{"id":"https://openalex.org/W2128686018","doi":"https://doi.org/10.1088/0963-0252/20/1/015017","title":"The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges","display_name":"The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges","publication_year":2011,"publication_date":"2011-01-24","ids":{"openalex":"https://openalex.org/W2128686018","doi":"https://doi.org/10.1088/0963-0252/20/1/015017","mag":"2128686018"},"language":"en","primary_location":{"id":"doi:10.1088/0963-0252/20/1/015017","doi":"https://doi.org/10.1088/0963-0252/20/1/015017","is_oa":false,"landing_page_url":"https://doi.org/10.1088/0963-0252/20/1/015017","pdf_url":null,"source":{"id":"https://openalex.org/S57082650","display_name":"Plasma Sources Science and Technology","issn_l":"0963-0252","issn":["0963-0252","1361-6595"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Plasma Sources Science and Technology","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5010518216","display_name":"Julian Schulze","orcid":"https://orcid.org/0000-0001-7929-5734","observed_orcids":["https://orcid.org/0000-0001-7929-5734"]},"institutions":[{"id":"https://openalex.org/I4210107617","display_name":"Institute for Solid State Physics and Optics","ror":"https://ror.org/01pdam362","country_code":"HU","type":"facility","lineage":["https://openalex.org/I4210107617","https://openalex.org/I4210126225","https://openalex.org/I4387152226"]},{"id":"https://openalex.org/I7597260","display_name":"Hungarian Academy of Sciences","ror":"https://ror.org/02ks8qq67","country_code":"HU","type":"government","lineage":["https://openalex.org/I7597260"]},{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE","HU"],"is_corresponding":false,"raw_author_name":"J Schulze","raw_affiliation_strings":["Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany","Research Institute for Solid State Physics and Optics of the Hungarian Academy of Science, Budapest, Hungary"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany","institution_ids":["https://openalex.org/I904495901"]},{"raw_affiliation_string":"Research Institute for Solid State Physics and Optics of the Hungarian Academy of Science, Budapest, Hungary","institution_ids":["https://openalex.org/I4210107617","https://openalex.org/I7597260"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108630919","display_name":"Edmund Sch\u00fcngel","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"E Sch\u00fcngel","raw_affiliation_strings":["Institute for Plasma and Atomic Physics, Ruhr-University, Bochum, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute for Plasma and Atomic Physics, Ruhr-University, Bochum, Germany","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030507867","display_name":"Zolt\u00e1n Donk\u00f3","orcid":"https://orcid.org/0000-0003-1369-6150","observed_orcids":["https://orcid.org/0000-0003-1369-6150"]},"institutions":[{"id":"https://openalex.org/I4210107617","display_name":"Institute for Solid State Physics and Optics","ror":"https://ror.org/01pdam362","country_code":"HU","type":"facility","lineage":["https://openalex.org/I4210107617","https://openalex.org/I4210126225","https://openalex.org/I4387152226"]},{"id":"https://openalex.org/I7597260","display_name":"Hungarian Academy of Sciences","ror":"https://ror.org/02ks8qq67","country_code":"HU","type":"government","lineage":["https://openalex.org/I7597260"]}],"countries":["HU"],"is_corresponding":false,"raw_author_name":"Z Donk\u00f3","raw_affiliation_strings":["Research Institute for Solid State Physics and Optics of the Hungarian Academy of Science, Budapest, Hungary"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Institute for Solid State Physics and Optics of the Hungarian Academy of Science, Budapest, Hungary","institution_ids":["https://openalex.org/I4210107617","https://openalex.org/I7597260"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5005908187","display_name":"Uwe Czarnetzki","orcid":"https://orcid.org/0000-0002-5823-1501","observed_orcids":["https://orcid.org/0000-0002-5823-1501"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"U Czarnetzki","raw_affiliation_strings":["Institute for Plasma and Atomic Physics, Ruhr-University, Bochum, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute for Plasma and Atomic