{"id":"https://openalex.org/W2118949373","doi":"https://doi.org/10.1109/memsys.2006.1627740","title":"Ultrasensitive Mass Sensor Based on Lateral Extensional Mode (LEM) Piezoelectric Resonator","display_name":"Ultrasensitive Mass Sensor Based on Lateral Extensional Mode (LEM) Piezoelectric Resonator","publication_year":2006,"publication_date":"2006-05-25","ids":{"openalex":"https://openalex.org/W2118949373","doi":"https://doi.org/10.1109/memsys.2006.1627740","mag":"2118949373"},"language":"en","primary_location":{"id":"doi:10.1109/memsys.2006.1627740","doi":"https://doi.org/10.1109/memsys.2006.1627740","is_oa":false,"landing_page_url":"https://doi.org/10.1109/memsys.2006.1627740","pdf_url":null,"source":{"id":"https://openalex.org/S4210233918","display_name":"Proceedings, IEEE micro electro mechanical systems","issn_l":"1084-6999","issn":["1084-6999"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"19th IEEE International Conference on Micro Electro Mechanical Systems","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Wei Pang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Wei Pang","raw_affiliation_strings":["Department of Electrical Engineering, University of Southern California, Los Angeles, CA, USA","Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089-0271"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of Southern California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I1174212"]},{"raw_affiliation_string":"Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089-0271","institution_ids":["https://openalex.org/I1174212"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019356756","display_name":"Le Wei Yan","orcid":"https://orcid.org/0000-0003-1323-0545","observed_orcids":["https://orcid.org/0000-0003-1323-0545"]},"institutions":[{"id":"https://openalex.org/I204250578","display_name":"University of California, Irvine","ror":"https://ror.org/04gyf1771","country_code":"US","type":"education","lineage":["https://openalex.org/I204250578"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Le Yan","raw_affiliation_strings":["University of California, Irvine, CA, USA","University of California, at Irvine#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of California, Irvine, CA, USA","institution_ids":["https://openalex.org/I204250578"]},{"raw_affiliation_string":"University of California, at Irvine#TAB#","institution_ids":["https://openalex.org/I204250578"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100396981","display_name":"Hao Zhang","orcid":"https://orcid.org/0000-0002-9447-1019","observed_orcids":["https://orcid.org/0000-0002-9447-1019"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hao Zhang","raw_affiliation_strings":["Department of Electrical Engineering, University of Southern California, Los Angeles, CA, USA","University of Southern California"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of Southern California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I1174212"]},{"raw_affiliation_string":"University of Southern California","institution_ids":["https://openalex.org/I1174212"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053597658","display_name":"Hongyu Yu","orcid":"https://orcid.org/0000-0002-6899-9346","observed_orcids":["https://orcid.org/0000-0002-6899-9346","https://orcid.org/0000-0001-8724-6211"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]},{"id":"https://openalex.org/I55732556","display_name":"Arizona State University","ror":"https://ror.org/03efmqc40","country_code":"US","type":"education","lineage":["https://openalex.org/I55732556"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hongyu Yu","raw_affiliation_strings":["Department of Electrical Engineering, University of Southern California, Los Angeles, CA, USA","Arizona State University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of Southern California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I1174212"]},{"raw_affiliation_string":"Arizona State University","institution_ids":["https://openalex.org/I55732556"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046110835","display_name":"Eun Sok Kim","orcid":"https://orcid.org/0000-0002-3158-5553","observed_orcids":["https://orcid.org/0000-0002-3158-5553"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Eun Sok Kim","raw_affiliation_strings":["Department of Electrical Engineering, University of Southern California, Los Angeles, CA, USA","University of Southern California"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of Southern California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I1174212"]},{"raw_affiliation_string":"University of Southern California","institution_ids":["https://openalex.org/I1174212"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5007937713","display_name":"William C. Tang","orcid":"https://orcid.org/0000-0003-4183-520X","observed_orcids":["https://orcid.org/0000-0003-4183-520X"]},"institutions":[{"id":"https://openalex.org/I204250578","display_name":"University of California, Irvine","ror":"https://ror.org/04gyf1771","country_code":"US","type":"education","lineage":["https://openalex.org/I204250578"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"William C. Tang","raw_affiliation_strings":["University of California, Irvine, CA, USA","University of California, at Irvine#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of