{"id":"https://openalex.org/W2129492276","doi":"https://doi.org/10.1143/jjap.38.7185","title":"Fabrication of Micromechanical Tunneling Probes and Actuators on a Silicon Chip","display_name":"Fabrication of Micromechanical Tunneling Probes and Actuators on a Silicon Chip","publication_year":1999,"publication_date":"1999-12-01","ids":{"openalex":"https://openalex.org/W2129492276","doi":"https://doi.org/10.1143/jjap.38.7185","mag":"2129492276"},"language":"en","primary_location":{"id":"doi:10.1143/jjap.38.7185","doi":"https://doi.org/10.1143/jjap.38.7185","is_oa":false,"landing_page_url":"https://doi.org/10.1143/jjap.38.7185","pdf_url":null,"source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5004166791","display_name":"Hiroshi Toshiyoshi","orcid":"https://orcid.org/0000-0003-3678-7741","observed_orcids":["https://orcid.org/0000-0003-3678-7741"]},"institutions":[{"id":"https://openalex.org/I4405287318","display_name":"Institute of Industrial Science, The University of Tokyo","ror":"https://ror.org/04t6zpd80","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiroshi Toshiyoshi","raw_affiliation_strings":["Institute of Industrial Science, The University of Tokyo,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Industrial Science, The University of Tokyo,","institution_ids":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017726683","display_name":"Masahide Goto","orcid":"https://orcid.org/0000-0002-1388-4488","observed_orcids":["https://orcid.org/0000-0002-1388-4488"]},"institutions":[{"id":"https://openalex.org/I4405287318","display_name":"Institute of Industrial Science, The University of Tokyo","ror":"https://ror.org/04t6zpd80","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masahide Goto","raw_affiliation_strings":["Institute of Industrial Science, The University of Tokyo,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Industrial Science, The University of Tokyo,","institution_ids":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060581878","display_name":"M. Mita","orcid":"https://orcid.org/0000-0002-3306-4954","observed_orcids":["https://orcid.org/0000-0002-3306-4954"]},"institutions":[{"id":"https://openalex.org/I4405287318","display_name":"Institute of Industrial Science, The University of Tokyo","ror":"https://ror.org/04t6zpd80","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Makoto Mita","raw_affiliation_strings":["Institute of Industrial Science, The University of Tokyo,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Industrial Science, The University of Tokyo,","institution_ids":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073676276","display_name":"Hiroyuki Fujita","orcid":"https://orcid.org/0000-0003-3113-8136","observed_orcids":["https://orcid.org/0000-0003-3113-8136","https://orcid.org/0000-0001-8744-8411","https://orcid.org/0009-0008-8400-6122","https://orcid.org/0009-0001-5376-5387","https://orcid.org/0000-0001-8886-6295"]},"institutions":[{"id":"https://openalex.org/I4405287318","display_name":"Institute of Industrial Science, The University of Tokyo","ror":"https://ror.org/04t6zpd80","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]},{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiroyuki Fujita","raw_affiliation_strings":["Institute of Industrial Science, The University of Tokyo,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Industrial Science, The University of Tokyo,","institution_ids":["https://openalex.org/I4405287318","https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5107887072","display_name":"Dai Kobayashi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I165522056","display_name":"Tokyo Denki University","ror":"https://ror.org/01pa62v70","country_code":"JP","type":"education","lineage":["https://openalex.org/I165522056"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Dai Kobayashi","raw_affiliation_strings":["Tokyo Denki University,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tokyo Denki University,","institution_ids":["https://openalex.org/I165522056"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048736602","display_name":"Gen Hashiguchi","orcid":"https://orcid.org/0000-0001-9018-5632","observed_orcids":["https://orcid.org/0000-0001-9018-5632"]},"institutions":[{"id":"https://openalex.org/I201933988","display_name":"Kagawa University","ror":"https://ror.org/04j7mzp05","country_code":"JP","type":"education","lineage":["https://openalex.org/I201933988"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Gen Hashiguchi","raw_affiliation_strings":["Kagawa University,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kagawa University,","institution_ids":["https://openalex.org/I201933988"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110031429","display_name":"Junji Endo","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Junji Endo","raw_affiliation_strings":["Advanced Research Laboratory, Hitachi Ltd.,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Advanced Research Laboratory, Hitachi Ltd.,","institution_ids":["https://openalex.org/I65143321"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109218598","display_name":"Yasuo Wada","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I65143321","display_name":"Hitachi (Japan)","ror":"https://ror.org/02exqgm79","country_code":"JP","type":"company","lineage":["https://openalex.org/I65143321"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yasuo Wada","raw_affiliation_strings":["Advanced Research Laboratory, Hitachi Ltd.,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Advanced Research Laboratory, Hitachi