{"id":"https://openalex.org/W2139497148","doi":"https://doi.org/10.1109/84.128055","title":"Piezoelectric micromotors for microrobots","display_name":"Piezoelectric micromotors for microrobots","publication_year":1992,"publication_date":"1992-03-01","ids":{"openalex":"https://openalex.org/W2139497148","doi":"https://doi.org/10.1109/84.128055","mag":"2139497148"},"language":"en","primary_location":{"id":"doi:10.1109/84.128055","doi":"https://doi.org/10.1109/84.128055","is_oa":false,"landing_page_url":"https://doi.org/10.1109/84.128055","pdf_url":null,"source":{"id":"https://openalex.org/S4210187724","display_name":"Journal of Microelectromechanical Systems","issn_l":"1057-7157","issn":["1057-7157","1941-0158"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Microelectromechanical Systems","raw_type":"journal-article"},"parent_works":[],"lineage":["https://openalex.org/W2139497148"],"child_works_count":0,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5004333608","display_name":"Anita M. Flynn","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"A.M. Flynn","raw_affiliation_strings":["Artificial Intelligence Laboratory, Massachusetts Institute of Technology, Cambridge, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Artificial Intelligence Laboratory, Massachusetts Institute of Technology, Cambridge, MA, USA","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037692722","display_name":"Lee S. Tavrow","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L.S. Tavrow","raw_affiliation_strings":["Artificial Intelligence Laboratory, Massachusetts Institute of Technology, Cambridge, MA, USA","Sun MicroSystems, Inc.orporated, Mountain View, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Artificial Intelligence Laboratory, Massachusetts Institute of Technology, Cambridge, MA, USA","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Sun MicroSystems, Inc.orporated, Mountain View, CA, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032394982","display_name":"Stephen F. Bart","orcid":"https://orcid.org/0000-0003-3871-2575","observed_orcids":["https://orcid.org/0000-0003-3871-2575"]},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S.F. Bart","raw_affiliation_strings":["Artificial Intelligence Laboratory, Massachusetts Institute of Technology, Cambridge, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Artificial Intelligence Laboratory, Massachusetts Institute of Technology, Cambridge, MA, USA","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113436962","display_name":"Rodney A. Brooks","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"R.A. Brooks","raw_affiliation_strings":["Artificial Intelligence Laboratory, Massachusetts Institute of Technology, Cambridge, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Artificial Intelligence Laboratory, Massachusetts Institute of Technology, Cambridge, MA, USA","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111795953","display_name":"D. J. Ehrlich","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210122954","display_name":"MIT Lincoln Laboratory","ror":"https://ror.org/022z6jk58","country_code":"US","type":"facility","lineage":["https://openalex.org/I4210122954","https://openalex.org/I63966007"]},{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D.J. Ehrlich","raw_affiliation_strings":["Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, MA, USA","institution_ids":["https://openalex.org/I4210122954","https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003811735","display_name":"Krishna Udayakumar","orcid":"https://orcid.org/0000-0001-8954-4343","observed_orcids":["https://orcid.org/0000-0001-8954-4343"]},"institutions":[{"id":"https://openalex.org/I130769515","display_name":"Pennsylvania State University","ror":"https://ror.org/04p491231","country_code":"US","type":"education","lineage":["https://openalex.org/I130769515"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K.R. Udayakumar","raw_affiliation_strings":["Materials Research Laboratory, Pennsylvania State University, University Park, PA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Materials Research Laboratory, Pennsylvania State University, University Park, PA, USA","institution_ids":["https://openalex.org/I130769515"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109879106","display_name":"Leslie Eric Cross","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I130769515","display_name":"Pennsylvania State University","ror":"https://ror.org/04p491231","country_code":"US","type":"education","lineage":["https://openalex.org/I130769515"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L.E. Cross","raw_affiliation_strings":["Materials Research Laboratory, Pennsylvania State University, University Park, PA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Materials Research Laboratory, Pennsylvania State University, University Park, PA, USA","institution_ids":["https://openalex.org/I130769515"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2645,"currency":"USD","value_usd":2645},"apc_paid":null,"fwci":12.666,"has_fulltext":false,"cited_by_count":228,"citation_normalized_percentile":{"value":0.98806758,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":87,"max":99},"biblio":{"volume":"1","issue":"1","first_page":"44","last_page":"51"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9800000190734863,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9800000190734863,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.016599999740719795,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.0010999999940395355,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoelectric-micromotor","display_name":"piezoelectric micromotor","score":0.9610000252723694},{"id":"https://openalex.org/keywords/ultrasonic-motor","display_name":"ultrasonic motor","score":0.9430000185966492},{"id":"https://openalex.org/keywords/microrobots","display_name":"microrobots","score":0.8930000066757202},{"id":"https://openalex.org/keywords/ferroelectric-thin-films","display_name":"ferroelectric