{"id":"https://openalex.org/W2114501604","doi":"https://doi.org/10.1109/ultsym.2008.0039","title":"PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers","display_name":"PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers","publication_year":2008,"publication_date":"2008-11-01","ids":{"openalex":"https://openalex.org/W2114501604","doi":"https://doi.org/10.1109/ultsym.2008.0039","mag":"2114501604","pmid":"https://pubmed.ncbi.nlm.nih.gov/20953269","pmcid":"https://www.ncbi.nlm.nih.gov/pmc/articles/2954502"},"language":"en","primary_location":{"id":"doi:10.1109/ultsym.2008.0039","doi":"https://doi.org/10.1109/ultsym.2008.0039","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ultsym.2008.0039","pdf_url":null,"source":{"id":"https://openalex.org/S4210177450","display_name":"Proceedings/Proceedings - IEEE Ultrasonics Symposium","issn_l":"1051-0117","issn":["1051-0117","1551-3025"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2008 IEEE Ultrasonics Symposium","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref","pubmed"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/2954502","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5020435005","display_name":"Jue Peng","orcid":"https://orcid.org/0000-0002-9026-8208","observed_orcids":["https://orcid.org/0000-0002-9026-8208"]},"institutions":[{"id":"https://openalex.org/I14243506","display_name":"Hong Kong Polytechnic University","ror":"https://ror.org/0030zas98","country_code":"HK","type":"education","lineage":["https://openalex.org/I14243506"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Jue Peng","raw_affiliation_strings":["Department of Applied Physics and Materials Research Center, The Hong Kong Polytechnic University, Hong Kong, China","Dept. of Appl. Phys., Hong Kong Polytech. Univ., Hong Kong"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Applied Physics and Materials Research Center, The Hong Kong Polytechnic University, Hong Kong, China","institution_ids":["https://openalex.org/I14243506"]},{"raw_affiliation_string":"Dept. of Appl. Phys., Hong Kong Polytech. Univ., Hong Kong","institution_ids":["https://openalex.org/I14243506"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103409201","display_name":"Sien-Ting Lau","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I14243506","display_name":"Hong Kong Polytechnic University","ror":"https://ror.org/0030zas98","country_code":"HK","type":"education","lineage":["https://openalex.org/I14243506"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Sienting Lau","raw_affiliation_strings":["Department of Applied Physics and Materials Research Center, Hong Kong Polytechnic University, Hong Kong, China","Dept. of Appl. Phys., Hong Kong Polytech. Univ., Hong Kong"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Applied Physics and Materials Research Center, Hong Kong Polytechnic University, Hong Kong, China","institution_ids":["https://openalex.org/I14243506"]},{"raw_affiliation_string":"Dept. of Appl. Phys., Hong Kong Polytech. Univ., Hong Kong","institution_ids":["https://openalex.org/I14243506"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100408305","display_name":"Chao Chen","orcid":"https://orcid.org/0000-0001-6881-3022","observed_orcids":["https://orcid.org/0000-0001-6881-3022"]},"institutions":[{"id":"https://openalex.org/I14243506","display_name":"Hong Kong Polytechnic University","ror":"https://ror.org/0030zas98","country_code":"HK","type":"education","lineage":["https://openalex.org/I14243506"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Chen Chao","raw_affiliation_strings":["Department of Applied Physics and Materials Research Center, Hong Kong Polytechnic University, Hong Kong, China","Dept. of Appl. Phys., Hong Kong Polytech. Univ., Hong Kong"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Applied Physics and Materials Research Center, Hong Kong Polytechnic University, Hong Kong, China","institution_ids":["https://openalex.org/I14243506"]},{"raw_affiliation_string":"Dept. of Appl. Phys., Hong Kong Polytech. Univ., Hong Kong","institution_ids":["https://openalex.org/I14243506"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064322463","display_name":"Jiyan Dai","orcid":"https://orcid.org/0000-0002-7720-8032","observed_orcids":["https://orcid.org/0000-0002-7720-8032"]},"institutions":[{"id":"https://openalex.org/I14243506","display_name":"Hong Kong Polytechnic