{"id":"https://openalex.org/W2147308290","doi":"https://doi.org/10.4028/www.scientific.net/msf.287-288.243","title":"High Resolution TEM Investigations of Nanostructures in Hard Amorphous Carbon Films","display_name":"High Resolution TEM Investigations of Nanostructures in Hard Amorphous Carbon Films","publication_year":1998,"publication_date":"1998-08-01","ids":{"openalex":"https://openalex.org/W2147308290","doi":"https://doi.org/10.4028/www.scientific.net/msf.287-288.243","mag":"2147308290"},"language":"en","primary_location":{"id":"doi:10.4028/www.scientific.net/msf.287-288.243","doi":"https://doi.org/10.4028/www.scientific.net/msf.287-288.243","is_oa":false,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/msf.287-288.243","pdf_url":null,"source":{"id":"https://openalex.org/S87940674","display_name":"Materials science forum","issn_l":"0255-5476","issn":["0255-5476","1662-9752","1662-9760"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","poland-20"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Materials Science Forum","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5000682120","display_name":"H. Banzhof","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H. Banzhof","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"K. Brand","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I78650965","display_name":"Technische Universit\u00e4t Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"K. Brand","raw_affiliation_strings":["Technische Universit\u00e4t Dresden","[Technische Universitat, Dresden]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Technische Universit\u00e4t Dresden","institution_ids":["https://openalex.org/I78650965"]},{"raw_affiliation_string":"[Technische Universitat, Dresden]","institution_ids":["https://openalex.org/I78650965"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024044847","display_name":"Hannes Lichte","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I78650965","display_name":"Technische Universit\u00e4t Dresden","ror":"https://ror.org/042aqky30","country_code":"DE","type":"education","lineage":["https://openalex.org/I78650965"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. Lichte","raw_affiliation_strings":["Technische Universit\u00e4t Dresden","[Technische Universitat, Dresden]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Technische Universit\u00e4t Dresden","institution_ids":["https://openalex.org/I78650965"]},{"raw_affiliation_string":"[Technische Universitat, Dresden]","institution_ids":["https://openalex.org/I78650965"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026480433","display_name":"A. Luft","orcid":"https://orcid.org/0000-0002-9322-8463","observed_orcids":["https://orcid.org/0000-0002-9322-8463"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"A. Luft","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028775503","display_name":"Frank Meyer","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"F.-C. Meyer","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111433015","display_name":"H.\u2010J. Scheibe","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H.-J. Scheibe","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062512505","display_name":"Bernd Schultrich","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210151842","display_name":"Fraunhofer Institute for Material and Beam Technology","ror":"https://ror.org/05h8wjh50","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210151842","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Bernd Schultrich","raw_affiliation_strings":["Fraunhofer Institute Material and Beam Technology Dresden, FhG IWS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute Material and Beam Technology Dresden, FhG IWS","institution_ids":["https://openalex.org/I4210151842"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031074759","display_name":"Holger Ziegele","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"H. Ziegele","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.1443,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.46203905,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"287-288","issue":null,"first_page":"243","last_page":"246"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10857","display_name":"Advanced Electron Microscopy Techniques and Applications","score":0.7221999764442444,"subfield":{"id":"https://openalex.org/subfields/1315","display_name":"Structural Biology"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},"topics":[{"id":"https://openalex.org/T10857","display_name":"Advanced Electron Microscopy Techniques and Applications","score":0.7221999764442444,"subfield":{"id":"https://openalex.org/subfields/1315","display_name":"Structural