{"id":"https://openalex.org/W2093190868","doi":"https://doi.org/10.3390/mi3030550","title":"Micromachined Thermal Flow Sensors\u2014A Review","display_name":"Micromachined Thermal Flow Sensors\u2014A Review","publication_year":2012,"publication_date":"2012-07-23","ids":{"openalex":"https://openalex.org/W2093190868","doi":"https://doi.org/10.3390/mi3030550","mag":"2093190868"},"language":"en","primary_location":{"id":"doi:10.3390/mi3030550","doi":"https://doi.org/10.3390/mi3030550","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi3030550","pdf_url":"https://www.mdpi.com/2072-666X/3/3/550/pdf?version=1345530459","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2072-666X/3/3/550/pdf?version=1345530459","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101585044","display_name":"Jonathan T. W. Kuo","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jonathan T. W. Kuo","raw_affiliation_strings":["Department of Biomedical Engineering, University of Southern California, Los Angeles, CA 90089, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering, University of Southern California, Los Angeles, CA 90089, USA","institution_ids":["https://openalex.org/I1174212"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110070704","display_name":"Lawrence Yu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Lawrence Yu","raw_affiliation_strings":["Department of Biomedical Engineering, University of Southern California, Los Angeles, CA 90089, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering, University of Southern California, Los Angeles, CA 90089, USA","institution_ids":["https://openalex.org/I1174212"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5085360836","display_name":"Ellis F. Meng","orcid":"https://orcid.org/0000-0003-0981-9197","observed_orcids":["https://orcid.org/0000-0003-0981-9197"]},"institutions":[{"id":"https://openalex.org/I1174212","display_name":"University of Southern California","ror":"https://ror.org/03taz7m60","country_code":"US","type":"education","lineage":["https://openalex.org/I1174212"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Ellis Meng","raw_affiliation_strings":["Department of Biomedical Engineering, University of Southern California, Los Angeles, CA 90089, USA","Ming Hsieh Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Biomedical Engineering, University of Southern California, Los Angeles, CA 90089, USA","institution_ids":["https://openalex.org/I1174212"]},{"raw_affiliation_string":"Ming Hsieh Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, USA","institution_ids":["https://openalex.org/I1174212"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5085360836"],"corresponding_institution_ids":["https://openalex.org/I1174212"],"apc_list":{"value":2100,"currency":"CHF","value_usd":2534},"apc_paid":{"value":2100,"currency":"CHF","value_usd":2534},"fwci":11.8604,"has_fulltext":true,"cited_by_count":483,"citation_normalized_percentile":{"value":0.98928683,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":100},"biblio":{"volume":"3","issue":"3","first_page":"550","last_page":"573"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9883000254631042,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9883000254631042,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12537","display_name":"Flow Measurement and Analysis","score":0.006099999882280827,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10998","display_name":"Heat Transfer and Optimization","score":0.0017000000225380063,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thermal-flow-sensor","display_name":"thermal flow sensor","score":0.8809999823570251},{"id":"https://openalex.org/keywords/micromachining","display_name":"micromachining","score":0.8640000224113464},{"id":"https://openalex.org/keywords/microfabrication","display_name":"microfabrication","score":0.9110000133514404},{"id":"https://openalex.org/keywords/sensor-configuration","display_name":"sensor configuration","score":0.7580000162124634},{"id":"https://openalex.org/keywords/material-properties","display_name":"material properties","score":0.5550000071525574},{"id":"https://openalex.org/keywords/material-selection","display_name":"material selection","score":0.6209999918937683},{"id":"https://openalex.org/keywords/miniaturization","display_name":"miniaturization","score":0.8330000042915344},{"id":"https://openalex.org/keywords/low-power-consumption","display_name":"low