{"id":"https://openalex.org/W2103444413","doi":"https://doi.org/10.1021/jp505653u","title":"Alternative Low-Pressure Surface Chemistry of Titanium Tetraisopropoxide on Oxidized Molybdenum","display_name":"Alternative Low-Pressure Surface Chemistry of Titanium Tetraisopropoxide on Oxidized Molybdenum","publication_year":2014,"publication_date":"2014-10-13","ids":{"openalex":"https://openalex.org/W2103444413","doi":"https://doi.org/10.1021/jp505653u","mag":"2103444413"},"language":"en","primary_location":{"id":"doi:10.1021/jp505653u","doi":"https://doi.org/10.1021/jp505653u","is_oa":false,"landing_page_url":"https://doi.org/10.1021/jp505653u","pdf_url":null,"source":{"id":"https://openalex.org/S95739953","display_name":"The Journal of Physical Chemistry C","issn_l":"1932-7447","issn":["1932-7447","1932-7455"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-2","ki-jl-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320006","host_organization_name":"American Chemical Society","host_organization_lineage":["https://openalex.org/P4310320006"],"host_organization_lineage_names":["American Chemical Society"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The Journal of Physical Chemistry C","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102579561","display_name":"Alexis M. Johnson","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I111979921","display_name":"Northwestern University","ror":"https://ror.org/000e0be47","country_code":"US","type":"education","lineage":["https://openalex.org/I111979921"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Alexis M. Johnson","raw_affiliation_strings":["Department\rof Chemistry, Northwestern University, Evanston, Illinois 60208, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department\rof Chemistry, Northwestern University, Evanston, Illinois 60208, United States","institution_ids":["https://openalex.org/I111979921"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5013834441","display_name":"Peter Curran Stair","orcid":"https://orcid.org/0000-0001-5654-6000","observed_orcids":["https://orcid.org/0000-0001-5654-6000"]},"institutions":[{"id":"https://openalex.org/I111979921","display_name":"Northwestern University","ror":"https://ror.org/000e0be47","country_code":"US","type":"education","lineage":["https://openalex.org/I111979921"]},{"id":"https://openalex.org/I1282105669","display_name":"Argonne National Laboratory","ror":"https://ror.org/05gvnxz63","country_code":"US","type":"facility","lineage":["https://openalex.org/I1282105669","https://openalex.org/I1330989302","https://openalex.org/I39565521","https://openalex.org/I40347166"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Peter C. Stair","raw_affiliation_strings":["Chemical\rSciences and Engineering Division, Argonne National Laboratory, Argonne, Illinois 60439, United States","Department\rof Chemistry, Northwestern University, Evanston, Illinois 60208, United States","Chemical#R#Sciences and Engineering Division, Argonne National Laboratory, Argonne, Illinois 60439, United States","Department#R#of Chemistry, Northwestern University, Evanston, Illinois 60208, United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chemical\rSciences and Engineering Division, Argonne National Laboratory, Argonne, Illinois 60439, United States","institution_ids":["https://openalex.org/I1282105669"]},{"raw_affiliation_string":"Department\rof Chemistry, Northwestern University, Evanston, Illinois 60208, United States","institution_ids":["https://openalex.org/I111979921"]},{"raw_affiliation_string":"Chemical#R#Sciences and Engineering Division, Argonne National Laboratory, Argonne, Illinois 60439, United States","institution_ids":["https://openalex.org/I1282105669"]},{"raw_affiliation_string":"Department#R#of Chemistry, Northwestern University, Evanston, Illinois 60208, United States","institution_ids":["https://openalex.org/I111979921"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5013834441"],"corresponding_institution_ids":["https://openalex.org/I111979921","https://openalex.org/I1282105669"],"apc_list":{"value":4500,"currency":"USD","value_usd":4500},"apc_paid":null,"fwci":0.5314,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.72505786,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"118","issue":"50","first_page":"29361","last_page":"29369"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9932000041007996,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9932000041007996,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10024","display_name":"TiO2 