Biology"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.1860000044107437,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.024299999698996544,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/amorphous-carbon-films","display_name":"amorphous carbon films","score":0.8790000081062317},{"id":"https://openalex.org/keywords/sp3-sp2-bonding-ratio","display_name":"sp3/sp2 bonding ratio","score":0.7310000061988831},{"id":"https://openalex.org/keywords/nanostructured-carbon","display_name":"nanostructured carbon","score":0.5730000138282776},{"id":"https://openalex.org/keywords/fullerene-like-nanoparticles","display_name":"fullerene-like nanoparticles","score":0.8410000205039978},{"id":"https://openalex.org/keywords/nanotubes","display_name":"nanotubes","score":0.925000011920929},{"id":"https://openalex.org/keywords/density-modulation","display_name":"density modulation","score":0.4690000116825104},{"id":"https://openalex.org/keywords/multilayer-stacks","display_name":"multilayer stacks","score":0.8679999709129333},{"id":"https://openalex.org/keywords/x-ray-mirrors","display_name":"X-ray mirrors","score":0.8560000061988831},{"id":"https://openalex.org/keywords/electron-emitters","display_name":"electron emitters","score":0.8659999966621399},{"id":"https://openalex.org/keywords/phase-contrast","display_name":"phase contrast","score":0.578000009059906},{"id":"https://openalex.org/keywords/electron-diffraction","display_name":"electron diffraction","score":0.48500001430511475},{"id":"https://openalex.org/keywords/electron-energy-loss-spectroscopy","display_name":"electron energy loss spectroscopy","score":0.7459999918937683}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8674886226654053},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.6652572154998779},{"id":"https://openalex.org/C201931942","wikidata":"https://www.wikidata.org/wiki/Q798012","display_name":"Amorphous carbon","level":3,"score":0.5964085459709167},{"id":"https://openalex.org/C186187911","wikidata":"https://www.wikidata.org/wiki/Q1093894","display_name":"Nanostructure","level":2,"score":0.5863937735557556},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5828530192375183},{"id":"https://openalex.org/C140205800","wikidata":"https://www.wikidata.org/wiki/Q5860","display_name":"Carbon fibers","level":3,"score":0.5231336951255798},{"id":"https://openalex.org/C3020199158","wikidata":"https://www.wikidata.org/wiki/Q210521","display_name":"High resolution","level":2,"score":0.4156167209148407},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.17139941453933716},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.14049500226974487},{"id":"https://openalex.org/C104779481","wikidata":"https://www.wikidata.org/wiki/Q50707","display_name":"Composite number","level":2,"score":0.10534399747848511},{"id":"https://openalex.org/C62649853","wikidata":"https://www.wikidata.org/wiki/Q199687","display_name":"Remote sensing","level":1,"score":0.09928235411643982},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.4028/www.scientific.net/msf.287-288.243","doi":"https://doi.org/10.4028/www.scientific.net/msf.287-288.243","is_oa":false,"landing_page_url":"https://doi.org/10.4028/www.scientific.net/msf.287-288.243","pdf_url":null,"source":{"id":"https://openalex.org/S87940674","display_name":"Materials science forum","issn_l":"0255-5476","issn":["0255-5476","1662-9752","1662-9760"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1","poland-20"],"host_organization":"https://openalex.org/P4310317839","host_organization_name":"Trans Tech Publications","host_organization_lineage":["https://openalex.org/P4310317839"],"host_organization_lineage_names":["Trans Tech Publications"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Materials Science Forum","raw_type":"journal-article"},{"id":"pmh:oai:fraunhofer.de:PX-17145","doi":null,"is_oa":false,"landing_page_url":"http://publica.fraunhofer.de/documents/PX-17145.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400801","display_name":"Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Fraunhofer IWS","raw_type":"Conference