power consumption","score":0.7329999804496765},{"id":"https://openalex.org/keywords/on-chip-integration","display_name":"on-chip integration","score":0.8349999785423279}],"concepts":[{"id":"https://openalex.org/C57528182","wikidata":"https://www.wikidata.org/wiki/Q1271842","display_name":"Miniaturization","level":2,"score":0.8598134517669678},{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.8153274059295654},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.7124614119529724},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5603717565536499},{"id":"https://openalex.org/C132943942","wikidata":"https://www.wikidata.org/wiki/Q2562511","display_name":"Footprint","level":2,"score":0.5568270087242126},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.5263223052024841},{"id":"https://openalex.org/C38349280","wikidata":"https://www.wikidata.org/wiki/Q1434290","display_name":"Flow (mathematics)","level":2,"score":0.4863646626472473},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.46771755814552307},{"id":"https://openalex.org/C2984118289","wikidata":"https://www.wikidata.org/wiki/Q29954","display_name":"Power consumption","level":3,"score":0.44874849915504456},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.41809216141700745},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.4173338711261749},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.3995729684829712},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3940269947052002},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3772171139717102},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.3639897108078003},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.09697705507278442},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08032417297363281},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.3390/mi3030550","doi":"https://doi.org/10.3390/mi3030550","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi3030550","pdf_url":"https://www.mdpi.com/2072-666X/3/3/550/pdf?version=1345530459","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.367.6391","doi":null,"is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.367.6391","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.mdpi.com/2072-666X/3/3/550/pdf?y=1","raw_type":"text"},{"id":"pmh:oai:doaj.org/article:03fa850be0f14097a6267901223b065f","doi":null,"is_oa":true,"landing_page_url":"https://doaj.org/article/03fa850be0f14097a6267901223b065f","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines, Vol 3, Iss 3, Pp 550-573 (2012)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/mi3030550","doi":"https://doi.org/10.3390/mi3030550","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi3030550","pdf_url":"https://www.mdpi.com/2072-666X/3/3/550/pdf?version=1345530459","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G5546362488","display_name":"CAREER:  Biologically-Inspired Polymer Microeletromechanical Systems (MEMS) for Bi-Directional Neural Interfaces","funder_award_id":"0547544","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G6671297155","display_name":null,"funder_award_id":"CAREER","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"}],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2093190868.pdf","grobid_xml":"https://content.openalex.org/works/W2093190868.grobid-xml"},"referenced_works_count":92,"referenced_works":["https://openalex.org/W83258799","https://openalex.org/W630955716","https://openalex.org/W636847917","https://openalex.org/W1503851770","https://openalex.org/W1511931480","https://openalex.org/W1563236261","https://openalex.org/W1676787307","https://openalex.org/W1786062512","https://openalex.org/W1970337270","https://openalex.org/W1971955574","https://openalex.org/W1972205674","https://openalex.org/W1974847889","https://openalex.org/W1975256625","https://openalex.org/W1975631503","https://openalex.org/W1981955015","https://openalex.org/W1984099261","https://openalex.org/W1991224285","https://openalex.org/W1998691123","https://openalex.org/W2000039216","https://openalex.org/W2006318742","https://openalex.org/W2007869388","https://openalex.org/W2013066842","https://openalex.org/W2013125204","https://openalex.org/W2013269727","https://openalex.org/W2017338788","https://openalex.org/W2019919504","https