{"id":"https://openalex.org/W2139085683","doi":"https://doi.org/10.1109/jmems.2014.2333743","title":"High- $Q$ AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing","display_name":"High- $Q$ AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing","publication_year":2014,"publication_date":"2014-07-15","ids":{"openalex":"https://openalex.org/W2139085683","doi":"https://doi.org/10.1109/jmems.2014.2333743","mag":"2139085683"},"language":"en","primary_location":{"id":"doi:10.1109/jmems.2014.2333743","doi":"https://doi.org/10.1109/jmems.2014.2333743","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jmems.2014.2333743","pdf_url":null,"source":{"id":"https://openalex.org/S4210187724","display_name":"Journal of Microelectromechanical Systems","issn_l":"1057-7157","issn":["1057-7157","1941-0158"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Microelectromechanical Systems","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5110210187","display_name":"Jenna L. Fu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]},{"id":"https://openalex.org/I205835726","display_name":"System Planning Corporation (United States)","ror":"https://ror.org/00a3n8178","country_code":"US","type":"company","lineage":["https://openalex.org/I205835726"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jenna L. Fu","raw_affiliation_strings":["Georgia Institute of Technology, Atlanta, GA, USA","System Planning Corporation, Arlington, VA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"System Planning Corporation, Arlington, VA, USA","institution_ids":["https://openalex.org/I205835726"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5081523432","display_name":"Farrokh Ayazi","orcid":"https://orcid.org/0000-0002-4539-7393","observed_orcids":["https://orcid.org/0000-0002-4539-7393"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Farrokh Ayazi","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","Georgia Institute of Technology Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Georgia Institute of Technology Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2645,"currency":"USD","value_usd":2645},"apc_paid":null,"fwci":0.3458,"has_fulltext":false,"cited_by_count":12,"citation_normalized_percentile":{"value":0.62442999,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"24","issue":"2","first_page":"503","last_page":"509"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.002099999925121665,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.0017999999690800905,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/volatile-organic-compounds","display_name":"volatile organic compounds","score":0.8730000257492065},{"id":"https://openalex.org/keywords/toluene-detection","display_name":"toluene detection","score":0.8289999961853027},{"id":"https://openalex.org/keywords/xylene-detection","display_name":"xylene detection","score":1.0},{"id":"https://openalex.org/keywords/high-quality-factor","display_name":"high quality factor","score":0.7879999876022339},{"id":"https://openalex.org/keywords/motional-resistance","display_name":"motional resistance","score":0.843999981880188},{"id":"https://openalex.org/keywords/gas-sensor-arrays","display_name":"gas sensor arrays","score":0.781000018119812}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.7752957940101624},{"id":"https://openalex.org/C96278889","wikidata":"https://www.wikidata.org/wiki/Q192414","display_name":"Gravimetric analysis","level":2,"score":0.5506630539894104},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5095301270484924},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.4804125130176544},{"id":"https://openalex.org/C2776303644","wikidata":"https://www.wikidata.org/wiki/Q1020499","display_name":"Interfacing","level":2,"score":0.469635933637619},{"id":"https://openalex.org/C2780009758","wikidata":"https://www.wikidata.org/wiki/Q6804172","display_name":"Measure (data warehouse)","level":2,"score":0.44782131910324097},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.44234877824783325},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4301835894584656},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.41357290744781494},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.32668814063072205},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3060782253742218},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23895245790481567},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.22242754697799683},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1859220564365387},{"id":"https://openalex.org/C9390403","wikidata":"https://www.wikidata.org/wiki/Q3966","display_name":"Computer hardware","level":1,"score":0.1273568868637085},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.10264945030212402},{"id":"https://openalex.org/C77088390","wikidata":"https://www.wikidata.org/wiki/Q8513","display_name":"Database","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/jmems.2014.2333743","doi":"https://doi.org/10.1109/jmems.2014.2333743","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jmems.2014.2333743","pdf_url":null,"source":{"id":"https://openalex.org/S4210187724","display_name":"Journal of Microelectromechanical Systems","issn_l":"1057-7157","issn":["1057-7157","1941-0158"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Microelectromechanical Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"display_name":"Responsible consumption and production","score":0.4000000059604645,"id":"https://metadata.un.org/sdg/12"}],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320309321","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":23,"referenced_works":["https://openalex.org/W27682000","https://openalex.org/W1829345944","https://openalex.org/W1975367768","https://openalex.org/W1984453713","https://openalex.org/W1991562557","https://openalex.org/W1993042215","https://openalex.org/W2018409502","https://openalex.org/W2034415627","https://openalex.org/W2054414447","https://openalex.org/W2056121714","https://openalex.org/W2059454265","https://openalex.org/W2078811354","https://openalex.org/W2109474896","https://openalex.org/W2110985821","https://openalex.org/W2119611283","https://openalex.org/W2135213533","https://openalex.org/W2149152856","https://openalex.org/W2149977790","https://openalex.org/W2160503630","https://openalex.org/W2162243665","https://openalex.org/W2168369249","https://openalex.org/W2241310218","https://openalex.org/W2334493192"],"related_works":["https://openalex.org/W92078598","https://openalex.org/W3189677840","https://openalex.org/W2137255016","https://openalex.org/W4389101932","https://openalex.org/W2069508161","https://openalex.org/W2016513332","https://openalex.org/W4211045222","https://openalex.org/W7221378671","https://openalex.org/W4283397804","https://openalex.org/W2969387320"],"abstract_inverted_index":{"Aluminum":[0],"nitride":[1],"(AlN)":[2],"thin-film":[3],"piezoelectric-onsilicon":[4],"resonators":[5,68],"optimized":[6],"for":[7,74],"gravimetric":[8],"gas":[9],"sensing":[10,79],"are":[11,72],"presented":[12],"in":[13,49,77],"this":[14],"paper.":[15],"Sensors":[16],"with":[17,69],"polyisobutylenefunctionalized":[18],"annexed":[19,36,70],"platforms":[20,71],"exhibit":[21],"a":[22,44],"linear":[23],"sensitivity":[24],"of":[25,47,55,88],"-0.09":[26],"Hz/ppm":[27,32],"to":[28,33,42,90],"toluene":[29],"and":[30,51,65,85,92],"-0.18":[31],"xylene.":[34],"The":[35],"platform":[37],"design":[38],"enables":[39],"the":[40],"sensor":[41],"maintain":[43],"high":[45],"Q":[46],"3700":[48],"air":[50],"low":[52],"motional":[53],"resistance":[54],"1.1":[56],"kQ":[57],"during":[58],"operation,":[59],"which":[60],"ensures":[61],"low-power":[62],"oscillator":[63],"interfacing":[64],"readout.":[66],"AlN-on-Si":[67],"suitable":[73],"array":[75],"implementation":[76],"environmental":[78],"microsystems":[80],"that":[81],"measure":[82],"temperature,":[83],"humidity,":[84],"various":[86],"gases":[87],"importance":[89],"health":[91],"safety.":[93]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":5},{"year":2021,"cited_by_count":3},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}