{"id":"https://openalex.org/W2121364458","doi":"https://doi.org/10.1109/aim.2012.6266052","title":"Individual nanowire handling for NEMS fabrication","display_name":"Individual nanowire handling for NEMS fabrication","publication_year":2012,"publication_date":"2012-07-01","ids":{"openalex":"https://openalex.org/W2121364458","doi":"https://doi.org/10.1109/aim.2012.6266052","mag":"2121364458"},"language":"en","primary_location":{"id":"doi:10.1109/aim.2012.6266052","doi":"https://doi.org/10.1109/aim.2012.6266052","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim.2012.6266052","pdf_url":null,"source":{"id":"https://openalex.org/S4393918220","display_name":"IEEE/ASME International Conference on Advanced Intelligent Mechatronics","issn_l":"2159-6247","issn":["2159-6247"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5070677520","display_name":"Malte Bartenwerfer","orcid":"https://orcid.org/0000-0003-1910-8540","observed_orcids":["https://orcid.org/0000-0003-1910-8540"]},"institutions":[{"id":"https://openalex.org/I129877168","display_name":"Carl von Ossietzky Universit\u00e4t Oldenburg","ror":"https://ror.org/033n9gh91","country_code":"DE","type":"education","lineage":["https://openalex.org/I129877168"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Malte Bartenwerfer","raw_affiliation_strings":["Department of Computing Science, University of Oldenburg, Oldenburg, Germany","Department of Computing Science, University of Oldenburg, D-26129 Oldenburg, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Computing Science, University of Oldenburg, Oldenburg, Germany","institution_ids":["https://openalex.org/I129877168"]},{"raw_affiliation_string":"Department of Computing Science, University of Oldenburg, D-26129 Oldenburg, Germany","institution_ids":["https://openalex.org/I129877168"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013858630","display_name":"Sergej Fatikow","orcid":"https://orcid.org/0000-0002-3352-7250","observed_orcids":["https://orcid.org/0000-0002-3352-7250"]},"institutions":[{"id":"https://openalex.org/I129877168","display_name":"Carl von Ossietzky Universit\u00e4t Oldenburg","ror":"https://ror.org/033n9gh91","country_code":"DE","type":"education","lineage":["https://openalex.org/I129877168"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Sergej Fatikow","raw_affiliation_strings":["Department of Computing Science, University of Oldenburg, Oldenburg, Germany","Department of Computing Science, University of Oldenburg, D-26129 Oldenburg, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Computing Science, University of Oldenburg, Oldenburg, Germany","institution_ids":["https://openalex.org/I129877168"]},{"raw_affiliation_string":"Department of Computing Science, University of Oldenburg, D-26129 Oldenburg, Germany","institution_ids":["https://openalex.org/I129877168"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113712821","display_name":"Hongjiang Zeng","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hongjiang Zeng","raw_affiliation_strings":["State Key Laboratories of Transducer Technology, Science and Technology on Micro-System Laboratory, SIMIT, Chinese Academy of Sciences, Shanghai, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratories of Transducer Technology, Science and Technology on Micro-System Laboratory, SIMIT, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100754630","display_name":"Tie Li","orcid":"https://orcid.org/0000-0001-9907-0188","observed_orcids":["https://orcid.org/0000-0001-9907-0188"]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tie Li","raw_affiliation_strings":["State Key Laboratories of Transducer Technology, Science and Technology on Micro-System Laboratory, SIMIT, Chinese Academy of Sciences, Shanghai, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratories of Transducer Technology, Science and Technology on Micro-System Laboratory, SIMIT, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101759741","display_name":"Yuelin Wang","orcid":"https://orcid.org/0000-0001-9360-5903","observed_orcids":["https://orcid.org/0000-0001-9360-5903","https://orcid.org/0000-0001-6746-3470"]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuelin Wang","raw_affiliation_strings":["State Key Laboratories of Transducer Technology, Science and Technology on Micro-System Laboratory, SIMIT, Chinese Academy of Sciences, Shanghai, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratories of Transducer Technology, Science and Technology on Micro-System Laboratory, SIMIT, Chinese Academy of Sciences, Shanghai, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.0413,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.87101316,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"562","last_page":"567"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.8306000232696533,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.8306000232696533,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.06340000033378601,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.05719999969005585,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanowire-transfer","display_name":"nanowire transfer","score":0.8180000185966492},{"id":"https://openalex.org/keywords/nanoelectromechanical-systems","display_name":"nanoelectromechanical