{"id":"https://openalex.org/W2103940296","doi":"https://doi.org/10.1109/icsens.2010.5691004","title":"Mid-infrared thermomechanical sensitivity of microcantilevers for application to infrared spectroscopy","display_name":"Mid-infrared thermomechanical sensitivity of microcantilevers for application to infrared spectroscopy","publication_year":2010,"publication_date":"2010-11-01","ids":{"openalex":"https://openalex.org/W2103940296","doi":"https://doi.org/10.1109/icsens.2010.5691004","mag":"2103940296"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2010.5691004","doi":"https://doi.org/10.1109/icsens.2010.5691004","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2010.5691004","pdf_url":null,"source":{"id":"https://openalex.org/S4210192710","display_name":"Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ...","issn_l":"1930-0395","issn":["1930-0395","2168-9229","2168-9237"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE Sensors","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5003164074","display_name":"Beomjin Kwon","orcid":"https://orcid.org/0000-0001-5399-5740","observed_orcids":["https://orcid.org/0000-0001-5399-5740"]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Beomjin Kwon","raw_affiliation_strings":["Department of Mechanical Science and Engineering, University of Illinois, Urbana-Champaign, Urbana, USA","(Department of Mechanical Science and Engineering), University of Illinois at Urbana-Champaign, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Science and Engineering, University of Illinois, Urbana-Champaign, Urbana, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"(Department of Mechanical Science and Engineering), University of Illinois at Urbana-Champaign, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065601087","display_name":"William P. King","orcid":"https://orcid.org/0000-0001-8606-1290","observed_orcids":["https://orcid.org/0000-0001-8606-1290"]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"William P King","raw_affiliation_strings":["Department of Mechanical Science and Engineering, University of Illinois, Urbana-Champaign, Urbana, USA","(Department of Mechanical Science and Engineering), University of Illinois at Urbana-Champaign, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Science and Engineering, University of Illinois, Urbana-Champaign, Urbana, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"(Department of Mechanical Science and Engineering), University of Illinois at Urbana-Champaign, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063335377","display_name":"Matthew V. Schulmerich","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Matthew Schulmerich","raw_affiliation_strings":["Department of Bioengineering, University of Illinois, Urbana-Champaign, Urbana, USA","Department of Bioengineering University of Illinois at Urbana-Champaign, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Bioengineering, University of Illinois, Urbana-Champaign, Urbana, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"Department of Bioengineering University of Illinois at Urbana-Champaign, USA","institution_ids":["https://openalex.org/I157725225"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5023245938","display_name":"Rohit Bhargava","orcid":"https://orcid.org/0000-0001-7360-994X","observed_orcids":["https://orcid.org/0000-0001-7360-994X"]},"institutions":[{"id":"https://openalex.org/I157725225","display_name":"University of Illinois Urbana-Champaign","ror":"https://ror.org/047426m28","country_code":"US","type":"education","lineage":["https://openalex.org/I157725225"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Rohit Bhargava","raw_affiliation_strings":["Department of Bioengineering, University of Illinois, Urbana-Champaign, Urbana, USA","Department of Bioengineering University of Illinois at Urbana-Champaign, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Bioengineering, University of Illinois, Urbana-Champaign, Urbana, USA","institution_ids":["https://openalex.org/I157725225"]},{"raw_affiliation_string":"Department of Bioengineering University of Illinois at Urbana-Champaign, USA","institution_ids":["https://openalex.org/I157725225"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I157725225"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.24382896,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"2405","last_page":"2408"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9297000169754028,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9297000169754028,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11324","display_name":"Spectroscopy Techniques in Biomedical and Chemical Research","score":0.033399999141693115,"subfield":{"id":"https://openalex.org/subfields/1304","display_name":"Biophysics"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.008200000040233135,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microcantilever-sensors","display_name":"microcantilever sensors","score":0.8859999775886536},{"id":"https://openalex.org/keywords/mid-infrared-sensing","display_name":"mid-infrared detection","score":0.6970000267028809},{"id":"https://openalex.org/keywords/infrared-spectroscopy","display_name":"infrared spectroscopy","score":0.6959999799728394},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"silicon nitride","score":0.6140000224113464},{"id":"https://openalex.org/keywords/silicon","display_name":"silicon","score":0.7440000176429749},{"id":"https://openalex.org/keywords/signal-to-noise-ratio","display_name":"signal-to-noise