{"id":"https://openalex.org/W2136351507","doi":"https://doi.org/10.1116/1.586643","title":"Investigations of artificial nanostructures and lithography techniques with a scanning probe microscope","display_name":"Investigations of artificial nanostructures and lithography techniques with a scanning probe microscope","publication_year":1993,"publication_date":"1993-11-01","ids":{"openalex":"https://openalex.org/W2136351507","doi":"https://doi.org/10.1116/1.586643","mag":"2136351507"},"language":"en","primary_location":{"id":"doi:10.1116/1.586643","doi":"https://doi.org/10.1116/1.586643","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.586643","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5029939030","display_name":"Uwe A. Griesinger","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"U. A. Griesinger","raw_affiliation_strings":["Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany","institution_ids":["https://openalex.org/I100066346"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054299198","display_name":"Christiane Kaden","orcid":"https://orcid.org/0000-0001-7433-8950","observed_orcids":["https://orcid.org/0000-0001-7433-8950"]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"C. Kaden","raw_affiliation_strings":["Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany","institution_ids":["https://openalex.org/I100066346"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029662382","display_name":"Norbert Lichtenstein","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"N. Lichtenstein","raw_affiliation_strings":["Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany","institution_ids":["https://openalex.org/I100066346"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009279679","display_name":"J. Hommel","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"J. Hommel","raw_affiliation_strings":["Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany","institution_ids":["https://openalex.org/I100066346"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050681630","display_name":"Georg Lehr","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"G. Lehr","raw_affiliation_strings":["Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany","institution_ids":["https://openalex.org/I100066346"]}]},{"author_position":"middle","author":{"id":null,"display_name":"R. Bergmann","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Bergmann","raw_affiliation_strings":["Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany","institution_ids":["https://openalex.org/I100066346"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026173836","display_name":"A. Menschig","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"A. Menschig","raw_affiliation_strings":["Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany","institution_ids":["https://openalex.org/I100066346"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078885698","display_name":"Heinz C. Schweizer","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I100066346","display_name":"University of Stuttgart","ror":"https://ror.org/04vnq7t77","country_code":"DE","type":"education","lineage":["https://openalex.org/I100066346"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. Schweizer","raw_affiliation_strings":["Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universit\u00e4t Stuttgart, 4. Physikalisches Institut, Pfaffenwaldring 57, 70550 Stuttgart, Germany","institution_ids":["https://openalex.org/I100066346"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085037265","display_name":"Hartmut H. Hillmer","orcid":"https://orcid.org/0000-0001-8228-5895","observed_orcids":["https://orcid.org/0000-0001-8228-5895"]},"institutions":[{"id":"https://openalex.org/I2802562207","display_name":"Deutsche Bundespost","ror":"https://ror.org/0150tj573","country_code":"DE","type":"government","lineage":["https://openalex.org/I2802562207"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. Hillmer","raw_affiliation_strings":["Deutsche Bundespost Telekom Forschungszentrum am FTZ Postfach 10 03 00, Darmstadt, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Deutsche Bundespost Telekom Forschungszentrum am FTZ Postfach 10 03 00, Darmstadt, Germany","institution_ids":["https://openalex.org/I2802562207"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076511817","display_name":"Hans W. P. Koops","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2802562207","display_name":"Deutsche Bundespost","ror":"https://ror.org/0150tj573","country_code":"DE","type":"government","lineage":["https://openalex.org/I2802562207"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"H. W. P. Koops","raw_affiliation_strings":["Deutsche Bundespost Telekom Forschungszentrum am FTZ Postfach 10 03 00, Darmstadt, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Deutsche Bundespost Telekom Forschungszentrum am FTZ Postfach 10 03 00, Darmstadt, Germany","institution_ids":["https://openalex.org/I2802562207"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071675413","display_name":"Johannes Kretz","orcid":"https://orcid.org/0000-0002-5613-0547","observed_orcids":["https://orcid.org/0000-0002-5613-0547"]},"institutions":[{"id":"https://openalex.org/I31512782","display_name":"Technische Universit\u00e4t Darmstadt","ror":"https://ror.org/05n911h24","country_code":"DE","type":"education","lineage":["https://openalex.org/I31512782"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"J. Kretz","raw_affiliation_strings":["Institut f\u00fcr Angewandte Physik, Technische Hochschule Darmstadt, Schlossgartenstrasse 7 R 147, 64289 Darmstadt, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Angewandte Physik, Technische Hochschule Darmstadt, Schlossgartenstrasse 7 R 147, 64289 Darmstadt, Germany","institution_ids":["https://openalex.org/I31512782"]}]},{"author_position":"last","author":{"id":null,"display_name":"M. Rudolph","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I31512782","display_name":"Technische Universit\u00e4t