{"id":"https://openalex.org/W2149065971","doi":"https://doi.org/10.4028/www.scientific.net/msf.287-288.479","title":"Fractal Analysis of Island Structures of Al Thin Films","display_name":"Fractal Analysis of Island Structures of Al Thin Films","publication_year":1998,"publication_date":"1998-08-01","ids":{"openalex":"https://openalex.org/W2149065971","doi":"https://doi.org/10.4028/www.scientific.net/msf.287-288.479","mag":"2149065971"},"language":"en","primary_location":{"id":"doi:10.4028/www.scientific.net/msf.287-288.479","doi":"https://doi.org/10.4028/www.scientific.net/msf.287-288.479","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/msf.287-288.479","pdf_url":null,"source":{"id":"https://openalex.org/S87940674","display_name":"Materials science forum","issn_l":"0255-5476","issn":["0255-5476","1662-9752","1662-9760"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","poland-20"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Materials Science Forum","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://doi.org/10.4028/www.scientific.net/msf.287-288.479","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5066364433","display_name":"Eiji Kusano","orcid":"https://orcid.org/0000-0002-6782-1300","observed_orcids":["https://orcid.org/0000-0002-6782-1300"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"E. Kusano","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113606533","display_name":"Yasunobu KURODA","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Y. Kuroda","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"A. Satoh","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"A. Satoh","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"M. Kitagawa","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Kitagawa","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111758850","display_name":"Hidehito Nanto","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H. Nanto","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5110147483","display_name":"Akira KINBARA","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"A. Kinbara","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4944,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.67016843,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"287-288","issue":null,"first_page":"479","last_page":"482"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.7529000043869019,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.7529000043869019,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12141","display_name":"Fluid Dynamics and Thin Films","score":0.10989999771118164,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13531","display_name":"Surface and Thin Film Phenomena","score":0.0568000003695488,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/aluminum-thin-films","display_name":"aluminum thin films","score":0.9300000071525574},{"id":"https://openalex.org/keywords/fractal-dimension","display_name":"fractal dimension","score":0.9789999723434448},{"id":"https://openalex.org/keywords/fractal-analysis","display_name":"fractal analysis","score":0.8159999847412109},{"id":"https://openalex.org/keywords/titanium-underlayer","display_name":"titanium underlayer","score":0.7310000061988831},{"id":"https://openalex.org/keywords/magnetron-sputtering","display_name":"magnetron sputtering","score":0.9350000023841858},{"id":"https://openalex.org/keywords/surface-morphology","display_name":"surface morphology","score":0.7739999890327454},{"id":"https://openalex.org/keywords/growth-mode-transition","display_name":"growth mode transformation","score":0.7120000123977661},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"surface roughness","score":0.7739999890327454},{"id":"https://openalex.org/keywords/bearing-ratio","display_name":"bearing ratio","score":0.5600000023841858},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"atomic force microscopy","score":0.6039999723434448}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7902959585189819},{"id":"https://openalex.org/C162494671","wikidata":"https://www.wikidata.org/wiki/Q2845227","display_name":"Fractal analysis","level":4,"score":0.6747080087661743},{"id":"https://openalex.org/C40636538","wikidata":"https://www.wikidata.org/wiki/Q81392","display_name":"Fractal","level":2,"score":0.6213066577911377},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4182606041431427},{"id":"https://openalex.org/C26546657","wikidata":"https://www.wikidata.org/wiki/Q1412452","display_name":"Fractal dimension","level":3,"score":0.3124825060367584},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.28267788887023926},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.16230472922325134},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.14324477314949036}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.4028/www.scientific.net/msf.287-288.479","doi":"https://doi.org/10.4028/www.scientific.net/msf.287-288.479","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/msf.287-288.479","pdf_url":null,"source":{"id":"https://openalex.org/S87940674","display_name":"Materials science forum","issn_l":"0255-5476","issn":["0255-5476","1662-9752","1662-9760"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","poland-20"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Materials Science Forum","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.4028/www.scientific.net/msf.287-288.479","doi":"https://doi.org/10.4028/www.scientific.net/msf.287-288.479","is_oa":true,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/msf.287-288.479","pdf_url":null,"source":{"id":"https://openalex.org/S87940674","display_name":"Materials science forum","issn_l":"0255-5476","issn":["0255-5476","1662-9752","1662-9760"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","poland-20"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Materials Science Forum","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W3172684532","https://openalex.org/W2990172009","https://openalex.org/W6888735543","https://openalex.org/W2984808198","https://openalex.org/W2400855573","https://openalex.org/W1972287575","https://openalex.org/W2015892789","https://openalex.org/W2366732548","https://openalex.org/W2949743638","https://openalex.org/W2081792284"],"abstract_inverted_index":{"Micro-island-structures":[0],"with":[1,144],"a":[2,5,64,81,127,145,152],"diameter":[3],"in":[4,9],"sub-micron":[6],"range":[7,153],"obtained":[8,56,110,150],"the":[10,34,52,117,133],"initial":[11],"stage":[12],"of":[13,28,38,83,154,160],"thin":[14],"film":[15],"growth":[16,134],"are":[17,40],"interesting":[18],"to":[19,24,42,68,89,124,139,163],"modify":[20],"surface":[21,26,55,91,107],"morphology":[22],"or":[23],"vary":[25],"area":[27],"micro":[29,49],"devices.":[30],"In":[31,45,87],"such":[32,94],"applications,":[33],"size":[35],"and":[36],"similarity":[37,72],"islands":[39,50],"thought":[41],"be":[43],"important.":[44],"this":[46],"study,":[47],"Al":[48,84,129],"on":[51],"Ti":[53],"underlayer":[54],"by":[57,63,73,105,111],"magnetron":[58],"sputtering":[59],"have":[60,102],"been":[61,103],"estimated":[62,104],"fractal":[65,118,158],"analysis":[66],"method":[67],"estimate":[69],"their":[70],"statistical":[71],"using":[74,106],"an":[75],"atomic":[76],"force":[77],"microscopy":[78],"(AFM)":[79],"as":[80,95,126],"function":[82],"amount":[85,130],"deposited.":[86],"relation":[88],"this.":[90],"characteristic":[92],"factors":[93],"average":[96,98],"roughness,":[97],"diameter,":[99],"bearing":[100],"ratio":[101],"topology":[108],"data":[109],"AFM.":[112],"The":[113],"results":[114],"show":[115],"that":[116],"dimension":[119],"varies":[120],"from":[121,137],"about":[122,161],"2":[123],"3":[125],"deposited":[128],"increased,":[131],"showing":[132],"mode":[135],"changed":[136],"two-dimensional":[138],"three-dimensional.":[140],"An":[141],"island":[142],"structure":[143],"similar":[146],"topographical":[147],"shape":[148],"was":[149],"at":[151],"At":[155],"amounts,":[156],"yielding":[157],"dimensions":[159],"1.9":[162],"2.2.":[164]},"counts_by_year":[],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2016-06-24T00:00:00"}