{"id":"https://openalex.org/W2129017490","doi":"https://doi.org/10.1109/jmems.2004.828738","title":"Design, Fabrication, and Characterization of Thermally Actuated Probe Arrays for Dip Pen Nanolithography","display_name":"Design, Fabrication, and Characterization of Thermally Actuated Probe Arrays for Dip Pen Nanolithography","publication_year":2004,"publication_date":"2004-08-01","ids":{"openalex":"https://openalex.org/W2129017490","doi":"https://doi.org/10.1109/jmems.2004.828738","mag":"2129017490"},"language":"en","primary_location":{"id":"doi:10.1109/jmems.2004.828738","doi":"https://doi.org/10.1109/jmems.2004.828738","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jmems.2004.828738","pdf_url":null,"source":{"id":"https://openalex.org/S4210187724","display_name":"Journal of Microelectromechanical Systems","issn_l":"1057-7157","issn":["1057-7157","1941-0158"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Microelectromechanical Systems","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5000319975","display_name":"David Bullen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]},{"id":"https://openalex.org/I2801919071","display_name":"University of Illinois System","ror":"https://ror.org/05e94g991","country_code":"US","type":"education","lineage":["https://openalex.org/I2801919071"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D. Bullen","raw_affiliation_strings":["Micro Actuators, Sensors, and Systems Group, Micro and Nanotechnology Laboratory, University of Illinois, Urbana-Champaign, Urbana-Champaign, IL, USA","Syst. Group, Univ. of Illinois, Urbana, IL, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro Actuators, Sensors, and Systems Group, Micro and Nanotechnology Laboratory, University of Illinois, Urbana-Champaign, Urbana-Champaign, IL, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"Syst. Group, Univ. of Illinois, Urbana, IL, USA","institution_ids":["https://openalex.org/I157725225","https://openalex.org/I2801919071"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100438586","display_name":"Xiaohua Wang","orcid":"https://orcid.org/0000-0002-6551-151X","observed_orcids":["https://orcid.org/0000-0002-6551-151X"]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]},{"id":"https://openalex.org/I2801919071","display_name":"University of Illinois System","ror":"https://ror.org/05e94g991","country_code":"US","type":"education","lineage":["https://openalex.org/I2801919071"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"X. Wang","raw_affiliation_strings":["Micro Actuators, Sensors, and Systems Group, Micro and Nanotechnology Laboratory, University of Illinois, Urbana-Champaign, Urbana-Champaign, IL, USA","Syst. Group, Univ. of Illinois, Urbana, IL, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro Actuators, Sensors, and Systems Group, Micro and Nanotechnology Laboratory, University of Illinois, Urbana-Champaign, Urbana-Champaign, IL, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"Syst. Group, Univ. of Illinois, Urbana, IL, USA","institution_ids":["https://openalex.org/I157725225","https://openalex.org/I2801919071"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011712654","display_name":"Jun Tao Zou","orcid":"https://orcid.org/0000-0003-2443-3516","observed_orcids":["https://orcid.org/0000-0003-2443-3516"]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]},{"id":"https://openalex.org/I2801919071","display_name":"University of Illinois System","ror":"https://ror.org/05e94g991","country_code":"US","type":"education","lineage":["https://openalex.org/I2801919071"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Zou","raw_affiliation_strings":["Micro Actuators, Sensors, and Systems Group, Micro and Nanotechnology Laboratory, University of Illinois, Urbana-Champaign, Urbana-Champaign, IL, USA","Syst. Group, Univ. of Illinois, Urbana, IL, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro Actuators, Sensors, and Systems Group, Micro and Nanotechnology Laboratory, University of Illinois, Urbana-Champaign, Urbana-Champaign, IL, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"Syst. Group, Univ. of Illinois, Urbana, IL, USA","institution_ids":["https://openalex.org/I157725225","https://openalex.org/I2801919071"]}]},{"author_position":"middle","author":{"id":null,"display_name":"S.-W. Chung","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I111979921","display_name":"Northwestern University","ror":"https://ror.org/000e0be47","country_code":"US","type":"education","lineage":["https://openalex.org/I111979921"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S.