University","ror":"https://ror.org/0030zas98","country_code":"HK","type":"education","lineage":["https://openalex.org/I14243506"]}],"countries":["HK"],"is_corresponding":true,"raw_author_name":"Jiyan Dai","raw_affiliation_strings":["Department of Applied Physics and Materials Research Center, Hong Kong Polytechnic University, Hong Kong, China","Dept. of Appl. Phys., Hong Kong Polytech. Univ., Hong Kong"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Applied Physics and Materials Research Center, Hong Kong Polytechnic University, Hong Kong, China","institution_ids":["https://openalex.org/I14243506"]},{"raw_affiliation_string":"Dept. of Appl. Phys., Hong Kong Polytech. Univ., Hong Kong","institution_ids":["https://openalex.org/I14243506"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111600418","display_name":"H.L.W. Chan","orcid":"https://orcid.org/0009-0004-9353-7065","observed_orcids":["https://orcid.org/0009-0004-9353-7065"]},"institutions":[{"id":"https://openalex.org/I14243506","display_name":"Hong Kong Polytechnic University","ror":"https://ror.org/0030zas98","country_code":"HK","type":"education","lineage":["https://openalex.org/I14243506"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Helen L.W. Chan","raw_affiliation_strings":["Department of Applied Physics and Materials Research Center, Hong Kong Polytechnic University, Hong Kong, China","Dept. of Appl. Phys., Hong Kong Polytech. Univ., Hong Kong"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Applied Physics and Materials Research Center, Hong Kong Polytechnic University, Hong Kong, China","institution_ids":["https://openalex.org/I14243506"]},{"raw_affiliation_string":"Dept. of Appl. Phys., Hong Kong Polytech. Univ., Hong Kong","institution_ids":["https://openalex.org/I14243506"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064678105","display_name":"Haosu Lu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210163874","display_name":"Shanghai Institute of Ceramics","ror":"https://ror.org/05etnz140","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210163874"]},{"id":"https://openalex.org/I4391768020","display_name":"State Key Laboratory of High Performance Ceramics and Superfine Microstructure","ror":"https://ror.org/03yvpw311","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210163874","https://openalex.org/I4391768020"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haosu Lu","raw_affiliation_strings":["The State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy and Sciences, Shanghai, China","State Key Lab. of High Performance Ceramics & Superfine Microstructure, Chinese Acad. of Sci., Shanghai"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"The State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy and Sciences, Shanghai, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210163874","https://openalex.org/I4391768020"]},{"raw_affiliation_string":"State Key Lab. of High Performance Ceramics & Superfine Microstructure, Chinese Acad. of Sci., Shanghai","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4391768020"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081250646","display_name":"Qifa Zhou","orcid":"https://orcid.org/0000-0003-1527-3020","observed_orcids":["https://orcid.org/0000-0003-1527-3020"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Q.F. Zhou","raw_affiliation_strings":["Department of Biomedical Engineering and NIH transducer Resource Center, University of Southern California, Los Angeles, CA, USA","Dept. of Biomed. Eng., Univ. of Southern California, Los Angeles, CA#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering and NIH transducer Resource Center, University of Southern California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I1174212"]},{"raw_affiliation_string":"Dept. of Biomed. Eng., Univ. of Southern California, Los Angeles, CA#TAB#","institution_ids":["https://openalex.org/I1174212"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109246302","display_name":"K.K. Shung","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"K.K. Shung","raw_affiliation_strings":["Department of Biomedical Engineering and NIH transducer Resource Center, University of Southern California, Los Angeles, CA, USA","Dept. of Biomed. Eng., Univ. of Southern California, Los Angeles, CA#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering and NIH transducer Resource Center, University of Southern California, Los Angeles, CA, USA","institution_ids":["https://openalex.org/I1174212"]},{"raw_affiliation_string":"Dept. of