Darmstadt","ror":"https://ror.org/05n911h24","country_code":"DE","type":"education","lineage":["https://openalex.org/I31512782"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Rudolph","raw_affiliation_strings":["Institut f\u00fcr Angewandte Physik, Technische Hochschule Darmstadt, Schlossgartenstrasse 7 R 147, 64289 Darmstadt, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Angewandte Physik, Technische Hochschule Darmstadt, Schlossgartenstrasse 7 R 147, 64289 Darmstadt, Germany","institution_ids":["https://openalex.org/I31512782"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.8119,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.72458816,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"11","issue":"6","first_page":"2441","last_page":"2445"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.7080000042915344,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.7080000042915344,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.22990000247955322,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.015399999916553497,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanostructures","display_name":"nanostructures","score":0.6019999980926514},{"id":"https://openalex.org/keywords/distributed-feedback-lasers","display_name":"distributed feedback lasers","score":0.7300000190734863},{"id":"https://openalex.org/keywords/sidewall-roughness","display_name":"sidewall roughness","score":0.9509999752044678},{"id":"https://openalex.org/keywords/wavelength-tuning","display_name":"wavelength tuning","score":0.7360000014305115},{"id":"https://openalex.org/keywords/electron-beam-lithography","display_name":"electron beam lithography","score":0.8510000109672546},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"atomic force microscopy","score":0.8040000200271606},{"id":"https://openalex.org/keywords/scanning-tunneling-microscopy","display_name":"scanning tunneling microscopy","score":0.878000020980835},{"id":"https://openalex.org/keywords/nanofabrication","display_name":"nanofabrication","score":0.7850000262260437}],"concepts":[{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.7041517496109009},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7025398015975952},{"id":"https://openalex.org/C200274948","wikidata":"https://www.wikidata.org/wiki/Q256845","display_name":"Electron-beam lithography","level":4,"score":0.6887794733047485},{"id":"https://openalex.org/C6518042","wikidata":"https://www.wikidata.org/wiki/Q175646","display_name":"Scanning tunneling microscope","level":2,"score":0.6385819911956787},{"id":"https://openalex.org/C77066764","wikidata":"https://www.wikidata.org/wiki/Q178674","display_name":"Nanometre","level":2,"score":0.5952150225639343},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5266889333724976},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4988532066345215},{"id":"https://openalex.org/C186187911","wikidata":"https://www.wikidata.org/wiki/Q1093894","display_name":"Nanostructure","level":2,"score":0.49790310859680176},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.48414450883865356},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.47467494010925293},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.46063220500946045},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.44989460706710815},{"id":"https://openalex.org/C2781089630","wikidata":"https://www.wikidata.org/wiki/Q21856745","display_name":"Realization (probability)","level":2,"score":0.43105998635292053},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.4225139617919922},{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.3478180766105652},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.15119600296020508},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09984073042869568},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.08441531658172607},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/1.586643","doi":"https://doi.org/10.1116/1.586643","is_oa":false,"landing_page_url":"https://doi.org/10.1116/1.586643","pdf_url":null,"source":{"id":"https://openalex.org/S4210169477","display_name":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","issn_l":"1071-1023","issn":["1071-1023","1520-8567"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","poland-70"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320320879","display_name":"Deutsche Forschungsgemeinschaft","ror":"https://ror.org/018mejw64"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2516699128","https://openalex.org/W2507194520","https://openalex.org/W2041125085","https://openalex.org/W2023608140","https://openalex.org/W2070323225","https://openalex.org/W3086891180","https://openalex.org/W1993191665","https://openalex.org/W1993955985","https://openalex.org/W7043480356","https://openalex.org/W2491312501"],"abstract_inverted_index":{"In":[0],"this":[1],"article,":[2],"the":[3,58,69],"examination":[4],"and":[5,14,26,48,77],"realization":[6],"of":[7,39,57,68,74,85],"nanometer":[8,87],"structures":[9,23,88],"by":[10],"an":[11,78],"atomic":[12],"force":[13],"a":[15,37,75],"scanning":[16],"tunneling":[17],"microscope":[18],"(AFM/STM)":[19],"is":[20],"reported.":[21],"Nanometer":[22],"[etched":[24],"wires":[25],"gratings":[27,53],"for":[28,54,80],"distributed":[29],"feedback":[30],"(DFB)":[31],"lasers]":[32],"were":[33],"investigated":[34],"down":[35],"to":[36,44,65],"width":[38],"50":[40],"nm":[41],"with":[42,63],"respect":[43,64],"profile,":[45],"structure":[46],"height,":[47],"sidewall":[49],"roughness.":[50],"Special":[51],"DFB":[52],"fine":[55],"tuning":[56],"emission":[59],"wavelength":[60],"are":[61],"analyzed":[62],"Fourier":[66],"components":[67],"periodic":[70],"structure.":[71],"The":[72],"use":[73],"STM":[76],"AFM":[79],"low":[81],"voltage":[82],"electron-beam":[83],"lithography":[84],"artificial":[86],"will":[89],"be":[90],"demonstrated.":[91]},"counts_by_year":[{"year":2013,"cited_by_count":1}],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2016-06-24T00:00:00"}