{"id":"https://openalex.org/W2126554651","doi":"https://doi.org/10.1002/pssc.201300320","title":"Evaluation of an InAlN/AlN/GaN HEMT with Ta\u2010based ohmic contacts and PECVD SiN passivation","display_name":"Evaluation of an InAlN/AlN/GaN HEMT with Ta\u2010based ohmic contacts and PECVD SiN passivation","publication_year":2014,"publication_date":"2014-01-22","ids":{"openalex":"https://openalex.org/W2126554651","doi":"https://doi.org/10.1002/pssc.201300320","mag":"2126554651"},"language":"en","primary_location":{"id":"doi:10.1002/pssc.201300320","doi":"https://doi.org/10.1002/pssc.201300320","is_oa":true,"landing_page_url":"https://doi.org/10.1002/pssc.201300320","pdf_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/pssc.201300320","source":{"id":"https://openalex.org/S4210174949","display_name":"Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics","issn_l":"1610-1634","issn":["1610-1634","1610-1642","1862-6351"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","norway-1","poland-40"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"physica status solidi c","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/pssc.201300320","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5012074699","display_name":"Anna Malmros","orcid":"https://orcid.org/0000-0001-5843-4918","observed_orcids":["https://orcid.org/0000-0001-5843-4918"]},"institutions":[{"id":"https://openalex.org/I66862912","display_name":"Chalmers University of Technology","ror":"https://ror.org/040wg7k59","country_code":"SE","type":"education","lineage":["https://openalex.org/I66862912"]}],"countries":["SE"],"is_corresponding":true,"raw_author_name":"Anna Malmros","raw_affiliation_strings":["Chalmers University of Technology, Kemiv. 9, 41296 Go\u0308teborg, Sweden","Chalmers University of Technology, Kemiv. 9, 41296 G\u00f6teborg, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chalmers University of Technology, Kemiv. 9, 41296 Go\u0308teborg, Sweden","institution_ids":["https://openalex.org/I66862912"]},{"raw_affiliation_string":"Chalmers University of Technology, Kemiv. 9, 41296 G\u00f6teborg, Sweden","institution_ids":["https://openalex.org/I66862912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108075109","display_name":"Piero Gamarra","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Piero Gamarra","raw_affiliation_strings":["3-5 Lab/Thales Research & Technology, Route de Nozay, 91460 Marcoussis, France","Phone: +33 1 30777 148,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"3-5 Lab/Thales Research & Technology, Route de Nozay, 91460 Marcoussis, France","institution_ids":[]},{"raw_affiliation_string":"Phone: +33 1 30777 148,","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030195714","display_name":"Mattias Thorsell","orcid":"https://orcid.org/0000-0003-0415-7219","observed_orcids":["https://orcid.org/0000-0003-0415-7219"]},"institutions":[{"id":"https://openalex.org/I66862912","display_name":"Chalmers University of Technology","ror":"https://ror.org/040wg7k59","country_code":"SE","type":"education","lineage":["https://openalex.org/I66862912"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"Mattias Thorsell","raw_affiliation_strings":["Chalmers University of Technology, Kemiv. 9, 41296 Go\u0308teborg, Sweden","Chalmers University of Technology, Kemiv. 9, 41296 G\u00f6teborg, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chalmers University of Technology, Kemiv. 9, 41296 Go\u0308teborg, Sweden","institution_ids":["https://openalex.org/I66862912"]},{"raw_affiliation_string":"Chalmers University of Technology, Kemiv. 9, 41296 G\u00f6teborg, Sweden","institution_ids":["https://openalex.org/I66862912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031304266","display_name":"Marie\u2010Antoinette di Forte\u2010Poisson","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Marie\u2010Antoinette di Forte\u2010Poisson","raw_affiliation_strings":["3-5 Lab/Thales Research & Technology, Route de Nozay, 91460 Marcoussis, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"3-5 Lab/Thales Research & Technology, Route de Nozay, 91460 Marcoussis, France","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013731637","display_name":"C. Lacam","orcid":"https://orcid.org/0000-0002-0944-9950","observed_orcids":["https://orcid.org/0000-0002-0944-9950"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Cedric Lacam","raw_affiliation_strings":["3-5 Lab/Thales Research & Technology, Route de Nozay, 91460 Marcoussis, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"3-5 Lab/Thales Research & Technology, Route de Nozay, 91460 Marcoussis, France","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005641802","display_name":"M. Tordjman","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Maurice Tordjman","raw_affiliation_strings":["3-5 Lab/Thales Research & Technology, Route de Nozay, 91460 Marcoussis, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"3-5 Lab/Thales Research & Technology, Route de Nozay, 91460 Marcoussis, France","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103784842","display_name":"Rapha\u00ebl