{"id":"https://openalex.org/W2135862425","doi":"https://doi.org/10.1080/01418619408242212","title":"Transmission electron microscopy of nanomachined silicon crystals","display_name":"Transmission electron microscopy of nanomachined silicon crystals","publication_year":1994,"publication_date":"1994-01-01","ids":{"openalex":"https://openalex.org/W2135862425","doi":"https://doi.org/10.1080/01418619408242212","mag":"2135862425"},"language":"en","primary_location":{"id":"doi:10.1080/01418619408242212","doi":"https://doi.org/10.1080/01418619408242212","is_oa":false,"landing_page_url":"https://doi.org/10.1080/01418619408242212","pdf_url":null,"source":{"id":"https://openalex.org/S4210192005","display_name":"Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties","issn_l":"0141-8610","issn":["0141-8610","1364-2804","1460-6992"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547","https://openalex.org/P4310320449"],"host_organization_lineage_names":["Taylor & Francis","Informa"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Philosophical Magazine A","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5112240602","display_name":"Keith E. Puttick","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I28290843","display_name":"University of Surrey","ror":"https://ror.org/00ks66431","country_code":"GB","type":"education","lineage":["https://openalex.org/I28290843"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"K. E. Puttick","raw_affiliation_strings":["Physics Department, University of Surrey, Guildford, Surrey, England"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physics Department, University of Surrey, Guildford, Surrey, England","institution_ids":["https://openalex.org/I28290843"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022676935","display_name":"Lawrence Whitmore","orcid":"https://orcid.org/0000-0003-0148-4003","observed_orcids":["https://orcid.org/0000-0003-0148-4003"]},"institutions":[{"id":"https://openalex.org/I28290843","display_name":"University of Surrey","ror":"https://ror.org/00ks66431","country_code":"GB","type":"education","lineage":["https://openalex.org/I28290843"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"L. C. Whitmore","raw_affiliation_strings":["Physics Department, University of Surrey, Guildford, Surrey, England"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physics Department, University of Surrey, Guildford, Surrey, England","institution_ids":["https://openalex.org/I28290843"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065377480","display_name":"Choung Lii Chao","orcid":"https://orcid.org/0000-0002-2531-0406","observed_orcids":["https://orcid.org/0000-0002-2531-0406"]},"institutions":[{"id":"https://openalex.org/I82284825","display_name":"Cranfield University","ror":"https://ror.org/05cncd958","country_code":"GB","type":"education","lineage":["https://openalex.org/I82284825"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"C. L. Chao","raw_affiliation_strings":["School of Industrial and Manufacturing Science, Cranfield Institute of Technology, Cranfield, Bedfordshire, England ; Chung-Chen Institute of Technology, Taiwan","Chung-Chen Institute of Technology , Taiwan","School of Industrial and Manufacturing Science , Cranfield Institute of Technology , Cranfield, Bedfordshire, England"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Industrial and Manufacturing Science, Cranfield Institute of Technology, Cranfield, Bedfordshire, England ; Chung-Chen Institute of Technology, Taiwan","institution_ids":["https://openalex.org/I82284825"]},{"raw_affiliation_string":"Chung-Chen Institute of Technology , Taiwan","institution_ids":[]},{"raw_affiliation_string":"School of Industrial and Manufacturing Science , Cranfield Institute of Technology , Cranfield, Bedfordshire, England","institution_ids":["https://openalex.org/I82284825"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5004746365","display_name":"Anthony E. Gee","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I82284825","display_name":"Cranfield University","ror":"https://ror.org/05cncd958","country_code":"GB","type":"education","lineage":["https://openalex.org/I82284825"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"A. E. Gee","raw_affiliation_strings":["School of Industrial and Manufacturing Science, Cranfield Institute of Technology, Cranfield, Bedfordshire, England"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Industrial and Manufacturing Science, Cranfield Institute of Technology, Cranfield, Bedfordshire, England","institution_ids":["https://openalex.org/I82284825"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":3.1752,"has_fulltext":false,"cited_by_count":70,"citation_normalized_percentile":{"value":0.91764637,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"69","issue":"1","first_page":"91","last_page":"103"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9423999786376953,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9423999786376953,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10188","display_name":"Advanced machining processes and optimization","score":0.03750000149011612,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12106","display_name":"Surface Treatment and Residual Stress","score":0.005100000184029341,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanomachining","display_name":"nanomachining","score":0.7419999837875366},{"id":"https://openalex.org/keywords/silicon","display_name":"silicon","score":0.5799999833106995},{"id":"https://openalex.org/keywords/diamond-turning","display_name":"diamond turning","score":0.7570000290870667},{"id":"https://openalex.org/keywords/diamond-grinding","display_name":"diamond grinding","score":0.8209999799728394},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"surface roughness","score":0.8220000267028809},{"id":"https://openalex.org/keywords/dislocation-loops","display_name":"dislocation loops","score":0.9879999756813049},{"id":"https://openalex.org/keywords/slip-systems","display_name":"slip systems","score":0.8169999718666077},{"id":"https://openalex.org/keywords/dislocation-arrays","display_name":"dislocation