Biomed. Eng., Univ. of Southern California, Los Angeles, CA#TAB#","institution_ids":["https://openalex.org/I1174212"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5064322463"],"corresponding_institution_ids":["https://openalex.org/I14243506"],"apc_list":null,"apc_paid":null,"fwci":10.9012,"has_fulltext":false,"cited_by_count":15,"citation_normalized_percentile":{"value":0.98544131,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"62","issue":null,"first_page":"161","last_page":"163"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.4106000065803528,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.4106000065803528,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.2451000064611435,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.2287999987602234,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pmn-pt","display_name":"PMN-PT","score":0.8009999990463257},{"id":"https://openalex.org/keywords/lead-magnesium-niobate-lead-titanate","display_name":"lead magnesium niobate-lead titanate","score":0.9120000004768372},{"id":"https://openalex.org/keywords/silicon-micromachining","display_name":"silicon micromachining","score":0.8659999966621399},{"id":"https://openalex.org/keywords/high-frequency-ultrasound-transducers","display_name":"high-frequency ultrasonic transducers","score":0.8330000042915344},{"id":"https://openalex.org/keywords/wafer-bonding","display_name":"wafer bonding","score":0.972000002861023},{"id":"https://openalex.org/keywords/lapping","display_name":"lapping","score":0.8309999704360962},{"id":"https://openalex.org/keywords/electromechanical-coupling-coefficient","display_name":"electromechanical coupling coefficient","score":0.9419999718666077},{"id":"https://openalex.org/keywords/piezoelectric-coefficient","display_name":"piezoelectric coefficient","score":0.9760000109672546},{"id":"https://openalex.org/keywords/insertion-loss","display_name":"insertion loss","score":0.859000027179718}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8536048531532288},{"id":"https://openalex.org/C58772458","wikidata":"https://www.wikidata.org/wiki/Q5034480","display_name":"Capacitive micromachined ultrasonic transducers","level":3,"score":0.7200900316238403},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.7139842510223389},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.7107371091842651},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6779870390892029},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6591082215309143},{"id":"https://openalex.org/C7054721","wikidata":"https://www.wikidata.org/wiki/Q1940572","display_name":"Center frequency","level":3,"score":0.6497370600700378},{"id":"https://openalex.org/C109880203","wikidata":"https://www.wikidata.org/wiki/Q1505601","display_name":"Lapping","level":2,"score":0.6289129853248596},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.5878668427467346},{"id":"https://openalex.org/C86194701","wikidata":"https://www.wikidata.org/wiki/Q2981748","display_name":"Electromechanical coupling coefficient","level":3,"score":0.5499387383460999},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.5496621131896973},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.49568331241607666},{"id":"https://openalex.org/C90327742","wikidata":"https://www.wikidata.org/wiki/Q947396","display_name":"Insertion loss","level":2,"score":0.4823886454105377},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4609679579734802},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4394633173942566},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.29085931181907654},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.2365291714668274},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.17795032262802124},{"id":"https://openalex.org/C147788027","wikidata":"https://www.wikidata.org/wiki/Q2718101","display_name":"Band-pass filter","level":2,"score":0.14031508564949036},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.117992103099823},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.1109/ultsym.2008.0039","doi":"https://doi.org/10.1109/ultsym.2008.0039","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ultsym.2008.0039","pdf_url":null,"source":{"id":"https://openalex.org/S4210177450","display_name":"Proceedings/Proceedings - IEEE Ultrasonics Symposium","issn_l":"1051-0117","issn":["1051-0117","1551-3025"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2008 IEEE Ultrasonics