Aubry","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Rapha\u00ebl Aubry","raw_affiliation_strings":["3-5 Lab/Thales Research & Technology, Route de Nozay, 91460 Marcoussis, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"3-5 Lab/Thales Research & Technology, Route de Nozay, 91460 Marcoussis, France","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085351155","display_name":"Herbert Zirath","orcid":"https://orcid.org/0000-0002-5721-4793","observed_orcids":["https://orcid.org/0000-0002-5721-4793"]},"institutions":[{"id":"https://openalex.org/I66862912","display_name":"Chalmers University of Technology","ror":"https://ror.org/040wg7k59","country_code":"SE","type":"education","lineage":["https://openalex.org/I66862912"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"Herbert Zirath","raw_affiliation_strings":["Chalmers University of Technology, Kemiv. 9, 41296 Go\u0308teborg, Sweden","Chalmers University of Technology, Kemiv. 9, 41296 G\u00f6teborg, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chalmers University of Technology, Kemiv. 9, 41296 Go\u0308teborg, Sweden","institution_ids":["https://openalex.org/I66862912"]},{"raw_affiliation_string":"Chalmers University of Technology, Kemiv. 9, 41296 G\u00f6teborg, Sweden","institution_ids":["https://openalex.org/I66862912"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5032524298","display_name":"Niklas Rorsman","orcid":"https://orcid.org/0000-0001-9916-7633","observed_orcids":["https://orcid.org/0000-0001-9916-7633"]},"institutions":[{"id":"https://openalex.org/I66862912","display_name":"Chalmers University of Technology","ror":"https://ror.org/040wg7k59","country_code":"SE","type":"education","lineage":["https://openalex.org/I66862912"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"Niklas Rorsman","raw_affiliation_strings":["Chalmers University of Technology, Kemiv. 9, 41296 Go\u0308teborg, Sweden","Chalmers University of Technology, Kemiv. 9, 41296 G\u00f6teborg, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chalmers University of Technology, Kemiv. 9, 41296 Go\u0308teborg, Sweden","institution_ids":["https://openalex.org/I66862912"]},{"raw_affiliation_string":"Chalmers University of Technology, Kemiv. 9, 41296 G\u00f6teborg, Sweden","institution_ids":["https://openalex.org/I66862912"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5012074699"],"corresponding_institution_ids":["https://openalex.org/I66862912"],"apc_list":null,"apc_paid":null,"fwci":1.7661,"has_fulltext":true,"cited_by_count":23,"citation_normalized_percentile":{"value":0.83848612,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":87,"max":99},"biblio":{"volume":"11","issue":"3-4","first_page":"924","last_page":"927"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":0.0005000000237487257,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/contact-resistance","display_name":"contact resistance","score":0.7409999966621399},{"id":"https://openalex.org/keywords/transconductance","display_name":"transconductance","score":0.9120000004768372},{"id":"https://openalex.org/keywords/gate-leakage-current","display_name":"gate leakage current","score":0.9210000038146973},{"id":"https://openalex.org/keywords/maximum-frequency-of-oscillation","display_name":"maximum oscillation frequency","score":0.8539999723434448},{"id":"https://openalex.org/keywords/power-output","display_name":"output power","score":0.8349999785423279},{"id":"https://openalex.org/keywords/high-electron-mobility-transistors","display_name":"high electron mobility transistors","score":0.6880000233650208},{"id":"https://openalex.org/keywords/radio-frequency-power-amplifiers","display_name":"RF power amplifier","score":0.37700000405311584}],"concepts":[{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.9242883920669556},{"id":"https://openalex.org/C138230450","wikidata":"https://www.wikidata.org/wiki/Q2016597","display_name":"Ohmic contact","level":3,"score":0.8764649629592896},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7806644439697266},{"id":"https://openalex.org/C2779283907","wikidata":"https://www.wikidata.org/wiki/Q1632964","display_name":"Transconductance","level":4,"score":0.7661161422729492},{"id":"https://openalex.org/C162057924","wikidata":"https://www.wikidata.org/wiki/Q1617706","display_name":"High-electron-mobility transistor","level":4,"score":0.6956250071525574},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6643091440200806},{"id":"https://openalex.org/C38347018","wikidata":"https://www.wikidata.org/wiki/Q905958","display_name":"Plasma-enhanced chemical vapor deposition","level":3,"score":0.6467583179473877},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.4090797007083893},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.2994093894958496},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2712988257408142},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.21909594535827637},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.21665000915527344},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1002/pssc.201300320","doi":"https://doi.org/10.1002/pssc.201300320","is_oa":true,"landing_page_url":"https://doi.org/10.1002/pssc.201300320","pdf_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/pssc.201300320","source":{"id":"https://openalex.org/S4210174949","display_name":"Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics","issn_l":"1610-1634","issn":["1610-1634","1610-1642","1862-6351"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","norway-1","poland-40"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"physica