-W. Chung","raw_affiliation_strings":["Institute of Nanotechnology and Department of Chemistry, Northwestern University, Evanston, IL, USA","[Institute of Nanotechnology and Department of Chemistry, Northwestern University, Evanston, IL, USA]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Nanotechnology and Department of Chemistry, Northwestern University, Evanston, IL, USA","institution_ids":["https://openalex.org/I111979921"]},{"raw_affiliation_string":"[Institute of Nanotechnology and Department of Chemistry, Northwestern University, Evanston, IL, USA]","institution_ids":["https://openalex.org/I111979921"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055829204","display_name":"Chad Alexander Mirkin","orcid":"https://orcid.org/0000-0002-6634-7627","observed_orcids":["https://orcid.org/0000-0002-6634-7627"]},"institutions":[{"id":"https://openalex.org/I111979921","display_name":"Northwestern University","ror":"https://ror.org/000e0be47","country_code":"US","type":"education","lineage":["https://openalex.org/I111979921"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C.A. Mirkin","raw_affiliation_strings":["Institute of Nanotechnology and Department of Chemistry, Northwestern University, Evanston, IL, USA","[Institute of Nanotechnology and Department of Chemistry, Northwestern University, Evanston, IL, USA]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Nanotechnology and Department of Chemistry, Northwestern University, Evanston, IL, USA","institution_ids":["https://openalex.org/I111979921"]},{"raw_affiliation_string":"[Institute of Nanotechnology and Department of Chemistry, Northwestern University, Evanston, IL, USA]","institution_ids":["https://openalex.org/I111979921"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5052306453","display_name":"C. Liu","orcid":"https://orcid.org/0000-0003-2205-8425","observed_orcids":["https://orcid.org/0000-0003-2205-8425"]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"C. Liu","raw_affiliation_strings":["Micro Actuators, Sensors, and Systems Group, Micro and Nanotechnology Laboratory, University of Illinois, Urbana-Champaign, Urbana-Champaign, IL, USA","[Micro Actuators, Sensors and Systems Group, Micro and Nanotechnology Laboratory, University of Illinois, Urbana-Champaign, Urbana-Champaign, IL, USA]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro Actuators, Sensors, and Systems Group, Micro and Nanotechnology Laboratory, University of Illinois, Urbana-Champaign, Urbana-Champaign, IL, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"[Micro Actuators, Sensors and Systems Group, Micro and Nanotechnology Laboratory, University of Illinois, Urbana-Champaign, Urbana-Champaign, IL, USA]","institution_ids":["https://openalex.org/I157725225"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2645,"currency":"USD","value_usd":2645},"apc_paid":null,"fwci":5.8014,"has_fulltext":false,"cited_by_count":52,"citation_normalized_percentile":{"value":0.96267385,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":88,"max":96},"biblio":{"volume":"13","issue":"4","first_page":"594","last_page":"602"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.6762999892234802,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.6762999892234802,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.31369999051094055,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.004100000020116568,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dip-pen-nanolithography","display_name":"dip-pen nanolithography","score":0.996999979019165},{"id":"https://openalex.org/keywords/atomic-force-microscope-tip","display_name":"atomic force microscope tip","score":0.6510000228881836},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"silicon nitride","score":0.8149999976158142},{"id":"https://openalex.org/keywords/gold","display_name":"gold","score":0.503000020980835},{"id":"https://openalex.org/keywords/tip-deflection","display_name":"tip deflection","score":0.7110000252723694},{"id":"https://openalex.org/keywords/octadecanethiol","display_name":"octadecanethiol","score":0.8220000267028809},{"id":"https://openalex.org/keywords/gold-surfaces","display_name":"gold surfaces","score":0.609000027179718},{"id":"https://openalex.org/keywords/write-speed","display_name":"write speed","score":0.5350000262260437}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.8404846787452698},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.7897937893867493},{"id":"https://openalex.org/C179203168","wikidata":"https://www.wikidata.org/wiki/Q5279666","display_name":"Dip-pen nanolithography","level":5,"score":0.778537392616272},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6277472972869873},{"id":"https://openalex.org/C2778393539","wikidata":"https://www.wikidata.org/wiki/Q4913759","display_name":"Bimorph","level":3,"score":0.5340090990066528},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5311713814735413},{"id":"https://openalex.org/C45206210","wikidata":"https://www.wikidata.org/wiki/Q2415817","display_name":"Nanoscopic scale","level":2,"score":0.5259411931037903},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.49823641777038574},{"id":"https://openalex.org/C142181693","wikidata":"https://www.wikidata.org/wiki/Q6493080","display_name":"Laser