{"id":"https://openalex.org/W2126205997","doi":"https://doi.org/10.1109/iitc.2009.5090398","title":"In situ post etching treatment as a solution to improve defect density for porous low-k integration using metallic hard masks","display_name":"In situ post etching treatment as a solution to improve defect density for porous low-k integration using metallic hard masks","publication_year":2009,"publication_date":"2009-06-01","ids":{"openalex":"https://openalex.org/W2126205997","doi":"https://doi.org/10.1109/iitc.2009.5090398","mag":"2126205997"},"language":"en","primary_location":{"id":"doi:10.1109/iitc.2009.5090398","doi":"https://doi.org/10.1109/iitc.2009.5090398","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iitc.2009.5090398","pdf_url":null,"source":{"id":"https://openalex.org/S7407085974","display_name":"IEEE International Interconnect Technology Conference (IITC)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Interconnect Technology Conference","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074822583","display_name":"N. Poss\u00e9m\u00e9","orcid":"https://orcid.org/0000-0003-4659-9488","observed_orcids":["https://orcid.org/0000-0003-4659-9488"]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"N. Posseme","raw_affiliation_strings":["CEA/LETI/Minatec, Grenoble, France","CEA/LETI - Minatec, 17 rue des martyrs, 38054 Grenoble cedex 09, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA/LETI/Minatec, Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"CEA/LETI - Minatec, 17 rue des martyrs, 38054 Grenoble cedex 09, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046703825","display_name":"R. Bouyssou","orcid":"https://orcid.org/0000-0003-0290-8445","observed_orcids":["https://orcid.org/0000-0003-0290-8445"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"R. Bouyssou","raw_affiliation_strings":["CNRS/LTM (CEA/LETI-Minatec), Grenoble, France","CNRS/LTM (CEA/LETI-Minatec), 17 rue des martyrs 38054 Grenoble cedex 09, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS/LTM (CEA/LETI-Minatec), Grenoble, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"CNRS/LTM (CEA/LETI-Minatec), 17 rue des martyrs 38054 Grenoble cedex 09, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001365155","display_name":"T. Chevolleau","orcid":"https://orcid.org/0000-0001-5638-4443","observed_orcids":["https://orcid.org/0000-0001-5638-4443"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"T. Chevolleau","raw_affiliation_strings":["CNRS/LTM (CEA/LETI-Minatec), Grenoble, France","CNRS/LTM (CEA/LETI-Minatec), 17 rue des martyrs 38054 Grenoble cedex 09, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS/LTM (CEA/LETI-Minatec), Grenoble, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"CNRS/LTM (CEA/LETI-Minatec), 17 rue des martyrs 38054 Grenoble cedex 09, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111892399","display_name":"Thibaut David","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"T. David","raw_affiliation_strings":["CEA/LETI/Minatec, Grenoble, France","CEA/LETI - Minatec, 17 rue des martyrs, 38054 Grenoble cedex 09, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA/LETI/Minatec, Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"CEA/LETI - Minatec, 17 rue des martyrs, 38054 Grenoble cedex 09, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044148491","display_name":"V. Arnal","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"V. Arnal","raw_affiliation_strings":["Central Research and Development, STMicroelectronics, Crolles, France","STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072273074","display_name":"Sonarith Chhun","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"S. Chhun","raw_affiliation_strings":["Central Research and Development, STMicroelectronics, Crolles, France","STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041594010","display_name":"C\u00e9dric Monget","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Monget","raw_affiliation_strings":["Central Research and Development, STMicroelectronics, Crolles, France","STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058705886","display_name":"Emmanuel Richard","orcid":"https://orcid.org/0000-0002-1348-2526","observed_orcids":["https://orcid.org/0000-0002-1348-2526"]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"E. Richard","raw_affiliation_strings":["Central Research and Development, STMicroelectronics, Crolles, France","STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040666869","display_name":"D. Galpin","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"D. Galpin","raw_affiliation_strings":["Central Research and Development, STMicroelectronics, Crolles, France","STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086070268","display_name":"Julie Guillan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. Guillan","raw_affiliation_strings":["Central Research and Development, STMicroelectronics, Crolles, France","STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112967532","display_name":"L. Arnaud","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"L. Arnaud","raw_affiliation_strings":["Central Research and Development, STMicroelectronics, Crolles, France","STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113211895","display_name":"D. Roy","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"D. Roy","raw_affiliation_strings":["Central Research and Development, STMicroelectronics, Crolles, France","STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002534389","display_name":"Marc Guillermet","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Guillermet","raw_affiliation_strings":["CEA/LETI/Minatec, Grenoble, France","CEA/LETI - Minatec, 17 rue des martyrs, 38054 Grenoble cedex 09, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA/LETI/Minatec, Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"CEA/LETI - Minatec, 17 rue des