Photocatalysis and Solar Cells","score":0.001500000013038516,"subfield":{"id":"https://openalex.org/subfields/2105","display_name":"Renewable Energy, Sustainability and the Environment"},"field":{"id":"https://openalex.org/fields/21","display_name":"Energy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.0008999999845400453,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/titanium-isopropoxide","display_name":"titanium isopropoxide","score":1.0},{"id":"https://openalex.org/keywords/atomic-layer-deposition","display_name":"atomic layer deposition","score":0.6769999861717224},{"id":"https://openalex.org/keywords/titanium-dioxide","display_name":"titanium dioxide","score":0.5509999990463257},{"id":"https://openalex.org/keywords/langmuir-hinshelwood-mechanism","display_name":"Langmuir-Hinshelwood mechanism","score":0.8989999890327454},{"id":"https://openalex.org/keywords/chemical-vapor-deposition","display_name":"chemical vapor deposition","score":0.9169999957084656},{"id":"https://openalex.org/keywords/precursor-decomposition","display_name":"precursor decomposition","score":0.37599998712539673},{"id":"https://openalex.org/keywords/substrate-temperature-effects","display_name":"substrate temperature effects","score":0.6399999856948853},{"id":"https://openalex.org/keywords/ultra-high-vacuum-deposition","display_name":"ultrahigh vacuum deposition","score":0.6949999928474426}],"concepts":[{"id":"https://openalex.org/C175708663","wikidata":"https://www.wikidata.org/wiki/Q899559","display_name":"X-ray photoelectron spectroscopy","level":2,"score":0.7054222822189331},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.6940360069274902},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.6456633806228638},{"id":"https://openalex.org/C69544855","wikidata":"https://www.wikidata.org/wiki/Q757625","display_name":"Atomic layer deposition","level":3,"score":0.6194184422492981},{"id":"https://openalex.org/C549387045","wikidata":"https://www.wikidata.org/wiki/Q1053","display_name":"Molybdenum","level":2,"score":0.591559886932373},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.5039867758750916},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.47264164686203003},{"id":"https://openalex.org/C506065880","wikidata":"https://www.wikidata.org/wiki/Q716","display_name":"Titanium","level":2,"score":0.4180111885070801},{"id":"https://openalex.org/C179104552","wikidata":"https://www.wikidata.org/wiki/Q11165","display_name":"Inorganic chemistry","level":1,"score":0.35359540581703186},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.1866007149219513},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.16169604659080505},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1021/jp505653u","doi":"https://doi.org/10.1021/jp505653u","is_oa":false,"landing_page_url":"https://doi.org/10.1021/jp505653u","pdf_url":null,"source":{"id":"https://openalex.org/S95739953","display_name":"The Journal of Physical Chemistry C","issn_l":"1932-7447","issn":["1932-7447","1932-7455"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-2","ki-jl-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320006","host_organization_name":"American Chemical Society","host_organization_lineage":["https://openalex.org/P4310320006"],"host_organization_lineage_names":["American Chemical Society"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The Journal of Physical Chemistry C","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G5676648888","display_name":null,"funder_award_id":"CHE-1058835","funder_id":"https://openalex.org/F4320337393","funder_display_name":"Division of Chemistry"}],"funders":[{"id":"https://openalex.org/F4320337393","display_name":"Division of