thin films","score":0.9330000281333923},{"id":"https://openalex.org/keywords/lead-zirconate-titanate","display_name":"lead zirconate titanate","score":0.9950000047683716},{"id":"https://openalex.org/keywords/silicon-nitride-membranes","display_name":"silicon nitride membranes","score":0.9629999995231628},{"id":"https://openalex.org/keywords/micromechanical-systems","display_name":"micromechanical systems","score":0.8769999742507935},{"id":"https://openalex.org/keywords/autonomous-robots","display_name":"autonomous robots","score":0.5910000205039978}],"concepts":[{"id":"https://openalex.org/C138794181","wikidata":"https://www.wikidata.org/wiki/Q10541502","display_name":"Ultrasonic motor","level":3,"score":0.8936455249786377},{"id":"https://openalex.org/C2776529397","wikidata":"https://www.wikidata.org/wiki/Q190312","display_name":"Stator","level":2,"score":0.7718361020088196},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.739298939704895},{"id":"https://openalex.org/C2781128178","wikidata":"https://www.wikidata.org/wiki/Q883484","display_name":"Lead zirconate titanate","level":4,"score":0.67754065990448},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6527835130691528},{"id":"https://openalex.org/C149878695","wikidata":"https://www.wikidata.org/wiki/Q10541502","display_name":"Piezoelectric motor","level":3,"score":0.6455562114715576},{"id":"https://openalex.org/C17281054","wikidata":"https://www.wikidata.org/wiki/Q193466","display_name":"Rotor (electric)","level":2,"score":0.5938894748687744},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.4273376762866974},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4204053282737732},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.40396013855934143},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.34807252883911133},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3404453694820404},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2316684126853943},{"id":"https://openalex.org/C79090758","wikidata":"https://www.wikidata.org/wiki/Q1045739","display_name":"Ferroelectricity","level":3,"score":0.22070881724357605},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.18526491522789001},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1355190873146057},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/84.128055","doi":"https://doi.org/10.1109/84.128055","is_oa":false,"landing_page_url":"https://doi.org/10.1109/84.128055","pdf_url":null,"source":{"id":"https://openalex.org/S4210187724","display_name":"Journal of Microelectromechanical Systems","issn_l":"1057-7157","issn":["1057-7157","1941-0158"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Microelectromechanical Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":24,"referenced_works":["https://openalex.org/W69537007","https://openalex.org/W577924212","https://openalex.org/W1481569135","https://openalex.org/W1507963034","https://openalex.org/W1559788982","https://openalex.org/W1569451701","https://openalex.org/W1573634388","https://openalex.org/W1910524990","https://openalex.org/W2036302793","https://openalex.org/W2046976914","https://openalex.org/W2050529324","https://openalex.org/W2097856935","https://openalex.org/W2115521433","https://openalex.org/W2136485803","https://openalex.org/W2145201131","https://openalex.org/W2149276032","https://openalex.org/W2151326957","https://openalex.org/W2183340942","https://openalex.org/W2217052439","https://openalex.org/W2539085412","https://openalex.org/W2624516165","https://openalex.org/W3141597194","https://openalex.org/W4250871362","https://openalex.org/W6634034843"],"related_works":["https://openalex.org/W3152566992","https://openalex.org/W2126651003","https://openalex.org/W4383901293","https://openalex.org/W7099000761","https://openalex.org/W2112952925","https://openalex.org/W2017400873","https://openalex.org/W2539085412","https://openalex.org/W7027612762","https://openalex.org/W2097356619"],"abstract_inverted_index":{"The":[0,13,39],"authors":[1,14,135],"have":[2,15],"begun":[3],"research":[4],"into":[5],"piezoelectric":[6,43,130],"ultrasonic":[7],"motors":[8,24,29,131],"using":[9],"ferroelectric":[10],"thin":[11,105],"films.":[12],"fabricated":[16],"the":[17,51,63,66,72,85,134],"stator":[18,35,40,64],"components":[19],"of":[20,31,53,107,117],"these":[21],"millimeter":[22],"diameter":[23],"on":[25,111],"silicon":[26,112],"wafers.":[27],"Ultrasonic":[28],"consist":[30],"two":[32],"pieces:":[33],"a":[34,37,42,54,96],"and":[36,84,132,144],"rotor.":[38,68],"includes":[41],"film":[44],"in":[45,50],"which":[46],"bending":[47],"is":[48],"induced":[49],"form":[52],"traveling":[55],"wave.":[56],"A":[57],"small":[58],"glass":[59],"lens":[60],"placed":[61],"upon":[62],"becomes":[65],"spinning":[67],"Piezoelectric":[69],"micromotors":[70,78],"overcome":[71],"problems":[73],"currently":[74],"associated":[75],"with":[76,129],"electrostatic":[77],"such":[79],"as":[80],"low":[81],"torque,":[82],"friction,":[83],"need":[86],"for":[87,100],"high":[88],"voltage":[89],"excitation.":[90],"More":[91],"importantly,":[92],"they":[93],"may":[94],"offer":[95],"much":[97],"simpler":[98],"mechanism":[99],"coupling":[101],"power":[102],"out.":[103],"Using":[104],"films":[106],"lead":[108],"zirconate":[109],"titanate":[110],"nitride":[113],"membranes,":[114],"various":[115],"types":[116],"actuator":[118],"structures":[119],"can":[120],"be":[121],"fabricated.":[122],"By":[123],"combined":[124],"new":[125],"robot":[126],"control":[127],"systems":[128,139],"micromechanics,":[133],"propose":[136],"creating":[137],"micromechanical":[138],"that":[140],"are":[141],"small,":[142],"cheap":[143],"completely":[145],"autonomous.>":[146]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":5},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":6},{"year":2013,"cited_by_count":7},{"year":2012,"cited_by_count":6}],"updated_date":"2026-11-14T11:04:58.165337","created_date":"2016-06-24T00:00:00"}