{"id":"https://openalex.org/W2101936680","doi":"https://doi.org/10.1016/j.diamond.2010.11.007","title":"Controlled glow to arc transition in sputtering for high rate deposition of carbon films","display_name":"Controlled glow to arc transition in sputtering for high rate deposition of carbon films","publication_year":2010,"publication_date":"2010-11-20","ids":{"openalex":"https://openalex.org/W2101936680","doi":"https://doi.org/10.1016/j.diamond.2010.11.007","mag":"2101936680"},"language":"en","primary_location":{"id":"doi:10.1016/j.diamond.2010.11.007","doi":"https://doi.org/10.1016/j.diamond.2010.11.007","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.diamond.2010.11.007","pdf_url":null,"source":{"id":"https://openalex.org/S124577123","display_name":"Diamond and Related Materials","issn_l":"0925-9635","issn":["0925-9635","1879-0062"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Diamond and Related Materials","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5025479661","display_name":"Martina Lattemann","orcid":"https://orcid.org/0000-0003-3500-8144","observed_orcids":["https://orcid.org/0000-0003-3500-8144"]},"institutions":[{"id":"https://openalex.org/I102335020","display_name":"Karlsruhe Institute of Technology","ror":"https://ror.org/04t3en479","country_code":"DE","type":"education","lineage":["https://openalex.org/I102335020","https://openalex.org/I1305996414"]},{"id":"https://openalex.org/I129604602","display_name":"The University of Sydney","ror":"https://ror.org/0384j8v12","country_code":"AU","type":"education","lineage":["https://openalex.org/I129604602"]},{"id":"https://openalex.org/I31512782","display_name":"Technische Universit\u00e4t Darmstadt","ror":"https://ror.org/05n911h24","country_code":"DE","type":"education","lineage":["https://openalex.org/I31512782"]}],"countries":["AU","DE"],"is_corresponding":true,"raw_author_name":"M. Lattemann","raw_affiliation_strings":["Institute of Nanotechnology (INT), Karlsruhe Institute of Technology (KIT), P.O. Box\u00a03640, D-76021 Karlsruhe, Germany","Joint Research Laboratory Nanomaterials, TU Darmstadt and Karlsruhe Institute of Technology, 64287 Darmstadt, Germany","School of Physics, University of Sydney, NSW 2006 Australia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Nanotechnology (INT), Karlsruhe Institute of Technology (KIT), P.O. Box\u00a03640, D-76021 Karlsruhe, Germany","institution_ids":["https://openalex.org/I102335020"]},{"raw_affiliation_string":"Joint Research Laboratory Nanomaterials, TU Darmstadt and Karlsruhe Institute of Technology, 64287 Darmstadt, Germany","institution_ids":["https://openalex.org/I102335020","https://openalex.org/I31512782"]},{"raw_affiliation_string":"School of Physics, University of Sydney, NSW 2006 Australia","institution_ids":["https://openalex.org/I129604602"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013258035","display_name":"Barbara Abendroth","orcid":"https://orcid.org/0000-0002-4807-9622","observed_orcids":["https://orcid.org/0000-0002-4807-9622"]},"institutions":[{"id":"https://openalex.org/I61893789","display_name":"TU Bergakademie Freiberg","ror":"https://ror.org/031vc2293","country_code":"DE","type":"education","lineage":["https://openalex.org/I61893789"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"B. Abendroth","raw_affiliation_strings":["Institut f\u00fcr Experimentelle Physik, TU Bergakademie Freiberg, Leipziger Stra\u00dfe 23, D-09599 Freiberg, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut f\u00fcr Experimentelle Physik, TU Bergakademie Freiberg, Leipziger Stra\u00dfe 23, D-09599 Freiberg, Germany","institution_ids":["https://openalex.org/I61893789"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089252521","display_name":"A. Moafi","orcid":"https://orcid.org/0000-0001-6319-5894","observed_orcids":["https://orcid.org/0000-0001-6319-5894"]},"institutions":[{"id":"https://openalex.org/I82951845","display_name":"RMIT University","ror":"https://ror.org/04ttjf776","country_code":"AU","type":"education","lineage":["https://openalex.org/I82951845"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"A. Moafi","raw_affiliation_strings":["Applied Sciences, RMIT University Melbourne, GPO Box\u00a02476, Melbourne VIC 3001, Australia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Applied Sciences, RMIT University Melbourne, GPO