Physics, Ruhr-University, Bochum, Germany","institution_ids":["https://openalex.org/I904495901"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":3325,"currency":"USD","value_usd":3325},"apc_paid":null,"fwci":6.2848,"has_fulltext":false,"cited_by_count":135,"citation_normalized_percentile":{"value":0.96789945,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":97,"max":99},"biblio":{"volume":"20","issue":"1","first_page":"015017","last_page":"015017"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9843999743461609,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9843999743461609,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.0071000000461936,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10642","display_name":"Atmospheric-Pressure Plasma Applications","score":0.004399999976158142,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitively-coupled-radio-frequency-discharge","display_name":"capacitively coupled radio frequency discharge","score":0.8289999961853027},{"id":"https://openalex.org/keywords/dc-self-bias","display_name":"DC self-bias","score":0.8999999761581421},{"id":"https://openalex.org/keywords/ion-energy-control","display_name":"ion energy control","score":0.7480000257492065},{"id":"https://openalex.org/keywords/ion-flux-control","display_name":"ion flux control","score":0.8230000138282776},{"id":"https://openalex.org/keywords/phase-shift-optimization","display_name":"phase shift optimization","score":0.6949999928474426},{"id":"https://openalex.org/keywords/floating-potential","display_name":"floating potential","score":0.7559999823570251}],"concepts":[{"id":"https://openalex.org/C188414643","wikidata":"https://www.wikidata.org/wiki/Q3001183","display_name":"Harmonics","level":3,"score":0.761648416519165},{"id":"https://openalex.org/C38976095","wikidata":"https://www.wikidata.org/wiki/Q752641","display_name":"Asymmetry","level":2,"score":0.7282944917678833},{"id":"https://openalex.org/C68687820","wikidata":"https://www.wikidata.org/wiki/Q5034482","display_name":"Capacitively coupled plasma","level":4,"score":0.6649356484413147},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.6068174839019775},{"id":"https://openalex.org/C88682704","wikidata":"https://www.wikidata.org/wiki/Q2907415","display_name":"DC bias","level":3,"score":0.5210999250411987},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.4931911826133728},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.4865238070487976},{"id":"https://openalex.org/C30475298","wikidata":"https://www.wikidata.org/wiki/Q909554","display_name":"Computational physics","level":1,"score":0.48134931921958923},{"id":"https://openalex.org/C122348159","wikidata":"https://www.wikidata.org/wiki/Q5502869","display_name":"Frequency drift","level":4,"score":0.4720407724380493},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.47137129306793213},{"id":"https://openalex.org/C197424946","wikidata":"https://www.wikidata.org/wiki/Q1165717","display_name":"Waveform","level":3,"score":0.4541858434677124},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.4485012888908386},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.4427063763141632},{"id":"https://openalex.org/C10513763","wikidata":"https://www.wikidata.org/wiki/Q1331774","display_name":"Fundamental frequency","level":2,"score":0.44012707471847534},{"id":"https://openalex.org/C20254490","wikidata":"https://www.wikidata.org/wiki/Q719550","display_name":"Biasing","level":3,"score":0.4354187548160553},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.35145148634910583},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2521861791610718},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.17496022582054138},{"id":"https://openalex.org/C95974651","wikidata":"https://www.wikidata.org/wiki/Q2454436","display_name":"Inductively coupled plasma","level":3,"score":0.14466413855552673},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.09130537509918213},{"id":"https://openalex.org/C5291336","wikidata":"https://www.wikidata.org/wiki/Q852341","display_name":"Voltage-controlled oscillator","level":3,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1088/0963-0252/20/1/015017","doi":"https://doi.org/10.1088/0963-0252/20/1/015017","is_oa":false,"landing_page_url":"https://doi.org/10.1088/0963-0252/20/1/015017","pdf_url":null,"source":{"id":"https://openalex.org/S57082650","display_name":"Plasma Sources Science and Technology","issn_l":"0963-0252","issn":["0963-0252","1361-6595"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Plasma Sources Science and Technology","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321994","display_name":"Hungarian Scientific Research