Paper"},{"id":"pmh:oai:publica.fraunhofer.de:publica/330553","doi":null,"is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/330553","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W7009510232","https://openalex.org/W7145264319","https://openalex.org/W7038276472","https://openalex.org/W2031463198","https://openalex.org/W7015517833","https://openalex.org/W6982127168","https://openalex.org/W7074705511","https://openalex.org/W7015368722","https://openalex.org/W1534051442","https://openalex.org/W2744068354"],"abstract_inverted_index":{"Amorphous":[0,52],"carbon":[1,236,270],"films":[2,53],"allow":[3],"the":[4,21,30,47,70,99,102,131,183,235,243,299,313,334,347,359,363,382,386,391,399,414,428,431],"simultaneous":[5],"realization":[6],"of":[7,50,61,67,98,130,141,189,191,265,285,362,385,393,398,406,430],"sp":[8,14,22,26,103,107],"3":[9,23,104,280,306],"(diamond)":[11],"bonds":[12],"and":[13,40,89,115,160,232,396,440],"2":[15,27,108],"(graphite)":[17],"bonds.":[18],"By":[19,95,403],"adjusting":[20],":":[25,106],"ratio,":[29],"film":[31,237],"properties":[32],"may":[33,118,166,309],"be":[34,44,119,136,167,248,310,410],"varied":[35],"over":[36],"a":[37,83,155,179,262,294,320],"broad":[38],"range":[39],"in":[41,198,209,220],"this":[42],"way":[43],"adapted":[45,311],"to":[46,92,123,234,247,312,419],"special":[48,170,370],"demands":[49],"applications.":[51,94],"appear":[54],"featureless,":[55],"but":[56],"thorough":[57],"investigations":[58],"by":[59,169,443],"means":[60],"electron":[62,171,218,251,351,356,372,379,400,432],"microscopy":[63,357],"reveal":[64],"two":[65],"kinds":[66],"structurization":[68,181],"on":[69,182,242],"nanometer":[71,184],"scale":[72],"[CDJ":[73],"91,":[74],"DJJ":[75],"90,":[76],"SXT":[77],"96,":[78],"VD":[79],"96],":[80],"which":[81],"open":[82],"wide":[84],"field":[85],"for":[86,138,150,229,269,427,437],"Structural":[87,315],"optimization":[88],"furthermore":[90],"lead":[91],"new":[93],"periodic":[96],"alteration":[97],"deposition":[100,177],"conditions":[101,178],"ratio":[110],"(and":[111],"hence":[112],"density,":[113],"Stiffness":[114],"so":[116],"on)":[117],"changed":[120],"from":[121,213],"layer":[122],"layer.":[124],"Such":[125],"density":[126,266],"modulated":[127],"multilayer":[128],"stacks":[129],"same":[132,300],"material":[133],"can":[134,409],"e.g.":[135,366],"used":[137],"X-ray":[139],"mirrors":[140],"high":[142],"stability":[143],"against":[144],"diffusional":[145],"degradation":[146],"[DHM":[147],"95].":[148,205,424],"Presupposition":[149],"such":[151,210],"an":[152,199],"application":[153,216],"are":[154,434],"very":[156,161],"regular":[157],"stacking":[158],"sequence":[159],"smooth":[162],"interfaces.":[163],"Both":[164],"aspects":[165],"controlled":[168],"microscopic":[172,252],"techniques.":[173],"Under":[174],"constant":[175],"(special)":[176],"lateral":[180,283],"level":[185],"was":[186],"found":[187],"consisting":[188],"patches":[190],"fullerene-like":[192],"nanoparticles":[193],"(nanoonions":[194],"or":[195],"nanotubes)":[196],"dispersed":[197],"amorphous":[200],"matrix":[201],"[AKZ":[202],"97,":[203,422],"SSB":[204],"The":[206],"large":[207,321],"interest":[208],"Structures":[211],"stems":[212],"their":[214],"possible":[215],"as":[217],"emitters":[219],"flat":[221],"panel":[222],"displays.":[223],"For":[224,331],"these":[225],"TEM":[226],"investigations,":[227],"foils":[228],"observation":[230,361],"parallel":[231],"perpendicular":[233],"were":[238],"prepared.":[239],"In":[240],"dependence":[241],"different":[244],"structural":[245],"details":[246],"investigated,":[249],"optimized":[250],"methods":[253],"have":[254],"been":[255],"applied:":[256],"-":[257,290,328,353,377],"Scattering":[258],"absorption":[259],"contrast":[260,292,324],"allows":[261,358],"rough":[263],"visualization":[264],"variations":[267],"(e.g.":[268],"investigation":[271],"with":[272,346,367],"Philips":[273,348,368,415],"CM200":[274,349,416],"FEGIST:":[275,417],"\u0394p":[276,302],"\u2243":[277,287,303,341],"0.5":[278],"g/cm":[279,305],"at":[282],"resolution":[284,333,355,408],"\u0394x":[286,340,374],"1":[288],"nm).":[289,330],"Phase":[291],"shows":[293],"much":[295],"higher":[296,332],"sensitivity":[297],"(for":[298,413],"microscope:":[301,373],"0.05":[304],").":[307],"It":[308],"characteristic":[314],"length:":[316],"With":[317],"strong":[318],"underfocussing":[319],"area":[322],"phase":[323,395],"is":[325,337,344],"visible":[326],"(2":[327],"10":[329],"Scherzer":[335],"focus":[336],"recommended;":[338],"then":[339],"0.24":[342],"nm":[343],"achievable":[345],"FEGIST":[350],"microscope.":[352],"High":[354],"direct":[360],"atomic":[364],"arrangement,":[365],"CM30FEG/UT":[369],"Tubingen":[371],"\u22430.17":[375],"nm.":[376],"Off-axis":[378],"holograms":[380],"contain":[381],"complete":[383],"information":[384],"complex":[387],"image":[388,438,441],"wave":[389],"allowing":[390],"reconstruction":[392],"both":[394],"amplitude":[397],"object":[401],"wave.":[402],"computer":[404,445],"correction":[405],"aberrations,":[407],"further":[411],"increased":[412],"down":[418],"0.13":[420],"nm)[H":[421],"ORL":[423],"Important":[425],"tools":[426],"evaluation":[429],"micrographs":[433],"Fourier":[435],"techniques":[436],"analysis":[439],"interpretation":[442],"accompanying":[444],"simulations.":[446]},"counts_by_year":[],"updated_date":"2026-11-08T12:12:28.789561","created_date":"2016-06-24T00:00:00"}