{"id":"https://openalex.org/W2147755674","doi":"https://doi.org/10.1109/27.763060","title":"Evolution of the two-dimensional axisymmetric charged particle density in a radio frequency planar magnetron via a PIC-MCC simulation","display_name":"Evolution of the two-dimensional axisymmetric charged particle density in a radio frequency planar magnetron via a PIC-MCC simulation","publication_year":1999,"publication_date":"1999-01-01","ids":{"openalex":"https://openalex.org/W2147755674","doi":"https://doi.org/10.1109/27.763060","mag":"2147755674"},"language":"en","primary_location":{"id":"doi:10.1109/27.763060","doi":"https://doi.org/10.1109/27.763060","is_oa":false,"landing_page_url":"https://doi.org/10.1109/27.763060","pdf_url":null,"source":{"id":"https://openalex.org/S164692974","display_name":"IEEE Transactions on Plasma Science","issn_l":"0093-3813","issn":["0093-3813","1939-9375"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-3"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Plasma Science","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5068652880","display_name":"Tiberiu M Minea","orcid":"https://orcid.org/0000-0003-2886-3492","observed_orcids":["https://orcid.org/0000-0003-2886-3492"]},"institutions":[{"id":"https://openalex.org/I102197404","display_name":"Universit\u00e9 Paris-Sud","ror":"https://ror.org/028rypz17","country_code":"FR","type":"education","lineage":["https://openalex.org/I102197404","https://openalex.org/I277688954"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210134955","display_name":"Laboratoire de Physique des Gaz et des Plasmas","ror":"https://ror.org/04bgjpg77","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I277688954","https://openalex.org/I4210134955"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"T.M. Minea","raw_affiliation_strings":["Laboratoire de Physique des Gaz et Plasmas UA CNRS, Universit\u00e9 Paris Sud, Orsay, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire de Physique des Gaz et Plasmas UA CNRS, Universit\u00e9 Paris Sud, Orsay, France","institution_ids":["https://openalex.org/I102197404","https://openalex.org/I1294671590","https://openalex.org/I4210134955"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109317321","display_name":"J. Bretagne","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I102197404","display_name":"Universit\u00e9 Paris-Sud","ror":"https://ror.org/028rypz17","country_code":"FR","type":"education","lineage":["https://openalex.org/I102197404","https://openalex.org/I277688954"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210134955","display_name":"Laboratoire de Physique des Gaz et des Plasmas","ror":"https://ror.org/04bgjpg77","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I277688954","https://openalex.org/I4210134955"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. Bretagne","raw_affiliation_strings":["Laboratoire de Physique des Gaz et Plasmas UA CNRS, Universit\u00e9 Paris Sud, Orsay, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire de Physique des Gaz et Plasmas UA CNRS, Universit\u00e9 Paris Sud, Orsay, France","institution_ids":["https://openalex.org/I102197404","https://openalex.org/I1294671590","https://openalex.org/I4210134955"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111807399","display_name":"G\u00e9rard Gousset","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I102197404","display_name":"Universit\u00e9 Paris-Sud","ror":"https://ror.org/028rypz17","country_code":"FR","type":"education","lineage":["https://openalex.org/I102197404","https://openalex.org/I277688954"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210134955","display_name":"Laboratoire de Physique des Gaz et des Plasmas","ror":"https://ror.org/04bgjpg77","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I277688954","https://openalex.org/I4210134955"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"G. Gousset","raw_affiliation_strings":["Laboratoire de Physique des Gaz et Plasmas UA CNRS, Universit\u00e9 Paris Sud, Orsay, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire de Physique des Gaz et Plasmas UA CNRS, Universit\u00e9 Paris Sud, Orsay, France","institution_ids":["https://openalex.org/I102197404","https://openalex.org/I1294671590","https://openalex.org/I4210134955"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2645,"currency":"USD","value_usd":2645},"apc_paid":null,"fwci":2.5661,"has_fulltext":false,"cited_by_count":22,"citation_normalized_percentile":{"value":0.87508559,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":93},"biblio":{"volume":"27","issue":"1","first_page":"94","last_page":"95"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9014000296592712,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9014000296592712,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11175","display_name":"Gyrotron and Vacuum Electronics