://openalex.org/W2024075971","https://openalex.org/W2025403914","https://openalex.org/W2036116820","https://openalex.org/W2036959088","https://openalex.org/W2041431299","https://openalex.org/W2041948262","https://openalex.org/W2047881078","https://openalex.org/W2048910977","https://openalex.org/W2051793518","https://openalex.org/W2053581124","https://openalex.org/W2054355536","https://openalex.org/W2054459654","https://openalex.org/W2054801131","https://openalex.org/W2059244755","https://openalex.org/W2059545421","https://openalex.org/W2060244448","https://openalex.org/W2063902051","https://openalex.org/W2066582523","https://openalex.org/W2069796872","https://openalex.org/W2070878947","https://openalex.org/W2071130847","https://openalex.org/W2072912231","https://openalex.org/W2075075048","https://openalex.org/W2082808344","https://openalex.org/W2083193493","https://openalex.org/W2083531472","https://openalex.org/W2083847117","https://openalex.org/W2084067743","https://openalex.org/W2086623689","https://openalex.org/W2093055122","https://openalex.org/W2097181576","https://openalex.org/W2097531013","https://openalex.org/W2099884755","https://openalex.org/W2103562298","https://openalex.org/W2105241399","https://openalex.org/W2120226263","https://openalex.org/W2125205380","https://openalex.org/W2126745132","https://openalex.org/W2126980717","https://openalex.org/W2127071466","https://openalex.org/W2130212525","https://openalex.org/W2132353965","https://openalex.org/W2132718809","https://openalex.org/W2133657813","https://openalex.org/W2133859185","https://openalex.org/W2135517713","https://openalex.org/W2141071048","https://openalex.org/W2142370862","https://openalex.org/W2142677568","https://openalex.org/W2142756470","https://openalex.org/W2144430488","https://openalex.org/W2151987478","https://openalex.org/W2157650291","https://openalex.org/W2161967407","https://openalex.org/W2162001838","https://openalex.org/W2162601881","https://openalex.org/W2164058139","https://openalex.org/W2167014376","https://openalex.org/W2167793083","https://openalex.org/W2171936259","https://openalex.org/W2486971233","https://openalex.org/W2933513000","https://openalex.org/W3023915194","https://openalex.org/W3119945090","https://openalex.org/W4240302739","https://openalex.org/W4250931269"],"related_works":["https://openalex.org/W7096521508","https://openalex.org/W2261134999","https://openalex.org/W3171630929","https://openalex.org/W2991111351","https://openalex.org/W4241326645","https://openalex.org/W4306151904","https://openalex.org/W7065571983","https://openalex.org/W2001472888","https://openalex.org/W6908969488","https://openalex.org/W2793585142"],"abstract_inverted_index":{"Microfabrication":[0],"has":[1,12],"greatly":[2],"matured":[3],"and":[4,50,54,66],"proliferated":[5],"in":[6,16],"use":[7],"amongst":[8],"many":[9],"disciplines.":[10],"There":[11],"been":[13],"great":[14],"interest":[15],"micromachined":[17,62,76],"flow":[18,48,64,78],"sensors":[19,79],"due":[20],"to":[21,61],"the":[22,44,51,85],"benefits":[23],"of":[24,46,75,84],"miniaturization:":[25],"low":[26,31],"cost,":[27],"small":[28],"device":[29],"footprint,":[30],"power":[32],"consumption,":[33],"greater":[34],"sensitivity,":[35],"integration":[36],"with":[37],"on-chip":[38],"circuitry,":[39],"etc.":[40],"This":[41],"paper":[42],"reviews":[43],"theory":[45],"thermal":[47,63,77],"sensing":[49,65],"different":[52],"configurations":[53],"operation":[55],"modes":[56],"available.":[57],"Material":[58],"properties":[59],"relevant":[60],"selection":[67],"criteria":[68],"are":[69,80,88],"also":[70],"presented.":[71,81],"Finally,":[72],"recent":[73],"applications":[74],"Detailed":[82],"tables":[83],"reviewed":[86],"devices":[87],"included.":[89]},"counts_by_year":[{"year":2026,"cited_by_count":28},{"year":2025,"cited_by_count":32},{"year":2024,"cited_by_count":34},{"year":2023,"cited_by_count":42},{"year":2022,"cited_by_count":42},{"year":2021,"cited_by_count":32},{"year":2020,"cited_by_count":43},{"year":2019,"cited_by_count":54},{"year":2018,"cited_by_count":44},{"year":2017,"cited_by_count":36},{"year":2016,"cited_by_count":38},{"year":2015,"cited_by_count":27},{"year":2014,"cited_by_count":20},{"year":2013,"cited_by_count":10},{"year":2012,"cited_by_count":1}],"updated_date":"2026-10-28T10:33:24.094632","created_date":"2016-06-24T00:00:00"}