{"id":"https://openalex.org/W2129721252","doi":"https://doi.org/10.1117/12.608101","title":"3-D polymeric microfluidic devices for BioMOEMS applications","display_name":"3-D polymeric microfluidic devices for BioMOEMS applications","publication_year":2005,"publication_date":"2005-06-29","ids":{"openalex":"https://openalex.org/W2129721252","doi":"https://doi.org/10.1117/12.608101","mag":"2129721252"},"language":"en","primary_location":{"id":"doi:10.1117/12.608101","doi":"https://doi.org/10.1117/12.608101","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.608101","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100848073","display_name":"F.J. Blanco","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210140267","display_name":"Ikerlan","ror":"https://ror.org/03hp1m080","country_code":"ES","type":"company","lineage":["https://openalex.org/I4210140267"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"F. J. Blanco","raw_affiliation_strings":["Ikerlan S. Coop (Spain)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ikerlan S. Coop (Spain)","institution_ids":["https://openalex.org/I4210140267"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056027134","display_name":"Javier Berganzo","orcid":"https://orcid.org/0000-0002-0485-9571","observed_orcids":["https://orcid.org/0000-0002-0485-9571"]},"institutions":[{"id":"https://openalex.org/I4210140267","display_name":"Ikerlan","ror":"https://ror.org/03hp1m080","country_code":"ES","type":"company","lineage":["https://openalex.org/I4210140267"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"J. Berganzo","raw_affiliation_strings":["Ikerlan S. Coop (Spain)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ikerlan S. Coop (Spain)","institution_ids":["https://openalex.org/I4210140267"]}]},{"author_position":"middle","author":{"id":null,"display_name":"J. Garcia","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210140267","display_name":"Ikerlan","ror":"https://ror.org/03hp1m080","country_code":"ES","type":"company","lineage":["https://openalex.org/I4210140267"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"J. Garcia","raw_affiliation_strings":["Ikerlan S. Coop (Spain)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ikerlan S. Coop (Spain)","institution_ids":["https://openalex.org/I4210140267"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053846256","display_name":"Kepa Mayora","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210140267","display_name":"Ikerlan","ror":"https://ror.org/03hp1m080","country_code":"ES","type":"company","lineage":["https://openalex.org/I4210140267"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"K. Mayora","raw_affiliation_strings":["Ikerlan S. Coop (Spain)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ikerlan S. Coop (Spain)","institution_ids":["https://openalex.org/I4210140267"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031563050","display_name":"Ana Calle","orcid":"https://orcid.org/0000-0002-0569-8597","observed_orcids":["https://orcid.org/0000-0002-0569-8597"]},"institutions":[{"id":"https://openalex.org/I134820265","display_name":"Consejo Superior de Investigaciones Cient\u00edficas","ror":"https://ror.org/02gfc7t72","country_code":"ES","type":"government","lineage":["https://openalex.org/I134820265"]},{"id":"https://openalex.org/I4210147934","display_name":"Centro Nacional de Microelectr\u00f3nica","ror":"https://ror.org/03ycqrz18","country_code":"ES","type":"facility","lineage":["https://openalex.org/I134820265","https://openalex.org/I4210147934"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"A. Calle","raw_affiliation_strings":["Microelectronics National Ctr., CSIC (Spain)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Microelectronics National Ctr., CSIC (Spain)","institution_ids":["https://openalex.org/I134820265","https://openalex.org/I4210147934"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5057714878","display_name":"Laura M. Lechuga","orcid":"https://orcid.org/0000-0001-5187-5358","observed_orcids":["https://orcid.org/0000-0001-5187-5358"]},"institutions":[{"id":"https://openalex.org/I134820265","display_name":"Consejo Superior de Investigaciones