Research","score":0.07460000365972519,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.009499999694526196,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/planar-magnetron","display_name":"planar magnetron","score":0.8059999942779541},{"id":"https://openalex.org/keywords/radio-frequency-discharge","display_name":"RF discharge","score":0.8320000171661377},{"id":"https://openalex.org/keywords/charged-particle-density","display_name":"charged particle density","score":0.906000018119812},{"id":"https://openalex.org/keywords/electron-density-distribution","display_name":"electron density distribution","score":0.8569999933242798},{"id":"https://openalex.org/keywords/ion-density-profiles","display_name":"ion density profiles","score":0.9980000257492065},{"id":"https://openalex.org/keywords/axisymmetric-plasma","display_name":"axisymmetric plasma","score":0.75},{"id":"https://openalex.org/keywords/pic-mcc-simulation","display_name":"PIC/MCC simulation","score":0.7429999709129333},{"id":"https://openalex.org/keywords/parallel-computing","display_name":"parallel computing","score":0.8019999861717224},{"id":"https://openalex.org/keywords/self-consistent-plasma-model","display_name":"self-consistent plasma model","score":0.9440000057220459}],"concepts":[{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.7413691282272339},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.689483642578125},{"id":"https://openalex.org/C123408415","wikidata":"https://www.wikidata.org/wiki/Q194154","display_name":"Cavity magnetron","level":4,"score":0.6339774131774902},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.6057224869728088},{"id":"https://openalex.org/C30475298","wikidata":"https://www.wikidata.org/wiki/Q909554","display_name":"Computational physics","level":1,"score":0.5928578972816467},{"id":"https://openalex.org/C33026886","wikidata":"https://www.wikidata.org/wiki/Q593950","display_name":"Rotational symmetry","level":2,"score":0.5116098523139954},{"id":"https://openalex.org/C125485243","wikidata":"https://www.wikidata.org/wiki/Q905186","display_name":"Electron density","level":3,"score":0.5058519840240479},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4783632159233093},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.45916494727134705},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.43958359956741333},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.43878379464149475},{"id":"https://openalex.org/C35048267","wikidata":"https://www.wikidata.org/wiki/Q587553","display_name":"Charged particle","level":3,"score":0.4252716600894928},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.3862806558609009},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.22544929385185242},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.14000174403190613},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.12368199229240417},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.12116757035255432},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0753818154335022},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.0},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.0},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/27.763060","doi":"https://doi.org/10.1109/27.763060","is_oa":false,"landing_page_url":"https://doi.org/10.1109/27.763060","pdf_url":null,"source":{"id":"https://openalex.org/S164692974","display_name":"IEEE Transactions on Plasma Science","issn_l":"0093-3813","issn":["0093-3813","1939-9375"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-3"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Plasma Science","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1966562777","https://openalex.org/W1969672791","https://openalex.org/W1983655446","https://openalex.org/W2032227296","https://openalex.org/W2039841369","https://openalex.org/W2062623133"],"related_works":["https://openalex.org/W1567425650","https://openalex.org/W1984051126","https://openalex.org/W2744541535","https://openalex.org/W7099739148","https://openalex.org/W25509979","https://openalex.org/W2189383246","https://openalex.org/W7096084669","https://openalex.org/W1613986227","https://openalex.org/W1972780135","https://openalex.org/W2018711622"],"abstract_inverted_index":{"A":[0],"two-dimensional":[1],"(2-D)":[2],"time":[3],"resolved":[4],"PIC-MCC":[5],"simulation":[6],"implemented":[7],"on":[8],"a":[9],"parallel":[10],"machine":[11],"is":[12],"developed":[13],"for":[14],"the":[15,26],"modeling":[16],"of":[17,25],"an":[18],"RF":[19],"planar":[20],"magnetron":[21],"discharge.":[22],"Preliminary":[23],"results":[24],"self-consistent":[27],"plasma":[28],"model":[29],"are":[30,39],"presented.":[31],"Instantaneous":[32],"electron":[33],"and":[34],"ion":[35],"2-D":[36],"density":[37],"distributions":[38],"reported.":[40]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-10-12T09:40:04.860316","created_date":"2016-06-24T00:00:00"}