status solidi c","raw_type":"journal-article"},{"id":"pmh:oai:publications.lib.chalmers.se:210398","doi":null,"is_oa":false,"landing_page_url":"http://publications.lib.chalmers.se/publication/210398-evaluation-of-an-inalnalngan-hemt-with-ta-based-ohmic-contacts-and-pecvd-sin-passivation","pdf_url":null,"source":{"id":"https://openalex.org/S4377196470","display_name":"Chalmers Publication Library (Chalmers University of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I66862912","host_organization_name":"Chalmers University of Technology","host_organization_lineage":["https://openalex.org/I66862912"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text.Article.Conference.PeerReviewed"},{"id":"pmh:oai:research.chalmers.se:210398","doi":null,"is_oa":false,"landing_page_url":"https://research.chalmers.se/en/publication/210398","pdf_url":null,"source":{"id":"https://openalex.org/S4306402469","display_name":"Chalmers Research (Chalmers University of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I66862912","host_organization_name":"Chalmers University of Technology","host_organization_lineage":["https://openalex.org/I66862912"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":null}],"best_oa_location":{"id":"doi:10.1002/pssc.201300320","doi":"https://doi.org/10.1002/pssc.201300320","is_oa":true,"landing_page_url":"https://doi.org/10.1002/pssc.201300320","pdf_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/pssc.201300320","source":{"id":"https://openalex.org/S4210174949","display_name":"Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics","issn_l":"1610-1634","issn":["1610-1634","1610-1642","1862-6351"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","norway-1","poland-40"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"physica status solidi c","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320320940","display_name":"Stiftelsen f\u00f6r\u00a0Strategisk Forskning","ror":"https://ror.org/044wr7g58"},{"id":"https://openalex.org/F4320321033","display_name":"Svenska Forskningsr\u00e5det Formas","ror":"https://ror.org/03pjs1y45"},{"id":"https://openalex.org/F4320322581","display_name":"Vetenskapsr\u00e5det","ror":"https://ror.org/03zttf063"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2126554651.pdf","grobid_xml":"https://content.openalex.org/works/W2126554651.grobid-xml"},"referenced_works_count":2,"referenced_works":["https://openalex.org/W6600168311","https://openalex.org/W6633827285"],"related_works":["https://openalex.org/W421226171","https://openalex.org/W2905323829","https://openalex.org/W2518707222","https://openalex.org/W1978357318","https://openalex.org/W2326582722","https://openalex.org/W2534891636","https://openalex.org/W2804620052","https://openalex.org/W1505021958","https://openalex.org/W1562748064","https://openalex.org/W1790655889"],"abstract_inverted_index":{"Abstract":[0],"An":[1],"InAlN/AlN/GaN":[2],"HEMT":[3],"with":[4],"Au\u2010free":[5],"Ta\u2010based":[6],"ohmic":[7,18],"contacts":[8,19],"and":[9,42,53,88,107,121,130],"a":[10,27],"high\u2010quality":[11],"PECVD":[12],"SiN":[13],"pas\u2010sivation":[14],"is":[15],"reported.":[16],"The":[17,33,39,69],"were":[20,45,124],"annealed":[21],"at":[22,81,128],"550":[23],"\u00b0C,":[24],"resulting":[25],"in":[26],"contact":[28],"resistance":[29],"of":[30,84,119],"0.64":[31],"\u03a9mm.":[32],"gate":[34,104],"length":[35],"was":[36,57,62],"50":[37],"nm.":[38],"device":[40],"performance":[41],"the":[43,66,82,85,89,100,103,108],"process":[44],"evaluated":[46],"by":[47,65,75],"performing":[48],"DC\u2010,":[49],"pulsed":[50],"IV\u2010,":[51],"RF\u2010,":[52],"load\u2010pull":[54],"measurements.":[55],"It":[56],"observed":[58],"that":[59],"current":[60,72],"slump":[61],"effectively":[63],"mitigated":[64],"passivation":[67,127],"layer.":[68],"DC":[70],"channel":[71],"density":[73],"increased":[74,91],"71":[76],"%":[77],"to":[78,94,114],"1170":[79],"mA/mm":[80],"knee":[83],"IV":[86],"curve,":[87],"transconductance":[90],"from":[92,112],"382":[93],"477":[95],"mS/mm":[96],"after":[97,126],"passivation.":[98],"At":[99],"same":[101],"time":[102],"leakage":[105],"increased,":[106],"extrinsic":[109],"fmax":[110],"decreased":[111],"207":[113],"140":[115],"GHz.":[116],"Output":[117],"powers":[118],"4.1":[120],"3.5":[122],"W/mm":[123],"measured":[125],"31":[129],"40":[131],"GHz,":[132],"respectively.":[133],"(\u00a9":[134],"2014":[135],"WILEY\u2010VCH":[136],"Verlag":[137],"GmbH":[138],"&":[139],"Co.":[140],"KGaA,":[141],"Weinheim)":[142]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":8},{"year":2014,"cited_by_count":2}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}