{"id":"https://openalex.org/W214503246","doi":"https://doi.org/10.4229/27theupvsec2012-2cv.6.52","title":"Advanced Anti-Reflection and Passivation Layer Systems Produced by High-Power Plasma in the New Manz PECVD System","display_name":"Advanced Anti-Reflection and Passivation Layer Systems Produced by High-Power Plasma in the New Manz PECVD System","publication_year":2012,"publication_date":"2012-01-01","ids":{"openalex":"https://openalex.org/W214503246","doi":"https://doi.org/10.4229/27theupvsec2012-2cv.6.52","mag":"214503246"},"language":"en","primary_location":{"id":"pmh:oai:fraunhofer.de:N-236585","doi":null,"is_oa":true,"landing_page_url":"http://publica.fraunhofer.de/documents/N-236585.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Fraunhofer ISE","raw_type":"Conference Paper"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://publica.fraunhofer.de/documents/N-236585.html","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Schwarz, F.","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Schwarz, F.","raw_affiliation_strings":["Fraunhofer Society, Munich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Society, Munich, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113499801","display_name":"R. Beckmann","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Beckmann, R.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048734983","display_name":"Norbert Kohn","orcid":"https://orcid.org/0009-0002-0209-5229","observed_orcids":["https://orcid.org/0009-0002-0209-5229"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kohn, N.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035629439","display_name":"S. N\u00f6lker","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"N\u00f6lker, S.","raw_affiliation_strings":["Fraunhofer Society, Munich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Society, Munich, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034812143","display_name":"S. Kastl","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kastl, S.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067475862","display_name":"Marc Hofmann","orcid":"https://orcid.org/0000-0001-9661-9243","observed_orcids":["https://orcid.org/0000-0001-9661-9243"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hofmann, M.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015437514","display_name":"Thomas Pernau","orcid":"https://orcid.org/0000-0001-9398-0965","observed_orcids":["https://orcid.org/0000-0001-9398-0965"]},"institutions":[{"id":"https://openalex.org/I4923324","display_name":"Fraunhofer-Gesellschaft","ror":"https://ror.org/05hkkdn48","country_code":"DE","type":"government","lineage":["https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Pernau, T.","raw_affiliation_strings":["Fraunhofer Society, Munich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Society, Munich, Germany","institution_ids":["https://openalex.org/I4923324"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085203273","display_name":"H.N. Wanka","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Wanka, H.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5002819290","display_name":"J. Rentsch","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Rentsch, J.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.8125,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.61879235,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1938","last_page":"1941"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9648000001907349,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9648000001907349,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.020999999716877937,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.00139999995008111,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/antireflection-coatings","display_name":"antireflection coatings","score":0.8700000047683716},{"id":"https://openalex.org/keywords/passivation-layer","display_name":"passivation layer","score":0.8240000009536743},{"id":"https://openalex.org/keywords/high-power-plasma","display_name":"high-power plasma","score":0.8109999895095825},{"id":"https://openalex.org/keywords/plasma-enhanced-chemical-vapor-deposition","display_name":"plasma-enhanced chemical vapor deposition","score":0.9470000267028809},{"id":"https://openalex.org/keywords/solar-cells","display_name":"solar cells","score":0.6690000295639038},{"id":"https://openalex.org/keywords/minority-carrier-lifetime","display_name":"minority carrier lifetime","score":0.902999997138977},{"id":"https://openalex.org/keywords/surface-recombination-velocity","display_name":"surface recombination velocity","score":0.9480000138282776},{"id":"https://openalex.org/keywords/alumina","display_name":"alumina","score":0.7699999809265137},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"silicon nitride","score":0.39399999380111694},{"id":"https://openalex.org/keywords/coating-quality","display_name":"coating quality","score":0.609000027179718},{"id":"https://openalex.org/keywords/film-forming-mechanism","display_name":"film-forming mechanism","score":0.4519999921321869}],"concepts":[{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.9369393587112427},{"id":"https://openalex.org/C38347018","wikidata":"https://www.wikidata.org/wiki/Q905958","display_name":"Plasma-enhanced chemical vapor