Properties of Pure and Antiplasticized Polymer Nanostructures","display_name":"Dimension-Dependent Mechanical Properties of Pure and Antiplasticized Polymer Nanostructures","publication_year":2009,"publication_date":"2009-03-18","ids":{"openalex":"https://openalex.org/W2149604108","mag":"2149604108"},"language":"en","primary_location":{"id":"mag:2149604108","doi":null,"is_oa":false,"landing_page_url":"http://absimage.aps.org/image/MAR09/MWS_MAR09-2008-003132.pdf","pdf_url":null,"source":{"id":"https://openalex.org/S2764664775","display_name":"Bulletin of the American Physical Society","issn_l":"0003-0503","issn":["0003-0503"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310311721","host_organization_name":"Cambridge University Press","host_organization_lineage":["https://openalex.org/P4310311721","https://openalex.org/P4310311702"],"host_organization_lineage_names":["Cambridge University Press","University of Cambridge"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Bulletin of the American Physical Society","raw_type":null},"volume":null,"type":"article","indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5079849827","display_name":"Sean P. Delcambre","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Sean P. Delcambre","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065260816","display_name":"Robert A. Riggleman","orcid":"https://orcid.org/0000-0002-5434-4787","observed_orcids":["https://orcid.org/0000-0002-5434-4787"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Robert A. Riggleman","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-5434-4787","affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"Juan Pablo","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Juan Pablo","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5018918501","display_name":"Paul F. Nealey","orcid":"https://orcid.org/0000-0003-3889-142X","observed_orcids":["https://orcid.org/0000-0003-3889-142X"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Paul F. Nealey","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.2027486,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.8823000192642212,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.8823000192642212,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.03739999979734421,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11471","display_name":"Block Copolymer Self-Assembly","score":0.016599999740719795,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/polymer-nanostructures","display_name":"nanostructured polymers","score":0.8519999980926514},{"id":"https://openalex.org/keywords/capillary-forces","display_name":"capillary forces","score":0.9419999718666077},{"id":"https://openalex.org/keywords/elastic-modulus","display_name":"elastic modulus","score":0.609000027179718},{"id":"https://openalex.org/keywords/yield-stress","display_name":"yield stress","score":0.996999979019165},{"id":"https://openalex.org/keywords/confined-polymers","display_name":"confined polymers","score":0.6650000214576721},{"id":"https://openalex.org/keywords/electron-beam-lithography","display_name":"electron beam lithography","score":0.9750000238418579},{"id":"https://openalex.org/keywords/continuum-model","display_name":"continuum model","score":0.3449999988079071}],"concepts":[{"id":"https://openalex.org/C134406635","wikidata":"https://www.wikidata.org/wiki/Q1439684","display_name":"Photoresist","level":3,"score":0.9295159578323364},{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.7824591398239136},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7511919736862183},{"id":"https://openalex.org/C207789793","wikidata":"https://www.wikidata.org/wiki/Q3028070","display_name":"Critical dimension","level":2,"score":0.7227219343185425},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.67470383644104},{"id":"https://openalex.org/C186187911","wikidata":"https://www.wikidata.org/wiki/Q1093894","display_name":"Nanostructure","level":2,"score":0.5048342347145081},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4719335734844208},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.4693302512168884},{"id":"https://openalex.org/C196806460","wikidata":"https://www.wikidata.org/wiki/Q188603","display_name":"Capillary