Ltd.,","institution_ids":["https://openalex.org/I65143321"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2210,"currency":"USD","value_usd":2210},"apc_paid":null,"fwci":0.4277,"has_fulltext":false,"cited_by_count":13,"citation_normalized_percentile":{"value":0.61743128,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":"38","issue":"12S","first_page":"7185","last_page":"7185"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9365000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9365000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13531","display_name":"Surface and Thin Film Phenomena","score":0.018400000408291817,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.012400000356137753,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microactuators","display_name":"microactuators","score":0.6460000276565552},{"id":"https://openalex.org/keywords/silicon-micromachining","display_name":"silicon micromachining","score":0.9760000109672546},{"id":"https://openalex.org/keywords/transmission-electron-microscopy","display_name":"transmission electron microscopy","score":0.5049999952316284},{"id":"https://openalex.org/keywords/in-situ-observation","display_name":"in situ observation","score":0.5640000104904175},{"id":"https://openalex.org/keywords/selective-etching","display_name":"selective etching","score":0.6309999823570251},{"id":"https://openalex.org/keywords/siox","display_name":"silicon oxide","score":0.7789999842643738},{"id":"https://openalex.org/keywords/comb-drive-actuators","display_name":"comb-drive actuators","score":0.878000020980835},{"id":"https://openalex.org/keywords/tip-position-control","display_name":"tip position control","score":0.6330000162124634},{"id":"https://openalex.org/keywords/nanoscale-imaging","display_name":"nanoscale imaging","score":0.5450000166893005}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7146395444869995},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6639853715896606},{"id":"https://openalex.org/C120398109","wikidata":"https://www.wikidata.org/wiki/Q175751","display_name":"Quantum tunnelling","level":2,"score":0.6027155518531799},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5567874312400818},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5431763529777527},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.5293199419975281},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.5165037512779236},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.5125879645347595},{"id":"https://openalex.org/C6518042","wikidata":"https://www.wikidata.org/wiki/Q175646","display_name":"Scanning tunneling microscope","level":2,"score":0.46930909156799316},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.431303471326828},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.388983815908432},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.21341046690940857},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1143/jjap.38.7185","doi":"https://doi.org/10.1143/jjap.38.7185","is_oa":false,"landing_page_url":"https://doi.org/10.1143/jjap.38.7185","pdf_url":null,"source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320320879","display_name":"Deutsche Forschungsgemeinschaft","ror":"https://ror.org/018mejw64"},{"id":"https://openalex.org/F4320334763","display_name":"Leibniz-Gemeinschaft","ror":"https://ror.org/01n6r0e97"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1629365489","https://openalex.org/W1911899118","https://openalex.org/W2043224514","https://openalex.org/W2046354237","https://openalex.org/W2046532889","https://openalex.org/W2057677696","https://openalex.org/W2084228094","https://openalex.org/W2085290322","https://openalex.org/W2140252302","https://openalex.org/W2141082776"],"related_works":["https://openalex.org/W1625259195","https://openalex.org/W2091449833","https://openalex.org/W1568522245","https://openalex.org/W2059065273","https://openalex.org/W1993839076","https://openalex.org/W1592652696","https://openalex.org/W2052717190","https://openalex.org/W3095933025","https://openalex.org/W1886097138","https://openalex.org/W1493071716"],"abstract_inverted_index":{"Simultaneous":[0],"visual":[1],"control":[2,26],"of":[3,11,39,63,72,78,83],"tip":[4],"position":[5],"is":[6,29,67,105],"indispensable":[7],"for":[8],"in-situ":[9],"observation":[10],"nanoscopic":[12],"phenomena":[13],"at":[14],"the":[15,40,70,84,109,127,131,153,158],"tunneling":[16,25,118,132],"gap.":[17,99],"In":[18],"this":[19],"paper":[20],"we":[21],"propose":[22],"a":[23,35,55,97,112,123],"one-chip":[24],"device,":[27],"which":[28],"small":[30],"enough":[31],"to":[32,107,152,157],"load":[33],"on":[34,54],"standard":[36],"sample":[37],"holder":[38],"transmission":[41],"electron":[42],"microscope":[43],"(TEM).":[44],"Tunneling":[45],"probes":[46],"and":[47,75,91,130],"micro":[48],"actuators":[49],"have":[50],"been":[51],"successfully":[52],"integrated":[53,159],"2.4\u00d72.4-mm2-chip":[56],"by":[57,69,137],"silicon":[58,65,79],"micromachining":[59],"technique.":[60],"A":[61],"pair":[62],"sharp":[64],"tips":[66,85,119],"obtained":[68,146],"combination":[71],"stress-induced":[73],"oxidation":[74],"selective":[76],"etching":[77],"oxide.":[80],"Typical":[81],"dimensions":[82],"are":[86,120],"10":[87],"nm":[88],"in":[89,94,126],"radius":[90],"1":[92],"\u00b5m":[93],"length":[95],"with":[96,111],"200-nm-initial":[98],"An":[100],"electrostatically":[101],"operated":[102],"comb-drive":[103],"actuator":[104],"used":[106],"close":[108],"gap":[110,133],"voltage":[113,155],"around":[114],"100":[115],"V.":[116],"The":[117],"suspended":[121],"over":[122],"through":[124],"hole":[125],"base":[128],"substrate,":[129],"can":[134],"be":[135,145],"observed":[136],"TEM.":[138],"We":[139],"found":[140],"that":[141],"clear":[142],"images":[143],"could":[144],"without":[147],"distortion":[148],"or":[149],"shift":[150],"due":[151],"driving":[154],"applied":[156],"actuator.":[160]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-11-05T12:25:35.769452","created_date":"2016-06-24T00:00:00"}