{"id":"https://openalex.org/W2145442192","doi":"https://doi.org/10.1039/jm9910101045","title":"Photogenerated amines and their use in the design of a positive-tone resist material based on electrophilic aromatic substitution","display_name":"Photogenerated amines and their use in the design of a positive-tone resist material based on electrophilic aromatic substitution","publication_year":1991,"publication_date":"1991-01-01","ids":{"openalex":"https://openalex.org/W2145442192","doi":"https://doi.org/10.1039/jm9910101045","mag":"2145442192"},"language":"en","primary_location":{"id":"doi:10.1039/jm9910101045","doi":"https://doi.org/10.1039/jm9910101045","is_oa":false,"landing_page_url":"https://doi.org/10.1039/jm9910101045","pdf_url":null,"source":{"id":"https://openalex.org/S45305740","display_name":"Journal of Materials Chemistry","issn_l":"0959-9428","issn":["0959-9428","1364-5501"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310320556","host_organization_name":"Royal Society of Chemistry","host_organization_lineage":["https://openalex.org/P4310320556"],"host_organization_lineage_names":["Royal Society of Chemistry"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"J. Mater. Chem.","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5058402123","display_name":"Stephen Matuszczak","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Stephen Matuszczak","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111690484","display_name":"James F. Cameron","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"James F. Cameron","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002152167","display_name":"Jean M. J. Fr\u00e9chet","orcid":"https://orcid.org/0000-0001-6419-0163","observed_orcids":["https://orcid.org/0000-0001-6419-0163"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jean M. J. Fr\u00e9chet","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5027381116","display_name":"Carlton Grant Willson","orcid":"https://orcid.org/0000-0002-2072-3981","observed_orcids":["https://orcid.org/0000-0002-2072-3981"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"C. Grant Wilson","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.8556,"has_fulltext":false,"cited_by_count":25,"citation_normalized_percentile":{"value":0.85324735,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":96},"biblio":{"volume":"1","issue":"6","first_page":"1045","last_page":"1050"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9541000127792358,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9541000127792358,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12570","display_name":"Photopolymerization techniques and applications","score":0.04309999942779541,"subfield":{"id":"https://openalex.org/subfields/1605","display_name":"Organic Chemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11708","display_name":"Photochromic and Fluorescence Chemistry","score":0.000699999975040555,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/positive-resist","display_name":"positive resist","score":0.734000027179718},{"id":"https://openalex.org/keywords/electrophilic-aromatic-substitution","display_name":"electrophilic aromatic substitution","score":0.9570000171661377},{"id":"https://openalex.org/keywords/latent-image","display_name":"latent image","score":0.8349999785423279},{"id":"https://openalex.org/keywords/image-reversal","display_name":"image reversal","score":0.9010000228881836},{"id":"https://openalex.org/keywords/uv-lithography","display_name":"UV lithography","score":0.5770000219345093},{"id":"https://openalex.org/keywords/resist-sensitivity","display_name":"resist sensitivity","score":0.4650000035762787}],"concepts":[{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.895766019821167},{"id":"https://openalex.org/C183882617","wikidata":"https://www.wikidata.org/wiki/Q3046749","display_name":"Cationic polymerization","level":2,"score":0.6554113626480103},{"id":"https://openalex.org/C131779359","wikidata":"https://www.wikidata.org/wiki/Q471875","display_name":"Amine gas treating","level":2,"score":0.654516339302063},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.5978832840919495},{"id":"https://openalex.org/C15920480","wikidata":"https://www.wikidata.org/wiki/Q421281","display_name":"Copolymer","level":3,"score":0.5970589518547058},{"id":"https://openalex.org/C205372313","wikidata":"https://www.wikidata.org/wiki/Q355645","display_name":"Latent image","level":3,"score":0.5565308928489685},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.5521880984306335},{"id":"https://openalex.org/C2778142098","wikidata":"https://www.wikidata.org/wiki/Q15779","display_name":"Toluene","level":2,"score":0.5517603158950806},{"id":"https://openalex.org/C184651966","wikidata":"https://www.wikidata.org/wiki/Q906356","display_name":"Aqueous