ratio","score":0.8949999809265137},{"id":"https://openalex.org/keywords/polycarbonate-films","display_name":"polycarbonate films","score":0.8700000047683716},{"id":"https://openalex.org/keywords/polymer-films","display_name":"polymer films","score":0.6890000104904175},{"id":"https://openalex.org/keywords/spectral-resolution","display_name":"spectral resolution","score":0.7080000042915344},{"id":"https://openalex.org/keywords/monochromator","display_name":"monochromator","score":0.824999988079071}],"concepts":[{"id":"https://openalex.org/C158355884","wikidata":"https://www.wikidata.org/wiki/Q11388","display_name":"Infrared","level":2,"score":0.7331530451774597},{"id":"https://openalex.org/C153642686","wikidata":"https://www.wikidata.org/wiki/Q70906","display_name":"Infrared spectroscopy","level":2,"score":0.7160780429840088},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6603242754936218},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.6281167268753052},{"id":"https://openalex.org/C98015330","wikidata":"https://www.wikidata.org/wiki/Q907315","display_name":"Absorbance","level":2,"score":0.5899694561958313},{"id":"https://openalex.org/C14112920","wikidata":"https://www.wikidata.org/wiki/Q898306","display_name":"Monochromator","level":3,"score":0.5548120141029358},{"id":"https://openalex.org/C32891209","wikidata":"https://www.wikidata.org/wiki/Q483666","display_name":"Spectroscopy","level":2,"score":0.5459553003311157},{"id":"https://openalex.org/C160892712","wikidata":"https://www.wikidata.org/wiki/Q901559","display_name":"Fourier transform infrared spectroscopy","level":2,"score":0.512507438659668},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5103561282157898},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.4892575740814209},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.48886269330978394},{"id":"https://openalex.org/C2776540798","wikidata":"https://www.wikidata.org/wiki/Q62246","display_name":"Polycarbonate","level":2,"score":0.4122595489025116},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3644130229949951},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.30266374349594116},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.18299058079719543},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15604248642921448},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.08082613348960876},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0630325973033905},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsens.2010.5691004","doi":"https://doi.org/10.1109/icsens.2010.5691004","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2010.5691004","pdf_url":null,"source":{"id":"https://openalex.org/S4210192710","display_name":"Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ...","issn_l":"1930-0395","issn":["1930-0395","2168-9229","2168-9237"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE Sensors","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1489231517","https://openalex.org/W1974210766","https://openalex.org/W1974262428","https://openalex.org/W1989291298","https://openalex.org/W2010667775","https://openalex.org/W2010711788","https://openalex.org/W2011171381","https://openalex.org/W2011481574","https://openalex.org/W2017417270","https://openalex.org/W2021892363","https://openalex.org/W2029002465","https://openalex.org/W2030304049","https://openalex.org/W2031319513","https://openalex.org/W2047533876","https://openalex.org/W2055292837","https://openalex.org/W2087740116"],"related_works":["https://openalex.org/W2591558734","https://openalex.org/W2010711788","https://openalex.org/W7098004694","https://openalex.org/W2255461060","https://openalex.org/W4385322910","https://openalex.org/W2070798673","https://openalex.org/W2005344955","https://openalex.org/W2103345773","https://openalex.org/W2063005498","https://openalex.org/W2014789337"],"abstract_inverted_index":{"We":[0,27,84],"report":[1],"the":[2,46,53,63,79,87,131,138],"use":[3],"of":[4,24,31,50,81,89,101,130],"bimaterial":[5],"microcantilever":[6,29],"sensors":[7,30,91,133],"for":[8,111],"sensing":[9],"narrow-band":[10],"infrared":[11],"(IR)":[12],"radiation":[13],"generated":[14],"by":[15,92],"a":[16,39],"monochromator":[17],"and":[18,37,117],"its":[19],"application":[20],"to":[21,56,95,135],"IR":[22,47,54,98,109,124],"spectroscopy":[23],"polymer":[25],"films.":[26],"selected":[28],"either":[32],"silicon":[33,35],"or":[34,70],"nitride":[36],"having":[38],"thin":[40],"metal":[41],"film":[42,113],"coating.":[43],"To":[44],"assess":[45],"measurement":[48],"capability":[49],"these":[51,90],"cantilevers,":[52],"sensitivity":[55],"noise":[57],"ratio":[58],"(SNR),":[59],"was":[60,77],"measured":[61,75],"in":[62,78,137],"mid-IR":[64],"fingerprint":[65],"spectral":[66,128],"region":[67],"(5-10":[68],"\u03bcm":[69,103],"1000":[71],"2000":[72],"cm-1).":[73],"The":[74,107,127],"SNR":[76],"range":[80,139],"8":[82],"90.":[83],"further":[85],"demonstrated":[86],"utility":[88],"using":[93],"them":[94],"collect":[96],"an":[97],"absorbance":[99],"spectrum":[100],"1":[102],"thick":[104],"polycarbonate":[105],"film.":[106],"characteristic":[108],"peaks":[110],"this":[112],"could":[114],"be":[115,136],"seen,":[116],"compare":[118],"well":[119],"with":[120],"conventional":[121],"Fourier":[122],"Transform":[123],"(FT-IR)":[125],"data.":[126],"resolution":[129],"cantilever":[132],"determined":[134],"32":[140],"64":[141],"cm-1.":[142]},"counts_by_year":[],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2016-06-24T00:00:00"}