Fund","ror":"https://ror.org/00v349e63"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":56,"referenced_works":["https://openalex.org/W1480160699","https://openalex.org/W1491321482","https://openalex.org/W1530960250","https://openalex.org/W1963954762","https://openalex.org/W1968428741","https://openalex.org/W1976668068","https://openalex.org/W1980807895","https://openalex.org/W1987600079","https://openalex.org/W1989815886","https://openalex.org/W1996957017","https://openalex.org/W1998299834","https://openalex.org/W2000172671","https://openalex.org/W2006098799","https://openalex.org/W2006634883","https://openalex.org/W2007185414","https://openalex.org/W2008464274","https://openalex.org/W2016551723","https://openalex.org/W2017981825","https://openalex.org/W2020045108","https://openalex.org/W2020903072","https://openalex.org/W2027678071","https://openalex.org/W2029321872","https://openalex.org/W2033110173","https://openalex.org/W2040464194","https://openalex.org/W2044798880","https://openalex.org/W2046193750","https://openalex.org/W2048015077","https://openalex.org/W2050668733","https://openalex.org/W2057612955","https://openalex.org/W2059380773","https://openalex.org/W2060600644","https://openalex.org/W2065455126","https://openalex.org/W2067990243","https://openalex.org/W2085401500","https://openalex.org/W2085456433","https://openalex.org/W2089864237","https://openalex.org/W2090851454","https://openalex.org/W2095410294","https://openalex.org/W2096940112","https://openalex.org/W2098537057","https://openalex.org/W2104062774","https://openalex.org/W2106582005","https://openalex.org/W2115482876","https://openalex.org/W2123761964","https://openalex.org/W2132508913","https://openalex.org/W2136937054","https://openalex.org/W2147018641","https://openalex.org/W2150759874","https://openalex.org/W2151160326","https://openalex.org/W2162999431","https://openalex.org/W2164335666","https://openalex.org/W2167562880","https://openalex.org/W2171206964","https://openalex.org/W2798788284","https://openalex.org/W4246994895","https://openalex.org/W4249676513"],"related_works":["https://openalex.org/W2096940112","https://openalex.org/W2000172671","https://openalex.org/W2150759874","https://openalex.org/W2062498750","https://openalex.org/W1996016748","https://openalex.org/W2123761964","https://openalex.org/W2112552636","https://openalex.org/W7097590137","https://openalex.org/W1995524853","https://openalex.org/W2793567635"],"abstract_inverted_index":{"The":[0,29],"electrical":[1],"asymmetry":[2],"effect":[3],"(EAE)":[4],"in":[5],"geometrically":[6],"symmetric":[7],"capacitively":[8],"coupled":[9],"radio":[10],"frequency":[11],"discharges":[12,69],"operated":[13],"at":[14,90],"multiple":[15],"consecutive":[16],"harmonics":[17],"is":[18,31,39,145],"investigated":[19],"by":[20,41,105],"a":[21,74,102],"particle-in-cell":[22],"(PIC)":[23],"simulation":[24],"and":[25,55,83,133],"an":[26],"analytical":[27],"model.":[28],"model":[30],"based":[32],"on":[33],"the":[34,45,48,52,56,61,86,91,98,107,111,118,121,127,139,143],"original":[35],"EAE":[36,144],"model,":[37],"which":[38],"extended":[40],"taking":[42],"into":[43],"account":[44],"floating":[46],"potentials,":[47],"voltage":[49,113,123],"drop":[50],"across":[51],"plasma":[53],"bulk,":[54],"symmetry":[57],"parameter":[58],"resulting":[59],"from":[60,97],"PIC":[62],"simulation.":[63],"Compared":[64],"with":[65],"electrically":[66,82,132],"asymmetric":[67],"dual-frequency":[68],"we":[70],"find":[71],"that":[72,84],"(i)":[73],"significantly":[75],"stronger":[76],"dc":[77,130],"self-bias":[78,131],"can":[79,93],"be":[80,94],"generated":[81],"(ii)":[85],"mean":[87],"ion":[88,99,140],"energies":[89],"electrodes":[92],"controlled":[95],"separately":[96],"flux":[100],"over":[101],"broader":[103],"range":[104],"tuning":[106],"phase":[108],"shifts":[109],"between":[110],"individual":[112],"harmonics.":[114],"A":[115],"recipe":[116],"for":[117],"optimization":[119],"of":[120,138],"applied":[122],"waveform":[124],"to":[125,134],"generate":[126],"strongest":[128],"possible":[129],"obtain":[135],"maximum":[136],"control":[137],"energy":[141],"via":[142],"presented.":[146]},"counts_by_year":[{"year":2026,"cited_by_count":9},{"year":2025,"cited_by_count":7},{"year":2024,"cited_by_count":9},{"year":2023,"cited_by_count":6},{"year":2022,"cited_by_count":5},{"year":2021,"cited_by_count":14},{"year":2020,"cited_by_count":11},{"year":2019,"cited_by_count":8},{"year":2018,"cited_by_count":7},{"year":2017,"cited_by_count":10},{"year":2016,"cited_by_count":8},{"year":2015,"cited_by_count":12},{"year":2014,"cited_by_count":6},{"year":2013,"cited_by_count":12},{"year":2012,"cited_by_count":6}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}