linewidth","level":3,"score":0.4716457724571228},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4641292095184326},{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.45029163360595703},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.41699206829071045},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4125421941280365},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.23936203122138977},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.09250497817993164},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.07670518755912781},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/jmems.2004.828738","doi":"https://doi.org/10.1109/jmems.2004.828738","is_oa":false,"landing_page_url":"https://doi.org/10.1109/jmems.2004.828738","pdf_url":null,"source":{"id":"https://openalex.org/S4210187724","display_name":"Journal of Microelectromechanical Systems","issn_l":"1057-7157","issn":["1057-7157","1941-0158"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Microelectromechanical Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320309475","display_name":"Northwestern University","ror":"https://ror.org/000e0be47"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":32,"referenced_works":["https://openalex.org/W1506589196","https://openalex.org/W1964259537","https://openalex.org/W1964373062","https://openalex.org/W1965827571","https://openalex.org/W1968318365","https://openalex.org/W1978152895","https://openalex.org/W1987886000","https://openalex.org/W1991540986","https://openalex.org/W1994523192","https://openalex.org/W1994583662","https://openalex.org/W1997268642","https://openalex.org/W1999184785","https://openalex.org/W2000908691","https://openalex.org/W2002119054","https://openalex.org/W2010157435","https://openalex.org/W2014075865","https://openalex.org/W2015498249","https://openalex.org/W2019263783","https://openalex.org/W2033339276","https://openalex.org/W2034851656","https://openalex.org/W2037932521","https://openalex.org/W2061530564","https://openalex.org/W2067032055","https://openalex.org/W2082786309","https://openalex.org/W2086320459","https://openalex.org/W2105088346","https://openalex.org/W2122445791","https://openalex.org/W2143915873","https://openalex.org/W2502646397","https://openalex.org/W2562786374","https://openalex.org/W4232751057","https://openalex.org/W4243665674"],"related_works":["https://openalex.org/W1970501686","https://openalex.org/W2011975392","https://openalex.org/W1984062010","https://openalex.org/W2068610115","https://openalex.org/W1979069790","https://openalex.org/W2015498249","https://openalex.org/W2358944978","https://openalex.org/W2024700173","https://openalex.org/W2979969075","https://openalex.org/W2042684002"],"abstract_inverted_index":{"In":[0],"Dip":[1],"Pen":[2],"Nanolithography":[3],"(DPN),":[4],"arbitrary":[5],"nanoscale":[6],"chemical":[7],"patterns":[8,136,165],"can":[9],"be":[10],"created":[11,150],"by":[12,127],"the":[13,18,33,69,99,103,116,183],"diffusion":[14],"of":[15,20,39,49,56,80,87,102,156],"chemicals":[16],"from":[17,98],"tip":[19,85],"an":[21,40],"atomic":[22],"force":[23],"microscope":[24],"(AFM)":[25],"probe":[26,46,108],"to":[27,94,114,130],"a":[28,84,138,152,171],"surface.":[29,140],"This":[30],"paper":[31],"describes":[32],"design,":[34],"optimization,":[35],"fabrication,":[36],"and":[37,59,68,112,176],"testing":[38],"actuated":[41],"multi-probe":[42],"DPN":[43,184],"array.":[44],"The":[45,61,123],"array":[47,124],"consists":[48],"10":[50,81,133],"thermal":[51],"bimorph":[52],"active":[53],"probes":[54,62,181],"made":[55],"silicon":[57],"nitride":[58],"gold.":[60],"are":[63,71],"300":[64],"/spl":[65,74,89,158],"mu/m":[66,75],"long":[67],"tips":[70,97],"spaced":[72],"100":[73],"apart.":[76],"An":[77,106],"actuation":[78],"current":[79],"mA":[82],"produces":[83],"deflection":[86],"8":[88],"mu/m,":[90],"which":[91],"is":[92,110,125],"enough":[93],"remove":[95],"individual":[96],"surface":[100],"independent":[101],"adjacent":[104],"probes.":[105],"analytical":[107],"model":[109],"presented":[111],"used":[113],"optimize":[115],"design":[117],"against":[118],"several":[119],"possible":[120],"failure":[121],"modes.":[122],"demonstrated":[126],"using":[128],"it":[129],"simultaneously":[131],"write":[132,154],"unique":[134],"octadecanethiol":[135],"on":[137],"gold":[139],"Pattern":[141],"linewidth":[142],"as":[143,145],"small":[144],"80":[146],"nm":[147],"has":[148],"been":[149],"at":[151],"maximum":[153],"speed":[155],"20":[157],"mu/m/sec.":[159],"By":[160],"writing":[161],"multiple,":[162],"distinctly":[163],"different":[164],"in":[166,174,182],"parallel,":[167],"this":[168],"device":[169],"provides":[170],"significant":[172],"improvement":[173],"throughput":[175],"flexibility":[177],"over":[178],"conventional":[179],"AFM":[180],"process.":[185]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":2}],"updated_date":"2026-10-14T16:39:01.820549","created_date":"2025-10-10T00:00:00"}