Symposium","raw_type":"proceedings-article"},{"id":"pmid:20953269","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/20953269","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied physics. A, Materials science & processing","raw_type":"Journal Article"},{"id":"pmh:oai:europepmc.org:1966866","doi":null,"is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/2954502","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:2954502","doi":null,"is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/2954502","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"Appl Phys A Mater Sci Process","raw_type":"Text"},{"id":"pmh:oai:ira.lib.polyu.edu.hk:10397/22625","doi":null,"is_oa":false,"landing_page_url":"http://hdl.handle.net/10397/22625","pdf_url":null,"source":{"id":"https://openalex.org/S4306400205","display_name":"PolyU Institutional Research Archive (Hong Kong Polytechnic University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I14243506","host_organization_name":"Hong Kong Polytechnic University","host_organization_lineage":["https://openalex.org/I14243506"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference Paper"}],"best_oa_location":{"id":"pmh:oai:europepmc.org:1966866","doi":null,"is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/2954502","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":null,"raw_type":"Text"},"sustainable_development_goals":[],"sustainable_development_goals_aurora":[{"score":0.6399999856948853,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"study_designs":[],"awards":[{"id":"https://openalex.org/G136923397","display_name":"A Resource on Medical Ultrasonic Transducer Technology","funder_award_id":"P41EB002182","funder_id":"https://openalex.org/F4320337363","funder_display_name":"National Institute of Biomedical Imaging and Bioengineering"}],"funders":[{"id":"https://openalex.org/F4320337363","display_name":"National Institute of Biomedical Imaging and Bioengineering","ror":"https://ror.org/00372qc85"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W156149010","https://openalex.org/W1267146369","https://openalex.org/W1519497138","https://openalex.org/W1965875653","https://openalex.org/W1998858511","https://openalex.org/W2045283999","https://openalex.org/W2058451388","https://openalex.org/W2074233261","https://openalex.org/W2076822095","https://openalex.org/W2085592964","https://openalex.org/W2109232342","https://openalex.org/W2111595317","https://openalex.org/W2134367720","https://openalex.org/W2134559840","https://openalex.org/W2150713309","https://openalex.org/W2155573342","https://openalex.org/W2978135881","https://openalex.org/W4214740289","https://openalex.org/W4230024915"],"related_works":["https://openalex.org/W1997141609","https://openalex.org/W4303628967","https://openalex.org/W2085797189","https://openalex.org/W2100144883","https://openalex.org/W2068335965","https://openalex.org/W2539458864","https://openalex.org/W2125851424","https://openalex.org/W2153530646","https://openalex.org/W7204459097","https://openalex.org/W7214171912"],"abstract_inverted_index":{"In":[0,41],"this":[1],"work,":[2],"a":[3,25,92,98],"novel":[4],"high-frequency":[5],"ultrasonic":[6],"transducer":[7,43,66,90],"structure":[8],"is":[9,38,48],"realized":[10],"by":[11],"using":[12],"PMNPT-on-silicon":[13,23],"technology":[14],"and":[15,34,60,70,81],"silicon":[16],"micromachining.":[17],"To":[18],"prepare":[19],"the":[20,42,45,51,65,75,89,108],"single":[21],"crystalline":[22],"wafers,":[24],"hybrid":[26],"processing":[27],"method":[28],"involving":[29],"wafer":[30],"bonding,":[31],"mechanical":[32],"lapping":[33],"wet":[35],"chemical":[36],"thinning":[37],"successfully":[39],"developed.":[40],"structure,":[44],"active":[46],"element":[47],"fixed":[49],"within":[50],"stainless":[52],"steel":[53],"needle":[54],"housing.":[55],"The":[56],"measured":[57],"center":[58,109],"frequency":[59],"-6":[61],"dB":[62,106],"bandwidth":[63],"of":[64,86],"are":[67],"35":[68],"MHz":[69],"34%,":[71],"respectively.":[72],"Owing":[73],"to":[74,104],"superior":[76],"electromechanical":[77],"coupling":[78],"coefficient":[79],"(k(t))":[80],"high":[82],"piezoelectric":[83],"constant":[84],"(d(33))":[85],"PMNPT":[87],"film,":[88],"shows":[91],"good":[93],"energy":[94],"conversion":[95],"performance":[96],"with":[97],"very":[99],"low":[100],"insertion":[101],"loss":[102],"down":[103],"8.3":[105],"at":[107],"frequency.":[110]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-10-28T10:33:24.094632","created_date":"2016-06-24T00:00:00"}