martyrs, 38054 Grenoble cedex 09, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051489261","display_name":"J. Ramard","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. Ramard","raw_affiliation_strings":["Central Research and Development, STMicroelectronics, Crolles, France","STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101995126","display_name":"O. Joubert","orcid":"https://orcid.org/0000-0003-3374-1481","observed_orcids":["https://orcid.org/0000-0003-3374-1481"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"O. Joubert","raw_affiliation_strings":["CNRS/LTM (CEA/LETI-Minatec), Grenoble, France","CNRS/LTM (CEA/LETI-Minatec), 17 rue des martyrs 38054 Grenoble cedex 09, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS/LTM (CEA/LETI-Minatec), Grenoble, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"CNRS/LTM (CEA/LETI-Minatec), 17 rue des martyrs 38054 Grenoble cedex 09, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I4210150049"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5075845702","display_name":"C. V\u00e9rove","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Verove","raw_affiliation_strings":["Central Research and Development, STMicroelectronics, Crolles, France","STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, STMicroelectronics, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics, Central R&D, 850 rue J. Monnet, 38926 Crolles cedex, France#TAB#","institution_ids":["https://openalex.org/I4210104693"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.2973,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.79787531,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":96,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"240","last_page":"242"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.7695000171661377,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.7695000171661377,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.10360000282526016,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.08839999884366989,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/porous-low-k-dielectrics","display_name":"porous low-k dielectrics","score":0.7979999780654907},{"id":"https://openalex.org/keywords/fluorocarbon-plasma-etching","display_name":"fluorocarbon plasma etching","score":0.9319999814033508},{"id":"https://openalex.org/keywords/defect-density","display_name":"defect density","score":0.7080000042915344},{"id":"https://openalex.org/keywords/dual-damascene","display_name":"dual damascene","score":0.9070000052452087},{"id":"https://openalex.org/keywords/process-compatibility","display_name":"process compatibility","score":0.44999998807907104}],"concepts":[{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.5942289233207703},{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.5492833852767944},{"id":"https://openalex.org/C2776875633","wikidata":"https://www.wikidata.org/wiki/Q425094","display_name":"Fluorocarbon","level":2,"score":0.4747610092163086},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.46447741985321045},{"id":"https://openalex.org/C544153396","wikidata":"https://www.wikidata.org/wiki/Q11426","display_name":"Metal","level":2,"score":0.45775142312049866},{"id":"https://openalex.org/C6648577","wikidata":"https://www.wikidata.org/wiki/Q622669","display_name":"Porosity","level":2,"score":0.4425064027309418},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.42626819014549255},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.34507662057876587},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.30007195472717285},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.1818789839744568},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.09931132197380066},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.07202392816543579},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/iitc.2009.5090398","doi":"https://doi.org/10.1109/iitc.2009.5090398","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iitc.2009.5090398","pdf_url":null,"source":{"id":"https://openalex.org/S7407085974","display_name":"IEEE International Interconnect Technology Conference (IITC)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Interconnect Technology Conference","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:hal-00399803v1","doi":null,"is_oa":false,"landing_page_url":"https://hal.science/hal-00399803","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IITC, Interconnect Technology Conference,, 2009, saporo, Japan","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W2034187554"],"related_works":["https://openalex.org/W4297080637","https://openalex.org/W4242924799","https://openalex.org/W1984866064","https://openalex.org/W2089672052","https://openalex.org/W2034187554","https://openalex.org/W2896132586","https://openalex.org/W4206860436","https://openalex.org/W3137592152","https://openalex.org/W2334444168","https://openalex.org/W1966953877"],"abstract_inverted_index":{"H2,":[0],"O2,":[1],"NH3and":[2],"CH4in":[3],"situ":[4],"post-etching":[5],"treatments":[6],"(PET)":[7],"have":[8],"been":[9],"investigated":[10],"as":[11],"a":[12],"solution":[13],"to":[14],"prevent":[15],"the":[16,37,42,46,57],"residues":[17,38],"formation":[18],"(TiFx":[19],"based)":[20],"on":[21,36,41,45],"TiN":[22],"metallic":[23],"hard":[24],"mask":[25,43],"(MHM)":[26],"after":[27],"etching":[28],"in":[29],"fluorocarbon":[30],"based":[31],"plasmas.":[32],"The":[33,54],"PET":[34,59],"impact":[35],"growth":[39],"reduction":[40],"and":[44,52],"porous":[47],"SiOCH":[48],"modification":[49],"is":[50,60],"presented":[51],"discussed.":[53],"compatibility":[55],"of":[56],"different":[58],"also":[61],"evaluated":[62],"for":[63],"C045":[64],"dual":[65],"damascene":[66],"level":[67],"using":[68],"trench":[69],"first":[70],"MHM":[71],"integration.":[72]},"counts_by_year":[{"year":2016,"cited_by_count":3}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}