deposition","level":3,"score":0.8967780470848083},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7225296497344971},{"id":"https://openalex.org/C9395851","wikidata":"https://www.wikidata.org/wiki/Q177929","display_name":"Stack (abstract data type)","level":2,"score":0.6533312797546387},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.6495199799537659},{"id":"https://openalex.org/C2781448156","wikidata":"https://www.wikidata.org/wiki/Q1570182","display_name":"Coating","level":2,"score":0.62846440076828},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5905924439430237},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.5826985836029053},{"id":"https://openalex.org/C198865614","wikidata":"https://www.wikidata.org/wiki/Q5046374","display_name":"Carrier lifetime","level":3,"score":0.4719580411911011},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.46425727009773254},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.4529520273208618},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3460931181907654},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.321927011013031},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2556348145008087},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.1612478494644165},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"pmh:oai:fraunhofer.de:N-236585","doi":null,"is_oa":true,"landing_page_url":"http://publica.fraunhofer.de/documents/N-236585.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Fraunhofer ISE","raw_type":"Conference Paper"},{"id":"pmh:oai:publica.fraunhofer.de:publica/378273","doi":null,"is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/378273","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"},{"id":"doi:10.4229/27theupvsec2012-2cv.6.52","doi":"https://doi.org/10.4229/27theupvsec2012-2cv.6.52","is_oa":true,"landing_page_url":"https://doi.org/10.4229/27theupvsec2012-2cv.6.52","pdf_url":null,"source":{"id":"https://openalex.org/S7407053010","display_name":"EU PVSEC","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article-journal"},{"id":"mag:214503246","doi":null,"is_oa":false,"landing_page_url":"https://www.eupvsec-proceedings.com/proceedings?paper=15447","pdf_url":null,"source":{"id":"https://openalex.org/S4306421319","display_name":"World Conference on Photovoltaic Energy Conversion","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"World Conference on Photovoltaic Energy Conversion","raw_type":null}],"best_oa_location":{"id":"pmh:oai:fraunhofer.de:N-236585","doi":null,"is_oa":true,"landing_page_url":"http://publica.fraunhofer.de/documents/N-236585.html","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Fraunhofer ISE","raw_type":"Conference Paper"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.5690000057220459,"display_name":"Affordable and clean energy"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2300076645","https://openalex.org/W2000923380","https://openalex.org/W7067235620","https://openalex.org/W6940119881","https://openalex.org/W2078119145","https://openalex.org/W2948187434","https://openalex.org/W7008036751","https://openalex.org/W2016643704","https://openalex.org/W2034956261","https://openalex.org/W4366115180"],"abstract_inverted_index":{"Manz":[0],"has":[1,87],"developed":[2,56],"a":[3,24,31,137],"novel":[4],"plasma":[5,27,38,57],"enhanced":[6],"chemical":[7],"vapour":[8],"deposition":[9,73],"(PECVD)":[10],"system":[11,86],"combining":[12],"both,":[13],"high":[14,25,35,75],"productivity":[15],"and":[16,94,102,126,151,156],"best":[17],"coating":[18,92],"quality.":[19],"It":[20],"is":[21,142],"based":[22],"on":[23,100,124,128],"power":[26,36],"source":[28],"(HPP)":[29],"in":[30,47],"static":[32],"process.":[33],"At":[34],"densities,":[37],"properties":[39],"change":[40],"as":[41],"compared":[42],"to":[43,117,163,170],"conventional":[44],"equipment":[45],"resulting":[46],"an":[48,133,171],"improved":[49],"film":[50,72],"forming":[51],"mechanism.":[52],"In":[53,77],"the":[54,68,82,85],"newly":[55],"source,":[58],"gas":[59],"conversion":[60],"factors":[61],"above":[62],"80%":[63],"could":[64,120,166],"be":[65,121,167],"observed,":[66],"being":[67],"key":[69],"parameter":[70],"for":[71],"at":[74,180],"throughputs.":[76],"cooperation":[78],"with":[79],"Fraunhofer":[80],"ISE":[81],"applicability":[83],"of":[84,96,105,140,149,161,176],"been":[88,154],"tested":[89],"by":[90],"analysing":[91],"quality":[93],"performance":[95],"typical":[97],"passivation":[98,147],"layers":[99],"front":[101],"back":[103,145],"side":[104,146],"standard":[106],"solar":[107],"cells.":[108],"For":[109],"single":[110],"layer":[111,135],"a-SiNx:H":[112],"antireflection":[113],"coatings,":[114],"efficiencies":[115],"equal":[116],"state-of-the-art":[118],"cells":[119],"obtained,":[122,168],"17.0%":[123],"multi":[125],"18.6%":[127],"mono":[129],"crystalline":[130],"material.":[131],"With":[132],"advanced":[134],"stack":[136],"further":[138],"increase":[139],"0.1%":[141],"possible.":[143],"Also":[144],"stacks":[148],"Al2O3":[150],"SiNx":[152],"have":[153],"produced":[155],"minority":[157],"carrier":[158],"life":[159],"times":[160],"up":[162],"1.3":[164],"ms":[165],"corresponding":[169],"effective":[172],"surface":[173],"recombination":[174],"velocity":[175],"about":[177],"6.0":[178],"cm/s":[179],"illumination":[181],"densities":[182],"below":[183],"1":[184],"sun.":[185]},"counts_by_year":[{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2013,"cited_by_count":2}],"updated_date":"2026-10-02T10:15:12.560889","created_date":"2016-06-24T00:00:00"}