Cient\u00edficas","ror":"https://ror.org/02gfc7t72","country_code":"ES","type":"government","lineage":["https://openalex.org/I134820265"]},{"id":"https://openalex.org/I4210147934","display_name":"Centro Nacional de Microelectr\u00f3nica","ror":"https://ror.org/03ycqrz18","country_code":"ES","type":"facility","lineage":["https://openalex.org/I134820265","https://openalex.org/I4210147934"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"L. M. Lechuga","raw_affiliation_strings":["Microelectronics National Ctr., CSIC (Spain)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Microelectronics National Ctr., CSIC (Spain)","institution_ids":["https://openalex.org/I134820265","https://openalex.org/I4210147934"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.6983,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.72163928,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"5839","issue":null,"first_page":"127","last_page":"127"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.00039999998989515007,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11255","display_name":"Microfluidic and Bio-sensing Technologies","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cmos-compatible-fabrication","display_name":"CMOS-compatible fabrication","score":0.7929999828338623},{"id":"https://openalex.org/keywords/laminar-flow","display_name":"laminar flow","score":0.8849999904632568},{"id":"https://openalex.org/keywords/pressure-driven-flow","display_name":"pressure-driven flow","score":0.8100000023841858},{"id":"https://openalex.org/keywords/flow-rate-measurement","display_name":"flow rate measurement","score":0.7799999713897705},{"id":"https://openalex.org/keywords/microsystem-packaging","display_name":"microsystem packaging","score":0.7749999761581421}],"concepts":[{"id":"https://openalex.org/C8673954","wikidata":"https://www.wikidata.org/wiki/Q138845","display_name":"Microfluidics","level":2,"score":0.8974716663360596},{"id":"https://openalex.org/C76563973","wikidata":"https://www.wikidata.org/wiki/Q189452","display_name":"Laminar flow","level":2,"score":0.7706947326660156},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7334085702896118},{"id":"https://openalex.org/C151054161","wikidata":"https://www.wikidata.org/wiki/Q379385","display_name":"Microsystem","level":2,"score":0.6900210380554199},{"id":"https://openalex.org/C114088122","wikidata":"https://www.wikidata.org/wiki/Q1261069","display_name":"Pressure drop","level":2,"score":0.6494606733322144},{"id":"https://openalex.org/C132651336","wikidata":"https://www.wikidata.org/wiki/Q185571","display_name":"Fluidics","level":2,"score":0.6181913018226624},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5322282910346985},{"id":"https://openalex.org/C172120300","wikidata":"https://www.wikidata.org/wiki/Q1134348","display_name":"Volumetric flow rate","level":2,"score":0.5178561210632324},{"id":"https://openalex.org/C2777300386","wikidata":"https://www.wikidata.org/wiki/Q5462101","display_name":"Flow focusing","level":3,"score":0.49618345499038696},{"id":"https://openalex.org/C182748727","wikidata":"https://www.wikidata.org/wiki/Q178932","display_name":"Reynolds number","level":3,"score":0.47641265392303467},{"id":"https://openalex.org/C2777042071","wikidata":"https://www.wikidata.org/wiki/Q6509304","display_name":"Leakage (economics)","level":2,"score":0.4121553301811218},{"id":"https://openalex.org/C115051666","wikidata":"https://www.wikidata.org/wiki/Q6522493","display_name":"Ranging","level":2,"score":0.4120141565799713},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.39210131764411926},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.17509019374847412},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.16458308696746826},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.11714211106300354},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C139719470","wikidata":"https://www.wikidata.org/wiki/Q39680","display_name":"Macroeconomics","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C196558001","wikidata":"https://www.wikidata.org/wiki/Q190132","display_name":"Turbulence","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1117/12.608101","doi":"https://doi.org/10.1117/12.608101","is_oa":false,"landing_page_url":"https://doi.org/10.1117/12.608101","pdf_url":null,"source":{"id":"https://openalex.org/S183492911","display_name":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","issn_l":"0277-786X","issn":["0277-786X","1996-756X"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310315543","host_organization_name":"SPIE","host_organization_lineage":["https://openalex.org/P4310315543"],"host_organization_lineage_names":["SPIE"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"SPIE