systems","score":0.8809999823570251},{"id":"https://openalex.org/keywords/adhesive-bonding","display_name":"adhesive bonding","score":0.8560000061988831},{"id":"https://openalex.org/keywords/robotic-manipulation","display_name":"robotic manipulation","score":0.5419999957084656},{"id":"https://openalex.org/keywords/scanning-electron-microscopy","display_name":"scanning electron microscopy","score":0.7699999809265137},{"id":"https://openalex.org/keywords/focused-ion-beam","display_name":"focused ion beam","score":0.9829999804496765},{"id":"https://openalex.org/keywords/gas-injection","display_name":"gas injection","score":0.9570000171661377},{"id":"https://openalex.org/keywords/nanowire-assembly","display_name":"nanowire assembly","score":0.8889999985694885}],"concepts":[{"id":"https://openalex.org/C74214498","wikidata":"https://www.wikidata.org/wiki/Q631739","display_name":"Nanowire","level":2,"score":0.9237332344055176},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7689036726951599},{"id":"https://openalex.org/C173409883","wikidata":"https://www.wikidata.org/wiki/Q175593","display_name":"Nanoelectromechanical systems","level":4,"score":0.7210472226142883},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.6462286710739136},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6233750581741333},{"id":"https://openalex.org/C100776233","wikidata":"https://www.wikidata.org/wiki/Q2532492","display_name":"Bridge (graph theory)","level":2,"score":0.5743584036827087},{"id":"https://openalex.org/C161866238","wikidata":"https://www.wikidata.org/wiki/Q258563","display_name":"Focused ion beam","level":3,"score":0.5725367665290833},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.5398006439208984},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4719119369983673},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.4310356378555298},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.38292062282562256},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.261756032705307},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0890408456325531},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.07238435745239258},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C126322002","wikidata":"https://www.wikidata.org/wiki/Q11180","display_name":"Internal medicine","level":1,"score":0.0},{"id":"https://openalex.org/C15083742","wikidata":"https://www.wikidata.org/wiki/Q261659","display_name":"Nanomedicine","level":3,"score":0.0},{"id":"https://openalex.org/C155672457","wikidata":"https://www.wikidata.org/wiki/Q61231","display_name":"Nanoparticle","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/aim.2012.6266052","doi":"https://doi.org/10.1109/aim.2012.6266052","is_oa":false,"landing_page_url":"https://doi.org/10.1109/aim.2012.6266052","pdf_url":null,"source":{"id":"https://openalex.org/S4393918220","display_name":"IEEE/ASME International Conference on Advanced Intelligent Mechatronics","issn_l":"2159-6247","issn":["2159-6247"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1626643025","https://openalex.org/W1972024716","https://openalex.org/W1987211913","https://openalex.org/W1997097935","https://openalex.org/W2006601643","https://openalex.org/W2017306131","https://openalex.org/W2026628020","https://openalex.org/W2032451332","https://openalex.org/W2044278041","https://openalex.org/W2066821784","https://openalex.org/W2071389279","https://openalex.org/W2079595817","https://openalex.org/W2104876603","https://openalex.org/W2133934213","https://openalex.org/W2138484165","https://openalex.org/W2141049906","https://openalex.org/W2147163432","https://openalex.org/W2162073381","https://openalex.org/W2168085787"],"related_works":["https://openalex.org/W2008261947","https://openalex.org/W1986988909","https://openalex.org/W2138484165","https://openalex.org/W2041894176","https://openalex.org/W2242244953","https://openalex.org/W4290649680","https://openalex.org/W1982485790","https://openalex.org/W2899848800","https://openalex.org/W2108322880","https://openalex.org/W2762912366"],"abstract_inverted_index":{"This":[0,85],"paper":[1],"presents":[2],"the":[3,51,63],"development":[4],"of":[5,13,16,95],"a":[6,70,89],"novel":[7],"technique":[8,36,91],"for":[9],"well":[10],"directed":[11],"handling":[12,41],"nanowires":[14],"made":[15],"different":[17],"materials":[18],"with":[19],"diameters":[20],"down":[21],"to":[22,29,46],"100nm":[23],"or":[24],"less":[25],"and":[26,43,54,79],"length":[27],"up":[28],"several":[30],"ten":[31],"\u03bcms.":[32],"The":[33,56],"presented":[34],"transfer":[35,86],"uses":[37],"an":[38,93],"adhesive":[39],"bond":[40],"approach":[42,87],"is":[44,59,67,88],"able":[45],"bridge":[47],"any":[48],"distance":[49],"between":[50],"nanowire's":[52],"source":[53],"target.":[55],"operational":[57],"range":[58],"only":[60],"limited":[61],"by":[62],"robotic":[64],"setup,":[65],"which":[66],"mounted":[68],"inside":[69],"high-resolution":[71],"scanning":[72],"electron":[73],"microscope.":[74],"Additionally,":[75],"focused":[76],"ion":[77],"beam":[78],"gas":[80],"injection":[81],"systems":[82],"are":[83],"used.":[84],"seminal":[90],"towards":[92],"assembly":[94],"nanowire":[96],"based":[97],"devices.":[98]},"counts_by_year":[{"year":2016,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":4}],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2016-06-24T00:00:00"}