Chemistry","ror":"https://ror.org/01ar8dr59"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":60,"referenced_works":["https://openalex.org/W656923709","https://openalex.org/W1484266168","https://openalex.org/W1607784784","https://openalex.org/W1822036955","https://openalex.org/W1968070650","https://openalex.org/W1971428687","https://openalex.org/W1972414350","https://openalex.org/W1972958529","https://openalex.org/W1974110646","https://openalex.org/W1974900665","https://openalex.org/W1975850843","https://openalex.org/W1976952677","https://openalex.org/W1978568989","https://openalex.org/W1981026627","https://openalex.org/W1981735033","https://openalex.org/W1981879805","https://openalex.org/W1982415894","https://openalex.org/W1982605596","https://openalex.org/W1987596999","https://openalex.org/W1990478953","https://openalex.org/W1990536516","https://openalex.org/W1994403799","https://openalex.org/W1995191254","https://openalex.org/W2000096619","https://openalex.org/W2000501630","https://openalex.org/W2007001565","https://openalex.org/W2011204085","https://openalex.org/W2013321494","https://openalex.org/W2014078093","https://openalex.org/W2014828690","https://openalex.org/W2015496850","https://openalex.org/W2017123040","https://openalex.org/W2020379007","https://openalex.org/W2022652848","https://openalex.org/W2026675654","https://openalex.org/W2027739606","https://openalex.org/W2033654175","https://openalex.org/W2035733716","https://openalex.org/W2036309034","https://openalex.org/W2053522731","https://openalex.org/W2054810052","https://openalex.org/W2058647044","https://openalex.org/W2061860731","https://openalex.org/W2067555228","https://openalex.org/W2069946148","https://openalex.org/W2071786742","https://openalex.org/W2073275293","https://openalex.org/W2076132640","https://openalex.org/W2077282298","https://openalex.org/W2080440670","https://openalex.org/W2084679011","https://openalex.org/W2088466857","https://openalex.org/W2098145674","https://openalex.org/W2123104163","https://openalex.org/W2132139078","https://openalex.org/W2158932701","https://openalex.org/W2164788318","https://openalex.org/W3016972814","https://openalex.org/W3148315092","https://openalex.org/W4254874822"],"related_works":["https://openalex.org/W2077667110","https://openalex.org/W2338497283","https://openalex.org/W2282462488","https://openalex.org/W7204157634","https://openalex.org/W1982605596","https://openalex.org/W7083442280","https://openalex.org/W2164788318","https://openalex.org/W7220911006","https://openalex.org/W1988520143","https://openalex.org/W2905108835"],"abstract_inverted_index":{"Titanium":[0],"tetraisopropoxide":[1],"(TTIP)":[2],"is":[3,83],"a":[4,25,63,71,89,94,165],"precursor":[5,144],"utilized":[6],"in":[7],"atomic":[8],"layer":[9],"depositions":[10,103],"(ALDs)":[11],"for":[12,57,102],"the":[13,43,54,81,108,116,142,150,157,172,175,184,189],"growth":[14,159],"of":[15,21,42,66,112,133,141,160,174,177],"TiO":[16,147,161],"2":[17,148,162],".":[18],"The":[19],"chemistry":[20,56,176],"TTIP":[22,61,113],"deposition":[23,99],"onto":[24],"slightly":[26],"oxidized":[27],"molybdenum":[28],"substrate":[29,59,74,82,138],"was":[30,100],"explored":[31],"under":[32,131],"ultrahigh":[33],"vacuum":[34],"(UHV)":[35],"conditions":[36,132],"with":[37,70,88],"X-ray":[38],"photoelectron":[39],"spectroscopy.":[40],"Comparison":[41],"Ti(2p)":[44],"and":[45,114,136,154,180],"C(1s)":[46],"peak":[47],"areas":[48],"has":[49],"been":[50],"used":[51],"to":[52,126,156],"determine":[53],"surface":[55,190],"increasing":[58],"temperatures.":[60],"at":[62,75,84,104],"gas-phase":[64],"temperature":[65,111,118],"373":[67,76],"K":[68,77],"reacts":[69],"MoO":[72],"x":[73],"but":[78],"not":[79],"when":[80],"295":[85],"K,":[86,106],"consistent":[87],"reaction":[90,123,152],"that":[91,130,182],"proceeds":[92],"via":[93],"Langmuir\u2013Hinshelwood":[95],"mechanism.":[96],"Chemical":[97],"vapor":[98],"observed":[101],"473":[105],"below":[107],"thermal":[109],"decomposition":[110],"within":[115],"ALD":[117,167,178],"window,":[119],"suggesting":[120],"an":[121],"alternative":[122],"pathway":[124,153],"competitive":[125],"ALD.":[127],"We":[128],"propose":[129],"low":[134],"pressure":[135,185],"moderate":[137],"temperatures":[139],"dehydration":[140],"reacted":[143],"by":[145],"nascent":[146],"becomes":[149],"dominant":[151],"leads":[155],"CVD":[158],"rather":[163],"than":[164],"self-limiting":[166],"reaction.":[168],"These":[169],"results":[170],"highlight":[171],"complexity":[173],"precursors":[179],"demonstrate":[181],"changing":[183],"can":[186],"drastically":[187],"alter":[188],"chemistry.":[191]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2018,"cited_by_count":3},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":2}],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2016-06-24T00:00:00"}