Proceedings","raw_type":"proceedings-article"},{"id":"pmh:oai:digital.csic.es:10261/27912","doi":null,"is_oa":false,"landing_page_url":"http://hdl.handle.net/10261/27912","pdf_url":null,"source":{"id":"https://openalex.org/S4306400616","display_name":"DIGITAL.CSIC (Spanish National Research Council (CSIC))","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I134820265","host_organization_name":"Consejo Superior de Investigaciones Cient\u00edficas","host_organization_lineage":["https://openalex.org/I134820265"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"http://purl.org/coar/resource_type/c_6501"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W1610356152","https://openalex.org/W1947237194","https://openalex.org/W2002133913","https://openalex.org/W2013117405","https://openalex.org/W2023639503","https://openalex.org/W2030814739","https://openalex.org/W2031667006","https://openalex.org/W2049197120","https://openalex.org/W2056584136","https://openalex.org/W2073655900","https://openalex.org/W2075718824","https://openalex.org/W2089984638","https://openalex.org/W2090131348","https://openalex.org/W2112469833","https://openalex.org/W2129008842","https://openalex.org/W2131245248","https://openalex.org/W2131407182","https://openalex.org/W2135882212","https://openalex.org/W2151506368","https://openalex.org/W2983363128"],"related_works":["https://openalex.org/W1981165460","https://openalex.org/W1528573489","https://openalex.org/W2033224518","https://openalex.org/W2595591203","https://openalex.org/W2793165567","https://openalex.org/W292574989","https://openalex.org/W2905671808","https://openalex.org/W2021322541","https://openalex.org/W2000032256","https://openalex.org/W2092398012"],"abstract_inverted_index":{"This":[0],"paper":[1],"describes":[2],"the":[3,57,93,97,107,115,146],"fabrication,":[4],"packaging":[5,137,151],"and":[6,33,41,49,96],"characterization":[7],"of":[8,118],"novel":[9],"multilayer":[10,30],"polymer":[11],"microfluidic":[12,21,120,143],"systems":[13],"fabricated":[14],"by":[15,123],"a":[16],"CMOS":[17],"compatible":[18],"process.":[19],"These":[20,80,111],"devices":[22,121,144],"were":[23,44,54,78],"specially":[24],"designed":[25,122],"for":[26,135],"BioMOEMS":[27],"applications.":[28],"Embedded":[29],"rectangular":[31],"smooth":[32],"uniform":[34],"microchannels,":[35],"50":[36],"to":[37,66,75,88,140,145,159],"150":[38],"mm":[39],"wide":[40],"18mm":[42],"deep":[43],"studied.":[45],"Steady-state":[46],"flow":[47,52,59,81,98,109],"rates":[48,62,82],"pressure":[50,70,154],"driven":[51],"control":[53],"measured":[55],"in":[56,103,138],"laminar":[58,108],"regime.":[60],"Flow":[61],"ranging":[63,72],"from":[64,73,157],"1":[65],"100":[67],"\u03bcl/min,":[68],"at":[69],"drop":[71],"10":[74],"600":[76],"kPa,":[77],"obtained.":[79],"yield":[83],"Reynolds":[84],"numbers":[85],"(Re)":[86],"up":[87,156],"20.":[89],"Results":[90],"indicate":[91],"that":[92],"experimental":[94,112],"Re":[95],"friction":[99],"coefficient":[100],"(f)":[101],"are":[102],"good":[104],"agreement":[105],"with":[106,162],"theory.":[110,127],"results":[113],"facilitate":[114],"future":[116],"designs":[117],"different":[119,132],"using":[124],"classical":[125],"fluidic":[126],"We":[128],"also":[129],"present":[130],"two":[131],"methods":[133],"developed":[134],"macro/microfluidic":[136],"order":[139],"connect":[141],"these":[142],"macroscopic":[147],"world.":[148],"The":[149],"microsystem":[150],"can":[152],"withstand":[153],"drops":[155],"500":[158],"2000":[160],"kPa":[161],"any":[163],"liquid":[164],"leakage.":[165]},"counts_by_year":[],"updated_date":"2026-10-14T16:39:01.820549","created_date":"2016-06-24T00:00:00"}