Box\u00a02476, Melbourne VIC 3001, Australia","institution_ids":["https://openalex.org/I82951845"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087713667","display_name":"Dougal G. McCulloch","orcid":"https://orcid.org/0000-0003-4548-1955","observed_orcids":["https://orcid.org/0000-0003-4548-1955"]},"institutions":[{"id":"https://openalex.org/I82951845","display_name":"RMIT University","ror":"https://ror.org/04ttjf776","country_code":"AU","type":"education","lineage":["https://openalex.org/I82951845"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"D.G. McCulloch","raw_affiliation_strings":["Applied Sciences, RMIT University Melbourne, GPO Box\u00a02476, Melbourne VIC 3001, Australia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Applied Sciences, RMIT University Melbourne, GPO Box\u00a02476, Melbourne VIC 3001, Australia","institution_ids":["https://openalex.org/I82951845"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5046816795","display_name":"David Robert McKenzie","orcid":"https://orcid.org/0000-0002-2476-1301","observed_orcids":["https://orcid.org/0000-0002-2476-1301"]},"institutions":[{"id":"https://openalex.org/I129604602","display_name":"The University of Sydney","ror":"https://ror.org/0384j8v12","country_code":"AU","type":"education","lineage":["https://openalex.org/I129604602"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"D.R. McKenzie","raw_affiliation_strings":["School of Physics, University of Sydney, NSW 2006 Australia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Physics, University of Sydney, NSW 2006 Australia","institution_ids":["https://openalex.org/I129604602"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5025479661"],"corresponding_institution_ids":["https://openalex.org/I102335020","https://openalex.org/I129604602","https://openalex.org/I31512782"],"apc_list":{"value":2690,"currency":"USD","value_usd":2690},"apc_paid":null,"fwci":3.2532,"has_fulltext":false,"cited_by_count":49,"citation_normalized_percentile":{"value":0.89564939,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":92,"max":99},"biblio":{"volume":"20","issue":"2","first_page":"68","last_page":"74"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.5684000253677368,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.5684000253677368,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.29980000853538513,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.0689999982714653,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/high-power-impulse-magnetron-sputtering","display_name":"high power impulse magnetron sputtering","score":0.921999990940094},{"id":"https://openalex.org/keywords/carbon-films","display_name":"carbon films","score":0.7099999785423279},{"id":"https://openalex.org/keywords/deposition-rate","display_name":"deposition rate","score":0.671999990940094},{"id":"https://openalex.org/keywords/sp3-content","display_name":"sp3 content","score":0.6859999895095825},{"id":"https://openalex.org/keywords/substrate-bias","display_name":"substrate bias","score":0.8949999809265137},{"id":"https://openalex.org/keywords/wear-resistant-coatings","display_name":"wear-resistant coatings","score":0.6809999942779541},{"id":"https://openalex.org/keywords/carbon-cathode","display_name":"carbon cathode","score":0.5839999914169312}],"concepts":[{"id":"https://openalex.org/C97892325","wikidata":"https://www.wikidata.org/wiki/Q1621956","display_name":"High-power impulse magnetron sputtering","level":5,"score":0.9406270384788513},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.6407473683357239},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6217578053474426},{"id":"https://openalex.org/C114375839","wikidata":"https://www.wikidata.org/wiki/Q207456","display_name":"Electric arc","level":3,"score":0.5537704229354858},{"id":"https://openalex.org/C2778402822","wikidata":"https://www.wikidata.org/wiki/Q22302226","display_name":"Nanoclusters","level":2,"score":0.5034849047660828},{"id":"https://openalex.org/C49110097","wikidata":"https://www.wikidata.org/wiki/Q175233","display_name":"Cathode","level":2,"score":0.5025944709777832},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.4988694190979004},{"id":"https://openalex.org/C20254490","wikidata":"https://www.wikidata.org/wiki/Q719550","display_name":"Biasing","level":3,"score":0.49083027243614197},{"id":"https://openalex.org/C2781083372","wikidata":"https://www.wikidata.org/wiki/Q7259687","display_name":"Pulsed