{"id":"https://openalex.org/W2118426329","doi":"https://doi.org/10.1109/cicc.2009.5280797","title":"Chemical microsystem based on integration of microresonant sensor and CMOS ASIC","display_name":"Chemical microsystem based on integration of microresonant sensor and CMOS ASIC","publication_year":2009,"publication_date":"2009-09-01","ids":{"openalex":"https://openalex.org/W2118426329","doi":"https://doi.org/10.1109/cicc.2009.5280797","mag":"2118426329"},"language":"en","primary_location":{"id":"doi:10.1109/cicc.2009.5280797","doi":"https://doi.org/10.1109/cicc.2009.5280797","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2009.5280797","pdf_url":null,"source":{"id":"https://openalex.org/S4306418143","display_name":"Custom Integrated Circuits Conference","issn_l":"0886-5930","issn":["0886-5930"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE Custom Integrated Circuits Conference","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5084863003","display_name":"K.S. Demirci","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K. S. Demirci","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","[School of Electrical & Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"[School of Electrical & Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA]","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050625705","display_name":"S. Truax","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Truax","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","[School of Electrical & Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"[School of Electrical & Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA]","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043787728","display_name":"Luke A. Beardslee","orcid":"https://orcid.org/0000-0002-5713-5059","observed_orcids":["https://orcid.org/0000-0002-5713-5059"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"L. A. Beardslee","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","[School of Electrical & Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"[School of Electrical & Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA]","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5067362832","display_name":"Oliver Brand","orcid":"https://orcid.org/0000-0001-7438-1094","observed_orcids":["https://orcid.org/0000-0001-7438-1094"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"O. Brand","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","[School of Electrical & Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"[School of Electrical & Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA]","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I130701444"],"apc_list":null,"apc_paid":null,"fwci":0.4783,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.58785972,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"17","issue":null,"first_page":"515","last_page":"518"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.6201000213623047,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.6201000213623047,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.2919999957084656,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.06210000067949295,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cmos-asic","display_name":"CMOS ASIC","score":0.8989999890327454},{"id":"https://openalex.org/keywords/silicon-microsystems","display_name":"silicon microsystems","score":0.8180000185966492},{"id":"https://openalex.org/keywords/resonant-vibration","display_name":"resonant vibration","score":0.7179999947547913},{"id":"https://openalex.org/keywords/volatile-organic-compounds","display_name":"volatile organic compounds","score":0.7720000147819519},{"id":"https://openalex.org/keywords/toluene-detection","display_name":"toluene detection","score":0.8669999837875366},{"id":"https://openalex.org/keywords/gas-phase-sensing","display_name":"gas-phase detection","score":0.8999999761581421},{"id":"https://openalex.org/keywords/portable-sensing","display_name":"portable sensing","score":0.6159999966621399},{"id":"https://openalex.org/keywords/detection-limit","display_name":"detection limit","score":0.7379999756813049},{"id":"https://openalex.org/keywords/frequency-stability","display_name":"frequency stability","score":0.9599999785423279}],"concepts":[{"id":"https://openalex.org/C151054161","wikidata":"https://www.wikidata.org/wiki/Q379385","display_name":"Microsystem","level":2,"score":0.9546765089035034},{"id":"https://openalex.org/C77390884","wikidata":"https://www.wikidata.org/wiki/Q217302","display_name":"Application-specific integrated circuit","level":2,"score":0.8025444746017456},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.7754033803939819},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5300963521003723},{"id":"https://openalex.org/C115051666","wikidata":"https://www.wikidata.org/wiki/Q6522493","display_name":"Ranging","level":2,"score":0.5023601055145264},{"id":"https://openalex.org/C2778439541","wikidata":"https://www.wikidata.org/wiki/Q7106412","display_name":"Oscillation (cell signaling)","level":2,"score":0.49390965700149536},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4556196331977844},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4235725998878479},{"id":"https://openalex.org/C110086884","wikidata":"https://www.wikidata.org/wiki/Q2085341","display_name":"Phase detector","level":3,"score":0.417012482881546},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4162983298301697},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.38015854358673096},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.25377777218818665},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.21676898002624512},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.12564656138420105},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.11127787828445435},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0894848108291626},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/cicc.2009.5280797","doi":"https://doi.org/10.1109/cicc.2009.5280797","is_oa":false,"landing_page_url":"https://doi.org/10.1109/cicc.2009.5280797","pdf_url":null,"source":{"id":"https://openalex.org/S4306418143","display_name":"Custom Integrated Circuits Conference","issn_l":"0886-5930","issn":["0886-5930"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE Custom Integrated Circuits Conference","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1536945048","https://openalex.org/W1992645815","https://openalex.org/W2011370705","https://openalex.org/W2059793578","https://openalex.org/W2107742247","https://openalex.org/W2108613929","https://openalex.org/W2165000018","https://openalex.org/W2971111865","https://openalex.org/W4211124806"],"related_works":["https://openalex.org/W2132006506","https://openalex.org/W2284599714","https://openalex.org/W2117003198","https://openalex.org/W1500211896","https://openalex.org/W2145154329","https://openalex.org/W2100250519","https://openalex.org/W2082981272","https://openalex.org/W2127078480","https://openalex.org/W2028791663","https://openalex.org/W2033163215"],"abstract_inverted_index":{"A":[0],"silicon-based":[1],"microsystem":[2,43],"consisting":[3],"of":[4,27,49,59,61,72],"a":[5,10,57,69],"mass-sensitive":[6],"resonant":[7,29],"sensor":[8,30],"and":[9,39,56],"CMOS":[11],"ASIC":[12],"containing":[13],"feedback":[14,23],"circuitry":[15,24],"is":[16,66],"demonstrated":[17],"for":[18,47,64],"portable":[19],"sensing":[20],"applications.":[21],"The":[22,42],"sustains":[25],"oscillation":[26],"the":[28,54],"at":[31],"its":[32],"mechanical":[33],"resonance":[34],"frequency":[35,70],"ranging":[36],"between":[37],"200":[38],"800":[40],"kHz.":[41],"has":[44],"been":[45],"used":[46],"detection":[48,60],"volatile":[50],"organic":[51],"compounds":[52],"in":[53],"gas-phase,":[55],"limit":[58],"13":[62],"ppm":[63],"toluene":[65],"obtained":[67],"with":[68],"stability":[71],"16":[73],"mHz.":[74]},"counts_by_year":[],"updated_date":"2026-10-29T09:56:32.521200","created_date":"2016-06-24T00:00:00"}