arrays","score":0.8479999899864197},{"id":"https://openalex.org/keywords/microcracks","display_name":"microcracks","score":0.9679999947547913},{"id":"https://openalex.org/keywords/amorphous-silicon","display_name":"amorphous silicon","score":0.972000002861023}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7068617343902588},{"id":"https://openalex.org/C2776921476","wikidata":"https://www.wikidata.org/wiki/Q5283","display_name":"Diamond","level":2,"score":0.6845888495445251},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6524869203567505},{"id":"https://openalex.org/C195268267","wikidata":"https://www.wikidata.org/wiki/Q1928883","display_name":"Slip (aerodynamics)","level":2,"score":0.6243561506271362},{"id":"https://openalex.org/C146088050","wikidata":"https://www.wikidata.org/wiki/Q744818","display_name":"Transmission electron microscopy","level":2,"score":0.6192538738250732},{"id":"https://openalex.org/C159122135","wikidata":"https://www.wikidata.org/wiki/Q737571","display_name":"Dislocation","level":2,"score":0.611956000328064},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.4792316257953644},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.4408150315284729},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.43460214138031006},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.4329962134361267},{"id":"https://openalex.org/C158488214","wikidata":"https://www.wikidata.org/wiki/Q6711545","display_name":"L\u00fcders band","level":3,"score":0.4317549765110016},{"id":"https://openalex.org/C2780957350","wikidata":"https://www.wikidata.org/wiki/Q372301","display_name":"Abrasive","level":2,"score":0.4291468858718872},{"id":"https://openalex.org/C93877712","wikidata":"https://www.wikidata.org/wiki/Q132560","display_name":"Electron microscope","level":2,"score":0.42700958251953125},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.42638319730758667},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.38647735118865967},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.34053361415863037},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.18281814455986023},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.17075687646865845},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.11942499876022339},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09135383367538452},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1080/01418619408242212","doi":"https://doi.org/10.1080/01418619408242212","is_oa":false,"landing_page_url":"https://doi.org/10.1080/01418619408242212","pdf_url":null,"source":{"id":"https://openalex.org/S4210192005","display_name":"Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties","issn_l":"0141-8610","issn":["0141-8610","1364-2804","1460-6992"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310320547","host_organization_name":"Taylor & Francis","host_organization_lineage":["https://openalex.org/P4310320547","https://openalex.org/P4310320449"],"host_organization_lineage_names":["Taylor & Francis","Informa"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Philosophical Magazine A","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320320343","display_name":"Cranfield University","ror":"https://ror.org/05cncd958"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1967185482","https://openalex.org/W1985884725","https://openalex.org/W1986640390","https://openalex.org/W2010618356","https://openalex.org/W2013844308","https://openalex.org/W2028346483","https://openalex.org/W2029187301","https://openalex.org/W2042709035","https://openalex.org/W2052070731","https://openalex.org/W2076021011","https://openalex.org/W2080294599","https://openalex.org/W2084657732","https://openalex.org/W2094986461","https://openalex.org/W4233253738"],"related_works":["https://openalex.org/W2013844308","https://openalex.org/W4230836898","https://openalex.org/W1982443349","https://openalex.org/W2086443749","https://openalex.org/W2029227760","https://openalex.org/W2046819902","https://openalex.org/W2103160112","https://openalex.org/W2051403236","https://openalex.org/W2074866957","https://openalex.org/W2026149762"],"abstract_inverted_index":{"Silicon":[0],"substrate":[1],"slices":[2],"in":[3,12,64,68,149],"(111)":[4],"or":[5,31],"(001)":[6],"surface":[7,24],"orientation":[8],"have":[9],"been":[10],"machined":[11,52],"two":[13],"ways:":[14],"precision":[15],"ground":[16,75],"by":[17],"a":[18,23,27,34,101,145],"diamond":[19,38],"abrasive":[20],"wheel":[21],"to":[22,41,113],"roughness":[25],"R":[26,42],"\u2248":[28],"11":[29],"nm,":[30],"turned":[32,132],"on":[33,94,144],"highly":[35],"stiff":[36],"single-point":[37],"turning":[39],"machine":[40],"a,\u22480\u00b75":[43],"nm.":[44,72],"Transmission":[45],"electron":[46],"microscopy":[47],"of":[48,50,61,87,89,105,124,140,153],"cross-sections":[49],"the":[51,56,69,74,77,84,121,131,134,154],"surfaces":[53,133],"has":[54],"established":[55],"following.":[57],"The":[58],"mean":[59],"depth":[60,79],"permanent":[62],"damage":[63,78,85,135],"both":[65],"cases":[66],"lies":[67],"range":[70],"100\u2013400":[71],"In":[73],"specimens":[76],"is":[80],"very":[81,102],"variable,":[82],"and":[83,109],"consists":[86],"regions":[88,99],"well":[90],"defined":[91],"dislocation":[92,107,141],"loops":[93,142],"several":[95],"slip":[96,147],"systems,":[97],"other":[98],"with":[100],"high":[103],"density":[104],"irregular":[106],"arrays,":[108],"occasional":[110],"microcracks":[111],"up":[112],"500nm":[114],"deep":[115],"which":[116],"do":[117],"not":[118],"always":[119],"intersect":[120],"surfaces.":[122],"Patches":[123],"amorphous":[125],"silicon":[126],"are":[127],"also":[128],"observed.":[129],"Beneath":[130],"appears":[136],"more":[137],"homogeneous,":[138],"consisting":[139],"predominantly":[143],"single":[146],"system":[148],"any":[150],"given":[151],"region":[152],"specimen.":[155]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2016,"cited_by_count":2},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":3},{"year":2012,"cited_by_count":3}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}