DC","level":5,"score":0.48780587315559387},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.42182672023773193},{"id":"https://openalex.org/C123408415","wikidata":"https://www.wikidata.org/wiki/Q194154","display_name":"Cavity magnetron","level":4,"score":0.41851842403411865},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.3729475736618042},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.35595786571502686},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.23636922240257263},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.23312124609947205},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.19573169946670532},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.1663913130760193},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.12805956602096558},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1016/j.diamond.2010.11.007","doi":"https://doi.org/10.1016/j.diamond.2010.11.007","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.diamond.2010.11.007","pdf_url":null,"source":{"id":"https://openalex.org/S124577123","display_name":"Diamond and Related Materials","issn_l":"0925-9635","issn":["0925-9635","1879-0062"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-100","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Diamond and Related Materials","raw_type":"journal-article"},{"id":"pmh:oai:alma61RMIT.INST:11246419450001341","doi":null,"is_oa":false,"landing_page_url":"http://doi.org/10.1016/j.diamond.2010.11.007","pdf_url":null,"source":{"id":"https://openalex.org/S4306402074","display_name":"RMIT Research Repository (RMIT University Library)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I82951845","host_organization_name":"RMIT University","host_organization_lineage":["https://openalex.org/I82951845"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"text"},{"id":"pmh:oai:figshare.com:article/27439461","doi":null,"is_oa":false,"landing_page_url":"https://figshare.com/articles/journal_contribution/Controlled_glow_to_arc_transition_in_sputtering_for_high_rate_deposition_of_carbon_films/27439461","pdf_url":null,"source":{"id":"https://openalex.org/S4377196282","display_name":"Figshare","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4210132348","host_organization_name":"Figshare (United Kingdom)","host_organization_lineage":["https://openalex.org/I4210132348"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320334704","display_name":"Australian Research Council","ror":"https://ror.org/05mmh0f86"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":30,"referenced_works":["https://openalex.org/W1643106262","https://openalex.org/W1977922323","https://openalex.org/W1980019607","https://openalex.org/W1982695030","https://openalex.org/W1988133629","https://openalex.org/W1988722541","https://openalex.org/W2001260889","https://openalex.org/W2004982340","https://openalex.org/W2019800713","https://openalex.org/W2026928232","https://openalex.org/W2037287120","https://openalex.org/W2038404392","https://openalex.org/W2051944828","https://openalex.org/W2065699140","https://openalex.org/W2067623685","https://openalex.org/W2068664254","https://openalex.org/W2069745674","https://openalex.org/W2080828730","https://openalex.org/W2081564226","https://openalex.org/W2082263603","https://openalex.org/W2094140768","https://openalex.org/W2094285478","https://openalex.org/W2117024117","https://openalex.org/W2161508873","https://openalex.org/W2163009788","https://openalex.org/W2572687589","https://openalex.org/W2592757337","https://openalex.org/W4211184409","https://openalex.org/W4229567210","https://openalex.org/W4291475894"],"related_works":["https://openalex.org/W1581316422","https://openalex.org/W4383822951","https://openalex.org/W1932655064","https://openalex.org/W2117024117","https://openalex.org/W3182277262","https://openalex.org/W2037310831","https://openalex.org/W3205075976","https://openalex.org/W2339824070","https://openalex.org/W2580610336","https://openalex.org/W2610995469"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":6},{"year":2018,"cited_by_count":7},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":4},{"year":2012,"cited_by_count":4}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2016-06-24T00:00:00"}