California, Irvine, CA, USA","institution_ids":["https://openalex.org/I204250578"]},{"raw_affiliation_string":"University of California, at Irvine#TAB#","institution_ids":["https://openalex.org/I204250578"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.6734,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.70670311,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"78","last_page":"81"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11890","display_name":"Scientific Measurement and Uncertainty Evaluation","score":0.0010999999940395355,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.0010000000474974513,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonant-mass-sensors","display_name":"resonant mass sensors","score":0.8389999866485596},{"id":"https://openalex.org/keywords/piezoelectric-resonators","display_name":"piezoelectric resonators","score":0.9980000257492065},{"id":"https://openalex.org/keywords/minimum-detectable-mass","display_name":"minimum detectable mass","score":0.9300000071525574},{"id":"https://openalex.org/keywords/resonant-frequency-shift","display_name":"resonant frequency shift","score":0.7860000133514404},{"id":"https://openalex.org/keywords/parylene-coating","display_name":"parylene coating","score":0.8040000200271606},{"id":"https://openalex.org/keywords/quality-factor","display_name":"quality factor","score":0.4880000054836273}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.8427566289901733},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.5064312219619751},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4966128468513489},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.4921547770500183},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.43239665031433105},{"id":"https://openalex.org/C46141821","wikidata":"https://www.wikidata.org/wiki/Q209402","display_name":"Nuclear magnetic resonance","level":1,"score":0.35245031118392944},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.25894680619239807},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.24176079034805298},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.1970764696598053},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.09643512964248657}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/memsys.2006.1627740","doi":"https://doi.org/10.1109/memsys.2006.1627740","is_oa":false,"landing_page_url":"https://doi.org/10.1109/memsys.2006.1627740","pdf_url":null,"source":{"id":"https://openalex.org/S4210233918","display_name":"Proceedings, IEEE micro electro mechanical systems","issn_l":"1084-6999","issn":["1084-6999"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"19th IEEE International Conference on Micro Electro Mechanical Systems","raw_type":"proceedings-article"},{"id":"pmh:oai:repository.hkust.edu.hk:1783.1-88645","doi":null,"is_oa":false,"landing_page_url":"http://repository.hkust.edu.hk/ir/Record/1783.1-88645","pdf_url":null,"source":{"id":"https://openalex.org/S4306401796","display_name":"Rare & Special e-Zone (The Hong Kong University of Science and Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I200769079","host_organization_name":"Hong Kong University of Science and Technology","host_organization_lineage":["https://openalex.org/I200769079"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Conference paper"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.7799999713897705}],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W128508582","https://openalex.org/W1977459773","https://openalex.org/W2001710792","https://openalex.org/W2028791663","https://openalex.org/W2029512361","https://openalex.org/W2077125422","https://openalex.org/W2104545383","https://openalex.org/W2144261285"],"related_works":["https://openalex.org/W2766999340","https://openalex.org/W2054124615","https://openalex.org/W2670482320","https://openalex.org/W2532341012","https://openalex.org/W3217179084","https://openalex.org/W4245281580","https://openalex.org/W4283755933","https://openalex.org/W2244350851","https://openalex.org/W2953193290","https://openalex.org/W2028268967"],"abstract_inverted_index":{"This":[0],"paper":[1],"introduces":[2],"a":[3,12,21,41,69,80],"new":[4],"resonant":[5,58],"mass":[6,24,70],"sensor":[7],"that":[8],"is":[9],"based":[10],"on":[11,98],"lateral":[13],"extensional":[14],"mode":[15],"(LEM)":[16],"piezoelectric":[17,105],"resonator,":[18],"and":[19,50],"has":[20],"minimum":[22,81],"detectable":[23,82],"(MDM)":[25],"of":[26,37,45,56,72,85,93,101],"10-15g":[27],"in":[28],"air":[29],"at":[30,48],"room":[31],"temperature.":[32],"The":[33,63],"resonator":[34],"with":[35],"size":[36],"about":[38,74,86],"200\u00d750\u00d71":[39],"\u03bcm3has":[40],"quality":[42],"factor":[43],"(Q)":[44],">":[46],"1,400":[47],"60MHz,":[49],"as":[51,53],"small":[52],"0.1ppm":[54,64],"shift":[55,84],"its":[57],"frequency":[59,83],"can":[60],"be":[61],"detected.":[62],"detection":[65],"capability":[66],"corresponds":[67],"to":[68,90],"uncertainty":[71],"only":[73],"4.6fg.":[75],"We":[76],"have":[77],"experimentally":[78],"demonstrated":[79],"~":[87],"1.6ppm":[88],"due":[89],"an":[91],"absorption":[92],"isopropanol":[94],"vapor":[95],"(73":[96],"fg)":[97],"the":[99,102],"sidewalls":[100],"parylene-coated":[103],"LEM":[104],"resonator.":[106]},"counts_by_year":[{"year":2013,"cited_by_count":1}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2025-10-10T00:00:00"}