solution","level":2,"score":0.5348922610282898},{"id":"https://openalex.org/C188027245","wikidata":"https://www.wikidata.org/wiki/Q750446","display_name":"Polymer chemistry","level":1,"score":0.4744078814983368},{"id":"https://openalex.org/C50027330","wikidata":"https://www.wikidata.org/wiki/Q908086","display_name":"Electrophile","level":3,"score":0.4498370289802551},{"id":"https://openalex.org/C75473681","wikidata":"https://www.wikidata.org/wiki/Q188651","display_name":"Photochemistry","level":1,"score":0.39631229639053345},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3839665651321411},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.3531218469142914},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.1956191062927246},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1039/jm9910101045","doi":"https://doi.org/10.1039/jm9910101045","is_oa":false,"landing_page_url":"https://doi.org/10.1039/jm9910101045","pdf_url":null,"source":{"id":"https://openalex.org/S45305740","display_name":"Journal of Materials Chemistry","issn_l":"0959-9428","issn":["0959-9428","1364-5501"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310320556","host_organization_name":"Royal Society of Chemistry","host_organization_lineage":["https://openalex.org/P4310320556"],"host_organization_lineage_names":["Royal Society of Chemistry"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"J. Mater. Chem.","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W657666059","https://openalex.org/W1963759802","https://openalex.org/W1988770626","https://openalex.org/W1993474204","https://openalex.org/W2015911412","https://openalex.org/W2016529169","https://openalex.org/W2017916715","https://openalex.org/W2020284422","https://openalex.org/W2020606611","https://openalex.org/W2029999474","https://openalex.org/W2053319891","https://openalex.org/W2062156951","https://openalex.org/W2064039337","https://openalex.org/W2067589820","https://openalex.org/W2069596055","https://openalex.org/W2078325785","https://openalex.org/W2089744418","https://openalex.org/W2483366376","https://openalex.org/W2952662727","https://openalex.org/W2953198311","https://openalex.org/W4248980256"],"related_works":["https://openalex.org/W2049064741","https://openalex.org/W2087906923","https://openalex.org/W1973616612","https://openalex.org/W2069678656","https://openalex.org/W2155010853","https://openalex.org/W2485326493","https://openalex.org/W239620692","https://openalex.org/W2004324872","https://openalex.org/W2089840491","https://openalex.org/W1981929096"],"abstract_inverted_index":{"The":[0,22,117],"photogeneration":[1],"of":[2,41,57,89,92,104,109,138,148,181],"an":[3,42,48,84,161],"active":[4],"amine":[5,85,110,131,153],"within":[6,113],"a":[7,17,27,54,76,90,105,142,178],"cationically":[8,167],"curable":[9],"polymer":[10,115,140],"coating":[11],"can":[12,170],"be":[13,171],"used":[14],"to":[15,64,71,95,165],"design":[16],"novel":[18],"positive-tone":[19],"resist":[20,23,73,94],"material.":[21],"is":[24,69,120,128],"based":[25,159],"on":[26,160],"copolymer":[28,45],"containing":[29],"4-hydroxystyrene":[30],"as":[31,33],"well":[32],"4-acetoxymethylstyrene":[34],"units;":[35],"when":[36],"heated":[37],"in":[38,101,145,173],"the":[39,72,93,102,114,139,149],"presence":[40],"acid,":[43,68,126],"this":[44,124],"crosslinks":[46],"through":[47],"electrophilic":[49],"aromatic":[50],"substitution":[51],"process.":[52],"Therefore,":[53],"small":[55],"amount":[56],"2-nitrobenzyl":[58],"toluene-p-sulphonate,":[59],"that":[60,82],"decomposes":[61],"upon":[62,86],"heating":[63],"produce":[65],"toluene":[66],"sulphonic":[67],"added":[70],"along":[74],"with":[75],"thermally":[77],"stable":[78],"but":[79,135],"photoactive":[80],"carbamate":[81],"liberates":[83,125],"irradiation.":[87],"Exposure":[88],"film":[91,150],"254":[96],"nm":[97],"UV":[98],"radiation":[99],"results":[100],"formation":[103],"latent":[106,118],"image":[107,119],"consisting":[108],"molecules":[111],"dispersed":[112],"film.":[116],"\u2018fixed\u2019":[121],"by":[122,141],"heating;":[123],"which":[127],"neutralized":[129],"where":[130,151],"has":[132,154],"been":[133,155],"formed,":[134],"causes":[136],"crosslinking":[137],"cationic":[143],"process":[144],"those":[146],"areas":[147],"no":[152],"produced.":[156],"This":[157],"resist,":[158],"image-reversal":[162],"concept":[163],"applicable":[164],"numerous":[166],"activated":[168],"resists,":[169],"developed":[172],"aqueous":[174],"base":[175],"and":[176],"shows":[177],"good":[179],"sensitivity":[180],"ca.":[182],"19":[183],"mJ":[184],"cm\u20132.":[185]},"counts_by_year":[{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2012,"cited_by_count":1}],"updated_date":"2026-09-27T08:07:27.782135","created_date":"2016-06-24T00:00:00"}