action","level":2,"score":0.46876686811447144},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.4492899775505066},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.41885918378829956},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.37689343094825745},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3436017632484436},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08482211828231812},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:2149604108","doi":null,"is_oa":false,"landing_page_url":"http://absimage.aps.org/image/MAR09/MWS_MAR09-2008-003132.pdf","pdf_url":null,"source":{"id":"https://openalex.org/S2764664775","display_name":"Bulletin of the American Physical Society","issn_l":"0003-0503","issn":["0003-0503"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310311721","host_organization_name":"Cambridge University Press","host_organization_lineage":["https://openalex.org/P4310311721","https://openalex.org/P4310311702"],"host_organization_lineage_names":["Cambridge University Press","University of Cambridge"],"type":"journal"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Bulletin of the American Physical Society","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2035237992","https://openalex.org/W2048137038","https://openalex.org/W2150307559","https://openalex.org/W2574482382","https://openalex.org/W1993012877","https://openalex.org/W2093531034","https://openalex.org/W2279826246","https://openalex.org/W3009770505","https://openalex.org/W1997782819","https://openalex.org/W3080935123"],"abstract_inverted_index":{"Preventing":[0],"the":[1,17,31,58,101,107,114,123,137,172,186,204],"collapse":[2,23,173,210],"of":[3,19,34,74,92,109,125,140,219],"high":[4],"aspect":[5,93],"ratio":[6,94],"photoresist":[7,90,104,209],"nanostructures":[8,160],"during":[9,116],"lithographic":[10,35],"processes":[11],"is":[12,131],"an":[13],"emerging":[14],"difficulty":[15],"in":[16,30,135],"fabrication":[18],"integrated":[20,45],"circuits.":[21],"Photoresist":[22],"leads":[24],"to":[25,65,96,207,226],"unwanted":[26],"masking":[27],"and":[28,164,189],"defects":[29],"etching":[32],"profile":[33],"patterns.":[36],"The":[37,72,216],"International":[38],"Technology":[39],"Roadmap":[40],"for":[41,88,152],"Semiconductors":[42],"stipulates":[43],"that":[44,81,129,198],"circuit":[46],"design":[47],"will":[48,63,77,83,119],"require":[49],"resist":[50,75],"half-pitches":[51],"as":[52,54,185],"small":[53],"35":[55],"nm":[56,69,142,213],"by":[57,70],"year":[59],"2010.":[60],"This":[61],"half-pitch":[62],"decrease":[64,79,227],"less":[66],"than":[67],"18":[68],"2016.":[71],"height":[73],"structures":[76,222],"also":[78],"such":[80,184],"there":[82,130],"be":[84,193],"a":[85,132,150],"consistent":[86],"need":[87],"dense":[89],"patterns":[91,105,115],"3":[95,231],"5":[97],"1":[98],".":[99],"As":[100],"spacing":[102],"between":[103],"decreases,":[106],"magnitude":[108],"capillary":[110,155,200],"forces":[111,156,201],"acting":[112],"on":[113,157],"rinse":[117],"drying":[118],"increase,":[120],"thereby":[121],"increasing":[122],"probability":[124],"collapse.":[126],"It":[127],"follows":[128],"considerable":[133],"interest":[134],"understanding":[136],"mechanical":[138,182],"behavior":[139],"sub-100":[141,212],"polymer":[143,159,221],"structures.":[144],"Our":[145],"research":[146],"group":[147],"has":[148],"developed":[149],"method":[151,178],"applying":[153],"precisely-defined":[154],"three-dimensional":[158],"fabricated":[161],"through":[162,176],"electron-beam":[163],"extreme":[165],"ultraviolet":[166],"interferometric":[167],"lithography":[168],"techniques.":[169],"By":[170],"coupling":[171],"data":[174],"collected":[175],"this":[177],"with":[179,228],"continuum":[180],"models,":[181],"properties":[183],"elastic":[187,217],"modulus":[188],"yield":[190],"stress":[191],"can":[192],"determined.":[194],"2":[195],"Evidence":[196],"exists":[197],"higher":[199],"are":[202],"not":[203],"sole":[205],"contributor":[206],"increased":[208],"at":[211],"length":[214],"scales.":[215],"moduli":[218],"confined":[220],"have":[223],"been":[224],"observed":[225],"critical":[229],"dimension.":[230]},"counts_by_year":[],"updated_date":"2026-09-27T08:07:27.782135","created_date":"2016-06-24T00:00:00"}